Como o Novo Analisador

de Semicondutores
B1500A pode ajudá-lo em
suas Pesquisas de
Nanotecnologia

Mauricio Kobayashi
Eng. Vendas - EMG

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 1

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 2

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Customer Presentation – April 2005
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Customer Presentation – April 2005

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Customer Presentation – April 2005
B1500A: Semiconductor Device Analyzer Page 5

Customer Presentation – April 2005

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 com sub. ferro-magnéticas
e menor efeito colateral
Customer Presentation – April 2005
B1500A: Semiconductor Device Analyzer Page 7

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 8

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 Parametric Test Measures 4 Basic Device
Types:

Transistors Diodes Resistors Capacitors

All measurements are either current versus voltage (I-V)

or capacitance versus voltage (C-V) measurements.

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 9

What Does Semiconductor Parametric Test

Involve?

SMU 1
Id

SMU2 SMU 4
SMU 3

Semiconductor parametric test involves the measurement of

voltage and current very accurately and very quickly. It also
involves the measurement of capacitance.
Customer Presentation – April 2005
B1500A: Semiconductor Device Analyzer Page 10

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 Parametric Test is Done Primarily on Wafers
Functional testers test product die

Parametric testers sometimes test

special structures in the scribe lane

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 11

What is a Source/Monitor Unit (SMU)? -

Simplified Equivalent SMU Circuit:

A
V

Consider how many rack & stack instruments you would

have to combine together to get equivalent functionality!

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 12

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 Why Do We use Triaxial Cables?
àThey are required for Measurements < 1nA
Shield (Ground)
Shield (Ground)
Driven Guard
Force/Sense Force/Sense

MOSFET Subthreshold MOSFET Subthreshold

mA mA

µA µA

Id nA Id nA
Leakage
pA pA

fA fA

Vg Coax Cables Vg Triax Cables

Triaxial cables eliminate cable leakage and charging currents.

Customer Presentation – April 2005
B1500A: Semiconductor Device Analyzer Page 13

Low Noise Test Environment

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 14

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 CNT FET

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 15

CNT - Aplicações

FETs
ULSI- cabos
sensores
Células de Combustíveis
Colete a prova de balas
Vidros blindados

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 16

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 Two Drain IV curve showing CNC FET behavior
and resistive behavior

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 17

Single Electron Transistor measurement

Com tratamento químico especial,
CNT FETs exibem comportamento de
SET.
exigência: C = 0,2 aF

Aplicação: Desenv. novos sensores

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 18

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 New B1500A Semiconductor Device Analyzer
Solves these Measurement Challenges!
Revolutionary new Modular mainframe
‘EasyEXPERT’ supports both CV &
software environment IV measurement

PC-Based
MS Windows SMU CMU Unify Unit
provides effortless
XP Pro OS
IV-CV measurement

Comprehensive
application Touch-screen
library w/optional USB
keyboard & mouse
Customer Presentation – April 2005
B1500A: Semiconductor Device Analyzer Page 19

Semiconductor Device Analyzer: EasyEXPERT

Revolutionary Testing Approach

Technology GaAs CMOS WLR
Nano-
tech
Classifications

BP MOS
Resistor Capacitor
Device Type TR FET

Device Analyzer
Device
Vth Idon Idoff gm Igleak Rg
Parameters
Top down approach
V/I on Vg Vd Vs Vsub
Ig Id Is Isub
terminals
Parameter Analyzer
SMU1 SMU2 SMU3 SMU4 CMU

Measurement Mode Mode Mode Mode Mode

Resources V V V V AC V
I I I I range

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 20

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 Parametric test as easy as 1-2-3

Agilent's new ‘EasyEXPERT' software makes

every user a parametric test expert
Customer Presentation – April 2005
B1500A: Semiconductor Device Analyzer Page 21

Parametric test as easy as 1-2-3

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 22

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 Parametric test as easy as 1-2-3

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 23

New Users Can Become Immediately Productive

Input relevant device parameters

Easy-to-use
categorized
library

Save “My
Favorite”
setup

Data history

Convenient
graphical
1 Page Setup = No need to fumble reference
Customer Presentation – April 2005
B1500A: Semiconductor Device Analyzer Page 24

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 Modular B1500A Design Lowers Cost-of-Test
Ten Module Slots B1520A CMU: 1 KHz to 5 MHz CV capability

B1511A MPSMU: 100 mA/100 V force capability,

10 fA/0.5 µV measurement resolution (1 slot)

B1517A HRSMU: 100 mA/100 V force capability,

1 fA/0.5 µV measurement resolution (1 slot)
B1510A HPSMU: 1 A/200 V force capability,
GNDU: 4.2 A 10 fA/2 µV measurement resolution (2 slots)

N1301A-100/102: SMU CMU unify unit &

Purchase cable assembly
exactly what
you want!
E5288A ASU: .1 fA/0.5 µV measurement resolution
with support for IV/CV switching

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 25

Current IV-CV Measurement Issues & Challenges

for Positioner-Based Wafer Probing
2 Triaxial Output:
Sense, Force
• Confusing Cabling
• What is Capacitance Compensation?
SMU
• Hard To Understand Connection Scheme
4156 - SMU: Sense/Force Which One To Use?
- CMU: How To Tie 4 Terminals?
- What to do about CMU Return Path?

4 BNC Outputs:
Hc, Hp, Lp, Lc

C Meter
Agilent4284 •Measurement Failure
•Poor Repeatability
•Inaccurate Measurement
Customer Presentation – April 2005
B1500A: Semiconductor Device Analyzer Page 26

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 SCUU Solves the IV-CV Measurement Dilemma

MFCMU

MPSMUs

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 27

Comparison Table (B1500A vs. 415xC vs. 4157B)

B1500A 4155C/56C (w/o I/CV Lite) 4157B
1 - 10 Medium Power SMUs 4 - 6 Medium Power SMUs 1 - 8 Medium Power SMUs
Configuration 1- 4 High-Power SMUs 1 High-Power SMUs 1- 4 High-Power SMUs
1- 10 High-Resolution SMUs 4 High-Resolution SMUs (4156) 1- 8 High-Resolution SMUs
I (w/o ASU): 1 fA I: 1 fA I (w/o ASU): 1 fA
Measurement
I (w/ ASU): 0.1 fA I (w/ ASU): 0.1 fA
Resolution
V: 0.5 µV (MPSMU & HRSMU) V: 0.2 µ V (VM) V: 0.5 µV (MPSMU & HRSMU)
Capacitance 1 slot module External 4284A
Max. Frequency 5 MHz NA 1 MHz
IV/CV Switch Yes Need Matrix Yes
Automated C comp Yes No No
QSCV Yes (Phase 2) Yes No
Meas. Library Over 100 Sample program or 4 default set Sample setup by I/CV
Remote control FLEX, VXI PnP 4145 syntax, FLEX, VXI PnP, SCPI NA (Flex and VXI PnP as E5270B)

IC-CAP Yes (Next version of IC-CAP) Yes NA (Yes as E5270B)

SWM control B220x (Phase 2) E5250A B220x, E5250A, & K707

Prober support Phase 2 or later No Yes
Pulse generator TBD Yes Yes
415xC : 5U
SPACE 7U 5U
415xC with 41501B : 9U

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 28

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 Over 100 Verified Application Tests at Your
Fingertips

The B1500A supplies application

tests that cover a broad range of
technologies and device types,
including MOSFETs, Bipolar
transistors, power transistors,
capacitors, resistors, and
nanotechnology devices.

Customer Presentation – April 2005

B1500A: Semiconductor Device Analyzer Page 29

Perguntas & Respostas

Para contatar a Agilent Technologies:

E-mail: tmobrasil@agilent.com

Tel.: (11) 4197-3600

Site: www.agilent.com/find/brasil

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