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JOURNAL OF APPLIED PHYSICS 110, 074505 (2011)

A solution processed nonvolatile resistive memory device with Ti/CdSe


quantum dot/Ti-TiOx/CdSe quantum dot/indium tin-oxide structure
V. Kannan and J. K. Rheea)
Millimeter-Wave INnovation Technology Research Center (MINT), Dongguk University, Seoul 100-715,
Republic of Korea
(Received 22 June 2011; accepted 24 August 2011; published online 4 October 2011)
We report a Ti-TiOx/quantum dot based bipolar nonvolatile resistive memory device. The device
has ON/OFF ratio 100 and is reproducible. The memory device showed good retention
characteristics under stress and excellent stability even after 100 000 cycles of switching operation.
The memory devices are solution processed at room temperature in ambient atmosphere. The
operating mechanism is discussed based on charge trapping in quantum dots resulting in Coulomb
blockade effect with the metal-oxide layer acting as the barrier to confine the trapped charges. The
mechanism is supported by negative differential resistance (NDR) observed exclusively in the ON
C 2011 American Institute of Physics. [doi:10.1063/1.3644973]
state. V

INTRODUCTION terest are fabricated with middle Ti layer thicknesses of 3 nm,


5 nm, and 7 nm. A titanium layer is deposited by e-beam
In the past decade, resistive random access memory
evaporation with chamber pressure of 1  106 Torr. After
(ReRAM) devices are considered as a potential substitute for
deposition of the middle Ti layer, the sample is kept in open
FET based flash memory.1–5 Nanoparticles and quantum
air for at least 1 h so that the exposed Ti surface can form a
dots are of interest due to their potential application in next
thin layer of titanium oxide. This is followed by another layer
generation logic devices.6,7 Quantum dots owing to their
of CdSe quantum dots by spin-casting. The thickness of the
nanometer size scale exhibit quantum confinement effects
all CdSe quantum dot layer is approximately 50 nm. Finally,
that play a dominant role in their electronic properties. Indi-
top contact is made from the e-beam deposited 100 nm thick
vidual CdSe quantum dots have discrete energy levels sepa-
Ti layer with diameter of shadow mask ranging from 1 mm to
rated by 100 meV and charging energies, 150 meV.8–10
30 lm, while the bottom contact is taken from ITO. The film
These quantum dots surrounded by suitable tunnel barriers
thicknesses were measured using Alpha-step surface profiler.
have been studied for their ability to store charges resulting
The current-voltage (I-V) characteristics were carried out using
in memory effects. Memory devices consisting exclusively
“Keithly 4200DC parameter analyzer” at room temperature.
of quantum dots are of interest due to their fast switching
capabilities and nano-scale devices.11 Quantum dots embed-
ded in a partially oxidized thin aluminum layer exhibited RESULTS AND DISCUSSION
bipolar bistable non-volatile memory characteristics with
excellent ON/OFF ratio and fast switching times.12 How- A standard reference device with Ti/quantum dot/ITO
ever, the actual switching mechanism and memory devices was prepared (without the middle Ti layer). This reference
with other metals with their partially oxide form is particu- device did not show any switching characteristics. Figure 1
larly interesting. In this paper, we report the observation of shows the switching characteristics of the resistive memory
non-volatile memory characteristics with a new structure: Ti/ devices with two stable conducting states. Initially, the device
CdSe quantum dot/Ti-TiOx/CdSe quantum dot/indium tin- was in high conducting state (ON). At a forward sweep volt-
oxide (ITO) and discuss the relevant mechanism based Cou- age of around 1.52 V, the device switched to low conduct-
lomb blockade in quantum dots. ing state (OFF). The device could be turned ON by applying
a negative sweep voltage of around 1 V. Both states were
stable and remained in the state even after removal of the
EXPERIMENTAL bias. Thus non-volatile bistable resistive memory is demon-
The resistive memory devices with Ti/quantum dot/ strated. The ON/OFF ratio is around 100. Several devices
Ti/quantum dot/ITO structure were prepared by the spin- (>12 numbers) showed switching characteristics consistent
casting method. CdSe quantum dots of size 3.3 nm dis- with the Fig. 1. The switching process was repeatable; the en-
persed in toluene procured from Sigma-Aldrich were durance test was done with pulse generator in “burst mode.”
employed in the device fabrication. First CdSe quantum dots The device was stable even after 105 cycles of switching
are spin-casted on a pre-cleaned indium tin-oxide (ITO) operation as shown in Fig. 2. Figure 3 shows the retention
coated glass substrate at 3 000 RPM. Subsequently, the sam- test carried out in both ON and OFF states with a constant
ples are well dried at 120  C for 10 min. Three samples of in- bias voltage of 0.2 V for 104 s at room temperature (RT) as
well as retention test at 150  C for 1 h. The device exhibits
a)
Author to whom correspondence should be addressed. Electronic mail: good stability with minimal change in ON/OFF resistances
jkrhee@dongguk.edu. under stress. Devices fabricated with a simpler structure with

0021-8979/2011/110(7)/074505/4/$30.00 110, 074505-1 C 2011 American Institute of Physics


V
074505-2 V. Kannan and J. K. Rhee J. Appl. Phys. 110, 074505 (2011)

FIG. 1. (Color online) I-V characteristics of the ITO/CdSe quantum dot/Ti-


FIG. 3. (Color online) Retention test results for the device for 10 000 s at
TiOx/CdSe quantum dot/Ti resistive memory device for three middle Ti
RT and 1 h at 150  C at a constant 0.2 V bias.
layer thicknesses of 3 nm, 5 nm, and 7 nm.

Ti/Ti-TiOx/CdSe quantum dot/ITO also showed two conduct- thus determined by the overall charging state of the individ-
ing states but had reliability issues. This could be to the high ual CdSe quantum dots.13,14 Moreover, there was marginal
roughness value of the ITO substrate (root mean square 8 variation in I-V characteristics of the device even at 200  C
nm from atomic force microscopy analysis). as shown in Fig. 6. TiOx acts as the barrier for trapped
The ON/OFF switching mechanism can be described charges in the quantum dot. Therefore, the net content of
based on charge trapping in CdSe quantum dots. A memory TiOx present in the middle layer can be expected to play a
device with aluminum in place of titanium was previously significant role in the amount of electrons trapped.
reported by us with mechanism based on charge trapping/de- A close examination of the I-V plot shown in Fig. 7 with
trapping in quantum dots.12 The thin titanium middle layer a linear scale in both axes reveals some interesting features,
when exposed to open atmosphere will form an oxide layer particularly in the forward sweep. The first conduction path
consisting of Ti/TiOx. Figure 4 shows the scanning electron from 0 to 1.1 V is nearly linear. The second conduction path
micrograph of the middle Ti layer confirming the presence from 1.1 to 1.2 V exhibits a steep decrease in current indicat-
of nano-particle/clusters. Energy dispersive x-ray spectra ing negative differential resistance (NDR). The peak-to-val-
(EDS) of this layer reveal the presence of oxygen. Here the ley ratio is around 1.6. In the third conduction path from 1.2
TiOx is believed to play major role in charge trapping and to 1.5 V, a near linear increment of current with voltage can
leading to OFF state. The charge trapping and subsequent be observed. The actual switching of device from ON to
blocking of further electrons entering the quantum dot could OFF state occurs around 1.8 V with an abrupt reduction in
be described on the basis of Coulomb blockade effect. In the injection current. A subsequent scan shows, as expected,
other words, as illustrated in Fig. 5, if the quantum dot is the device in the OFF state. More importantly, the NDR phe-
charged with an electron, the tunneling path through it will nomenon is not observed in the OFF state. Similarly, I-V
be effectively shut off by the large Coulomb charging characteristics were observed in many such devices. Figure 8
energy. The total tunneling current through the structure is shows the I-V characteristics (in log scale) of both ON and

FIG. 2. Endurance data obtained for ITO/CdSe quantum dot/Ti-TiOx/CdSe FIG. 4. Scanning electron micrograph of the middle Ti layer showing the
quantum dot/Ti device with middle Ti layer thickness of 5 nm. presence of nano-particle/cluster.
074505-3 V. Kannan and J. K. Rhee J. Appl. Phys. 110, 074505 (2011)

FIG. 6. I-V plot of the resistive memory device at 200  C.

FIG. 5. (Color online) Illustration for the ON/OFF states based on Coulomb The observed NDR exclusively in the ON state is dis-
blockade in CdSe quantum dot/TiOx structure.
cussed based on the theory adopted for a double barrier res-
onant tunneling diode (DBRTD) and Coulomb blockade
OFF states for V < Turn off voltage. In the region the ON effect. Metal-oxide is considered as the barrier and the
state follow a power law, i.e., I ¼ AVn, where n is the expo- CdSe quantum dot as the well. Further, we find that
nent factor (n ¼ 1 for perfect ohmic conduction) and A is the the results corroborate with the proposed mechanism for
coefficient that depends on the resistance state.15 As shown the observed memory characteristics. In a quantum dot, the
in Fig. 8, n is close to 1 for ON state, whereas in the OFF energy levels are not continuous but discrete giving rise to
state, the curve is slightly exponential with n > 1, indicating quasi-bound states. When one of these quasi-bound states in
that the ON state conduction is ohmic in nature, while the the conduction band of the CdSe quantum dot line up with
OFF state appears to include more complex transport mecha- the Fermi level of the left contact, resonance occurs giving
nisms. The ON state ohmic conduction could be explained rise to increase in current. As the voltage is further
on the basis of tunneling of electrons through the quantum increased, the resonance condition is not satisfied; this leads
dot/TiOx structure. The OFF state conduction with a mar- to sharp reduction in current value exhibiting NDR phe-
ginal exponential behavior could partly be due to tunneling nomena. Such NDR characteristics have been recently
emission current,16 but the problem demands a more detailed reported in polymer/quantum dot based nanocomposite
study. devices.17–19

FIG. 7. (Color online) I-V plot in linear


scale exhibiting NDR exclusively in
ON state.
074505-4 V. Kannan and J. K. Rhee J. Appl. Phys. 110, 074505 (2011)

does not require a “filament forming” high-voltage and


expected to be in the OFF state initially.20
In summary, a quantum dot based nonvolatile resistive
memory device is demonstrated with ON/OFF ratio of 100.
The retention and endurance test show good stability and
reliability. The operating mechanism is proposed based on
Coulomb blockade with charge trapping/de-trapping in quan-
tum dots with metal-oxide layer serving as barrier. The
memory devices are easy to fabricate, ultra-thin, and solution
processed and have a low cost, promising to be one the
potential candidates for the future memory applications.

ACKNOWLEDGMENTS
This work was supported by the Millimeter-wave INno-
vation Technology Research Center (MINT), Dongguk Uni-
FIG. 8. (Color online) Plot of log I vs log V for V< turn off voltage for versity, Republic of Korea.
both ON and OFF states.
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19
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