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Pratap2018 Article AnalyticalModelingOfGate-all-a
Pratap2018 Article AnalyticalModelingOfGate-all-a
https://doi.org/10.1007/s10825-017-1041-4
Abstract In recent times, FET-based sensors have been model has been developed for a GAA JLT-based biosen-
widely used in industrial and domestic applications due to sor. The results are compared with an inversion mode
their low cost and high sensitivity. In this paper, a nanogap- transistor-based biosensor using TCAD numerical simula-
embedded gate-all-around junctionless transistor (GAA JLT) tion. The GAA JLT shows very high sensitivity due to
is proposed for label-free electrochemical detection of neu- the gate all around structure and bulk conduction mecha-
tral biomolecule species such as Uricase, Protein, ChOx, nism.
APTES and Streptavidin. Shifts in subthreshold current,
threshold voltage and capacitance are used to predict the Keywords Sensor · Junctionless transistor (JLT) ·
response of the sensor. Impact of cavity width, cavity length, Biomolecule species · Protein · Gate-all-around (GAA) ·
and gate length on the sensitivity of a junctionless tran- Protein
sistor has also been investigated in detail. An analytical
B Mridula Gupta
1 Introduction
mridula@south.du.ac.in
Yogesh Pratap
Since the invention of MOSFET, the CMOS industry has
yogi.pratap87@gmail.com been continuously facing the problem of formation of
source/drain to channel junctions. As the device dimensions
Manoj Kumar
manoj.uiet@gmail.com decrease, the complexity of fabrication feasibility increases.
Sneha Kabra
In the nanoscale regime, it is very hard to control p–n chan-
snehakabra1@gmail.com nel junctions [1–3]. Recently, a junctionless transistor (JLT)
[1–5] was introduced as a novel transistor which has uni-
Subhasis Haldar
subhasis_haldar@rediffmail.com form doping concentration in the source, channel and drain
regions and, therefore, there is no formation of p–n junctions.
R. S. Gupta
rsgupta1943@gmail.com The fabrication problem due to diffusion of the impurities
is completely removed [6,7]. Due to uniform doping, the
1 Department of Instrumentation, Shaheed Rajguru College of working principle of JLT is quite different than the inversion
Applied Science for Women, University of Delhi,
mode transistor. A high work-function difference between
New Delhi 110096, India
2
the metal gate and the channel is used to deplete carriers in
Semiconductor Device Research Laboratory, Department of
Electronic Science, University of Delhi South Campus,
the channel [8]. At flat band condition, the entire channel
New Delhi 110021, India region becomes neutral and bulk current flows in that neutral
3 region. Therefore, a junctionless transistor has bulk conduc-
Motilal Nehru College, University of Delhi,
New Delhi 110021, India tion in spite of surface conduction. It has been observed that
4 a junctionless transistor has superior short channel effects
Department of Electronics and Communication Engineering,
Maharaja Agrasen Institute of Technology, (SCEs) immunity than an inversion mode transistor [1–
New Delhi 110086, India 10].
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J Comput Electron (2018) 17:288–296 289
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290 J Comput Electron (2018) 17:288–296
Fig. 3 a Calibration for simulation results at Vds = 1 V with experimental results [6]. b Model/method and assumption of changing gate dielectric
is calibrated with experimental results from [16]
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J Comput Electron (2018) 17:288–296 291
εox is the dielectric permittivity of silicon di-oxide. toxeffi is The Poisson’s equation (1) is modified according to the
the effective thickness of dielectrics and given as: source depleted region
Here, E g (300 K) is the energy band gap at 300 K and E gα = (a) The electrostatic potential at the source and drain end is
4.73 × 104 eV/K, E gβ = 636 K. E g (ND ) is the amount of
band gap narrowing energy due to high doping and can be 2
q ND lSD
calculated as [19]: ϕ1 (r, z) |z=0 = VR − (17)
2εSi
⎧ 2
q ND lDD
1 ⎫ ϕ2 (r, z) z=L 1 +L 2 = VR + Vds − (18)
⎨ N ND
2 2⎬ 2εSi
D
E g (ND ) = β E × ln + ln + βC ,
⎩ βN βN ⎭
(b) Potential and electric field at z = L 1 is
(11)
ϕ1 (r, z) z=L 1 = ϕ2 (r, z) z=L 1 (19a)
where β E = 6.92 meV, β N = 1.3×1017 cm−3 and βC
= 0.5. {ϕ1 (r, z)} z=L = {ϕ2 (r, z)} z=L
1 1 (19b)
The solution of the 2-D Laplace equation can be obtained
in the form of a Fourier–Bessel series [22] by the eparation Using above Eqs. (17)–(19), the resultant expression for coef-
of variable method, ficients An1 , An2 , Bn1 and Bn2 , are expressed as
∞
K ni z
K z
KL
2 − l 2 e KaL
τ1 − η2 d S2 sinh KaL − τ1 e a + τ4 − τ2 lDD
K ni r − ni SD
Ui (r, z) = J0 Ani e a
+ Bni e a
An1 =
a 2 sinh KaL
n=1
for 0 < z < L , (12) (20)
KL
τ1 e − τ4 + τ2 lDD
a 2 − l 2 e KaL
SD
Bn1 = (21)
where a = tSi /2 and Ani , Bni are the coefficients. K n1 K n2 2 sinh KaL
are the eigenvalues calculated from the following equation τ2
An2 = An1 − exp {− (K L 1 /a)} (22)
2
τ2
a J0 (K ni ) − CGAAi εSi K ni J1 (K ni ) = 0, i = 1 and 2. (13) Bn2 = Bn1 + exp (K L 1 /a) . (23)
2
In a junctionless transistor, due to the same doping Coefficients of Eqs. (20)–(23) are given in the Appendix.
throughout the silicon film, the depletion region in the gated
portion extends for a length lSD and lDD into the source and 3.2 Drain current model
drain regions. To calculate the potential in the source/drain
depleted region, it is assumed that the electrostatic potential The drain current of each region is calculated separately.
is independent of r in source/drain depleted regions. The drain current below threshold voltage is calculated by
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292 J Comput Electron (2018) 17:288–296
−q
Vds
ISub = μeff tSi kT π n i 1 − e kT
L a
qϕ(r,z)
1 e kT dr dz, (24)
0 0
2πaμeff Cf1 E c α θshort VD1
2
Idlin1 = Vgs − Vths 2 VD1 −
(E c L 1 + VD1 ) 2
for 0 ≤ z ≤ L 1 (25)
2πaμeff Cf2 E c
Idlin2 =
(E C L 2 + VDS − VD1 )
2
α θshort VDS − V 2
D1
Vgs − Vths 2 (Vds − VD1 ) −
2
for L 1 ≤ z ≤ L 1 + L 2 . (26)
where
θshort = 0.1/ ∂ϕC min (0, z min )/∂ Vgs at Vgs = Vth (27)
Vths = Vth (1 − θshort ) (28) θshort L 2
β1 = β3 L 1 + (31)
E C = 2Vsat /μeff . (29) 2
α/2
β2 = Vgs − Vths (32)
Vsat is the saturation velocity. In order to obtain an unique θshort
β3 = . (33)
value of drain current in the device, these two currents are 2
equated to each other (Idlin1 = Idlin2 ) at z = L 1 leading to a
quadratic equation. The solution of the quadratic equation gives the value of VD1 ,
which is then substituted in any of the Eqs. (25) and (26) to
obtain the final linear region drain current.
β3 The drain current in the saturation region is calculated
β1 VD1
2
−β2 (L 1 + L 2 ) VD1 + VD1 VDS (VDS − VD1 ) = 0,
E C2 using the saturation velocity of electrons (Vsat ) by replacing
(30) Vds to Vdsat which is given as:
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J Comput Electron (2018) 17:288–296 293
Fig. 6 Impact of nanogap cavity width on the drain-off sensitivity parameter (SIoff )
π tSi μeff CGAA3 it can be seen that as the dielectric constant of neutral
Idsat =
1 + VEdsat
cL
(L − L sat ) biomolecule increases, both on current and off current
⎛ α ⎞ increases. The off-current shows higher sensitivity than the
θshort Vdsat
2
β V − V V − + on-current because the change in dielectric is more effective
⎝ gs ths
dsat
q 2 ⎠ , (34)
kT
θshort 1 − exp − (V ds − Vdsat ) below threshold voltage. Uricase in the cavity region shows
q kT
higher changes in drain-off current with the reference device
(without cavity). Whereas APTES shows the maximum sen-
where β is a technologically dependent empirical fitting sitivity (almost two decades) when it is compared to the air
parameter. L sat is the characteristic length of the velocity filled cavity region. The figure also demonstrates that the
saturation region and Vdsat is the drain saturation voltage and combination of gate-all-around structure with a junctionless
are given as: transistor shows good sensitivity. For better sensitivity, the
device should be operated in the subthreshold region.
Vdsat = Vgs − Vth / 1 + Vgs − Vth μeff /Lvsat . (35) Figures 6 and 7 show the drain-off sensitivity (SIoff )
parameter versus nanogap cavity width and nanogap cav-
ity length, respectively. The change in off-current is higher
4 Results and discussion than the change in on-current due to presence of neutral
biomolecules, therefore a new figure of merit SIoff is intro-
4.1 Sensitivity of GAA JLT for neutral species detection duced and defined as:
Figure 4 shows the impact of neutral biomolecule species Ioff (With Biomolecule Species)
SIoff = at Vgs = 0V .
on the center potential profile of GAA JLT. The cavity of Ioff (Without Biomolecule Species)
25 nm is considered near the drain end. A higher variation (36)
in potential is seen when different biomolecules are filled in
the cavity region. This indicates that the GAA junctionless Figure 7 demonstrates that drain-off current sensitivity
device is a better candidate for sensing applications. (SIoff ) is increased with the increase of both nanogap cav-
Figure 5 illustrates the impact of neutral biomolecule ity width and nanogap cavity length. A drastic increase in
species on transfer characteristics of GAA JLT. From Fig. 5, SIoff is observed when the cavity length is increased. This is
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J Comput Electron (2018) 17:288–296 295
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