IC FABRICATION TECHNOLOGY LAB

EXPERIMENT – 1
TO STUDY/OBSERVE CLAEN ROOM FORMATION, VARIOUS COMPONENTS,
RELIABILITY
Submitted by
NAME : K. VishnuVardhan Reddy
ID NUMBER : 2021H1230221H

What is clean room

Cleanrooms are areas in which particle concentration and environmental conditions are controlled within
specified limits. The limits of the particle concentrations are normally set by the requirements of the process
occurring within the space so that contamination of people, processes and equipment can be mitigated.

History

Concern over contamination during production and manufacturing processes can be traced back several
centuries. Since that time, the concept of cleanrooms started to grow and develop gradually.

Hospitals did not even put the concept of a cleanroom into effect until the 19 th century! The manufacturing
industry also was slow to adapt, with the first controlled production areas implemented during World War I.

It was not until the HEPA filter was invented in the 1950s that cleanrooms started to take shape and transform
into the ones we know today. Since the 1950s, each decade has seen advances being made in cleanroom
technologies.

Even today, advances are still being made, with an emphasis on reusable cleanroom garments and eco-friendly
facilities.  ARTA (American Reusable Textile Association) even introduced its Life Cycle Assessment (LCA)
sharing the benefits of cleanroom reusables.
Types of clean room
Now coming to the types of the clean rooms, there are two types of clean rooms based on the method of
ventilation. They are

1. Turbulent Ventilated Cleanroom

2. Unidirectional Flow Cleanroom

In turbulent ventilated cleanroom, the direction of the air would be non-directional.

In unidirectional flow cleanroom the direction of the air would be unidirectional.

Things to follow to maintain the cleanroom more effective:

1. Air supplied to the room is filtered by high efficiency filters, which are HEPA or ULPA, and the
room is pressurized to block contaminants.
 2. The materials in construction do not emit contaminants, particles, chemicals, or gases and must be
easy to clean.
3. Workers, staff, and operators wear garments that minimize the spread of micro-particles and
organisms from skin, hair, and clothing.

Cleanroom Classification
IS0 standard 14644-1, or Federal Standard 209 in 1963.
First measure: measuring particles of > 0.5μm by means of optical particle counters;
Second measure: Air flow rate 90 ft/min Federal Standard 209 D

Cleanroom Air Filters

The filtration system for a cleanroom is its most important component, since it is what keeps it clean.
Cleanrooms can have single or multiple filters depending on their design and ISO classification. Most
systems have filters located in the ceiling. Air travels downward from the ceiling to the floor and exits
through ducts in the floor.
High Efficiency Air Filtration Construction mechanism

 Deep-Pleated
High grade water repellent glass fibre  media paper formed into deep pleats,  divided by kraft or
aluminium separators,  sealed into a wood or steel case.

 Mini-Pleated
Filters comprise micro-fine glass fibre  media sealed into a wood or aluminium  frame with polyurethane
gasket, gel or knife  edge type seal, to provide fine particulate  filtration.

Cleanroom process

Conclusions:

 Cleanrooms are specially designed enclosures that are designed to eliminate contaminants and
microorganisms.
 The purity of the air in a cleanroom is determined by the number of µm particles there are in one
cubic meter of air.
 There are several classifications used to identify a cleanroom. The International Organization of
Standardization (ISO) is the most widely accepted.
 There are strict guidelines for clothing worn by workers in a cleanroom.
 The most important component in a cleanroom is its air exchange unit.
 Airflow in a clean room can be unidirectional or turbulent.
 The two construction designs of cleanrooms are modular and permanent or stick.