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TEM-Sci Mat
TEM-Sci Mat
Electrons at 200kV
Wavelength Resolution
(nm) (nm)
0.00251 ~0.2
TEM lens system
Application of magnetic
Lenses: Transmission
Electron Microscope
(Ruska and Knoll 1931)
1945 - 1nm resolution
Basis of the transmission electron microscopy
h Attention
λ=
m0 v relativistic
1 h electrons!
eV = m 0 v 2 λ=
2 1
eV 2
v2 2m0 eV 1 +
2
m0 = m 1 − 2 2m0 c
c
λ Wavelength (nm)
rth = 0.61
β Green light Electrons at 200kV
~550 0.00251
β= semi-collection angle of magnifying lens
λ= electron wavelength
The resolution of the transmission electron
microscope is strongly reduced by lens aberration
(mainly spherical aberration Cs )
3 1
r = 0.67λ C 4
s
4 Best attained resolution ~0.07 nm
Nature (2006)
Emitters
Emitter
Wehnelt
J =
Anode
4 ic
x β =
d 02πΩ
Schottky and Field emission guns
++
B
lens with focal length f but with a rotation θ
1 η +∞
= ∫ B 2 ( x )dx
f 8V −∞
η +∞
θ = ∫ B ( x ) dx
8V −∞
2 = − eB r ϕ& + mr ϕ& 2
Newton’s law 1) m &
r& = Fr + mr ϕ& z
2)
d
(mr 2ϕ& ) = rFϕ =
d e 2
r Bz
dt dt 2
3) m&z& = Fz = eB r r ϕ&
e 2
from 2): mr 2ϕ& = r Bz + C with C=0 for per trajectories
2 in meridian planes
e
ϕ& = Bz
2m 2
e e e2 2
from 1): m &r& = − eB z r B z + mr Bz = − Bz r
2m 2m 4m
Br is small for paraxial trajectories, eq. 3) gives vz=const,
while the coordinate r oscillates with frequency ω=√(1+k2)
x = z/a k =
2 eB 02 a 2 d2y
=−
k2
y
y = r/a 8 m 0U * dx 2
(1 + x )
2 2
Aberrations
Defocus
δ f = fα
Spherical aberration
δ s = C sα 3
Scherzer: in a lens system with
radial symmetry the spherical
aberration can never be completely
corrected
Chromatic aberration
∆E ∆I
δ C = CC +2
E I
Astigmatism
different gradients of the field:
different focalization in the two directions
It can be corrected
GaAs bulk
http://www.gel.usherbrooke.ca/casino/download2.html
Trajectories of 100KeV electron in a thin
specimen
backscattering
forward
scattering
Diffraction occurs when the Ewald’s sphere cuts a point of the reciprocal lattice
R 1d λL
= d =
L 1λ R
The Specimen is completely immersed in its field so that pre-field and post field can
be distinguished
f
Imaging mode
Objective
aperture
0.5 m
Diffraction contrast
Suppose only two beams are on
Perfect imaging would require the interference of all difffraction
Imaging channels. Contrast may however be more important.
Bright Field Image Dark Field Image Lattice Fringe Image High Resolution Image
Amplitude contrast - 1
Amplitude contrast - 2
Phase contrast in electron microscopy
∑Ψ
2
φi = g
BEAMS
φi
~
g a vector of the reciprocal lattice Φi
Ψg s the component beam scattered by a vector g
But notice that Ψ g is the Fourier component of the exit wavefunction
∑Ψ
2
g =1
BEAMS
NOTE: the diffraction pattern is just the Fourier transform of the exit wave
Effect of the sample potential V
Phase shift φ t = e iθ
φt ≈ eiσV ≈ 1 + iσV
Amplitude variation φ t = e − µ t
r 2
K
r r max r r r r
− iχ ( k ) ik ( rprobe − r )
r
P ( rprobe − r ,0, ∆ ) = ∫
2 2
e e d k
r
K =0
It is the sum of the waves at different angles, each with its own phase factor.
If there is no aberration the larger is the convergence, the smaller is the probe.
The presence of aberrations limits the maximum value of the convergence angle up to 14 mrad
The
diffracting
area is <1 nm
in diameter
Chemical analysis: energy dispersive spectrometry
SEM TEM
The electron beam can be focused to obtain a spot less than 500 nm
EELS
Used to collect spectra and images
Usable in both
scanning and tem
mode
Powders
TEM DEVELOPMENTS
• An additional class of these instruments is the electron cryomicroscope,
which includes a specimen stage capable of maintaining the specimen at
liquid nitrogen or liquid helium temperatures. This allows imaging specimens
prepared in vitreous ice, the preferred preparation technique for imaging
individual molecules or macromolecular assemblies.
• In analytical TEMs the elemental composition of the specimen can be
determined by analysing its X-ray spectrum or the energy-loss spectrum of
the transmitted electrons.
• Modern research TEMs may include aberration correctors, to reduce the
amount of distortion in the image, allowing information on features on the
scale of 0.1 nm to be obtained (resolutions down to 0.08 nm have been
demonstrated, so far). Monochromators may also be used which reduce the
energy spread of the incident electron beam to less than 0.15 eV.
Other Electron Microscopes
TEM : transmission
electron microscope
STEM: scanning
transmission electron
microscope
SEM
1
2 3
z z z
g (z) = 0 .6 + 6 .21 − 12 .4 + 5 .69
R R R R
Accelerating voltage
Higher voltage -> smaller probe
But larger generation pear
WD
D
La divergenza del fascio provoca un
allargamento del suo diametro sopra e
sotto il punto di fuoco ottimale. In prima
approssimazione, a una distanza D/2 dal
punto di fuoco il diametro del fascio
aumenta di ∆r ≈αD/2.
detector
by reciprocity it is almost
equivalent to light : most
of time intuitive
interpretation
channeling BSE
BSDE Backscattering electron diffraction