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IOP PUBLISHING MEASUREMENT SCIENCE AND TECHNOLOGY
Meas. Sci. Technol. 21 (2010) 054007 (10pp) doi:10.1088/0957-0233/21/5/054007

Development of a real-time closed-loop

micro-/nano-positioning system
embedded with a capacitive sensor
Fang-Jung Shiou1,3 , Chao-Jung Chen2 , Chia-Jui Chiang1 , Ke-Jhen Liou1 ,
Shu-Chung Liao1 and Huay-Chung Liou2
1
Department of Mechanical Engineering, National Taiwan University of Science and Technology
(TAIWAN TECH), Taipei 106, Taiwan, Republic of China
2
Center for Measurement Standards, Industrial Technology Research Institute (ITRI), Hsinchu 300,
Taiwan, Republic of China
E-mail: shiou@mail.ntust.edu.tw

Received 27 October 2009, in final form 22 February 2010

Published 23 March 2010
Online at stacks.iop.org/MST/21/054007

Abstract
The hysteresis and nonlinearity of the PZT is an actual problem in the piezo-driven
micro-/nano-positioning stage, especially for the open-loop positioning stage. The study
presents the development of an NI cRIO9074-based real-time closed-loop
micro-/nano-positioning system, to overcome the problem of the hysteresis and nonlinearity
of a PZT and to increase the positioning speed of the positioning stage. The developed system
mainly consists of a piezoelectric actuator, a bridge-type hinge mechanism for displacement
magnification, a micro-/nano-positioning stage body, a capacitive sensor system, an NI
cRIO9074 real-time control unit with FPGA chip and a PC. After executing the optimization
analysis of the displacement, stress and the frequency, using the ANSYS software, the
dimensions of the stage body have been designed and determined. A set of software written
with the LabView programming language was developed to construct the real-time PID
closed-loop control of the developed positioning system. Based on the test results, the
designed closed-loop micro-/nano-positioning system was capable of precision positioning
within the travel of 119.08 μm with maximum stage tilting angle at 25 μrad. The steady-state
positioning deviation of the stage is about ±2 nm in the step-positioning test. In the transient
slope-tracing test at a tracing speed of 5 μm s−1 , an error of about ±100 nm is observed.
Keywords: micro-/nano-positioning stage, ANSYS software, bridge-type hinge displacement
magnification mechanism, capacitive sensor system, PID control, FPGA chip
(Some figures in this article are in colour only in the electronic version)

1. Introduction (1) direct-drive piezo actuators, (2) piezo-driven flexure and

The micro-/nano-positioning stage is one of the key
components used for semiconductor technology,
biotechnology, micro/nanofabrication process, microscopy
instruments, metrology instruments, etc. Most of the
micro-/nano-positioning stages are driven by piezoelectric
transducers (PZT). Types of micro-/nano-positioning stages
using the PZT can basically be divided into three categories:
3 Author to whom any correspondence should be addressed.
(3) ultrasonic piezomotors [1]. The travel of most direct-drive
piezo actuators is, in general, within tens of microns with
sub-nanometer resolution. The travel of a stage has been
magnified via the design of a series of two lever flexures [2].
The Scott–Russell mechanism and the leaf spring flexure were
applied in [3] to increase the travel of a piezo-driven stage and
to eliminate the angular errors and lateral movement error of
the stage during positioning. A novel open-loop long-travel
piezoelectric-driven linear nano-positioning stage using

0957-0233/10/054007+10$30.00 1 © 2010 IOP Publishing Ltd Printed in the UK & the USA
Meas. Sci. Technol. 21 (2010) 054007
Figure 1. Exploded view of the designed micro-/nano-positioning stage.
a toggle amplification mechanism has been presented to
eliminate the lateral offset error of the level mechanism in [4].
A novel parallel-kinematics mechanisms for integrated, multi-
axis nano-positioning has been developed in [5]. The flexure
hinges were used in most of the mentioned piezo-driven stages.
Due to the non-uniformity of the fabricated flexure hinges,
the tilting angles of a micro-/nano-positioning stage are still a
problem to be solved. Steel balls have been inserted
between the PZT and the lever, and between the lever and the
stage body, to reduce the possible tilting angles of the stage
body in [6].
Capacitive sensors, inductive sensors and laser
interferometer systems are commonly used as feedback
sensors for the closed-loop control of some micro-/nano-
positioning stages. A miniature fiber optic sensor based on
interferometry, with nanometer resolution, is proposed in [7].
A laser diffraction grating interferometer has been applied to
an intelligent nano-positioning closed-control system driven
by an ultrasonic motor [8]. The fiber optic sensor based
on interferometry has advantages including immunity to
electromagnetic interference and long-distance measurement
capability, compared with capacitive or inductive sensors.
However, the positioning speed was limited to about 100
nm s−1 , due to the complex signal processing [6, 9]. As a
result, how to increase the positioning speed of a micro-/nano-
positioning stage is still a problem to be solved. With the
development of integrated circuit technology, the performance
and capacity of the field-programmable gate array (FPGA) has
become faster and more affordable. With the LabView FPGA
Module, people can create custom measurement and control
hardware without low-level hardware description languages or
board-level design [10]. This custom hardware can be used
for unique timing and triggering routines and ultrahigh-speed
control.
The aim of this research is to design a new real-
time closed-loop micro-/nano-positioning stage with straight
motion by using a bridge-type hinge mechanism for
displacement magnification, and to increase the positioning
speed by using a real-time control unit and integrating a
capacitive sensor with the stage as the feedback sensor. The
detailed design and manufacture of a real-time closed-loop
micro-/nano-positioning stage embedded with a capacitive
2
F-J Shiou et al
sensor are introduced in section 2. Model-based analysis and
PID control development for the moving stage are presented in
section 3. The real-time control loop of the developed system
using the NI cRIO9074 FPGA based PID control is presented
in section 4. Experimental results including step-positioning,
slope-tracing and tilting angle measurement are illustrated in
section 5.
2. Design and manufacture of a new
micro-/nano-positioning stage
Figure 1 shows an exploded illustration of newly designed
micro-/nano-positioning stage. The developed closed-loop
positioning system mainly consists of a piezoelectric actuator,
a bridge-type hinge displacement amplification mechanism,
a micro-/nano-positioning stage body constrained by four
folded leaf springs, a capacitive sensor system, an NI
cRIO9074 real-time control unit embedded with a FPGA chip
and a PC. The open-loop travel of the PZT used, a product of
Physik Instrumente model P-888.90 [1], is 38 μm ± 10% with
an input voltage of 100 V, and push force capacity 3800 N.
The movement of the designed micro-/nano-positioning stage
body is constrained by four sets of flexible double compound
leaf springs. A capacitive sensor developed by PI, model
D-510.100, is integrated with the stage as a position feedback
sensor, so that the closed-loop control is possible. The nominal
measuring range of the capacitive sensor is about 100 μm. The
resolution of the capacitive sensor is 2 nm using a 16 bit NI
9215 A/D interface card.
Two sets of bridge-type hinge displacement amplification
mechanism are applied to the system to enlarge the travel
of the designed stage [11], as illustrated in figures 2 and 3.
By assuming symmetric elongation of the PZT in the axial
direction, L  L and y  h, and negligible change of PZT
width in the lateral direction, the displacement magnification
ratio of the bridge-type hinge displacement mechanism is
derived based on the geometry in figure 2 as
y 1
fPZT = = (1)
L tan θ
where y is the amplified displacement of the bridge
mechanism; L is the stretched length of the PZT; θ is the
Meas. Sci. Technol. 21 (2010) 054007 F-J Shiou et al

h
θ
L/2
y

(a)

ΔL/2 ΔL/2

Figure 2. Schematic illustration of a bridge displacement

amplification mechanism.

(b)

Figure 3. Modeling of the stage body with four sets of

double-compound leaf springs using the ANSYS software.

angle of the bridge arm with respect to the horizontal line. As

the maximum displacement required for the stage is about
100 μm, the angle θ is chosen as 4◦ so as to achieve a
magnification ratio of about 14. As a result, the maximum
stretch of the PZT is kept well below 10 μm to avoid yielding
of the PZT.
Figure 3 shows the model of the stage body with four
sets of double-compound leaf springs [12] constructed with
the ANSYS software. The ANSYS structural solid element (c)
SOLID45 with eight nodes was selected as the meshing
element type to construct the model. The selected material Figure 4. Simulation results of the designed stage: (a) stress
distribution (62.6 × 106 N m−2 ), (b) displacement (108 μm) and
of the stage was aluminum alloy T6-6061. Young’s modulus
(c) natural frequency (220.68 Hz).
of 71 × 109 N m−2 , a density of 2700 kg m−3 and Poisson’s
ratio of 0.33 have been set as the material properties. After
the model had been constructed and the parameters had been 62.6 × 106 N m−2 , which was much smaller than the
set, the meshing of the stage was carried out. The translation yielding stress of 270 × 107 N m−2 of the aluminum alloy
and rotation of the four holes, used for mounting, have been T6-6061 used, as shown in figure 4(a). The simulated
set fixed as boundary conditions. travel of the designed stage was 108 μm, as shown in
Table 1 shows the geometric dimensions of the main figure 4(b). The natural frequency was 220.68 Hz, as shown
variables (the width of the leaf spring, length of the leaf in figure 4(c). The geometrical dimensions of the leaf springs
spring, hing thickness, hinge radius, as shown in figure 3) and the hinges having been determined, the stage body was
of the stage body after executing the iterative optimization fabricated by the wire electrical discharge machining (EDM)
process. The maximum induced stress of the stage was process. Based on the design configuration of the positioning

3
Meas. Sci. Technol. 21 (2010) 054007 F-J Shiou et al

Figure 5. Photo of the fabricated and integrated micro-/nano-positioning stage mounted on an optical table.

Stage displacement at different voltage

120

100
Displacement(μm)

80

60

40
Capacitive sensor
20 Laser

0
10 20 30 40 50 60 70 80 90 100
Voltage (V)
0.04

0.02
Deviation (μm)

-0.02

-0.04

-0.06
10 20 30 40 50 60 70 80 90 100
Voltage (V)

Figure 6. Stage displacement at different voltages.

system (figure 1), the piezoelectric actuator, and the capacitive Table 1. Geometric dimensions of the leaf springs after executing
sensor system were integrated with the fabricated stage body the optimization process.
mounted on an optical table to perform the tests, as shown in Parameters Optimized value
figure 5. Figure 6 shows the displacement of the stage at
different voltages. Accuracy of the measurement with the Width of the leaf spring W 0.8 mm
capacitive sensor is verified with a SIOS laser interferometer Length of the leaf spring L 24 mm
Hinge thickness t 0.8 mm
system. Hinge radius R 2.0 mm

3. Model-based analysis and control development

relations describing piezoelectric continua [13], a simple
In this section, a model-based approach is used for control model capturing the dynamics of the moving stage is first
analysis and design. By utilizing the linearized constitutive developed based on Newton’s second law. The model is then

4
Meas. Sci. Technol. 21 (2010) 054007
Figure 7. Schematic diagram of the moving stage.
used for PID control design and gain tuning so as to achieve
accurate and fast positioning of the moving stage. Figure 7
shows a schematic diagram of the stage with four sets of
double-compound leaf springs modeled as four ideal springs
with soft dampers. The excitation force F(t) is activated by
the voltage v(t) applied to the PZT via the bridge-type hinge
displacement mechanism shown in figure 2.
The governing equation of the moving stage can be written
as
mÿ(t) + 4C ẏ(t) + 4Kd y(t) = F (t).
Based on the hammer test  results in [14], the natural frequency

of the moving stage ωn = 4Kd m = 2πf = 2π ×220 Hz =
√
1382 rad s−1 and a small damping ratio ξ = C Kd m = 0.1
is assumed. Furthermore, based on the linearized constitutive
relations describing piezoelectric continua [13],
1 can hardly be stabilized by a PI controller only (adding one
L = FT + dv
KT
where L represents the stretched length of the PZT, FT is
the tension force on the PZT, v is the applied voltage, KT
is the stiffness of the PZT and d is the piezoelectric constant
relating stress to the applied field. For the Physik Instrument
P-888.90 [1], KT = 100 N μm−1 and d = 0.3167 μm V−1 .
By assuming negligible impedance, the applied voltage v is
always as commanded. Based on figure 2 and equation (1), the
displacement and force ratios of the bridge hinge mechanism
are described as follows:
y 1 F
= and = −2 tan θ
L tan θ FT
where the angle θ = 4◦ is considered in this paper. By
combining (2), (3) and (4), the open-loop transfer function
G(s) can thus be derived:
Y (s) Kωp2
G(s) = = 2
V (s) s + 2ξ ωn s + ωp2
 between fast tracking and less-oscillatory performance, we
where ωp = ωn2 + 2KT tan2 θ/m and the dc gain K = 1.25 is
obtained from linear interpolation of the experimental results
in figure 6. Note that as damping ratio ξ is quite small, the
open-loop poles are located very close to the imaginary axis,
which corresponds to oscillatory behavior. To achieve accurate
and fast tracking, a PID controller of the following format is
applied:
KI
C(s) = KP + + KD s
s frequencies. Secondly, suppression of measurement noise is
F-J Shiou et al
Figure 8. Block diagram of the PID control system.
where the parameter KP is the proportional gain, KI is the
integral gain and KD is the derivative gain. The closed-
loop transfer function can thus be derived based on the block
diagram in figure 8 [15]:
G(s)C(s)
T (s) =
1 + G(s)C(s)
 
Kωp2 KD s 2 + KP s + KI
= 3   .
s + KD Kωp2 + 2ξ ωn s 2 + (KP K + 1)ωp2 s + KI Kωp2
(7)
(2)
The control gains KP , KI and KD can thus be tuned based on
linear control techniques such as root-locus or pole placement.
Fast tracking (2% settling time within 1 s) and minimum
overshoot (less than 10%) are required for the positioning
system. As the two open-loop poles are located close to the
imaginary axis, based on the root-locus technique, the system
(3) pole at origin and one left-half-plane zero). On the other hand,
a PD controller alone can easily stabilize the system by adding
one left-half-plane zero but the tracking accuracy cannot be
guaranteed. Therefore, a PID controller with nonzero KP , KI
and KD gains is required to achieve both closed-loop stability
and tracking accuracy. Different sets of control gains are
evaluated by the resulting closed-loop pole locations, unit step
responses and sensitivity functions. Tradeoffs between fast
tracking and less-oscillatory performance have to be made
during the control gain tuning process. Figure 9 illustrate
the idea of tradeoffs by comparing the unit-step responses
(4) with three different sets of control gains. Aggressive gain
tuning (KP = 0.2, KI = 12, KD = 0.2) achieves fast
initial response but oscillatory behavior is observed before
settling down at the tracking position. On the other hand,
conservative gain tuning (KP = 0.3, KI = 2, KD = 0.005)
achieves smooth tracking performance but the rising time
(5) is much longer than the others. Considering the tradeoffs
choose control gains KP = 0.2, KI = 7, KD = 0.1, which
correspond to closed-loop poles (eigen modes) at −3.3017 ×
105 , −4.9959 ± 6.7071i. The closed-loop robustness to
disturbance and measurement noise is further examined with
the sensitivity function and complementary sensitivity in
figure 10 [15]. First of all, ideal steady-state tracking and
disturbance rejection are achieved as the complementary
sensitivity goes to 1 and sensitivity goes to zero at low
(6)
5
Meas. Sci. Technol. 21 (2010) 054007 F-J Shiou et al

Step responses with different control gains

1.4
Kp=0.2, KI=7, KD=0.1
Kp=0.2, KI=12, KD=0.2
Kp=0.3, KI=2, KD=0.005
1.2

Displacement (μm) 1

0.8

0.6

0.4

0.2

0
0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6 1.8 2
Time (s)

Figure 9. Closed-loop simulation with different PID control gains.

0.9

0.8

0.7

0.6
Magnitude

0.5

0.4

0.3

0.2
Sensitivity
Complementary senstivity
0.1

0
-1 0 1 2 3 4 5 6 7
10 10 10 10 10 10 10 10 10
Frequency (rad/s)

Figure 10. Sensitivity and complementary sensitivity with control gains KP = 0.2, KI = 7, KD = 0.1.

achieved as the complementary sensitivity goes to zero at high
frequencies. Moreover, the designed controller results in a
notch filter type of sensitivity function with center frequency
located around the natural frequency of the stage [15]. Hence
the closed-loop system is robust to any disturbance that comes
around the natural frequency of the stage. The PID controller
with KP = 0.2, KI = 7, KD = 0.1 is thus chosen for the
experimental implementation in section 5.
4. Real-time closed-loop control implementation
To overcome the hysteresis and nonlinearity of the PZT, about
5% of the travel [1], a closed-loop control has been applied to
the micro-/nano-positioning stage system. Figure 11 shows
the feedback loop of the stage system. A control unit connected
to a PC through a net cable, model NI cRIO-9074 embedded
with a 9074 FPGA chip, was applied to carry out the real-
time control of the positioning stage. A digital to analog

6
Meas. Sci. Technol. 21 (2010) 054007
Figure 11. Schematic illustration of the feedback loop of the
developed stage system.
conversion (D/A) interface card, model NI-9263, and an
analog to digital conversion (A/D) interface card, model NI
9215, are inserted in the control unit. The positioning stage
was driven by the PZT actuator, model P-888.9, made by
PI Co. The PZT actuator was driven by the PZT driver from
0 V to 100 V. The PZT driver is controlled by the PID controller
of the PC through a D/A interface card, model NI-9263. The
precise movement of the positioning stage is monitored by
the capacitive sensor PI D-510.100. The output of the
capacitive sensor is connected to the amplifier, model PI E-852.
The amplified signal is then connected to an interface card,
model NI 9215 A/D, with the function of analog to digital
conversion. A set of software, written with the LabView
programming language, was developed to conduct the real-
time closed-loop PID control of the positioning stage.
The proportional integral derivative (PID) control
algorithm developed in section 3 is used for the digital control
implementation with sampling rate set to 1500 Hz. The error
signal e(t) was the difference between the target position and
the measured position. The voltage u(t) input to the PZT driver
can be expressed in discrete time:

n
KD
u(t) = KP e(t) + KI T e(t) + (e(t) − e(t − 1)) (8)
T if the tracing speed is smaller than 5 μm s−1 . As a result,
t=0
where KP , KI and KD are the controller gains of the error
signal, the integral of the error signal and the first derivative
of the error signal, respectively.
5. Experimental results
To evaluate the performance of the developed closed-loop
positioning stage, experiments were carried out on the tracing
speeds, step positioning, slope tracing and the tilting angles,
7
F-J Shiou et al
Figure 12. Step test results of the PID control under controller gains
KP = 0.2, KI = 7, KD = 0.1.
Figure 13. Results of the step positioning of 10 nm.
respectively. The controller gains of the PID control are set
as KP = 0.20, KI = 7.0 and KD = 0.1, based on the gain
tuning in section 3. Fast tracking performance with slight
overshoot, which has been predicted in the simulation results
in figure 9, is observed in the experimental results in figure 12.
A slightly larger overshoot is observed in the experiment
(figure 12) than in the simulation (figure 9) due to the
nonlinearity of the system.
Different speeds for slope tracing, such as 2 μm s−1 ,
5 μm s−1 and 10 μm s−1 , have been executed in order to
determine an appropriate tracing speed. The greater the tracing
speed, the greater the positioning delay, based on the results of
the experiments [16]. There was almost no positioning delay
this tracing speed was applied to the step-positioning test, the
slope-tracing test and the tilting angle test. Figure 13 shows
the results of the step positioning of 10 nm of the developed
stage within a travel of 50 nm. A steady-state error of
about ±2 nm measured with the capacitive sensor is shown in
figure 14.
Based on the test results, the designed closed-loop
micro-/nano-positioning system was capable of performing
precision positioning within the travel of 119.4 μm [16].
Figure 15 shows the results of slope tracing of 100 μm of the
Meas. Sci. Technol. 21 (2010) 054007 F-J Shiou et al

Figure 14. Error plot of the step positioning of 10 nm.

developed stage with an enlarged view shown in the second
graph. A noticeable overshoot is observed when the stage
changes direction around 100 μm due to the inertia of the
moving stage. The controller is able to guide the moving stage
back on track within 0.5 s. An error of about ±100 nm during
the transient slope-tracing test measured with the capacitive
sensor is observed in the third graph in figure 15.
The orientation and leveling of the moving stage are
evaluated from the tilting angles of the stage measured with a
SIOS laser interferometer system with a resolution of 0.001 .
Three tilting angles of the developed stage with respect to the
x-, y- and z-axes are defined in figure 16. During this test, the
voltage applied to the PZT is swept from 0 V to 100 V with
Figure 16. Definition of tilting angles of the developed stage.
an increment of 10 V. Figure 17 shows the tilting angles of
the stage at different positions with respect to the attitude of
the stage at the origin (0 μm). The position of the stage is
represented by the displacement of the stage measured with
the capacitive sensor. As shown in figure 17, the larger the
displacement, the larger the tilting angles. The maximum
tilting angles (pitch, roll and yaw errors) were the yaw error
of about 25 μrad within a travel of about 119.08 μm. The
angular errors might result from the asymmetric fabrication
flaw of the bridge mechanism.

Slope tracing
100
Displacement (μm)

50

0
0 5 10 15 20 25 30 35 40
Time (sec)
101
Capacitive sensor
Displacement (μm)

100
Reference
99
98
97
96
19.2 19.4 19.6 19.8 20 20.2 20.4 20.6 20.8
Time (sec)
1

0.5
Deviation (μm)

-0.5

-1
0 5 10 15 20 25 30 35 40
Time (sec)

Figure 15. Result of slope tracing of 100 μm.

8
Meas. Sci. Technol. 21 (2010) 054007
10
-5
Angularerror (μrad)
-10
-15
-20
θx (Pitch)
θy (Roll)
θz (Yaw)
-25
-30
0 15.78
Figure 17. Measured tilting angles of the developed stage at different positions with respect to the orientation of the stage at the origin
(0 μm).
6. Conclusion
A prototype of the real-time closed-loop micro-/nano-
positioning stage with bridge-type hinge mechanism for
displacement magnification, integrated with a capacitive
sensor, has been newly developed. The geometric dimensions
of the leaf springs and hinges were determined by executing the
optimization analysis using the ANSYS software. Based on
the model-based analysis, simulation and experimental results,
the designed PID controller achieves fast and accurate tracking
with robustness to disturbance and measurement noise. NI
cRIO9074 FPGA-based PID control is applied for the step-
positioning, slope-tracing and tilting angle tests. In the step-
positioning test the steady-state positioning deviation of the
stage is about ±2 nm. In the transient slope-tracing test,
a travel of about 100 μm of the developed stage with a
positioning error of about ±100 nm is observed at a tracing
speed of 5 μm s−1 . In the tilting angle test, the maximum yaw
error of the stage observed was about 25 μrad within a travel of
119.08 μm. In the future, an optimal control strategy may be
applied to further improve the performance of the positioning
stage.
Acknowledgments
The authors are appreciative of the National Science Council
of the Republic of China supporting this research under grant
NSC 97-2221-E-011-050.
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Meas. Sci. Technol. 21 (2010) 054007
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