INSTITUTE FOR DEFENSE ANALYSES

MEMS in Turbine Engines

A. A. Seraphin
R. A. Singer
R R. Frank
K. Carson

v January 1999
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distribution unlimited.
IDA Document D-2266
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INSTITUTE FOR DEFENSE ANALYSES

IDA Document D-2266

MEMS in Turbine Engines

A. A. Seraphin
R. A. Singer
F. R. Frank
K. Carson
 PREFACE

This work was undertaken for the Defense Advanced Research Projects Agency,
under a task entitled "Micro-Electro-Mechanical Systems (MEMS) Development and
Insertion," as a part of a program to incorporate MEMS technologies into defense
systems and platforms. This document was originally presented at the AIAA Fluid
Dynamics Conference in Albuquerque, New Mexico, on 15 June 1998, and is published
in the conference proceedings.

u
 MEMS IN TURBINE ENGINES
A.A. Seraphin, R.A. Singer, F.R. Frank, and K. Carson
Institute for Defense Analyses, Alexandria, VA
Introduction
This document analyzes the use of micro-
electromechanical systems (MEMS) in turbine
engines. Potential applications of MEMS include
sensor, actuator, power, and communication
subsystems. In addition, there is significant
analysis of technical and policy barriers to the
transition of MEMS into engines. Briefing slides
from a presentation on this topic delivered at an
AIAA Fluid Dynamics Conference are included as
an appendix.
MEMS
MEMS are micron-scale devices that integrate
novel sensing and actuation functions with
traditional micro-electronics-based data
processing and control systems. Proponents of
MEMS development list a number of advantages
of systems based on these devices over traditional
"macro-scale" systems, including:
Cost of Fabrication—Batch fabrication of MEMS
based on processing technologies developed by
the semiconductor microelectronics industry can
greatly reduce systems production costs.
Size, Weight, Power Reduction—Reduction of
existing system sizes without loss in functionality
often reduces energy consumption, improves
system efficiency, and provides access for
sensors and actuators to previously inaccessible
spaces.
Real-time sensing, monitoring, and control of the
environment—These capabilities allow for user-
controlled or automated response to anticipated
problems before failure, and improve system
robustness to unexpected events.
Performance advantages—Some specific
applications of MEMS provide theoretical
advantages over macro-scale systems, including
materials performance advantages, reduction of
losses for RF applications, and improved mixing
characteristics in microfluidic systems. This benefit
is multiplied when arrays of MEMS sensors and
actuators are used in control systems.
The transition of MEMS technologies from
research curiosities to practical systems and
commercial products involves identification of
specific, high-impact applications for MEMS, and
the development of realistic strategies for
development, testing, and insertion of the devices
into real systems.
Most current applications of MEMS focus on
the simple replacement of existing systems with
MEMS-based systems to reduce size and cost.
However, the real benefits of MEMS technology
will be seen through the exploitation of the
advantages of these replacement systems in
developing entirely new capabilities that result
from microscale control over macro-scale
phenomena.1 The challenge for the MEMS
developer and user communities is to identify the
specific applications that best exploit these new
capabilities and to develop MEMS designed for
use in solving real-world engineering problems.
Engine Applications of MEMS
Turbine engines represent an important
opportunity to demonstrate the innovative use of
MEMS in the control of large, complex systems.
Defense applications of turbine engines range
from jet engines to cruise missiles to stationary
power supplies for fixed installations. The military
engine market is extremely large, with over 50,000
systems fielded by the Department of Defense
(DoD). The Air Force has identified airbreathing
propulsion as a key enabling technology for all of
its future advanced system concepts.2 Since
combined engine and fuel weight is approximately
50 percent of takeoff gross weight of most military
aircraft, reducing this load has become a key
focus. The government-funded Integrated High
Performance Turbine Engine Program (IHPTET) is
an example of attempts to create more affordable,
robust, and high-performance engines in the
future.
Commercial markets are much
larger—analysts estimate that from 1997 to 2006,
the total value of the turbofan and turbojet
aeroengine market alone will be $136 billion, with
approximately 40,000 of these engines being
produced.3 Government initiatives, commercial
market size, and competition in the turbine engine
industry will all serve to help finance and promote
technological innovation, making this an ideal
situation for the development and insertion of
MEMS.
Improvements in existing turbine engine
technology could result in huge cost savings for
government and industry alike. Advances in
technology could
• reduce the life-cycle costs of systems
through condition-based maintenance
• improve performance of military aircraft
and munitions so that fewer platforms are
required to perform assigned missions
• reduce instrumentation requirements on
test rigs
• reduce time-to-market of new systems by
reducing the cost and improving the
quality of engine tests
A number of industry and government
organizations have begun to explore the possibility
of using MEMS sensors and actuators in turbine
engine systems. Drawn from their studies, the
following list of specific MEMS applications for
turbine engines in test rigs or working systems is
not intended to be exhaustive but instead to give a
sense of the breadth of the potential of MEMS in
these systems.
Health (structural) monitoring
MEMS sensors would be used to monitor the
health of engine casings, blades, and turbines,
and the loads they are experiencing. These
sensors could be linked to systems to adjust
engine controls to avoid or reduce damage or as
part of condition-based maintenance systems. For
example, advanced composite structures need
acoustic emission sensors with wireless
connections to signal-processing and damage-
monitoring nodes. Other sensors are needed for
torque and thrust-load measurements, acoustic
crack initiation detection,4 and dynamic and high-
temperature strain.
One such strain sensor might involve the use
of a silicon cantilever excited to its resonant
frequency. The strain acting on the sensor would
be measured with a differential laser
interferometer and would be determined by the
maximal deflection and the geometry of the
cantilever. This device could be exploited in the
development of test and measurement equipment
for new turbine engine systems.5
Other application areas include vibration
sensing and control6 and deicing using heaters
embedded into engine structures that can be used
to melt ice which can alter air intake flow and lead
to compressor stall and engine failure.
Flow control and monitoring
MEMS-based systems can be used to meter
the flow of fuel and air into combustors, control
cooling air flow through engine sections, or control
turbulent air flow or boundary layer separation to
improve engine efficiency. The development of
micro-atomizer components will provide more
precise metering of fuel into the combustor
section. Si micro-atomizers reproducibly create
small droplets at lower pressures and precise
spray angles over a wide range of fuel injection
pressures. This control over droplet size and
shape enhances mixing efficiency. Current MEMS
development projects have produced working Si,
SiC-coated, and SiC atomizers.7 A number of
issues still remain to be addressed, including the
reduced erosion resistance of silicon atomizers
over conventional atomizers and the extreme
temperature requirements of the engine
environment.
MEMS actuators can be integral parts of
advanced cooling air and fuel flow and pressure
control systems. One proposed MEMS system
would reduce noise and high-cycle fatigue through
controlled trailing edge blowing from upstream
inlet guide vanes. This system would control
pressure fluctuations and turbulence within the
engine. A control system could be linked to
MEMS-based microvalves and micropumps built
into the vanes to regulate blowing air."
Similar systems can be used to control leading
edge air feed to pressure deficient blade tips as
determined by pressure sensors. Increasing tip
pressure at selected points can reduce leakage
and improve turbine efficiency. Systems integrated
with flow sensors can be used along with actuated
flow splitters to control air bypass ratios, possibly
along with embedded heaters to control cooling air
temperatures, or act as stall detectors.
Actuators/Smart Structures
MEMS can be embedded in structural
materials to create smart skins that can sense and
adapt to changing environments. Smart skins
could perform real-time monitoring and structural
modifications of turbine components. In test rigs,
they can be used to verify and improve finite-
element-analysis models by providing microscale
data.
 One application of this type of technology
would provide on-blade smart skin FOD (foreign
object damage) detection.9 Here, FOD or crack-
initiation detectors would give pilots warning of
potential imminent catastrophic failures and
reduce pilot risk, as well as maintenance costs.
Another application would be active clearance
control for turbine blades, i.e., blades whose
shape would change, depending on flow and
temperature conditions, to minimize leakage.10
Clearance control could also be effected through
the use of synthetic microjets to control air flow.
Smart structures are currently being
developed by DARPA as part of active inlet control
systems in the SAMPSON program. The goal is to
be able to modify turbine inlet shape so as to
extend the performance envelope of next-
generation fighter aircraft. These systems could
include the use of MEMS sensors and actuators
as part of the control mechanisms.
Sensors
Microsensors represent the most important
application for MEMS in engines. Miniaturized
sensing systems will enable finer control of engine
function to optimize efficiency and reduce the size
and cost of instrumentation. Utilizing MEMS-based
instrumentation to validate fluid dynamics and
materials performance models will help in this
effort, by improving design capability and assisting
integration and manufacturability. MEMS sensors
can also fill the need in the engine development
community for instrumentation that has longer life,
greater reliability, lower cost, and is unobtrusive. In
addition, MEMS can improve the accuracy of
simulators through the introduction of sensors into
hitherto inaccessible locations.
Miniaturized temperature sensors can be used
to measure both air and surface temperature in
engines. Air-temperature sensors would be used
to monitor combustion process efficiency or hot
gas ingestion into the engine. Surface
measurements would enable temperature
mapping of frames, blades, and combustor section
walls. These—and in fact any MEMS sensors
used in engines—would have to be nonintrusive
so as not to interfere with engine air flow. Such
sensors, for example, could be embedded directly
into ceramic or metallic matrices and queried and
powered remotely.
MEMS pressure sensors would be used to
measure both steady-state and dynamic
pressures. Steady-state pressure measurements
can be used to monitor flow profiles, help adjust
engine efficiency, or control stall and surge. Other
sensors can monitor the flow of secondary and
cooling air or pressures in the exhaust stream and
feed the information back to control systems.
Dynamic pressure applications include mapping
pressure distributions on rotating parts (critical in
controlling high-cycle fatigue) and monitoring the
flow environment in the exhaust stream.
Vibration sensors could be embedded
throughout the engine as part of a condition-based
maintenance monitoring network, for example, to
detect crack initiation and growth. Control of these
vibrations is key in eliminating failures due to high-
cycle fatigue. Nonintrusive, remotely queried
accelerometers could monitor case vibrations as
part of a control system that integrates sensors
with piezoelectric actuators for vibration
cancellation. Another key application would be the
development Of ice-detection systems based on
resonant piezoelectric sensing elements and
microprocessor control, for example.11
Gas emission sensors, including micro-
spectrometers or Sn02-based sensors, could be
used to monitor engine emissions for
environmental control or to sense key gas
components to allow for active combustion control.
These sensors could be a component on an
integrated control system that monitors the
efficiency and stability of the combustion process.
Sensors would also monitor emissions for
compliance with environmental standards. Specific
goals include reducing NOx emissions and using
chemical information as part of condition-based
maintenance systems. Integrated sensors could
replace current expensive and time-consuming
testing and analysis techniques, some of which
involve using chase planes with scoops that
collect exhaust samples from test engines in
airplanes.
Strain sensing applications will also be an
integral part of condition-based maintenance
systems. Sensors which make dynamic strain
measurements with microstrain accuracy are
needed. These systems might be on flexible
substrates for conformal application onto engine
parts and preferably be networked using a
telemetry system for data I/O. A key factor in the
use of these systems will be the thermal stability
and operating temperature ranges of any MEMS
strain sensors.
Additional possibilities for applications of
MEMS sensors to engine systems are nearly
limitless. Force transducers could be used for
measuring torque and thrust loading on parts.
Actuator/fuel valve position sensors would enable
precision metering of fuel injection to enhance
engine efficiency (and therefore reduce costs), as
well as improve engine response to pilot actions.12
Other sensors could be used to measure blade tip
clearances dynamically, measure oil degradation
chemically, or monitor engine noise.
Data transfer
MEMS-based telemetry provides the key to
enabling nonintrusive devices that would link
pressure, temperature, strain, or other sensors to
full authority digital electronic control (FADEC)
instrumentation for real-time monitoring of engine
performance and condition. Wireless technologies
would eliminate the need for extensive cabling
during engine tests and be particularly useful
when dealing with rotating parts. Advanced
telemetry systems would also reduce time and
cost of assembly and disassembly of test rigs. To
realize the networked active structure systems
envisioned for future engines, wireless
transmitters and receivers built into MEMS
sensors and actuator packages are critical. An
example of such a system would be a thermo-
microelectronic radio frequency (RF) transmitter.13
This device would be powered by excess heat
generated by the turbine engine itself. The
transmitters would send RF signals short distance
(< -3 ft) from rotors to the engine casings at
frequencies above engine background noise.
Technical Barriers
Currently, the hazardous environment limits
the use of MEMS in turbine engines. Typical
conditions that MEMS will experience in high
performance aircraft engines include the
following:14
• an operating temperature range between
-40 and 3000+ °F and associated thermal
shocks
• supersonic velocities
• case vibrations exceeding 100 g and at
frequencies up to 20 kHz
• sound levels at 120 dB/Hz at frequencies
outtolOkHz
• dust and sand environment
New materials, device architectures, and
packaging systems must be developed for MEMS
to be feasible in turbine engines.
High-Temperature Survivabilitv
At the high operating temperatures in the hot
sections of a turbine engine, it is clear that silicon-
based MEMS and the supporting silicon
microelectronics will not survive. MEMS will fail
due to excessive oxidation, mechanical failure, or
electronic breakdown at elevated temperatures.
Considerable effort is being made to improve the
performance of silicon microelectronics at high
temperature—simple silicon transistor operation
has been demonstrated up to 462 °C15—however,
it is not likely that silicon will ever be able to meet
the temperature requirements of many engine
applications.
SiC-based electronic devices and MEMS are
currently being developed for use in high-
temperature, high-power, and/or high-radiation
conditions. SiC's high breakdown field, wide band
gap, high carrier saturation velocity, and high
thermal conductivity give it better operating
performance at elevated temperatures than
silicon. SiC exhibits a dielectric strength of 10
times that of Si and a thermal conductivity of 5
times that of Si. The standard overall Temperature
Figure-of-Merit for SiC is 3 to 4 times that of Si.16
SiC is relatively chemically inert, making it ideal for
use in valves, pumps, or flow sensors operating in
corrosive media. SiC's superior mechanical
properties make these devices promising for
operation in the presence of high loading,
temperatures, and pressures as well as foreign
object impact and violent chemical reactions.
Some basic SiC MEMS, including atomizers and
lateral resonators, have been grown and
demonstrated. These devices have already shown
significant reliability advantages in harsh
environments over traditional polysilicon MEMS.
SiC device development is still in its infancy
relative to silicon systems. In some ways, the
material's chemical inertness makes it more
difficult to process than Si. Much progress
continues to be made in developing substrates,
defect-free materials, and dopant systems for
complex device architectures. Other research is
focusing on developing other materials systems
for high-temperature environments, including
diamond and silicon-on-insulator (SOI) systems.17
This work, as well as parallel research into high-
temperature packaging and interconnects, is
critical in laying the foundation for the use of
MEMS in engine environments.
Structural Reliability
The structural reliability of MEMS also comes
into question when considering turbine engine
applications. MEMS must be at least as reliable as
the components they are replacing to justify
insertion into engine systems. Case vibrations and
loading, which can cause failure in the metallic
components of existing engines, may cause
performance degradation in any embedded or
surface-mounted MEMS. Surface components
must be able to survive impacts of dust and sand
particles that may be larger than the devices
themselves. Any MEMS must also be able to
survive high-temperature processing of engine
materials. Here again, SiC's mechanical properties
make it promising for use in engine applications.
Packaging
MEMS packaging must be developed to
survive the high temperatures and vibrations in the
engine environment. This packaging must also be
designed to include required telemetry and power
systems that will support the MEMS sensors and
actuators. Innovative packaging techniques will be
a prime factor in allowing MEMS achieve the form,
fit, and function requirements of engine
subsystems.
Packaging cost must also be reduced before
affordable MEMS-based systems are produced.
Currently, package costs are over five times the
cost of the sensor alone. Often, any cost
advantage gained by MEMS producers leveraging
semiconductor manufacturing infrastructure is lost
to expensive, application-specific packaging
requirements. This problem must be resolved
before MEMS can move from the laboratory to the
commercial sector
Power
Another major technical barrier will be
powering the MEMS inserted into the engine
environment. Extensive networks of sensors and
actuators in relatively inaccessible spaces must
have on-board power sufficient for long term
operation without maintenance. It is possible that
this power can be supplied using RF transponder
technology18 or by generating energy using the
heat or vibrations of the engine itself. Power
packages must meet the overall goal of being
nonintrusive within the engine.
System Integration
System integration issues will also determine
how successfully MEMS will be inserted into
turbine environments. MEMS developers will have
to work closely with subcomponent manufacturers
not only to meet technical performance
requirements, but also power, communications,
and data protocols. As part of this process, engine
system and subsystem developers will need more
information on the allowable operating
environments and reliability of MEMS-based
systems. More information on mean time between
failure (MTBF) and failure mechanisms needs to
be cataloged to enable substitution of MEMS for
existing components.
Cost
The cost of MEMS-based systems must also
become competitive with traditional engine
instrumentation before any significant progress
towards insertion can be made. This cost reflects
the entire life cycle of the products, from research
and development investments, to manufacturing,
testing and evaluation; retrofitting costs; and
maintenance and support. Government support of
initial R&D programs and development of flexible
manufacturing infrastructure for MEMS will serve
to assist in making the technology an affordable
commercial alternative.
Transitioning MEMS to Turbines
Past successes in the transition of technology
from the laboratory to the field suggest some
general principles which may apply to current
efforts to accelerate adoption of MEMS technology
within the gas turbine engine community. It is
important to understand that past successes by no
means guarantee future success; however, the
specific circumstances surrounding the successful
transition of technology in the past must be
understood to draw the most appropriate lessons
for MEMS technology transition.
Cautionary notes notwithstanding, there are
certain "lessons from histor/' documented by the
Federal Laboratory Consortium, the General
Accounting Office, and a recently produced history
of DARPA that are instructive.19
The first lesson to be learned is that
technology transition from laboratory to field
requires the establishment of an effective
collaboration among the research and
development (R&D) community, the user
community, and the industrial base that will
produce the fruits of R&D in meaningful quantities.
Effective collaboration requires a common
vocabulary, an appreciation for the similar and
different imperatives that drive institutions, and
products that are appropriate to the needs or
requirements of the consumer. In the past, DoD
focused on the supremacy of combat
performance. Today, however, DoD must make
conscious tradeoffs between combat performance
on the one hand and the total cost of ownership on
the other. Recent decisions by the Secretary of
Defense reported in the Defense Reform Initiative
(November 1997)20 and subsequent Defense
Reform Initiative Decisions (DRIDs) elevate the
importance of total cost of ownership by making
system cost an independent variable in the
weapons acquisition process.
To reduce total ownership costs, the
government is prepared to enter into a much wider
variety of partnerships with the industrial base.
The goal of acquisition reform is to move away
from low bid to best value procurements. This will
result in the lowest total cost of ownership over
complete system life cycles. Initial acquisition
costs must be balanced against reliability,
maintainability, usability, sustainability, and
personnel requirements (numbers, skill level, etc.).
MEMS technology will transition far more quickly
from laboratory to the field if engine developers
take full advantage of expanded acquisition
vehicles that promote collaboration throughout the
development of the next family of systems.
The second lesson learned is that technology
transition occurs best in balanced programs. The
MEMS R&D community is engaged in the
development of a broad range of technologies
addressing high-temperature materials, packaging
materials, sensors, recording devices, and data
transmission. The broad technology development
efforts within the MEMS community are intended
to ensure that there exists a balanced set of
opportunities and solutions that can be applied to
the full range of technical needs within the gas
turbine engine development process.
The third lesson is that system developers
must engage developers of subsystems and of
test and evaluation technology, as well as end
users, in a continuous dialog that refines generic
needs and requirements to very specific, focused
problems and solutions based on cause and effect
relationships. Good engineering solutions truly do
depend on good science. But good science also
depends on a clear understanding of the
engineering challenges to be solved and the gaps
in our understanding of fundamental principles.
The need to take full advantage of advances in
information processing and communication
technology to disseminate problems and solutions
as widely as possible has never been greater.
We have also learned that successful
technology transitions from laboratory to the field
have occurred when the participants in the
transition process paid due care to the broader
environment in which their efforts took place. The
development and implementation of realistic
technology roadmaps was essential to the
transition of technologies ranging from
semiconductor devices to the submarine launched
ballistic missile (technologies in which DARPA
played a key role).
Realism in this context refers to a
dispassionate understanding not only of the
process of scientific discovery and its reduction to
engineering practice, but forthright and frank
assessment of resource requirements and
availability to ensure successful transition. All of
the factors that affect success need to be carefully
assessed, including those that are often neglected
by scientists and engineers. The impact of politics
(macro, micro, and nanoscale), rules and
regulations (commercial, environmental,
institutional, and human behavioral), as well as the
pace of scientific discovery and engineering
practice fuel the success of technology transition.
Excessive projections of success create false
optimism and keen disappointment, which in turn
create greater barriers to transition in the future.
The promised level of performance that is never
quite attained results in dismissal of pleas for more
resources; more time; and additional opportunities
for research, development, and testing.
Technology roadmaps for MEMS technology
transition require much better understanding of the
precise location and path of MEMS development
in absolute and relative terms. The MEMS R&D
community must develop far better understanding
of the range of MEMS and non-MEMS solutions to
problems confronting the developers of new
turbine engines. By working in consort with the
engine development community, MEMS
developers and producers can focus on those
areas of technology where MEMS will have a
comparative advantage and convey that
advantage to the engine developers and
operators. Engine developers also have an
obligation to suspend their disbelief of MEMS
devices and technology and define technical
challenges in terms that present a fair, realistic,
and reasoned set of challenges to MEMS and
alternative technologies so that the best
technology can be developed and deployed in the
future.
As part of the test of realism, MEMS
developers, as well as the engine development
community, must sharpen their focus on those
environmental factors that inhibit the development
and transition of new gas turbine engine
technology. Paths of least political, economic,
technical, and budgetary resistance must be
identified and followed. Rigorous use of the
scientific method—reliance on past experimental
success and the careful development and testing
of new theories—offers exceptional opportunities
to accelerate transition of MEMS technology from
the laboratory to the field. But MEMS developers
need to do their part by mining the literature of the
field and contributing to its further growth and
development. The extraction and contribution of
new knowledge to the Defense Technical
Information Center's archive is no longer a
luxury—it is an absolute requirement both of
contract and of science. Similarly, exploitation of
existing government technology transfer
opportunities through the use of Cooperative
Research and Development Agreements
(CRADAs), other Cooperative Agreements,
partnering, and exploitation of new contractual
vehicles should accelerate the dissemination and
incorporation of MEMS technology by engine
developers, where such technology is appropriate.
Another facet of realism is the recognition on
the part of MEMS developers, as well as the
engine community, that the resources provided by
the government with which they are expected to
perform are likely to shrink in real terms over the
foreseeable future. Available dollars to support
developmental testing will remain flat or decline.
The number and diversity of test facilities and
environments will remain constant or shrink. The
requirement for accurate, precise, and complete
collection of data during experiments has never
been greater and is likely to grow as the use of
constructive simulations in conjunction with
laboratory testing expands. The need to develop
new test and evaluation techniques for MEMS
devices and new instruments incorporating MEMS
devices, as well as using MEMS to support test
and evaluation of gas turbine engines, must be
fulfilled in an environment constrained by budgets,
facilities, people, and time.
Finally, we have learned that technology
moves from laboratory to field when researchers
produce what in the world of software is termed
"the killer app"—the one application everyone
wants to have to be successful. While there are
many possible uses for MEMS devices in the
design, development, test, manufacture, and
operation of future gas turbine engines, no one
has identified the one application of MEMS
technology that if successful would radically alter
the path of engine development. Find a MEMS
application that reduces the longest "poles" in the
development process "tent" to little more than tent
"pegs" and MEMS technology transition from the
laboratory to the field will follow in short order.
Making MEMS instrumentation technology
worthwhile for insertion by the engine
development community into the R&D process,
the test and evaluation process, and ultimately the
certification and licensing process will happen
quickly if a small number of widely used devices
with large economic or performance impact can be
developed and deployed first within the R&D
community. These types of successes will help to
clear most barriers to insertion of MEMS into
turbine engines and other systems.
The insertion of MEMS into engine systems
shows promise for great economic and
performance rewards. MEMS technology can be
used innovatively to solve a number of key
problems currently facing in the engine
development community. Although there are
significant technical and nontechnical barriers to
the transition process, communication and
cooperation between academia, industry, and
government can ensure the quickest and most
cost-effective path to MEMS technology insertion.
Acknowledgments
The authors would like to thank Dr. Al Pisano,
Mr. Lew Schmidt, and the Propulsion
Instrumentation Working Group for valuable
technical discussions. This work is funded as a
part of a larger study by the Defense Advanced
Research Projects Agency.
1
A. Pisano, Defense Advanced Research Projects
Agency/Electronics Technology Office, "MEMS
2003," presented at DARPATECH '97, Kansas
City, MO, 1997.
2
USAF Scientific Advisory Board, New World
Vistas: Air and Space Power for the 21st Century
—Aircraft & Propulsion Volume, R.G. Bradley,
1995.
3
"The Market for Turbofan, Turbojet and Ducted-
Fan Aviation Engines, 1997-2006" in Gas Turbine
Forecast, Forecast International, October 1997.
4
L. Schmidt, private communication.
5
T. Viel, GE Aircraft Engines, "Large Engines &
PIWG," presented at the NAWCAD/IDA Workshop
on Potential Applications of MEMS to Gas Turbine
Engines, held at the Institute for Defense
Analyses, Alexandria, VA, March 19-20,1997.
6
T. Viel, GE Aircraft Engines, "Large Engines & held at the Institute for Defense Analyses,
PIWG," presented at the NAWCAD/IDA Workshop Alexandria, VA, March 19-20,1997.
on Potential Applications of MEMS to Gas Turbine 15
M. Migitaka, Toyota Technological Institute,
Engines, held at the Institute for Defense presented at the IEEE Conference on High-
Analyses, Alexandria, VA, March 19-20,1997. Temperature Materials, Devices and Sensors, San
7
M. Mehregany, Case Western Reserve Diego, CA, February 22-27,1998.
University, "Microelectromechanical Systems," 16
M.N. Yoder, "Wide Bandgap Semiconductor
presented at the NAWCAD/IDA Workshop on Materials and Devices," IEEE Trans, on Electron
Potential Applications of MEMS to Gas Turbine Devices, Vol. 43, No. 10,1996, p. 1633.
Engines, held at the Institute for Defense 17
Analyses, Alexandria, VA, March 19-20,1997. N. Maluf, Lucas NovaSensor, "MEMS
8
Technologies for Extreme Environments,"
W. Ng, et al., Virginia Technical University, presented at the Ohio Aerospace Institute
"MEMS-based Remote Sensing and Actuation in Propulsion Instrumentation Working Group Micro
Jet Engines: Issues and Opportunities," presented Device Applications Workshop, Cocoa Beach, FL,
at the NAWCAD/IDA Workshop on Potential January 28-29, 1998.
Applications of MEMS to Gas Turbine Engines, 18
held at the Institute for Defense Analyses, M. Miller, Phase IV Engineering, "Applications of
Alexandria, VA, March 19-20,1997. Transponder Technology to MEMS Sensors,"
9
presented at the NAWCAD/IDA Workshop on
L. Schmidt, private communication. Potential Applications of MEMS to Gas Turbine
10
L Burwell, AlliedSignal Aerospace, "Challenges Engines, held at the Institute for Defense
in Applying MEMS to Gas Turbine Engines," Analyses, Alexandria, VA, March 19-20,1997.
presented at the NAWCAD/IDA Workshop on 19
Institute for Defense Analyses, DARPA
Potential Applications of MEMS to Gas Turbine Technical Accomplishments: An Historical Review
Engines, held at the Institute for Defense of Selected DARPA Projects. Volume 1, IDA
Analyses, Alexandria, VA, March 19-20,1997. Paper P-2192, VOL 1, S.J. Deitchman, et al.,
11
S. Roy, et al., Case Western Reserve University, 1989.
"Detection And Measurement Of Ice Thickness 20
Department of Defense, Defense Reform
Using Microprocessor-Controlled Resonant Initiative Report, W.S. Cohen, November 1997.
Transducers," Proceedings of the Conf. Smart
Struc. and MEMS, SPIE Symp. on Smart Struc.
and Mat., San Diego, CA (Mar. 1998).
12
R. Clark, Pratt & Whitney, "Potential Gas
Turbine Engine Applications of
MicroElectricalMechanical Systems," presented at
the NAWCAD/IDA Workshop on Potential
Applications of MEMS to Gas Turbine Engines,
held at the Institute for Defense Analyses,
Alexandria, VA, March 19-20,1997.
13
W. Ng, et al., Virginia Technical University,
"MEMS-based Remote Sensing and Actuation in
Jet Engines: Issues and Opportunities," presented
at the NAWCAD/IDA Workshop on Potential
Applications of MEMS to Gas Turbine Engines,
held at the Institute for Defense Analyses,
Alexandria, VA, March 19-20,1997.
14
R. Clark, Pratt & Whitney, "Potential Gas
Turbine Engine Applications of
MicroElectricalMechanical Systems," presented at
the NAWCAD/IDA Workshop on Potential
Applications of MEMS to Gas Turbine Engines,
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1. AGENCY USE ONLY (Leave blank) 2. REPORT DATE REPORT TYPE AND DATES COVERED
January 1999 Final—January 1998 - June 1998
l. TITLE AND SUBTITLE 5. FUNDING NUMBERS
MEMS in Turbine Engines DASW01 94 C 0054
ARPA Assignment A-205

i. AUTHOR(S)
A. A. Seraphin, R. A. Singer, F. R. Frank, K. Carson

'. PERFORMING ORGANIZATION NAME(S) AND ADDRESS(ES) PERFORMING ORGANIZATION

Institute for Defense Analyses REPORT NUMBER
1801 N. Beauregard St. IDA Document D-2266
Alexandria, VA 22311-1772

I. SPONSORING/MONITORING AGENCY NAME(S) AND ADDRESS(ES) 10. SPONSORING/MONITORING

Defense Advanced Research Projects Agency/ETO AGENCY REPORT NUMBER
3701 North Fairfax Drive
Arlington, VA 22203-1714

11. SUPPLEMENTARY NOTES

12a. DISTRIBUTION/AVAILABILITY STATEMENT 12b. DISTRIBUTION CODE

Approved for public release; distribution unlimited.

13. ABSTRACT (Maximum 180 words)

There are many promising insertion opportunities for micro-electromechanical systems (MEMS) in turbine engines.
Applications for novel control systems include sensors, actuators, and communications systems in networks.
Significant technical barriers, including hazardous environments, packaging, and power, may limit the utility of
MEMS in engines. Innovative technology transition strategies that rationalize both technical and nontechnical
barriers to technology insertion must be developed to bring about MEMS usage by the engine development
community.

14. SUBJECT TERMS 15. NUMBER OF PAGES

actuators, MEMS, sensors, smart structures, technology transition, turbine engine 40
16. PRICE CODE

17. SECURITY CLASSIFICATION 18. SECURITY CLASSIFICATION 19. SECURITY CLASSIFICATION 20. LIMITATION OF ABSTRACT
OF REPORT OF THIS PAGE OF ABSTRACT
UNCLASSIFIED UNCLASSIFIED UNCLASSIFIED SAR

NSN 7540-01-280-5500 Standard Form 298 (Rev. 2-89)

Prescribed by ANSI Std. Z39-18
298-102