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Ontheelectricalandopticalpropertiesof CD Sfilmsthermallydeposited
Ontheelectricalandopticalpropertiesof CD Sfilmsthermallydeposited
Abstract
CdS films were prepared by a physical vacuum deposition technique on an amorphous (glass) substrate using a modified evaporation
source. The effect of the processing conditions (the film thickness, substrate temperatureand the deposition rate) wereconsidered in comparison
with the normal evaporation source. A van der Pauw four-probe arrangement was used for measuring the electrical resistivity, which varies
between 0.1 X lo4 and 8.18 X 104 R cm. It decreases with increasing film thickness, and decreasing deposition rate and substrate temperature.
This was attributed to the effect of crystallite size, the degree of preferred orientation, internal microstrain and the stoichiometry. From
spectrophotometric measuring and using an approximate formula, the optical parameters (n, k, a ) were evaluated. The values of the refractive
indices and the energy gaps were evaluated and correlated with the preparation parameters.
temperature and deposition rate increased, but decreased with Fig. 1. Optical transmission of CdS films in different preparation conditions.
increasing film thickness. Similar behavior was observed by (a) t= 1000 nm, (b) t= 1500 nm.
other workers [ 14,151. For nearly the same specification
(film thickness, deposition rate and substrate temperature) The variation of electrical properties as a function of the
of the films, the resistivity is higher in the case of the modified preparation parameter was highly correlated with structure
source than the normal one [ 141. On the other hand, the characteristics of the prepared films [ 16 1. Thus, the decrease
structural features and the morphology of the films prepared in resistivity values as the thickness increases is a result of
with the modified source were studied and published in a the increase of both the crystallite size and the degree of
separate paper [ 161. The results showed that CdS films pre- preferred orientation of the films. On the other hand, the
pared with the modified source possessed a larger crystallite increase of resistivity with the increase of the deposition rate
size with lower microstrain values relative to films prepared is due to the increase in the internal micro-strain and the
with the normal evaporation source and the same preparative decrease in both the crystallite size and the degree of preferred
conditions. This means that the increase in the electrical resis- orientation. Finally, the improvement of stoichiometry as the
tivity values mentioned above cannot be attributed neither to substrate temperature rises leads to an increase of the resis-
the effect of the crystallite size nor to the strain [ 14,161, but tivity. Thus, the dependence of resistivity is most probably
most probably is due to the better stoichiometry of the CdS the result of changes in the structure of the films.
film prepared by the modified source. The optical transmission for CdS films is shown in Fig. 1
for samples prepared at different preparation parameters. It
Table 1
can be observed that, in general, the transmission is high,
Values of the electrical resistivity of CdS tilms with different deposition
parameters which can be attributed to the improvement in perfection and
stoichiometry of the films.
Substrate Film Deposition Dark The refractive indices (n) were determined from the reflec-
temperature thickness rate resistivity tance (R) data using [ 171:
Ts t R (Xl04ncm)
(“C) (nm) (rims;‘‘’ R=[(n-l)*]l[(,+l)*] (1)
180 1000 0.8 0.40
As shown in Fig. 2, the refractive indices of the films are
200 1000 0.8 0.70
220 1000 0.8 5.50 greatly influenced by the deposition rate and substrate tem-
200 1000 1.5 8.18 perature. The refractive indices increase as the deposition rate
180 1000 2.2 5.20 increases. This is in agreement with results reported by Ash-
180 1500 0.8 0.10 our [ 181 and Gottesman and Ferguson [ 171. On the other
180 1500 2.2 1.00
hand, the indices decrease as the substrate temperature
200 1500 2.2 3.00
increases.
A. Ashour et al. / Thin Solid Films 269 (1995) I1 7-120 119
3
T=(l-R)*exp(-at)/[l-R*exp(-2at)] (2)
a =4rrklA (3)
\ -8-
- 2o0°c
18O’C 2 2 nmk
Inm/s
The absorption coefficient, a, and the extinction coeffi- 500 600 700 800 9&l l(
cient (absorption index), k, were obtained from the trans- Wavelength
mittance, T, and reflectance, R, using the approximate Fig. 4. Absorption coefficient characteristics of CdS films in different prep-
formula [ 191: aration conditions. (a) r= 1000 nm, (b) t= 1500 nm.
120 A. Ashour et al. /Thin Solid Films 269 (1995) 117-120
6-I
1 Acknowledgements
2 2.2 24 2.6
-I
2.8
References
EnergyCeVl
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