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Equipment Installation Package
Equipment Installation Package
EQUIPMENT OWNER:
TI PC:
1451347
COVER SHEET
F10N
1451347
DRAWING MODIFICATION HISTORY
F10N
1451347
TAGGING MATRIX
F10N
GENERAL NOTES
A. REFER TO STANDARD UTILITY DETAIL (SSUD) 'XNOTES' FOR
GENERAL NOTES THAT APPLY TO MICRON TOOL INSTALLATIONS.
PSK_SUPRA_BULK - 1451347
V43 TOOL OUTLINE @ LEVEL 3
KEYED NOTES
1. TOOL DATUM.
2. RACK DATUM
2 2
2 2
KEY PLAN :
N 1451347
EQUIPMENT PLAN L2
F10N
GENERAL NOTES
A. REFER TO SINGAPORE STANDARD UTILITY DETAIL (SSUD)
'XNOTES' FOR GENERAL NOTES THAT APPLY TO MICRON
TOOL INSTALLATIONS.
O
C. CONTRACTOR TO FURNISH AND INSTALL ALL ITEMS
A
2/1
11
INCLUDED IN THESE DRAWINGS IN ACCORDANCE WITH
M
MICRON CONSTRUCTION SPECIFICATIONS.
MA
36.0 ENA
INT
0 [914NCE
.4] ACC
INTERFERING WITH TOOL INSTALLATION i.e. HOUSE VACUUM,
FRO ESS
M
THI ARE
S SURA EXT
FAC END
E
DATA CONDUIT, ETC. COORDINATE ALL RELOCATIONS WITH
S
TOOL OWNER AND CONSTRUCTION COORDINATOR.
Support Pad
2.43" Dia
RAISED FLOOR PANEL AS REQUIRED. COORDINATE WITH
OTHER TRADES TO ESTABLISH COMMON CUT-OUTS WHERE
POSSIBLE. COORDINATE SIZE AND LOCATION WITH
CONSTRUCTION COORDINATOR.
KEYED NOTES
1. FULL VIEW TILE .
2. POWER/DATA OUTLET..
4. TOOL DATUM
1 1 1 1 1 3 3 2
5. CUT TILES AS REQUIRED.
12/10/2021
SUPRAVP
4
1451347
STRIP
V43
LOAD PORT
5 3
PSK LOAD PORT
KEY PLAN :
N 1451347
EQUIPMENT PLAN L3
F10N
GENERAL NOTES:
A. SERVICE ROUTING SHOWN IS SUGGESTED. FINAL
ROUTING TO BE FIELD VERIFIED AND COORDINATED
WITH ALL OTHER TRADES AND CONSTRUCTION
COORDINATOR PRIOR TO INSTALLATION. REFER TO
EQUIPMENT TEMPLATE/DRAWINGS FOR FINAL
CONNECTION LOCATIONS.
O
A
2/1
11
B. ROUTING DRAWING TO BE READ IN CONJUNCTION
M
WITH VMP SCHEMATIC/PID PACKAGE.
MA
36.0 ENA
INT
0 [914NCE
ASSIGNMENTS.
.4] ACC
FRO ESS
M
THI ARE
S SURA EXT
FAC END
E S
D. CONTRACTOR TO RELOCATE EXISTING SERVICES
INTERFERING WITH TOOL INSTALLATION, (e.g. HOUSE
Support Pad
2.43" Dia
RELOCATIONS WITH TOOL OWNER AND
CONSTRUCTION COORDINATOR.
DN50 GE 0-8-2
12/10/2021
SUPRAVP
1451347
ISO100 EV
STRIP
V43
PSK
ISO100 EV ISO100 EV - JJMP
ISO100 EV - JJMP
ISO100 EV
ISO100 EV - JJMP
DN50 GE 0-8-2
KEY PLAN :
N 1451347
MECHANICAL ROUTING PLAN L3-1
F10N
GENERAL NOTES:
A. SERVICE ROUTING SHOWN IS SUGGESTED. FINAL
ROUTING TO BE FIELD VERIFIED AND COORDINATED
WITH ALL OTHER TRADES AND CONSTRUCTION
COORDINATOR PRIOR TO INSTALLATION. REFER TO
EQUIPMENT TEMPLATE/DRAWINGS FOR FINAL
CONNECTION LOCATIONS.
O
A
WITH VMP SCHEMATIC/PID PACKAGE.
2/1
11
M
C. REFER TO 'TAGGING' MATRIX FOR LPOC
ASSIGNMENTS.
MA
36.0 ENA
INT
0 [914NCE
.4] ACC
FRO ESS
M
THI ARE
D. CONTRACTOR TO RELOCATE EXISTING SERVICES
S SURA EXT
FAC END
E S
INTERFERING WITH TOOL INSTALLATION, (e.g. HOUSE
VACUUM, DATA CONDUIT, ETC). COORDINATE ALL
RELOCATIONS WITH TOOL OWNER AND
1 1 1 1 1 1
LEFT to RIGHT
1/4" HPN2 0-9-4
TOP to BOTTOM:
1/4" O2 0-9-3
1/4" HPN2 0-9-5 0-11-7 1/2" PCWS PM#2
1/4" H2(3.8%)/N2 0-9-15 1/2" PCWS PM#1 0-11-1 0-11-8 1/2" PCWR PM#2
1/4" He 0-9-12 1/2" PCWR PM#1 0-11-2 TOP to BOTTOM:
1/4" HPN2 0-9-7 0-11-5 1/2" PCWS PM#2
1/2" CDA
1/4" O2 0-9-6 0-11-6 1/2" PCWR PM#2
1/2" PV
1/4" HPN2 0-9-8
1/4" H2(3.8%)/N2 0-9-16 1/2" PCWR PM#1 0-11-4
1/4" He 0-9-13 1/2" PCWS PM#1 0-11-3
12/10/2021
SUPRAVP
1
1451347
STRIP
TOP to BOTTOM:
V43
1/2" PCWS (TM) 0-11-13
PSK
1/2" PCWR (TM) 0-11-14
LEFT to RIGHT
1/4" He 0-9-14
1/4" H2 (3.8%)/N2 0-9-17
1/4" HPN2 0-9-11
1/4" O2 0-9-9
1/4" HPN2 0-9-10
TOP to BOTTOM:
1/2" CDA 0-9-1
1/2" PV 0-9-2
N 1451347
MECHANICAL ROUTING PLAN L3-2
F10N
GENERAL NOTES:
A. SERVICE ROUTING SHOWN IS SUGGESTED. FINAL
ROUTING TO BE FIELD VERIFIED AND COORDINATED
WITH ALL OTHER TRADES AND CONSTRUCTION
COORDINATOR PRIOR TO INSTALLATION. REFER TO
EQUIPMENT TEMPLATE/DRAWINGS FOR FINAL
CONNECTION LOCATIONS.
ISO100 - EV-JJMP
P3-8-1 NW40 AE
DN100 - GE - GS
P2-8-1 NW40 AE
ISO100 - EV
ISO100 - EV-JJMP
P1-8-1 NW40 AE
ISO100 - EV-JJMP
ISO100 - EV
PSK_SUPRA_BULK - 1451347
V43 TOOL OUTLINE @ LEVEL 3
KEY PLAN :
N 1451347
MECHANICAL ROUTING PLAN L2 - 1
F10N
GENERAL NOTES:
TOP to BOTTOM: A. SERVICE ROUTING SHOWN IS SUGGESTED. FINAL
1/2" PCWR ROUTING TO BE FIELD VERIFIED AND COORDINATED
1/2" PCWS WITH ALL OTHER TRADES AND CONSTRUCTION
1/2" PCWR COORDINATOR PRIOR TO INSTALLATION. REFER TO
1/2" PCWS EQUIPMENT TEMPLATE/DRAWINGS FOR FINAL
1/2" PCWR CONNECTION LOCATIONS.
1/2" PCWS
1/2" PCWR B. ROUTING DRAWING TO BE READ IN CONJUNCTION
1/2" PCWS WITH VMP SCHEMATIC/PID PACKAGE.
1/2" PCWS
1/2" PCWR
C. REFER TO 'TAGGING' MATRIX FOR LPOC
ASSIGNMENTS.
TOP to BOTTOM:
3/8" O2 D. CONTRACTOR TO RELOCATE EXISTING SERVICES
1/2" HPN2 INTERFERING WITH TOOL INSTALLATION, (e.g. HOUSE
3/8" H2(3.8%)/N2 LEFT to RIGHT:
VACUUM, DATA CONDUIT, ETC). COORDINATE ALL
3/8" He 2" PCWR
RELOCATIONS WITH TOOL OWNER AND
2" PCWS
TOP to BOTTOM: 1/2" UN2 CONSTRUCTION COORDINATOR.
1/2" PCWR
1/2" PCWS E. REFER TO STANDARD UTILITY DETAIL (SSUD) 'XNOTES',
1/2" PCWR 'MNOTES' & 'ENOTES' FOR GENERAL NOTES
1/2" PCWS APPLICABLE TO TOOL INSTALLATIONS.
KEYED NOTES:
1/2" CDA
1. LOCATE VALVES AND INSTRUMENTS UNDER VIEWTILE.
1/2" PV 1 FOR VALVES AND INSTRUMENTS NOT SHOWN FOR
CLARITY, SEE MECHANICAL P&ID FOR COMPONENTS.
TOP to BOTTOM:
P3-11-2 3/8" PCWR
1 P3-11-1 3/8" PCWS
P3-9-1 1/4" UN2
P2-11-2 3/8" PCWR
P2-11-1 3/8" PCWS
P2-9-1 1/4" UN2
P1-11-2 3/8" PCWR
PSK_SUPRA_BULK - 1451347 P1-11-1 3/8" PCWS
V43 TOOL OUTLINE @ LEVEL 3
P1-9-1 1/4" UN2
KEY PLAN :
N 1451347
MECHANICAL ROUTING PLAN L2 - 2
F10N
GENERAL NOTES
A. SERVICE ROUTING SHOWN IS SUGGESTED. FINAL ROUTING
TO BE FIELD VERIFIED AND COORDINATION WITH ALL OTHER
TRADES AND CONSTRUCTION COORDINATOR PRIOR TO
INSTALLATION. REFER TO EQUIPMENT TEMPLATE/DRAWINGS
FOR FINAL CONNECTION LOCATIONS.
O
A
2/1
11
B. ROUTING DRAWING TO BE READ IN CONJUNCTION WITH VMP
M
SCHEMATIC/PID PACKAGE.
MA
36.0 ENA
INT
0 [914NCE
.4] ACC
WHERE DISCREPANCIES EXIST BETWEEN THE TAGGING
FRO ESS
M
THI ARE
S SUR
A EXT
FAC END
E
MATRIX AND THE ROUTING PLAN, THE TAGGING MATRIX
S
SHALL TAKE PRECEDENCE. COORDINATE WITH
CONSTRUCTION COORDINATOR.
KEYED NOTES:
MAINTENANCE ACCESS AREA EXTENDS
12/10/2021
SUPRAVP
LOCATION AND EXACT ORIENTATION WITH TOOL OWNER VIA
CONSTRUCTION COORDINATOR
1451347
2. HALF VIEWTILE FOR ELEC/DATA PORT. COORDINATE EXACT
LOCATION AND ORIENTATION WITH TOOL OWNER VIA
STRIP
CONSTRUCTION COORDINATOR.
V43
PSK
1 2
01 02 03
KEY PLAN :
N 1451347
ELECTRICAL ROUTING PLAN L3
F10N
GENERAL NOTES
A. SERVICE ROUTING SHOWN IS SUGGESTED. FINAL ROUTING
TO BE FIELD VERIFIED AND COORDINATION WITH ALL OTHER
TRADES AND CONSTRUCTION COORDINATOR PRIOR TO
INSTALLATION. REFER TO EQUIPMENT TEMPLATE/DRAWINGS
FOR FINAL CONNECTION LOCATIONS.
P2-6-1
KEY PLAN :
N 1451347
ELECTRICAL ROUTING PLAN L2
F10N