Chemical Tape Method Sensor: FP

Chemical
Chemical Tape Method Sensor: FP
Chemical Tape
Tape Method
Method Sensor:
Sensor: FP
Stationary
Stationary tape
Stationary tape
tape
FP Example:
Example: FCL-002E
Example: FCL-002E
FCL-002E
Stationary tape
1. Brief
1. Brief description
description Stationary
Example: tape
FCL-002E
Stationary
Stationary tape
tape
Example: FCL-002E
Category
Category Detectable
Detectable gas
gas
This
This sensor
This sensor uses
sensor uses cellulose
uses cellulose tape
cellulose tape impregnated
tape impregnated with
impregnated with aa color
with a color former.
color former. ItIt lets
former. It lets detectable
lets detectable gas
detectable gas enter
gas enter this
enter this
this Category
Example:
Example: FCL-002EDetectable gas
FCL-002E
1.
tape
tape
tape Brief
by
by description
allowing
by allowing
allowing ititit to
to pass
to pass through
through ititit or
pass through or diffuse
or diffuse into
diffuse into it.
into it. The
it. The sensor
The sensor electrically
sensor electrically measures
electrically measures reflected
measures reflected
reflected
1. Brief description Optical
Optical
Optical Toxic
Toxic
Toxic
1.
light
lightBrief
based
based on
1. sensor
This
light
This Brief
sensor
based description
on
on the
description
uses
the
uses
tape
thecellulose
tape color
tape color
color caused
caused
tape by
impregnated
caused by the
by the reaction
the reaction
reaction
with a between
between
color former.
between the
the color
theItcolor
color
lets former and
former and
detectable
former detectable
andgas
detectable
enter
detectable this Category
Category
Detectable gas
Detectable gas
gas
gas to
tape
gas allowing itcellulose
byquantitatively
to quantitatively to recognize
pass tapeaaimpregnated
recognize
through very
it orlow
very low with
intoait.color
concentrations
concentrations
diffuse The former.
of
of toxic
sensor It lets detectable
gas.
toxic electrically
gas. gas enter
measures this
reflected
Thisto
This
tape by
quantitatively
sensor
sensor uses
allowing
recognize
uses cellulose
cellulose tapea impregnated
tape very low concentrations
impregnated with
into a
with a colorofformer.
color toxic gas.
former. ItIt lets
lets detectable
detectable gas enter
enter this
gasreflected
this Category
Category
Optical Detectable
Toxic gas
Detectable gas
light
tape based
by on theitittape
allowing
to
to
pass
pass
through
color caused
through
it or
it by
or
diffuse
the reaction
diffuse into
it.
it.
The sensor
between
The the electrically
sensor color former
electrically
measures
and detectable
measures reflected Optical Toxic
tapebased
light by allowing
on the ittape
to pass
colorthrough
caused itby
or the
diffuse into it.
reaction The sensor
between the electrically
color former measures
and reflected
detectable Optical Toxic
2.
gas
2.
gas Structure
tobased
light
to
quantitatively
Structure
light based on
on the
the tape
quantitatively and
and
tape principles
recognize
color
recognize
a very by
principles
color caused
caused
a very low
lowthe
concentrations
by the reaction
reaction between
concentrations
of toxic
between
of toxic the gas.
color
thegas.color former
former and
and detectable
detectable
Optical Toxic
gas
gas to
to
[Structure]
[Structure]quantitatively
quantitatively recognize
recognize a
a very
very low
low concentrations
concentrations of
of toxic
toxic gas.
gas.
[Structure] [Structure]
[Structure]
2.
The
TheStructure
sensor has
sensor has
has a aaand
gas principles
chamber
gas chamber
chamber that lets
that lets in
lets in detectable
in detectable gas.
detectable gas. This
gas. This
This
2.
The Structure
sensor and
gas principles
that
2.
2. Structure
Structure
[Structure]
chamber
chamber
chamber is
is a
is and
and principles
principles
aa light-resistant
light-resistant
light-resistant container that
container that
container is
that is internally
is internally arranged
internally arranged and
arranged and
and [Structure]
[Structure]
The sensor
[Structure]
housed
housed
[Structure]
housed so
so that
so has the
that
that a gas
the
the light
light
light chamber
source
source and
source that
and lets
and light-receiving in detectable
light-receiving gas. can
section
section This
can
can [Structure]
The sensor
chamber istheahas a gas
light-resistant chamber containerthat light-receiving
letsthat inisdetectable
internally
section
gas.
arranged This and [Structure]
[Structure]
Gas
Gas release
Gasrelease
release
recognize
recognize
The sensor
recognize
The sensor the
the has
has tape
tape
tape a
a color.
gascolor.
color.
gas The
The
chamber
The
chamber sensor
sensor
sensorthat
that consists
consists
lets
consists
lets in
in of
detectable
of
detectable this
of this
this gasgas
gas
gas.
gas. chamber
chamber
This
chamber
This Light
Light source
Lightsource
source
chamber
housed so is a
that light-resistant
the light source container
and that
light-receiving is internally sectionarrangedcan and (LED)
(LED) Light receiving
Lightreceiving section
receivingsection
section
and
and
and other
otheris
chamber
other
chamber components
components
is a
a light-resistant
components
light-resistant such
such as
suchcontainer
as a
as aa reel
container reel mechanism
reel mechanism
mechanism
that
that is
is internally
internally for
for rewinding
for rewinding
rewinding
arranged
arranged tape
tape
and
tape
and (LED) Light
Gas release
housed
recognize sothe thattape the color.
light source The sensor and light-receiving
consists of this section can
gas chamber Gas release(Photodiode)
(Photodiode)
(Photodiode)
after
after
housed
after
housedeach
each
each so measurement.
measurement.
that
measurement.
sothe that the light
light source
thecolor. source and
and light-receiving
light-receiving section
section can
can Tape
Light source
Gas release
recognize
and other components tape such The sensor
assensor consists
a reel mechanism of this gas
for rewinding chamber tape
Tape
Tape Light source
(LED) GasLight
release
receiving section
[Principles]
[Principles]
recognize
recognize
and other the
the
components tape
tape color.
color. such The
The as sensor
a reel consists
consists
mechanism of
of this
this
for gas
gas
rewinding chamber
chamber tape
Light
Light source
source
(LED)
Coloring
Coloring
Light(Photodiode)
receiving
mark
Coloringmark
mark
section
after
and
When
When
and
When each
other
aa
other
a measurement.
components
detectable
detectable
components
detectable gas
gas
gas such
comes
comes
such
comes as
as in
in a
ina reel
contact
contact
reel
contact mechanismwith
mechanismwith
with the
the
the for
tape
tape
tapefor rewinding
impregnated
impregnated
rewinding
impregnated tape
tape Tape
(LED)
(LED) Light
Light receiving
receiving section
(Photodiode) section
after each measurement. (Photodiode)
(Photodiode)
[Principles]
after
with
with aaeach
aftera
with colormeasurement.
color
each
color former,
former, a
measurement.
former, aa chemical
chemical
chemical reaction reaction
reaction occurs, occurs,
occurs, causing causing
causing the the tape
the tape
tape to to
to Tape Coloring mark
[Principles]
When a detectable gas comes in contact with the tape impregnated
Tape
Tape Coloring mark
[Principles]
color.
color. For
For
[Principles]
color.
When For
a
example,
example,
example,
detectable gas
if
ifif phosphine
phosphine
phosphine
comes in
(PH
(PH
(PH
contact 3
33)
)) comes
comes
comes with
into
into
into
the
contact
contact
contact
tape
with
with
with
impregnated
the
the
the Coloring
Coloring mark
mark
with
tape,
tape,
When asilver
color
silver
silver former,
colloid
colloid is
aa detectable isagas chemical
produced
produced reaction
asas shownoccurs,
shown in
in the
thethe causing
formula
formula the tape to
below,
below, Tape travelling
Tapetravelling direction
travellingdirection
direction
former,isaifgas comes in contact with tape
tape impregnated
tape,
When colloid
detectable produced comesas in shown
contact in the
with formula
the below,
impregnated Tape
with
color.a For
color chemical reaction occurs, causing thewith
tapetheto Gas chamber
Gaschamber
chamber
causing
causing
with a aaexample,
color coloring
coloring
former, mark
mark a phosphine
to appear
to appear
chemical appear (PH
reactionon3)the
on comes
the
the white
white
occurs, intotape.
tape. contact
causing the tape Gas
causing
with
color.
tape,
a
For a
color
silver
coloring
former,
example,
colloid
mark
is if a to
chemical
phosphine
produced as (PH on
reaction
shown ) comes in
white
occurs,
the intotape.
causing
formula contact the
below,with theto
tape to Tape travelling direction
color. For
For example, PH
PH ＋＋ AgClO
AgClO ->
-> Ag
Ag 3
++ HH PO
PO ++ 1/2
1/2 Cl
Cl
PH333 ＋ is ifproduced
phosphine
ifAgClO 444 ->as Ag (PH +33))Hcomes POthe into
1/2contact
444 +formula Cl222 below, with
with the
color.silver example, phosphine (PH comes into contact the Detectable
Detectable gas
gas
Detectable gas Tape travelling direction
tape, colloid shown 333in Gas chamber
causing
The
The
tape,
The sensor
tape, a coloring
sensor
silver
sensor
silver colloidmark
applies
applies
colloid
applies islight
light
light
is to
toappear
to
produced
to
produced the
the spot
the spotspot
as on
as shown onthe
on
on
shown thewhite
the
the intapethetape.
tape
the
tape
in that
that
formula
that
formula has colored
hasbelow,
has colored to
colored
below, to
to Gas chamber
Tape
Tape travelling
travelling direction
direction
causing a coloring PH mark
＋ AgClO to appear -> Ag on + theH white
PO + tape.
1/2 Cl Gas
Gas chamber
determine
determine
causing
causing aa the
determine the
the
coloring change
change
change
coloring 3 mark
mark in
in reflected
in reflected
reflected
to
to appear
4appear light
light
on
light
on intensity
theintensity
3 white
intensity
the white
4 before
before
tape.
before
tape. and
2 and after
and after the
after the
the Detectable gas chamber
PH3 ＋ AgClO4 -> Ag + H3PO4 + 1/2 Cl2 Detectable gas
The
entry sensor
entry ofof the
of the applies
detectable
the detectable
detectable
PH33 ＋
PH ＋light to
gas; the
gas; thus
AgClO
AgClO thus
thusspot
->itititAg
44 -> Ag on
accuratelythe
accurately
+H H33PO tape that
quantifies
quantifies
++ 1/2 has
Cl colored
the gas
the gas
gas to
entry gas; on+the
accurately PO 1/2has
44quantifies Cl22 the Detectable
Detectable gas
gas
The sensor
determine the applies
change light in to the
reflected spot light tape that colored
after to
concentration.
concentration.
The
The sensor
concentration.
determinesensor the applies
applies
change light
light
in to
to the
the spot
reflected spot lightononintensity
the
the tape
intensity tapebefore that
that has
before hasand
and colored
colored
after
the
to
to
the
entry of the the
determine
determine detectable
change gas;
change in thus it accurately
in reflected light
light intensity quantifies
before
before and the
andgas after
after the
entry of the the
concentration. detectable gas; reflected
thus it accurately intensity quantifies the gas the
entry
entry of
of the
the detectable
detectable gas;
gas; thus
thus it
it accurately
accurately quantifies
quantifies the
the gas
gas
3.
3. Features
Features (of
concentration.
concentration.
(of the the sensorssensors FP-300 FP-300 and and FCL-002E FCL-002E (PH (PH333)) as
as examples)
examples)
concentration.
○Output
○Output characteristics
characteristics ○Temperature
○Temperature and and
3. Features (of the sensors 30 FP-300 and FCL-002E (PH3) as examples)
3.
WhenFeatures
When
When a (ofgas
aa detectable
detectable
detectable the
gas
gas sensors 30
enters
enters
enters
30
FP-300 and FCL-002E (PH3)characteristics
humidity
humidity as examples) 500
characteristics
500
500
3.
3. Features
Features
○Output (of
(of the
the
characteristics sensors
sensors FP-300
FP-300 and
and FCL-002E
FCL-002E (PH
(PH
○Temperature 33)) as
as examples)
examples)
and
Sensor
Sensor

the detection
the detection section,
detection section, the
section, the tape
the tape
tape
Sensor

the For PH
PH33,,, the
For PH the tape-based
the tape-based sensors
tape-based sensors
sensors
○Output characteristics For 30 ○Temperature
3 and 500
○Output
When
starts
starts atodetectable
to
○Output
starts to color
color and gasoutput
the
and the
the enters
characteristics
output
output
characteristics
color and 30 humidity
○Temperature
FP-300
FP-300
FP-300 or characteristics
FCL-002E
or FCL-002E
○Temperature
or FCL-002E and
does not
does not
and
does not Read
Read
Read
500
When a detectable gas enters 30 humidity characteristics ing
ing
Sensor

the detection
gradually section,
increases. theenters
Since tape
the 30 depend
depend on
on temperature.
temperature. Without
Without 500
ing
gradually
When increases.
aa detectable Since
gas the For PH3,on
humidity
depend thetemperature.
tape-based sensors
characteristics
Without 500
output
output

gradually
When increases.
detectable Since
gas the
enters humidity characteristics
output
Sensor

the detection (ppb)

(ppb)
colorsection, the tape For PH3depending
,depending
the tape-based sensors
greatly
greatly on
on humidity
humidity as
as (ppb)
Read
starts todetermines and the output FP-300
greatly or FCL-002E
depending on does not
humidity as
Sensor

sensor
sensor
the determines
determines
detection section,changes
changes
the tape in
in
Sensor output

sensor
the
starts detection
to color section,changes
and theSince the
output tapein For
For PH
FP-300
well,
well, PH , the
3,sensor
3or
this
this the tape-based
tape-based
FCL-002E
sensor does
provides
provides
sensors
sensors
not Read
ing
gradually
color,
color, the
the increases.
output
output forms
forms a the
curve.
a curve.
curve. depend
well, this on temperature.
sensor provides Without
output

starts to color and the output FP-300 or FCL-002E does not Read
Read
color,
startsthe
gradually to output
color andforms
increases.changes the aoutput
Since the (%)
(%)
(%) FP-300
depend
accurate
accurate onor FCL-002E
temperature.
reading within
reading within does
within not
the as (ppb)
Without
the
ing
output

00
0 greatly
accurate depending
reading on humidity
the ing 00
ing0
sensor
graduallydetermines
gradually increases.
increases. Since
Since the in
the depend
depend
greatly on
on temperature.
dependingtemperature.
on Without
Without
humidity as
(ppb)
output

sensor determines changes in 00

0 1000
1000
1000 operating
operating
well, temperature
temperature
thisdepending
operating sensor provides
temperature and
and
and (ppb)
(ppb) 0 00 80
80
80
color,
sensor the output
determines forms a
changes curve. in greatly
greatly
well, depending
this ranges.
sensor on
on humidity
humidity as
as Humidity
Humidity (%RH)
Humidity(%RH)
(%RH)
sensor
color, the determines
output forms changes
a curve. in (%) Gas
Gas concentration
concentration (ppb)
(%) 0 Gas concentration (ppb)
(ppb) humidity
humidity
accurate
humidity ranges.provides
ranges.
reading within the 0
well, this sensor
well, thisreading
accurate provides
sensor within
providesthe
color,
color, the
○Aging
○Aging output
output forms
thecharacteristics
characteristicsforms aa curve.
curve. 0
(%) 0 0
(%) 1000 ○accurate
○accurate
Features
Features
operating of
temperature the
ofwithin
theandtape-based
tape-based 0
sensor
sensor
0 80
00 1000 operating reading
reading
temperature within
andthe
the 000 Humidity (%RH) 80
Continuous
Continuous runningrunning
running teststests
tests onon
on thethe sensor
the sensor Gas
sensor indicate 00 concentration
indicate
indicate that
that (ppb)
with
with 1000 humidity
-- Very
Very ranges.
high
high sensitivity
sensitivity with
with excellent
excellent selectivity
selectivity
Humidity (%RH)
Continuous that with
Gas concentration (ppb) 1000 operating
- Veryranges.
operating
humidity temperature
high andwith excellent00selectivity
and
sensitivity
temperature 80
80
○Aging
no characteristics
deterioration
no deterioration
deterioration in gas
in gas sensitivity,
sensitivity, ititit provides
gas sensitivity, provides
provides stable
stable ○ Features of the tape-based sensor
--- Use
Use of cassette
Humidity
Humidity (%RH)
(%RH)
Use of
of
of thetape,
cassette tape, which
tape, which is
which is easy
is easy to
easy to replace
to replace
replace
no in Gas concentration
Gas stable (ppb) humidity ranges.
○Aging characteristics concentration (ppb)
○humidity
Features ranges.
cassette tape-based sensor
○Aging
Continuous
measurement. running tests on the sensor indicate that with
○Aging characteristics
measurement.
measurement. characteristics ○○-----Features
Very
Tapehigh
Tape feedsensitivity
feed
Features of
onthe
on
of with excellent
tape-based
aa per-measurement
theper-measurement
per-measurement
tape-based selectivity
sensor
basis, which
which allows
basis, which
sensor allows no
no
Continuous
no deterioration running
in gas tests on the sensor
sensitivity, indicate
it provides
---Use
that with
stable Very high sensitivity with excellent selectivity allows no
Tape feed on a basis,
Continuous
noContinuous
deterioration running
running
in gas tests
tests on
on the
sensitivity, the sensor
sensor
it provides
-- Use Veryof
hysteresis
hysteresis
indicate
Very cassette
high
indicate
hysteresis
high that
stable
offeed
cassette
tape, with
that with
sensitivity
with
sensitivity which
tape, with
which
is easy selectivity
excellent
excellent to replace
selectivity
is easybasis,
to replace
measurement.
no
no deterioration
deterioration in
in gas
gas sensitivity,
sensitivity, it
it-----Tape
Coloring
Coloring
provides
Use
provides of
Coloring
Use of on a per-measurement
caused
caused
stable
cassette
stable
caused
cassette by
tape,
by
tape,detectable
by detectable
detectable
which
which is
is gas
gas accumulates
easy
gas
easy to which allows
accumulates
accumulates
to replace
replace on
on the
on the
theno
measurement. Tape feed on a per-measurement basis, which allows no
measurement.
measurement. --hysteresis
tape,
tape,
Tape
tape,
Tape which
which
feed
which
feed allows
on
onallows for detection
for detection
aa per-measurement
allows for
per-measurement of
detection of very
of very
very
basis,
basis, low
low
low which
which allows
allows no
no
hysteresis
- Coloring causedof
concentrations
concentrations
hysteresis
concentrations
hysteresis ofby
of gasdetectable gas accumulates on the
gas
gas
- Coloring caused by detectable gas accumulates on the
--tape, which
Coloring
Coloring allowsby
caused
caused fordetectable
by detection gasof very low
accumulates on
on the
tape, which
concentrations allows fordetectable
of gas detection gas accumulates
of very low the
tape,
tape, which
which allows
allows for
for detection
detection of
of very
very low
low
4. Detectable
4. Detectable gas,
gas, molecular
molecular formula,
formula, model,
model, and
and detection
detection concentrations 5. of gas of
5. Products
Products of this
this type
type (examples)
(examples)
concentrations
concentrations of of gas
gas
range
range (examples*)
(examples*)
range (examples*)
4. Detectable gas, molecular formula, model, and detection
4. Detectable
Detectable gasgas,Molecular
molecular formula,Model
model,
## and detection 5.○○Products
Stationaryof
Stationary products
products
this type (examples)
Detectable
range
4.
gas
Detectable gas
(examples*)
Detectable
Molecular
Molecular
gas,
formula
formula
formula Model
Model # Detection
Detection
Detection range
range
range 5. Products
...
... FP-300,of
FP-300,
... FP-300, this type (examples)
FP-301
FP-301
FP-301
4.
rangeDetectable gas, molecular
Arsine (examples*)
Arsine
molecular
AsH
AsH333
formula,
formula, model,
model, and detection
and0-15/150
detectionppb
0-15/150ppb
ppb
5.
5. Products
Products of
of
○ Stationary productsthis
this type
type (examples)
(examples)
Arsine AsH 0-15/150
range
range (examples*)
(examples*)
Detectable gas Molecular formula FCL-001
FCL-001
Model #
FCL-001 Detection range ○ Stationary products
Hydrogen
Hydrogen
Detectable
Hydrogen selenide
selenide
gas
selenide H
Molecular
H Se
Se
H222Se formula Model # 0-200 ppb
0-200ppb
Detection
0-200 ppb
range ○○... FP-300, FP-301
Stationary
...Stationary
products
products
FP-300, FP-301
Detectable
Detectable gas
Arsine gas Molecular
AsH3formula
Molecular formula Model
Model ## Detection range
0-15/150 ppb
Detection range ...
Formaldehyde
Formaldehyde
Arsine
Formaldehyde HCHO
HCHO
AsH
HCHO 3 FCL-018
FCL-018
FCL-001
FCL-018 0-0.5/1/5
0-0.5/1/5 ppm
0-0.5/1/5 ppm
0-15/150 ppmppb ... FP-300,
FP-300, FP-301
FP-301
Arsine
Hydrogen
Arsine selenide HAsH
2Se33
AsH FCL-001 0-15/150
0-200 ppb
0-15/150 ppb
ppb
Phosphine
Phosphineselenide
Hydrogen
Phosphine PH
HPHPH
2Se 333 FCL-001
FCL-001 0-900
0-900
0-200 ppb
ppb
0-900 ppb
ppb
Hydrogen
Hydrogen selenide
Formaldehydeselenide HH22Se
HCHO Se FCL-018 0-200
0-0.5/1/5 ppb
ppm
0-200 ppb
Diborane
Diborane
Formaldehyde
Diborane HCHO
B H
BB222HH666 FCL-018 0-300
0-0.5/1/5
0-300 ppb
0-300ppb
ppb
ppm
Formaldehyde
Phosphine
Formaldehyde HCHO
PH
HCHO 3 FCL-002E
FCL-002E
FCL-018
FCL-002E
FCL-018 0-0.5/1/5
0-900 ppb
0-0.5/1/5 ppm
ppm FP-300
FP-300
FP-300
Silane
Silane
Phosphine
Silane SiH
SiH3444
PH
SiH 0-15
0-900
0-15 ppm
0-15ppm
ppm
ppb
Phosphine
Diborane
Phosphine BPH
2PHH633 0-900
0-300 ppb
0-900ppb
ppb
Disilane
Disilane
Diborane
Disilane Si
Si222H
B
Si H
H6666
2H FCL-002E 0-10
0-300
0-10 ppm
0-10ppm
ppm
ppb FP-300
Diborane
Silane
Diborane BB22H
SiH H
4 66 FCL-002E 0-300
0-15 ppm
0-300 ppb
ppb FP-300
***Silane
Tape
Tape FP-300
Tape FP-300 used
FP-300 used as
used as an
as an example
an example
example
SiH4 FCL-002E
FCL-002E 0-15 ppm FP-300
FP-300
Silane
Disilane
Silane SiSiH H
SiH644
2 0-15
0-10 ppm
ppm
0-15 ppm
Disilane Si2H6 0-10 ppm
Disilane
* Tape FP-300 used as an example
Disilane Si22H
Si H66 0-10
0-10 ppm
ppm
* Tape FP-300 used as an example
** Tape
Tape FP-300
FP-300 used
used as
as an
an example
example

17