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III-V Ternary and Quaternary Compounds
III-V Ternary and Quaternary Compounds
III-V Ternary
30. III-V Ternary and Quaternary Compounds
Part D | 30
Sadao Adachi
III–V semiconducting compound alloys are widely used hampered by a lack of definite knowledge of many ma-
as materials for optoelectronic devices such as light- terial parameters. This chapter provides data on the
emitting diodes, laser diodes and photodetectors, as fundamental material properties of III–V ternary and
well as for electronic transport devices such as field ef- quaternary alloys. The model used here is based on an
fect transistors, high electron mobility transistors and interpolation scheme and thus requires that values of
heterojunction bipolar transistors. In a ternary alloy, the material parameters for the related endpoint bina-
the bandgap energy Eg and the lattice parameter a are ries are known. We therefore begin with the constituent
generally both functions of a single composition pa- binaries and gradually move on to alloys. The phe-
rameter, so they cannot be selected independently. In nomenon of spontaneous ordering in semiconductor
quaternary alloys, on the other hand, the two com- alloys, which can be categorized as a self-organized
position parameters allow Eg and a to be selected process, is observed to occur spontaneously during
independently, within the constraints of a given alloy- the epitaxial growth of certain alloys, and results in
substrate system. Even though the basic semiconductor modifications to their structural, electronic and opti-
alloy concepts are understood at this time, the deter- cal properties. This topic is omitted from the cover-
mination of some practical device parameters has been age [30.1].
Part D | 30.3
available, the quaternary parameter Q can be expressed
"s .x; y/ 1 "s .AC/ 1 "s .AD/ 1
D xy C x.1 y/ either as(Ax B1x Cy D1y )
"s .x; y/ 2 "s .AC/ 2 "s .AD/ 2
"s .BC/ 1 x.1 x/ŒyTABC .x/ C .1 y/TABD .x/
C .1 x/y Q.x; y/ D
"s .BC/ 2 x.1 x/ C y.1 y/
"s .BD/ 1 y.1 y/ŒxTACD .y/ C .1 x/TBCD .y/
C .1 x/.1 y/ : C ;
"s .BD/ 2 x.1 x/ C y.1 y/
(30.6) (30.9)
When bowing from the anion sublattice disorder is in- or (Ax By C1xy D)
dependent of the disorder in the cation sublattice, the
interpolation scheme is written by incorporating these xyTABD .u/ C y.1 x y/TBCD .v /
cation and anion bowing parameters into the linear in- Q.x; y/ D
xy C y.1 x y/ C x.1 x y/
terpolation scheme as
x.1 x y/TACD .w /
C
Q.x; y/ D xyBAC C x.1 y/BAD C .1 x/yBBC xy C y.1 x y/ C x.1 x y/
C .1 x/.1 y/BBD C CAB x.1 x/ (30.10)
A0 CB0 y
Table 30.2 Lattice-matching conditions for some III–V quaternaries of type Ax B1x Cy D1y at 300 K. x D C0 CD0 y
Part D | 30.3
A0 CB0 x
Table 30.3 Lattice-matching conditions for some III–V quaternaries of type Ax B1x Cy D1y at 300 K. y D C0 CD0 x
Quaternary Substrate A0 B0 C0 D0 Remark
Alx Ga1x Py As1y GaAs 0 0:0081 0:2025 0:0046 0 x 1:0
Alx Ga1x Asy Sb1y GaSb 0 0:0396 0:4426 0:0315 0 x 1:0
InP 0:2269 0:0396 0:4426 0:0315 0 x 1:0
InAs 0:0376 0:0396 0:4426 0:0315 0 x 1:0
Alx Ga1x Py Sb1y GaAs 0:4426 0:0396 0:6451 0:0269 0 x 1:0
GaSb 0 0:0396 0:6451 0:0269 0 x 1:0
InP 0:2269 0:0396 0:6451 0:0269 0 x 1:0
InAs 0:0376 0:0396 0:6451 0:0269 0 x 1:0
Gax In1x Asy Sb1y GaSb 0:3834 0:3834 0:4211 0:0216 0 x 1:0
InP 0:6104 0:3834 0:4211 0:0216 0:47 x 1:0
InAs 0:4211 0:3834 0:4211 0:0216 0 x 1:0
Gax In1x Py Sb1y GaAs 0:8261 0:3834 0:6104 0:0348 0:52 x 1:0
GaSb 0:3834 0:3834 0:6104 0:0348 0 x 1:0
InP 0:6104 0:3834 0:6104 0:0348 0 x 1:0
InAs 0:4211 0:3834 0:6104 0:0348 0 x 1:0
Alx In1x Asy Sb1y GaSb 0:3834 0:3439 0:4211 0:0530 0 x 1:0
InP 0:6104 0:3439 0:4211 0:0530 0:48 x 1:0
InAs 0:4211 0:3439 0:4211 0:0530 0 x 1:0
Alx In1x Py Sb1y GaAs 0:8261 0:3439 0:6104 0:0616 0:53 x 1:0
GaSb 0:3834 0:3439 0:6104 0:0616 0 x 1:0
InP 0:6104 0:3439 0:6104 0:0616 0 x 1:0
InAs 0:4211 0:3439 0:6104 0:0616 0 x 1:0
Table 30.4 Lattice-matching conditions for some III–V quaternaries of type Ax By C1xy D at 300 K. y D A0 C B0 x
Quaternary Substrate A0 B0 Remark
Alx Gay In1xy P GaAs 0:5158 0:9696 0 x 0:53
Alx Gay In1xy As InP 0:4674 0:9800 0 x 0:48
Table 30.5 Lattice-matching conditions for some III–V quaternaries of type ABx Cy D1xy at 300 K. x D A0 C B0 y
Quaternary Substrate A0 B0 Remark
AlPx Asy Sb1xy GaAs 0:7176 0:7055 0 y 1:0
InP 0:3966 0:7055 0 y 0:56
InAs 0:1149 0:7055 0 y 0:16
GaPx Asy Sb1xy GaAs 0:6861 0:6861 0 y 1:0
InP 0:3518 0:6861 0 y 0:51
InAs 0:0583 0:6861 0 y 0:085
InPx Asy Sb1xy GaSb 0:6282 0:6899 0 y 0:911
InAs 0:6899 0:6899 0 y 1:0
The x-ray crystal density g can be simply written, using where M is the molecular weight and NA D 6:022
dM , as 1023 mol1 is the Avogadro constant. We list g for
some III–V binaries in Table 30.1. Alloy values of dM
MdM and g can be accurately obtained using Vegard’s law,
gD ; (30.15)
i. e., (30.1), (30.3), and (30.5).
NA
III-V Ternary and Quaternary Compounds 30.4 Mechanical, Elasticand Lattice Vibronic Properties 729
Part D | 30.4
30.4.1 Microhardness Note that Y and P are not isotropic, even in the cubic
zinc blende lattice.
The hardness test has been used for a long time as a sim-
ple means of characterizing the mechanical behavior of 30.4.3 Long-Wavelength Phonons
solids. The Knoop hardness HP for Gax In1x Py As1y
lattice-matched to InP has been reported [30.5], and is The atoms of a crystal can be visualized as being joined
found to increase gradually from 520 kg=mm2 for y D by harmonic springs, and the crystal dynamics can
0 (Ga0:47 In0:53 As) to 380 kg=mm2 for y D 1:0 (InP). be analyzed in terms of a linear combination of 3N
It has also been reported that the microhardness in normal modes of vibration (N is the number of dif-
Alx Ga1x N thin film slightly decreases with increasing ferent types of atoms; different in terms of mass or
AlN composition x [30.6]. ordering in space). In alloys, the nature of the lattice
optical spectrum depends on the difference between
30.4.2 Elastic Constants and Related Moduli the quantities representing the lattice vibronic proper-
ties of the components. If these quantities are similar,
Although the elastic properties of the III–V binaries then the optical response of an alloy is similar to the
have been studied extensively, little is known about response of a crystal with the quantities averaged over
their alloys. Recent studies, however, suggested that the composition (one-mode behavior). In one-mode
the elastic properties of the alloys can be obtained, to systems, such as most I–VII alloys, a single set of
a good approximation, by averaging the binary end- long-wavelength optical modes appears, as schemati-
point values [30.7, 8]. We have, therefore, listed in cally shown in Fig. 30.1. When the parameters differ
Tables 30.6 and 30.7 the elastic stiffness (Cij ) and com- strongly, the response of a system is more complex; the
pliance constants (Sij ) for some III–V binaries with zinc spectrum contains a number of bands, each of which
blende and wurtzite structures, respectively. Table 30.8 corresponds to one of the components, and it has an in-
also summarizes the functional expressions for the bulk tensity governed by its content in the alloy (multimode
modulus Bu , Young’s modulus Y, and Poisson’s ratio P. behavior). For example, a two-mode system exhibits
Table 30.6 Elastic stiffness (Cij ) and compliance constants (Sij ) for some cubic III–V binaries at 300 K
Binary Cij (1011 dyn=cm2 ) Sij (1012 cm2 =dyn)
C11 C12 C44 S11 S12 S44
AlN 31:5a 15:0a 18:5a 0:458a 0:148a 0:541a
AlP 15:0a 6:42a 6:11a 0:897a 0:269a 1:64a
AlAs 11:93 5:72 5:72 1:216 0:394 1:748
AlSb 8:769 4:341 4:076 1:697 0:5618 2:453
ˇ-GaN 29:1a 14:8a 15:8a 0:523a 0:176a 0:633a
GaP 14:050 6:203 7:033 0:9756 0:2988 1:422
GaAs 11:88 5:38 5:94 1:173 0:366 1:684
GaSb 8:838 4:027 4:320 1:583 0:4955 2:315
InN 19:2a 7:30a 9:35a 0:659a 0:182a 1:07a
InP 10:22 5:73 4:42 1:639 0:589 2:26
InAs 8:329 4:526 3:959 1:945 0:6847 2:526
InSb 6:608 3:531 3:027 2:410 0:8395 3:304
a Theoretical
Table 30.7 Elastic stiffness (Cij ) and compliance constants (Sij ) for some wurtzite III–V binaries at 300 K
Binary Cij (1011 dyn=cm2 ) Sij (1012 cm2 =dyn)
a
C11 C12 C13 C33 C44 C66 S11 S12 S13 S33 S44 Sb66
AlN 41:0 14:0 10:0 39:0 12:0 13:5 0:285 0:085 0:051 0:283 0:833 0:740
˛-GaN 37:3 14:1 8:0 38:7 9:4 11:6 0:320 0:112 0:043 0:276 1:06 0:864
InN 19:0 10:4 12:1 18:2 0:99 4:3 0:957 0:206 0:499 1:21 10:1 2:33
aC
66 D 1=2.C11 C12 /, b S66 D 2.S11 S12 )
730 Part D Materials for Optoelectronics and Photonics
Table 30.8 Functional expressions for the bulk modulus Bu , Young’s modulus Y, and Poisson’s ratio P in semiconductors
Part D | 30.4
S D S11 S12 .S44 =2/; l D directional vector; m D direction for a longitudinal stress; n D direction for a transverse strain (n ? m)
LO2 LO2
TO
TO2 TO2
0 0.2 0.4 0.6 0.8 1.0 0 0.2 0.4 0.6 0.8 1.0 0 0.2 0.4 0.6 0.8 1.0
Composition Composition Composition
Table 30.9 Behavior of the long-wavelength optical modes in III–V ternary and quaternary alloys
Behavior Alloy
One mode AlGaN (LO; cubic), AlGaN (except for E1 (TO); wurtzite), GaInN, AlAsSb
Two mode AlGaN (TO; cubic), AlGaN (E1 (TO); wurtzite), AlInN, AlGaP, AlGaAs, AlGaSb, AlInP, AlInAs, AlInSb,
GaInP, GaInAs, GaNP, GaNAs, GaPAs, GaPSb, GaAsSb, InPAs, InPSb
One–two mode GaInSb, InAsSb
Two–three mode AlGaInP/GaAs
Three mode AlGaAsSb, GaInAsSb, AlGaInAs/InP, InPAsSb
Three–four mode AlGaPAs
Four mode GaInPSb, GaInPAs/GaAs, GaInPAs/InP
two distinct sets of optical modes with frequencies or two-mode behavior, or more rigorously, three differ-
characteristic of each end member and strengths that ent types of mode behavior: one-mode, two-mode, and
are roughly proportional to the respective concentra- one–two-mode behaviors. The one–two-mode system
tions. exhibits a single mode over only a part of the composi-
As seen in Table 30.9, the long-wavelength opti- tion range, with two modes observed over the remaining
cal phonons in III–V ternaries exhibit either one-mode range of compositions.
III-V Ternary and Quaternary Compounds 30.5 Thermal Properties 731
In a quaternary alloy of the Ax B1x Cy D1y type, optical phonons in Alx Ga1x As exhibit the two-mode
Part D | 30.5
there are four kinds of unit cells: AC, AD, BC, and behavior over the whole composition range. Thus, the
BD. On the other hand, in the Ax By C1xy D type Alx Ga1x As system has two couples of the transverse
there are three kinds of unit cells: AD, BD, and CD. optical (TO) and longitudinal optical (LO) modes; one
We can, thus, expect four-mode or three-mode be- is the GaAs-like mode and the other is the AlAs-
havior of the long-wavelength optical modes in such like mode. Each phonon frequency can be expressed
quaternary alloys ([30.9]; Table 30.9). However, the as [30.12]:
Gax In1x Asy Sb1y quaternary showed three-mode be-
havior with GaAs, InSb and mixed InAs/GaAs char-
TO (GaAs): 26814x cm1
acteristics [30.10]. The Gax In1x Asy Sb1y quaternary
LO (GaAs): 29238x cm1
was also reported to show two-mode or three-mode be-
TO (AlAs): 358 C 4x cm1
havior, depending on the alloy composition [30.11].
LO (AlAs): 358 C 71x 26x2 cm1 .
The long-wavelength optical phonon behavior in It is observed that only the AlAs-like LO mode shows
the Alx Ga1x As ternary has been studied both theoreti- a weak nonlinearity with respect to the alloy composi-
cally and experimentally. These studies suggest that the tion x.
1.5 0.3
0.4
1.0 0.2
0.2
0.5 0.1
0 0 0
0 0.2 0.4 0.6 0.8 1.0 0 0.2 0.4 0.6 0.8 1.0 0 0.2 0.4 0.6 0.8 1.0
x x y
Fig. 30.3a–c Thermal conductivity as a function of x.y/ for (a) Alx Ga1x As, (b) Alx Ga1x N, and (c) Gax In1x Asy P1y
lattice-matched to InP at T D 300 K. The experimental data (solid circles) are gathered from various sources. The solid
lines represent the results calculated from (30.2) and (30.6) using the binary endpoint values and nonlinear parameters
in Table 30.11
30.5.2 Thermal Expansion Coefficient various alloy semiconductors, in fact, exhibit strong
nonlinearity with respect to the alloy composition.
The linear thermal expansion coefficient ˛th is usually Such a composition dependence can be successfully ex-
measured by measuring the temperature dependence of plained by using the quadratic expression of (30.2) or
the lattice parameter. The composition dependence of (30.6) [30.17].
˛th has been measured for many semiconductor alloys, In Fig. 30.3 we compare the results calculated
including Gax In1x P [30.15] and GaPx As1x [30.16]. from (30.2) [(30.7)] to the experimental data for
These studies indicate that the ˛th value varies al- Alx Ga1x As, Alx Ga1x N and Gax In1x Asy P1y =InP
most linearly with composition. This suggests that the alloys. The binary W values used in these calculations
thermal expansion coefficient can be accurately esti- are taken from Table 30.11. The corresponding non-
mated using linear interpolation. In fact, we plot in linear parameters CAB are also listed in Table 30.11.
Fig. 30.2 the 300 K value of ˛th as a function of x for The agreement between the calculated and experimen-
the Alx Ga1x As ternary. By using the least-squares fit
procedure, we obtain the linear relationship between ˛th Table 30.11 Thermal resistivity values W for some III–V
and x as ˛th .x/ D 6:011:74x .106 K1 /. This expres- binaries at 300 K. Several cation and anion bowing param-
sion is almost the same as that obtained using the linear eters used for the calculation of alloy values are also listed
interpolation expression in the last column
Binary W CAB
˛th .x/ D 4:28x C 6:03.1 x/ (cm K=W) (cm K=W)
D 6:031:75.106 K1 / : AlN 0:31a
AlP 1:11 CAlGa D 32
The binary endpoint values of ˛th are listed in Ta- AlAs 1:10 CAlIn D 15
ble 30.10. AlSb 1:75 CGaIn D 72
˛-GaN 0:51a CNP D 36
30.5.3 Thermal Conductivity GaP 1:30 CNAs D 12
GaAs 2:22 CNSb D 10
The lattice thermal conductivity , or the thermal re- GaSb 2:78 CPAs D 25
sistivity W D 1=, results mainly from interactions be- InN 2:22b CPSb D 16
tween phonons and from the scattering of phonons by InP 1:47 CAsSb D 91
crystalline imperfections. It is important to point out InAs 3:33
that when large numbers of foreign atoms are added InSb 5:416:06
to the host lattice, as in alloying, the thermal conduc- a Heat flow parallel to the basal plane, b ceramics
tivity may decrease significantly. Experimental data on
III-V Ternary and Quaternary Compounds 30.6 Energy Band Parameters 733
tal data is excellent. By applying the present model, perimentally unknown III–V alloy systems, such as
Part D | 30.6
it is possible to estimate the (or W) values of ex- GaAsx Sb1x and Alx Gay In1xy As.
3.0
GaxIn1 – xP
Electron Effective Mass
Since the carrier effective mass is strongly connected
with the carrier mobility, it is known to be one of the
most important device parameters. Effective masses can
2.5 be measured by a variety of techniques, such as the
Shubnikov-de Haas effect, magnetophonon resonance,
cyclotron resonance, and interband magneto-optical ef-
Egx fects. We list in Table 30.17 the electron effective mass
2.0 (me ) at the -conduction band and the density of states
(m˛ ˛
e ) and conductivity masses (mc ) at the X-conduction
and L-conduction bands of some III–V binaries. We
also list in Table 30.18 the bowing parameters used
when calculating the electron effective mass m e for
1.5
some III–V ternaries from (30.2). Note that the density
E0 of states mass m˛ e for electrons in the conduction band
minima ˛ D , X, and L can be obtained from
1.0 m˛
e DN
2=3 2=3 1=3
mt˛ ml˛ ; (30.16)
0 0.2 0.4 0.6 0.8 1.0
x
where N is the number of equivalent ˛ minima (N D 1
Fig. 30.4 Variation of the lowest direct gap (E0 ) and low-
for the minimum, N D 3 for the X minima, and N D 4
est indirect gap energies (EgX )
in the Gax In1x P ternary at
for the L minima). The two masses ml and mt in (30.16)
T D 300 K. The experimental data are gathered from var-
are called the longitudinal and transverse masses, re-
ious sources. The solid lines are calculated from (30.2)
spectively. The density of states effective mass m˛ e is
using the binary endpoint values and bowing parameters
used to calculate the density of states. The conductivity
in Tables 30.12 and 30.13
effective mass m˛ c , which can be used for calculating
the conductivity (mobility), is also given by
summarize in Table 30.15 the higher-lying bandgap
energies E1 and E2 for some III–V binaries. The corre-
3mt˛ ml˛
sponding bowing parameters for these gaps are listed in m˛
c D : (30.17)
Table 30.16. mt˛ C 2ml˛
E0(eV)
2.0
1.6 GaxIn1 – xAs InAsxSb1 – x GaxIn1 – xSb
1.2
0.8
0.4
meΓ/m0 0
0.08
0.06
0.04
0.02
0
GaAs InAs InSb GaSb
x x x
Fig. 30.5 Variation of the lowest direct gap energy E0 (T D 300 K) and electron effective mass me at the -conduction
bands of Gax In1x As, InAsx Sb1x and Gax In1x Sb ternaries. The experimental data are gathered from various sources.
The solid lines are calculated from (30.2) using the binary endpoint values and bowing parameters in Tables 30.12
and 30.13 (E0 ) and those in Tables 30.17 and 30.18 (me )
III-V Ternary and Quaternary Compounds 30.6 Energy Band Parameters 735
Table 30.14 Bandgap energies E0 for some III–V quater- Table 30.16 Bowing parameters used in the calculation of
Part D | 30.6
naries at 300 K the higher-lying bandgap energies, E1 and E2 , for some cu-
Quaternary E0 (eV) bic III–V ternaries. In those cases where no value is listed,
Gax In1x Py As1y /InP 0:75 C 0:46y C 0:14y2 linear variation should be assumed
Gax In1x Asy Sb1y /GaSb 0:28 0:16x C 0:60x2 Ternary CAB (eV)
Gax In1x Asy Sb1y /InAs 0:359 0:415x C 0:718x2 E1 E2 (E00 )
Alx Gay In1xy P=GaAsa 1:90 C 0:57x C 0:10x2
(Ga,In)N 1:11 1:26
Alx Gay In1xy As/InP 0:75 C 0:68x C 0:06x2
(Al,Ga)P 0 0
InPx Asy Sb1xy /InAs 0:512 C 0:030y 0:183y2
(Al,In)P 0 0
a The lowest indirect gap energy for this quaternary alloy can (Ga,In)P 0:86 0
be obtained via EgX D 2:25 C 0:09x 0:01x2 eV (Al,Ga)As 0:39 0
(Al,In)As 0:44 0:24
(Ga,In)As 0:51 0:27
Table 30.15 Higher-lying bandgap energies, E1 and E2 , for (Al,Ga)Sb 0:31 0:34
some III–V binaries at 300 K (Al,In)Sb 0:30 0:14
Binary E1 (eV) E2 (eV) (Ga,In)Sb 0:36 0:15
AlN 7:76 8:79 Ga(N,P) 0 0
AlP 4:30 4:63 Ga(N,As) 0 0
AlAs 3:623:90 4:853, 4:89 Ga(P,As) 0 0
AlSb 2:782:890 4:204:25 Ga(As,Sb) 0:59 0:19
˛-GaN 6:9 8:0 In(P,As) 0:17 0:03
ˇ-GaN 7:0 7:6 In(As,Sb) 0:8 1:4
GaP 3:71 5:28
GaAs 2:892:97 4:9605:45 dependence of m e , determined for Gax In1x Py As1y
GaSb 2:05 4:084:20 and Alx Gay In1xy As quaternaries lattice-matched to
InN 5:0 7:6 InP.
InP 3:17 4:70 (E00 )
InAs 2:50 4:70 Hole Effective Mass
InSb 1:80 3:90 The effective mass can only be clearly defined for
an isotropic parabolic band. In the case of III–V
Since mt D ml at the ˛ D minimum of cubic semi- materials, the valence bands are warped from spher-
conductors, we have the relation m
e D mc . In the case
ical symmetry some distance away from the Bril-
of wurtzite semiconductors, we have the relation m e ¤
louin zone center (). Depending on the measure-
mc , but the difference is very small.
ment or calculation technique employed, different
The composition dependence of the electron ef- values of hole masses are then possible experimen-
fective mass m e at the -conduction bands of tally or theoretically. Thus, it is always important to
Gax In1x As, InAsx Sb1x and Gax In1x Sb ternaries choose the correct definition of the effective hole mass
is plotted in Fig. 30.5. The solid lines are calcu- which appropriate to the physical phenomenon consid-
lated from (30.2) using the binary endpoint values ered.
and bowing parameters in Tables 30.17 and 30.18. We list in Table 30.20 the density of states heavy
For conventional semiconductors, the values of the hole (m
HH ), the averaged light hole (mLH ), and spin or-
effective mass are known to decrease with decrease- bit splitoff effective hole masses (mSO ) in some cubic
ing bandgap energy (Fig. 30.5). This is in agreement III–V semiconductors. These masses are, respectively,
with a trend predicted by the k p theory [30.2]. In defined using Luttinger’s valence band parameters i
III–V-N alloys, the electron effective mass has been by
predicted to increase with increasing nitrogen com- 2=3
position in the low composition range [30.19]. This 1 C 0:05h C 0:0164h2
m D ; (30.18)
behavior is rather unusual, and in fact is opposite to HH
1
what is seen in conventional semiconductors. How- 1
ever, a more recent study suggested that the effective mLH D ; (30.19)
1 C
electron mass in GaNx As1x decreases from 0:084m0
1
to 0:029m0 as x increases from 0 to 0:004 [30.20]. mSO D (30.20)
We also summarize in Table 30.19 the composition 1
736 Part D Materials for Optoelectronics and Photonics
(m˛
c ) at the X-conduction and L-conduction bands of some III–V binaries. ZB D zinc blende
Binary m
e =m0 Density of states mass Conductivity mass
e =m0
mX e =m0
mL c =m0
mX c =m0
mL
AlN 0:290:45 – – – –
AlN (ZB) 0:26a 0:78a 0:37a
AlP 0:220a 1:14a 0:31a
AlAs 0:124 0:71 0:78 0:26a 0:21a
AlSb 0:14 0:84 1:05a 0:29 0:28a
˛-GaN 0:21 – – – –
ˇ-GaN 0:15 0:78a 0:36a
GaP 0:114 1:58 0:75a 0:37 0:21a
GaAs 0:067 0:85 0:56 0:32 0:11
GaSb 0:039 1:08a 0:54 0:44a 0:12
InN 0:044 – – – –
InN (ZB) 0:03a
InP 0:07927 1:09a 0:76a 0:45a 0:19a
InAs 0:024 0:98a 0:94a 0:38a 0:18a
InSb 0:013
a Theoretical
Table 30.18 Bowing parameter used in the calculation of Table 30.19 Electron effective mass m
e at the -
the electron effective mass m
e at the -conduction bands conduction bands of some III–V quaternaries
of some III–V ternaries
Quaternary m
e =m0
Ternary CAB (m0 )
(Ga,In)P 0:01854 Gax In1x Py As1y /InP 0:04084 C 0:03384y C 0:00459y2
(Al,Ga)As 0 Alx Gay In1xy As/InP 0:043 C 0:031x
(Al,In)As 0:012
(Ga,In)As 0:008 Table 30.20 Density of states heavy hole (m HH ), aver-
(Ga,In)Sb 0:010 aged light hole (m
LH ), and spin orbit splitoff effective hole
Ga(P,As) 0 masses (mSO ) in some cubic III–V semiconductors. ZB D
Ga(As,Sb) 0:014 zinc blende
In(P,As) 0
Material m =m0 m =m0 mSO =m0
In(As,Sb) 0:027 HH LH
AlN (ZB) 1:77a 0:35a 0:58a
a
with AlP 0:63 0:20a 0:29a
AlAs 0:81a 0:16a 0:30a
1=2 6 32 22 AlSb 0:9 0:13 0:317a
D 222 C 232 ; h D :
.1 / ˇ-GaN 1:27a 0:21a 0:35a
(30.21) GaP 0:52 0:17 0:34
GaAs 0:55 0:083 0:165
Only a few experimental studies have been performed GaSb 0:37 0:043 0:12
on the effective hole masses in III–V alloys, e.g., the InN (ZB) 1:959a 0:098a 0:186a
Gax In1x Py As1y quaternary [30.2]. While some data InP 0:69 0:11 0:21
imply a bowing parameter, the large uncertainties in ex- InAs 0:36 0:026 0:14
isting determinations make it difficult to conclusively InSb 0:38 0:014 0:10
state that such experimental values are preferable to a
a linear interpolation. The binary endpoint data listed Theoretical
in Table 30.20 enable us to estimate alloy values using
the linear interpolation scheme. portant role in many physical phenomena. For example,
the splitting of the heavy hole and light hole bands at
30.6.3 Deformation Potential the point of the strained substance can be explained
by the shear deformation potentials, b and d. The lat-
The deformation potentials of the electronic states at the tice mobilities of holes are also strongly affected by
Brillouin zone centers of semiconductors play an im- these potentials. Several experimental data have been
III-V Ternary and Quaternary Compounds 30.7 Optical Properties 737
Table 30.21 Conduction-band (ac ) and valence-band deformation potentials (av , b, d) for some cubic III–V binaries. ZB
Part D | 30.7
D zinc blende
Binary Conduction band Valence band
ac (eV) av (eV) b (eV) d (eV)
AlN (ZB) 11:7a 5:9a 1:7a 4:4a
AlP 5:54a 3:15a 1:5a
AlAs 5:64a 2:6a 2:3a
AlSb 6:97a 1:38a 1:35 4:3
ˇ-GaN 21:3a 13:33a 2:09a 1:75a
GaP 7:14a 1:70a 1:7 4:4
GaAs 11:0 0:85 1:85 5:1
GaSb 9 0:79a 2:4 5:4
InP 11:4 0:6 1:7 4:3
InAs 10:2 1:00a 1:8 3:6
InSb 15 0:36a 2:0 5:4
a Theoretical
Table 30.22 Conduction-band (Di ) and valence-band deformation potentials (Ci ) for some wurtzite III–V binaries (in
eV)
Binary Conduction band Valence band
D1 D2 C1 D1 –C1 C2 D2 –C2 C3 C4 C5 C6
AlN 10:23a 9:65a 12:9a 8:4a 4:5a 2:2a 2:6a 4:1a
˛-GaN 9:47a 7:17a 41:4 3:1 33:3 11:2 8:2 4:1 4:7
InN 4:05a 6:67a 4:92a 1:79a
a Theoretical
reported on the deformation potential values for III– band deformation potentials (av , b, d) of some cubic
V alloys, Alx Ga1x As [30.12], GaPx As1x [30.21] and III–V binaries. The deformation potentials for some
Alx In1x As [30.22]. Due to the large scatter in the ex- wurtzite III–V semiconductors are also collected in Ta-
perimental binary endpoint values, it is very difficult to ble 30.22. Until more precise data become available, we
establish any evolution of the deformation potentials suggest employing the linear interpolation expressions
with composition. We list in Table 30.21 the recom- in order to estimate the parameter values of these poorly
mended values for the conduction band (ac ) and valence explored properties.
ε∞
Part D | 30.7
a)
18 ε1
Alx Ga1 – x Sb Lucovsky 150
17 Ance Alx Ga1 – xAs
100
16 Ferrini
50
15
0
14 –50 AlAs-like
13 GaAs-like
–100
12 –150
240 270 300 330 360 390 420
11 b) ω (cm–1)
ε2
10 250
9 x = 0 (GaAs)
200 x = 0.18
8 x = 0.36
150 x = 0.54
7
100
6
0 0.2 0.4 0.6 0.8 1.0 50
x
Part D | 30.8
a) ε 1 b) ε 2
E2
40 (AlxGa1 – x)0.5In0.5P/GaAs 40 E1
30 30
x = 1.0 E0
x = 0.75
20 x = 0.5 20 x = 1.0
x = 0.25 x = 0.75
10 x = 0 10 x = 0.5
x = 0.25
0 0 x=0
–10 –10
0 1 2 3 4 5 6 0 1 2 3 4 5 6
E(eV) E(eV)
Fig. 30.8a,b ".E/ spectra for Alx Gay In1xy P=GaAs at room temperature. The experimental data are taken from
Adachi [30.27]; open and solid circles. The solid lines represent the theoretical fits for the MDF calculation
tra of Alx Ga1x As exhibit two main optical resonances: means that "1 .E/ can be calculated at each photon en-
GaAs-like and AlAs-like. ergy if "2 .E/ is known explicitly over the entire photon
energy range, and vice versa. The Kramers–Kronig re-
30.7.2 The Interband Transition Region lations are of fundamental importance in the analysis of
optical spectra [30.9].
The optical constants in the interband transition regions The refractive indices and absorption coefficients
of semiconductors depend fundamentally on the elec- of semiconductors are the basis of many important
tronic energy band structure of the semiconductors. The applications of semiconductors, such as light-emitting
relation between the electronic energy band structure diodes, laser diodes and photodetectors. The optical
and "2 .E/ is given by constants of III–V binaries and their ternary and quater-
Z nary alloys have been presented in tabular and graphical
4e2 „2 forms [30.27]. We plot in Fig. 30.8 the ".E/ spec-
"2 .E/ D dk jPcv .k/j2 ıŒEc .k/Ev .k/E ;
2 E2 tra for Alx Gay In1xy P=GaAs taken from tabulation
(30.23) by Adachi ([30.27]; open and solid circles). The solid
lines represent the theoretical fits of the model dielec-
where is the combined density of states mass, the tric function (MDF) calculation [30.9]. The three major
Dirac ı function represents the spectral joint den- features of the spectra seen in Fig. 30.8 are the E0 , E1
sity of states between the valence-band [Ev (k)] and and E2 structures at 2, 3:5 and 4:5 eV, respec-
conduction-band states [Ec (k)], differing by the energy tively. It is found that the E0 and E1 structures move to
E D „! of the incident light, Pcv (k) is the momen- higher energies with increasing x, while the E2 struc-
tum matrix element between the valence-band and ture does not do so to any perceptible degree. We can
conduction-band states, and the integration is per- see that the MDF calculation enables us to calculate the
formed over the first Brillouin zone. The Kramers– optical spectra for optional compositions of alloy semi-
Kronig relations link "2 .E/ and "1 .E/ in a manner that conductors with good accuracy.
Optical
(h ) obtained at 300 K for relatively pure samples of III–V
Intervalley
binaries (in cm2 =.V s/)
Acoustic
Phonon Binary e h
Polar AlN 125 14
Optical
Nonpolar AlP 80 450
Intervalley
Piezoelectric AlAs 294 105
Acoustic
Deformation AlSb 200 420
potential
˛-GaN 1245 370
Ionized ˇ-GaN 760 350
Impurity GaP 189 140
Neutral
Defect Space-charge GaAs 9340 450
Alloy GaSb 12 040 1624
InN 3100 39
Carrier/carrier
InP 6460 180
Fig. 30.9 Various possible carrier scattering mechanisms InAs 33 000 450
in semiconductor alloys InSb 77 000 1100
The total carrier mobility tot can then be obtained from the band degeneracy and is given by ˛ D 1 for electrons
the scattering-limited mobilities i of each scattering and by ˛ D Œ.d 5=2 Cd 3 /=.1Cd 3=2/2 for holes with d D
mechanism. We note that in alloy semiconductors the mHH =mLH , where mHH and mLH are the heavy hole and
charged carriers see potential fluctuations as a result of light hole band masses, respectively [30.12].
the composition disorder. This kind of scattering mech- Let us simply express the total carrier mobility tot
anism, so-called alloy scattering, is important in some in alloy Ax B1x C as
III–V ternaries and quaternaries. The alloy scattering
limited mobility in ternary alloys can be formulated as 1 1
p D
tot .x/ xtot .AC/ C .1 x/tot .BC/
2e„4 Nal ˛
al D ; (30.25) 1
3.mc/
5=2 .kT/1=2 x.1 x/.
U/2 C x : (30.26)
al,0 = 1x
where Nal is the density of alloy sites, m
c is the electron
or hole conductivity mass, x and (1 x) are the mole The first term in (30.26) comes from the linear inter-
fractions of the binary endpoint materials, and
U is polation scheme and the second term accounts for the
the alloy scattering potential. The factor ˛ is caused by effects of alloying.
a) b)
μe (cm2/V s) μh (cm2/V s)
14 000 500
Gax In1 – x Py As1– y /InP 450 AlxGa1 – xAs
12 000
400
10 000 350
8000 300
250
6000
200
4000 150
100
2000
50
0 0
0 0.2 0.4 0.6 0.8 1.0 0 0.2 0.4 0.6 0.8 1.0
y y
Fig. 30.10 (a) Electron Hall mobility e in the Gax In1x Py As1y =InP quaternary and (b) the hole Hall mobility h in
the Alx Ga1x As ternary, respectively. The experimental data correspond to those for relatively pure samples. The solid
lines in (a) and (b) represent the results calculated using (30.26) with al,0 D 3000 and 50 cm2 =.V s/, respectively
III-V Ternary and Quaternary Compounds References 741
We plot in Figs. 30.10a and 30.10b the electron endpoint values for tot are listed in Table 30.25. For
Part D | 30
Hall mobility in the Gax In1x Py As1y =InP quaternary Gax In1x Py As1y =InP, we have considered the quater-
(e ) and the hole Hall mobility in the Alx Ga1x As nary to be an alloy of the constituents Ga0:53 In0:47 As
ternary, respectively. The experimental data corre- (y D 0) and InP (y D 1:0) and we have used the value
spond to those for relatively pure samples [30.28]. of tot .Ga0:47 In0:53 As/ D 13 000 cm2 =.V s/. It is clear
The solid lines in Figs. 30.10a,b represent the re- that (30.26) can successfully explain the peculiar com-
sults calculated using (30.26) with al;0 D 3000 and position dependence of the carrier mobility in the semi-
50 cm2 =.V s/, respectively. The corresponding binary conductor alloys.
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