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Laser Prototyping of Microwave Circuits in LTCC Technology
Laser Prototyping of Microwave Circuits in LTCC Technology
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Ian Robertson
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Abstract—In this paper, a process for direct laser structuring of The alternatives to thick-film technology are high tempera-
microwave circuits in low-temperature co-fired ceramic (LTCC) ture co-fired ceramic (HTCC) and low-temperature co-fired ce-
technology is reported. An efficient alternative to screen printing ramic (LTCC). The repeated firing drawback of thick-film tech-
is proposed for prototyping circuits by laser patterning the con-
ductors on the unfired tape. A line width and gap of 50 m are nology is overcome in these two technologies by cofiring the
achieved with laser machining. A range of samples has been complete circuit after laminating all the layers together. LTCC
studied using a scanning electron microscope in order to optimize has an advantage of low temperature sintering over HTCC. This
the process parameters. The surface roughness of laser-treated low temperature sintering allows the use of high conductivity
samples is measured with a surface profiler and compared with the metals like gold, silver and copper. The parallel processing of
untreated samples. A method of creating microvias and trenches
in thick LTCC substrate is also demonstrated. For 254 m thick layers in LTCC technology allows the replacement of a defec-
green tape, vias with a diameter and separation of 50 m are tive layer at any stage before laminating. The tracks are usually
realized along with trenches having a width as small as 30 m. screen (or stencil) printed on individual layers and a width and
The method of optimizing the laser machining process is described gap of 100 m are achievable with fine mesh screens. For a so-
in detail. A band-stop mushroom resonator and a microstrip ring phisticated multilayer LTCC design, a large number of screens
resonator filter are fabricated and their results compared against
simulations. are required to pattern the conductors and filling the vias on
different layers, making prototyping of a new design relatively
Index Terms—Ceramics, laser machining, low-temperature costly and time consuming.
co-fired ceramic (LTCC), microwave circuits, multichip modules,
thick film circuits. There are various alternatives to directly screen-printing the
conductor patterns. Photoimageable inks can be printed and pat-
terned photolithographically [4], although this requires high res-
I. INTRODUCTION olution masks and a controlled light environment [5]. These
photoimageable inks can yield tracks as small as 10 m [5].
Other techniques like inkjet and micropen deposition can be
W HILE silicon-based system-on-chip technology con-
tinues to advance rapidly, in microwave, millimeter-
wave and terahertz systems there remains a demand for
used for a range of electronic and organic materials with pre-
cision and high resolution [6]. A technique known as thermal
packaging solutions that provide the ability to integrate semi- spray is also useful, in which inks are sprayed at high velocity
conductor devices from a wide range of technologies [1], [2]. and solidify when they land on the substrate [6]. High capital
Ceramic multichip module technology (MCM-C) is an excel- investment is mandatory for the techniques such as focused ion
lent candidate for this packaging requirement. It can provide beams and nanolithography, although they do give outstanding
embedded passive components, hermeticity, and excellent resolution. Laser-induced forward transfer (LIFT) is another
thermal and mechanical stability. Thick-film technology is well developed technique where a laser beam transfers mate-
a well-established traditional technique for microelectronic rial from an optically transparent ribbon onto the substrate. An
packaging. The layers of dielectric and conductor are printed organic vehicle is mixed with the depositing material to im-
sequentially onto the alumina substrate. However, for sophis- prove the process quality and it is known as matrix-assisted
ticated multilayer thick-film fabrication [3], any small defect pulsed laser evaporation direct writing (MAPLE-DW) [6], [7].
may require a complete rebuild of the whole design and the These various processes have different tradeoffs with respect
need for repeated firing cycles can make the fabrication process to process quality, turnaround time of prototyping and capital
very time consuming. investment required. A very attractive solution for microwave
circuit prototyping is achieved with direct laser machining of
Manuscript received April 15, 2009; revised July 27, 2009. First published
unfired ceramics [8]. The process is very fast and does not re-
November 13, 2009; current version published December 09, 2009. This work quire chemicals or a controlled light environment. Moreover,
was supported in part by the Engineering and Physical Sciences Research this technique provides a significant reduction of fabrication
Council under Grant EP/D068649/1 and in part by the COMSATS Institute of
Information Technology, Islamabad, Pakistan.
time (to a few hours) and also allows the freedom to change
The authors are with the Institute of Microwaves and Photonics, School of a design without requiring any new screens or masks.
Electronic and Electrical Engineering, The University of Leeds, Leeds LS2 9JT, In a recent study, the laser processing of different materials
U.K. (e-mail: elfms@leeds.ac.uk; i.d.robertson@leeds.ac.uk). was studied; fired alumina coated with platinum and gold was
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org. treated with a frequency tripled Nd:YAG laser and laser struc-
Digital Object Identifier 10.1109/TMTT.2009.2033846 turing of laminated green tapes was also commented on briefly
0018-9480/$26.00 © 2009 IEEE
SHAFIQUE et al.: LASER PROTOTYPING OF MICROWAVE CIRCUITS IN LTCC TECHNOLOGY 3255
TABLE II
WRITING SPEED OBSERVATIONS
Fig. 4. SEM photograph of laser etched 100 m track with single contour line.
Fig. 3. Substrate damage around the contour line: (A) silver track itself;
(B) contour line; and (C) etched substrate region.
Fig. 10. Roughness comparison of unetched, silver, and laser etched regions.
Fig. 13. Laser entry side of 50 m via matrix with pitch of 100 m.
Fig. 15. Laser drilled trenches of different widths.
Fig. 14. Laser exit side of 50 m via matrix with pitch of 100 m.
Fig. 16. Band-stop mushroom resonator.
the laser during the process. Arbitrary via shapes can be pro-
duced and trenches with a width smaller than 50 m have been
demonstrated by using lower power but repeated laser cycles
along a single straight contour line.
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[22] K. M. Nowak, H. J. Baker, and D. R. Hall, “Cold processing of LTCC David Paul Steenson (M’96–SM’00) was born
with CO2 laser,” Appl. Phys. A, vol. 84, no. 3, pp. 267–270, Aug. 2006. in Belfast, Northern Ireland, in 1963. He received
[23] Y. Horri, “A compact band elimination filter composed of a mushroom the B.Sc. degree (with honors) in electronics and
resonator embedded in a microstrip line substrate,” presented at the electrical engineering from the University of Man-
Asia–Pacific Microw. Conf., Osaka, Japan, Dec. 2005. chester, Manchester, U.K., in 1984, and the Ph.D.
[24] L. H. Hsieh and K. Chang, “Compact, low insertion-loss sharp-rejec- degree in physics from the University of Nottingham,
tion and wide-band microstrip bandpass filters,” IEEE Trans. Microw. Nottingham, U.K., in 1993.
Theory Tech., vol. 51, no. 4, pp. 1241–1246, Apr. 2003. In 1984, he joined Philips Components, Cheshire,
U.K., where he was a Microwave Device Develop-
ment Engineer, and in 1986, he moved to Philips Re-
search Laboratories, Surrey, U.K., where he was in-
volved with the manufacture, design, and characterization of high-frequency
devices in germanium, silicon, and gallium arsenide. In 1989, he joined the De-
partment of Physics, University of Nottingham, where he was involved in the
area of high frequency applications of double barrier resonant tunnelling de-
M. Farhan Shafique (S’08) received the B.Eng. de- vices (DBRTDs). In 1993, he joined the Department of Electronic and Elec-
gree from Hamdard University, Hamdard, Pakistan, trical Engineering, The University of Leeds, Leeds, U.K., as a Research Assis-
in 2003, and the M.S. degree from University of tant and continued his research on high-frequency applications of DBRTDs. In
Paris East Marne-La-Vallée, Paris, France, in 2005. 1994, he became a permanent member of the Microwave and Terahertz Tech-
He is currently working toward the Ph.D. degree in nology Group (later becoming the Institute of Microwaves and Photonics), at
electronic and communications engineering from The University of Leeds, and more recently he has supervised the construction
The University of Leeds, Leeds, U.K. and equipping of the Wolfson Nanotechnology Cleanroom, Leeds, U.K. His re-
His research interests involve multilayered-mi- search interests are mainly in the field of micro-fabrication and integration of
crowave device fabrication on LTCC and thick-film novel millimeter- and submillimeter-wave devices and circuits.
technology, electromagnetic modeling of microwave Dr. Steenson is a member of the Institute of Physics and the Institute of En-
structures, and RF antenna design. In 2005, he was gineering and Technology, U.K.
an intern at Conservatoire National des Arts et Métiers, Paris, France, where he
was involved in the study of blind frequency and phase estimation in short radio
burst. From 2005 to 2007, he was a Research Assistant with the COMSATS
Institute of Technology, Islamabad, Pakistan. Ian D. Robertson (M’96–SM’05) was born in
London, U.K., in 1963. He received the B.Sc. (Eng.)
and Ph.D. degrees from King’s College London,
London, U.K., in 1984 and 1990, respectively.
Kashif Saeed (S’06–M’08) received the B.Eng. From 1984 to 1986, he worked with the MMIC Re-
(with honors, first class), M.Sc., and Ph.D. degrees search Group, Plessey Research, Caswell, U.K. After
in electronic and communications engineering from that he returned to King’s College London, initially
The University of Leeds, Leeds, U.K., in 2002, 2004, as a Research Assistant and then as a Lecturer, finally
and 2008, respectively. becoming Reader in 1994. In 1998, he was appointed
He is currently working as a Post-Doctoral Re- Professor of Microwave Subsystems Engineering at
search Associate with the Institute of Microwave the University of Surrey, where he established the Mi-
and Photonics, School of Electronic and Electrical crowave Systems Research Group and was a founder member of the Advanced
Engineering, The University of Leeds, where he is Technology Institute. He has organized many colloquia, workshops, and short
currently involved in the study of low-dimensional courses for both the IEE and IEEE. He edited the book MMIC Design (IEE,
electronic systems at microwave frequencies. In 1995) and coedited the book RFIC & MMIC Design and Technology, (The In-
2007, he was a Summer Intern with Agilent Technologies, where he was in- stitute of Electrical Engineering, 2001). He has published over 380 papers in the
volved in the design and application of microwave biosensors in microfluidics. areas of MIC and MMIC design.
His research interests include the area of high-frequency material characteri- Dr. Roberson was the Honorary Editor of IEE Proceedings—Microwaves,
zation and microwave circuit design and miniaturization techniques on LTCC Antennas & Propagation for many years and Editor-in-Chief of the rebranded
and thick-film technology. IET Microwaves, Antennas & Propagation from 2005 to 2009. In June 2004,
Dr. Saeed was a recipient of the 2002 U.K. and RI IEEE Communications he was appointed to the University of Leeds Centenary Chair in Microwave and
Chapter Prize for the best project in the area of telecommunications. Millimeter-Wave Circuits.