A Novel Absolute Magnetic Rotary Sensor

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This article has been accepted for publication in a future issue of this journal, but has not been

fully edited. Content may change prior to final publication. Citation information: DOI
10.1109/TIE.2014.2387794, IEEE Transactions on Industrial Electronics
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

A Novel Absolute Magnetic Rotary Sensor


Zijian Zhang, Fenglei Ni, Yangyang Dong, Chuangqiang Guo, Minghe Jin and Hong Liu

Abstract—To measure angular position of motors, robot joints, resolver-to-digital conversion method [ 7 ] to improve
etc, an absolute magnetic rotary position sensor is developed, performance of the resolver. In [8], a linear inductosyn sensor
which possesses small-size, light, robust, and easy-to-integrate with one excitation coil and two sensing coils had been
properties. The sensor consists of two inductors, a code disc, and a
developed. All these magnetic sensor have many advantages
signal processing part. Both of the two inductors are embedded
with a big planar spiral copper coil and four smaller ones by such as robustness and tolerance of dirt, oil, vibration and
employing MEMS technology, and there are two circles of regular low-noise effects [9,10,11]. However, the drawbacks of heavy
copper sheets listing on the surface of the code disc. Besides, weight and large volume are limitations to the sensors.
mathematical analysises of the inductor structure, the In the other type, the permanent magnet is commonly used to
relationships of position and dimension among the coils and the generate excitation signals and the magnetic encoder is one
copper sheet are addressed. Finite element simulation results
typical delegate. Based on the arrangement forms, the magnetic
demonstrate that one group of the optimal sine and cosine signals
can be generated by each inductor. Then, the absolute position encoder can be divided into two types. In [12], the spin valve
measurement method is validated by mathematical method. At used to generate signals was listed on the axial direction of the
last, experiments are performed on the high-speed and the permanent magnet. In this form, the sensor cannot be used in
low-speed testing platforms to assess effectiveness and accuracy of the hollow devices. In the other form, the sensing elements are
the sensor. on the radial direction of the magnetic ring. To the encoders of
this form, Z signal used to determine absolute zero point
Index Terms—Absolute magnetic rotary sensor, angular sensor,
electromagnetic sensor, magnetic encoder, resolver, sine-cosine
generates only once per circle. Therefore, they are usually
sensor. relative position sensors. To measure absolute angular position,
[13] developed a multi-pole magnetic rotary encoder. However,
I. INTRODUCTION the encoders are difficult to be magnetized [14]. Besides, as the
sine and cosine analog signals have to be transformed to digital
A bsolute angular position measurement is important in
automotive industry such as motor and robot arm control
[1,2]. The magnetic sensors, one type of the most frequently
pulse signals, the advantages of sinusoidal signals such as
simple, accurate and reliable to represent angular position are
lost [15]. What’s worse, the encoders require additional signal
used sensors in servo drive systems [3], have been developed
interpolation process both in hardware and software [16, 17]
by many different researchers and companies [4]. According to
and various dedicated converter schemes were designed
the excitation signal-generating mode - the electromagnetic
[18,19]. To make up these disadvantages of the encoders, some
induction or the Hall effect, the magnetic sensors are divided
other sensors were developed. Seung-Ho Jeong etc. [14] had
into two types. 1

designed a rotary magnetic position sensor with a sinusoidally


Resolvers and the inductosyn sensors belong to the first type
magnetized permanent magnet and two hall elements. The
as their signals are generated by the excitation coils. Their
position information is obtained as the magnetic flux density of
primary winding resides on the rotor which is energized by a
the permanent magnet is different in different position. An
high frequency alternating voltage, two secondary windings
absolute magnetic encoder which has four hall sensors and a
located in quadrature position of the stator sense magnetic filed
magnet ring was designed in [9]. As the magnetic ring and the
changes and export sine and cosine signals [5]. Most recent
hall sensors rotating around different axes, the four
researches focused on the resolvers including improving
trigonometric function signals with different phases and
mathematical model [ 6 ] and developing novel
amplitudes can be generated to determine angular position. In
[ 20 ], four linear hall sensors were displaced (90+k360)°
Manuscript received June 22, 2014; revised September 5, 2014 and October
16, 2014; accepted December 02, 2014. electrically to determine sine and cosine signals and then the
Copyright (c) 2014 IEEE. Personal use of this material is permitted. absolute position can be obtained. However, in all these sensors,
However, permission to use this material for any other purposes must be the permanent magnets are used which can be easily disturbed
obtained from the IEEE by sending a request to pubs-permissions@ieee.org.
The work was sponsored by the National Key Basic Research and by the external magnetic field.
Development Program (973 Program) 2013CB733103 and National High Compared with all magnetic sensors, an absolute magnetic
Technology Research and Development Program of China (State 863 project) rotary sensor is developed in the paper. Similar to the resolvers,
2011AA7045041. it has an excitation coil which can generate high frequency
Zijian Zhang, Fenglei Ni, Chuangqiang Guo, Minghe Jin and Hong Liu are
with State Key Laboratory of Robotics and System, Harbin Institute of carrier wave signals. Therefore, it is resistant to low frequency
Technology, Harbin, Heilongjiang, 150001, China (corresponding author to magnetic field disturbance. Besides, a code disc is used to
provide phone: 0451-86402360; fax: 0451-86418306; e-mail: minimize weight and volume of the sensor to ensure the sensor
hit_lfn2002@aliyun.com). can be integrated into the hollow devices. Furthermore, the
Yangyang Dong is with Shenzhen Graduate School, Harbin Institute of
Technology, Shenzhen, Guangdong, 518055, China (e-mail: sensor has common advantages compared with the magnetic
dongyang1314@126.com). sensors such as robustness, tolerance to dust and oil.

0278-0046 (c) 2013 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission. See
http://www.ieee.org/publications_standards/publications/rights/index.html for more information.
This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. Citation information: DOI
10.1109/TIE.2014.2387794, IEEE Transactions on Industrial Electronics
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

II. WORKING PRINCIPLE ANALYSIS OF THE SENSOR specific amplitude and phase relationships, the position and
dimension relationships of all the coils and the copper sheets
A. Working principle of the sensor are discussed.
Working principle of the sensor is illustrated in Fig.1. B. Position and dimension relationships discussion of the
five coils
The relationships of dimension and position among all these
five coils and the copper sheet could refer to Fig.2. To be easily
observed, the coils are represented by the circles in Fig.2(a). In
the designing process, amplitudes of signals generated by L2 &
L3 and L4 & L5 are equal with each other and the phase
difference is 90 degree.

Fig. 1. Structure of the sensor.


There are five planar spiral copper coils L1-L5 and a copper
sheet C which are represented by different colors in Fig. 1. If a
high frequency sine voltage signals is applied to the big planar
spiral copper coil L1, a time-varying magnetic field can be
generated. The voltage signal is expressed as follows:
 2π 
V = A sin ( w × t ) = A sin  ×t (1)
 T 
In (1), A, w and T are amplitude, angular frequency and period
Fig. 2. Structure of the inductor.
of the signal.
Therefore, the position and dimension relationships among
The current of the big spiral coil is calculated by the following
equation: all the five coils are established and one group of the answer is

the following equation.
2A w× L  (2)
I = sin  wt − arctan   D 23 = D 24 = D35 = D 45 = 5R
Z  RL  
 3 5
where Z = RL 2 + ( w × L )  sin θ 2 =
2

 10 (5)
In (2), |Z|, RL and L are impedance, resistance and inductance  5
 sin θ 3 =
of coil L1, respectively.  5
According to the electromagnetic induction, the voltage  10
r = ( + 1 )R
signals generated by one of the smaller planar spiral copper  2
coils under effect of the big coil can be expressed as: If the large coil is located in the original point of the
d Φ 21 dI coordinate system, the center position parameters of the four
u 21 = = -M =
dt dt (3) smaller coils are easily obtained.
- 2 AwM  w× L  w× L O ( 0 , 0 ,0 )
sin  wt − arctan  cos( wt − arctan ) 
RL + ( w × L )  R  RL  A ( -1 .5 R , 0 .5 R , Z )
2 2
L
 (6)
From (3), the four smaller copper coils generate cosine  B ( 0 .5 R ,1 .5 R , Z )

voltage signals under effect of L1. M denotes mutual inductance  C ( - 0 .5 R ,- 1 .5 R , Z )
coefficient.  D (1 .5 R ,- 0 .5 R , Z )

As shown in Fig.1(a), the magnetic filed generated by coil L1
After determining the position and dimension relationships
is affected if there is a conductor such as a copper sheet moving
of the coils in the XOY plane, the distance between the big coil
under the coils. According to the electromagnetic wave
and the smaller coils along Z-axis is discussed.
propagation theory, the electromagnetic wave can be reflected
by the cooper sheet. Therefore, when the copper sheet moves From equation (3), u21 is proportional to M. Therefore, to
under one of the smaller coils, the magnetic flux flowing into it maximize u21, we acquire the maximum value of M. As the
becomes small. Consequently, the mutual voltage u21 is small values of the mutual inductance coefficients of all these four
as shown in equation (3). smaller coils and big coil are the same, only the second coil L2
As shown in Fig.1(b), the amplitudes of the signals are is taken for example in the following analysis.
different when the copper sheet located at different positions. It is known that the planar spiral coil is treated as the
Therefore, as the cooper sheet moving from one side of coil L1 concentric coils approximately. Assuming the distance between
to the other side, the regular signals such as sine and cosine any two neighboring coils of L1 and L2 are Δ1 and Δ2, the
ones are generated. Five typical points in the signal generating concentric coil numbers N1 and N2 of L1 and L2 are calculated as
process are given in Fig.1(b). To ensure all the signals with follows:

0278-0046 (c) 2013 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission. See
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This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. Citation information: DOI
10.1109/TIE.2014.2387794, IEEE Transactions on Industrial Electronics
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

 rmax − rmin r j = r - ∆1 ( j - 1) j=1 to N 1 (15)


 N1 = ∆1
+1
 (7)  k ij 2 
 Ψ ij ( k ij ) =  1 − (16)
 N = R max − R min + 1   K ( k ) − E ( k )
 2 
 2 ∆2
According to elliptical equations,
where rmax, rmin and Rmax, Rmin are the maximum and the
 π  ( )
∞  2 n − 1 !! 
2

minimum radiuses of the planar spiral coils L1 and L2,  K ij ( k ij )= Fij ( ρ = π / 2, k ij ) = 1 + ∑  2n 
 k ij 
respectively.  2 n =1  2 n !!   (17)
 
From references [ 21 , 22 ], there are two circles named 
 π  ∞  ( 2 n − 1)!!  k ij 
2 2 n

primary and secondary coils. If the primary coil is injected with  E ij ( k ij ) = E ij ( ρ = π / 2, k ij ) = 1- ∑   
2  n =1  2 n !!  2 n − 1 
voltage signals, the mutual inductance coefficient M of two   
circular circles is calculated as follows: Therefore,
µ R 2π [ p1 cos ϕ + p 2 sin ϕ + p 3 ]Ψ ( k )  nπ k ij 2 π  ∞  ( 2 n − 1)!!  2 n
2

Ψ ij ( k ij ) = 
(8)
M = 0 S
π ∫
0

k V03  2n − 1
−  ∑   k ij
(18)
 4  n =1  2 n !! 
In (8), μ0 is permeability of vacuum. Rs and Rp are radiuses of In the equation above, (x2,y2,z2): center location of the
the secondary and primary coils, respectively. The coordinates smaller coil L2. r: the maximum radius of the coil L1. rj: the
(xC, yC, zC) defining the center of the secondary coil. The radiuses of coils L1, j=1 to N1. Δ1: the radius difference between
secondary coil is located in a plane λ=ax+by+cz+d=0. Other any two neighboring coils of L1. φ: integral cell of the coils.
parameters are expressed as (9). Taking (5), (6) and all the conditions into the equation (10),
yC R y
p1 = ± γ = ± ;p 2 = m β ;p 3 = S ;p 4 = ± γ = ± C ; M is rewritten as follows:
RP RP RP
µ 0 Ri
N N

× ∑ ∑ ∫ ℜdϕ
1 2

x 4V0 M =
p 5 = m β = m C ;k = π j =1 i =1
0

RP A0 + 2V0 (19)
nπ k ij 2π ∞ (2 n − 1)!! n 2
R   ρ 
2 2 (9) ( ± y 2 cos ϕ m x 2 sin ϕ + Ri )( − )∑ ( k ij )
RS  yC x  2n − 1
A0 = 1 +  S  +   +2 ± cos ϕ m C sin ϕ  ℜ=
4 n =1 2 n !!
 P
R  P 
R R P  R P R P  1
2Vij2

2  b2c2  c2 abc  r j 2 + z 2 2 + r j 2Vij2 + 2 r j 2Vij
V0 = α   1 − 2 2  cos ϕ + 2 sin ϕ + 2 sin 2ϕ 
2 2 2

 l L  l l L  As shown in equation (19), different concentric coils have


β ab - γ l 2 2αβ c the similar expressions, only the condition Ri=R and rj=r are
+ β 2 + γ 2 m 2α cos ϕ m sin ϕ ;
lL l discussed to simplify the discussion. The simplified expression
of (19) is shown in (20).
From (7) and (8), the mutual inductance coefficient of L1 and µ0 R 2π

L2 is calculated as follows:
M =
π ∫0
ℵdϕ

 R  p cos ϕ + p sin ϕ + p  Ψ ( k )  nπ k 2π ∞ ( 2 n − 1)!! 2 2 n (20)


µ0 )∑ (
N1 N2
 i  1j 3 ij  ( y 2 cos ϕ − x 2 sin ϕ + R )( −

M L1 ,L2 = ∑∑ ∫  dϕ (10) ) k
2j ij

π   2n − 1 4 n =1 2 n !!
j =1 i =1
0
k V 3
ℵ=
 ij ij  1
2V02
In (10), r 2 + z 2 2 + r 2V 02 + 2 r 2V0
Ri = R - ∆2 ( i - 1) i=1 to N 2 (11) The equation (20) is simplified as follows:
μ0: permeability of vacuum which is often used as the  ellipticE ( R ,h ,cos ϕ , sin ϕ )  2π (21)
M =K 
permeability of the copper. R: the maximum radius of the coil  + ellipticK ( R ,h ,cos ϕ , sin ϕ )
0

L2, Ri: the radiuses of coils L2, i=1 to N2, Δ2: the radius
The relationship between M and h is established through
difference between any two neighboring coils of L2. parameter R. Sampling different points of the ratio h/R in the
The smaller circles are located in a plane λ=ax+by+cz+d=0, θ section [0, 100] and the relationship curve is illustrated in Fig. 3.
is the angle between Z-axis and Z’ axis. In the paper, the plane λ It is known that with the distance increases, the absolute value
is parallel to XOY, the plane expression λ=cz+d=0 and a=b=0, of M decreases. Therefore, if the condition h ≤ 2.4R is satisfied,
θ = 0. Therefore, the other parameters are defined as follows. the distance is as small as possible to maximize the absolute
 y value of M. Otherwise, we set h=5R as there is a peak value of
 p1 j = ± 2
 rj M at this point.
 (12)
 x2
 p2 j = m j=1 to N 1 ,i=1 to N 2
 r - ∆1 ( j - 1)
 R- ∆2 ( i - 1)
 p 3ij =
 r - ∆1 ( j - 1)

4V0 (13)
k ij = r j
r j 2 + z 2 2 + r j 2Vij2 + 2 r j 2Vij

Vij2 =
1
rj2
( Ri2 + x2 2 + y 2 2 ± 2 Ri y 2 cos ϕ m 2 Ri x2 sin ϕ ) (14)

0278-0046 (c) 2013 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission. See
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This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. Citation information: DOI
10.1109/TIE.2014.2387794, IEEE Transactions on Industrial Electronics
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

Fig. 3. Numerical relationship of M and h.

C. Copper Sheet Dimension and Position Discussion


The dimension parameters Wc and Lc of the copper sheet
shown in Fig. 2 are easily obtained.
W C = 2 R (22)

 LC ≥ 2 r = ( 10 + 2) R Fig. 4. Simulation model.
The five planar spiral copper coils are simplified to be five
The width parameter Dc of the copper sheet is larger than the
coils. A sine voltage signal with frequency of 40 kHz is applied
skin depth of the copper as shown in the following equation.
to the big coil. The moving speed of the copper sheet is 13 m/s
D c > δ = 2 ( w µσ ) (23)
and the simulation time is 1.18 ms. As the copper sheet moving
where w is the frequency of the electromagnetic wave, μ is the under the four smaller coils, the magnetic flux flowing into the
permeability of the copper, σ is the conductivity of the copper. smaller coils is influenced. The lower part of Fig. 4 shows us
In industrial applications, the permeability of vacuum μ0 = the magnetic field intensity changing process of coil 2 as the
4π×10-7 H/m is often used as the permeability of the copper. copper sheet moving from one side of the coil to the other.
The conductivity of the copper σ is about 5.8×107S/m.
Therefore, height of the copper sheet is determined by the
frequency of the electromagnetic wave. For example, assuming
the frequency of the signals is about 100MHz, the skin depth of
the copper sheet is about 1.66×10-2mm.
The parameter D, the distance between the coil L1 and the
copper sheet along the Z-axis, is determined by the
electromagnetic wave propagation theory. When the
electromagnetic wave propagates from air to the copper, the
reflection phenomenon is arising on the interface. Form the
Fresnel formula, the larger of the incident angle, the more
obvious reflection effect is. The magnetic induction lines
generated by coil L1 are the concentric circles around the coil L1
according to the right-hand rule. Therefore, to increase incident
angle of the magnetic field, the value of parameter D is as small
as possible. Besides, based on the Maxwell's equations, the
magnetic field strength is inversely proportional to the distance.
Therefore, the smaller of the distance, the more magnetic waves
are reflected and signal amplitudes of the inductor are larger.
D. Signals Generation Simulation
The simulation model which is a simplified model of the
sensor is established shown in Fig.4 and the signal generation
simulation is done in the software-ANSOFT. Fig. 5. Signals of the four small coils.
The detailed influence to the induced voltage of the four
smaller coils can be seen in Fig. 5. From equation (3), we know
the induced signals of the four smaller coils are cosine signals.
Besides, the frequency of the signals generated by the smaller
coils is same as the excitation sine signals. As the coils of the
same group are rotated in inverse direction, the signal phase
difference between coils L2, L3 and L4, L5 is π radian. Without
disturbance, the four groups of signals have the same amplitude.

0278-0046 (c) 2013 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission. See
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This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. Citation information: DOI
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IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

However, as shown in Fig. 4, amplitudes of the induced voltage θ 1 ≥ θ 2 ⇔ N1 = N 2 (26)



signals vary with positions of the copper sheet. θ 1 < θ 2 ⇔ N1 = N 2 + 1
The summations of induced voltage signals of coil 2 and coil According to (25) and (26), the absolute angular position of
3, coil 4 and coil 5 are presented as blue and red lines in Fig. 6. the point P is obtained as follows.
Connecting all the maximum and minimum values of the θ 1 − θ 2 if (θ 1 − θ 2 ) ≥ 0
signals together, the sine and cosine signals are obtained. θP =  θ 1 , θ 2 , θ P ∈ [ 0, 2 π ) (27)
θ 1 − θ 2 + 2π if (θ 1 − θ 2 ) < 0
Therefore, the method to measure absolute angular position
is validated. If the angle values θ1 and θ2 are obtained, the
absolute angular position of any point P on the circle is easily
calculated via their difference values. This method is easy to be
used in the absolute angular position sensors.
Algorithmic flowchart of the method achieving to absolute
angular position is shown in Fig. 8. Each inductor generates
four channels of differential signals SinP+, SinP-, CosP+ and
CosP-. Through signal processing part, four channels of
standard trigonometric signals dpSin11, dpCos11, dpSin22 and
Fig. 6. Sine and cosine signals of the sensor. dpCos22 are obtained. Signal processing part including the
band-pass filter and amplitude & phase judgment is presented
E. Absolute Angular Position Measurement Method
in section IV. Based on the four channel signals, the angle value
To measure absolute angular position, a method which is θ is obtained. In the algorithm, tangent function is used to
similar to the vernier caliper measuring principle is proposed,. calculate angle value to reduce errors caused by amplitude
According to the method, a code disc with two circles of copper unequal between sine and cosine signals. Besides, A, B and Δp
sheets is designed as shown in Fig. 7. which are the amplitude, median and phase compensation of
the signals are considered in the calculating process. Then, the
angle θpi(i=1,2) which belong to [0, π/2] are obtained. In the
following, cosine signals are used to judge the quadrant of the
angles θpi to minimize measuring errors. Cos11 and Cos22
represent cos(θp1) and cos(θp2), respectively. According to the
judgment, θi(i=1,2) changing range from 0 to 2π are generated.
Then, based on the equation (27), we compare the angle values
of θ1 and θ2. If θ1 ≥ θ2, their different value Δθ is the absolute
angular position. However, if θ1 < θ2 , the absolute angular
position value θabs is obtained by (Δθ+2π).

Fig. 7. Code disc of the sensor.


The numbers of the copper sheets on the outer and inner
circles are N and (N-1), respectively. The signals of sine and
cosine are generated between any two neighboring copper
sheets and therefore, the angle changing range between any two
neighboring copper sheets is 360 degree. Two angle values are
calculated by the outer and the inner circles, respectively.
Therefore, as shown in Fig.7, any point P is expressed in
different forms by the outer and inner signals.
θ1 2π θ2 2π
θP = +N1 × = +N × θ 1 , θ 2 , θ P ∈ [ 0, 2 π ) ; (24)
N N ( N − 1) 2 ( N − 1)
N = 1, 2,3 L n ; N 1 = 0,1, 2,3 L ( N − 1) ; N 2 = 0,1, 2 L ( N − 2 )
where N1 and N2 are the integral numbers of the copper sheets
on different circles between P and the initial line, respectively,
θ1 and θ2 are the angle values calculated by the sine and cosine
signals.
The equation (24) is changed into the form as follows.
θ − θ 2 when N 1 = N 2 (25)
θ P1 = θ P2 =  1
θ 1 − θ 2 +2 π when N 1 = N 2 + 1
Through analyzing numerical relationships of N1, N2, θ1 and Fig. 8. Flowchart of absolute angular position acquisition.
θ2, the following equivalent conditions are obtained.

0278-0046 (c) 2013 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission. See
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This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. Citation information: DOI
10.1109/TIE.2014.2387794, IEEE Transactions on Industrial Electronics
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

F. Code Disc The other side of the signal processing board is mainly
Main structure of the code disc is illustrated in Fig.7. N and composed of five parts including MCU(Micro Control Unit),
ROO are acquired according to the requirements of the ADC (Analog to Digital Converter), ASPC(Analog Signal
applications. Then, the other parameters of the outer circle are Processing Circuit), C&P(Communication and Power) part and
calculated as follows: JTAG(Joint Test Action Group). As the analog sine and cosine
  LC  signals are generated by the inductors, they have to be filtered
 N = 2π  ROO − 2  L P and changed to single signals from difference ones by ASPC
   (28)
 part. Then, the signals are converted to digital ones thorough
 ( OO
W + W OI ) 3
 L P = 2
×
2
the ADC. Besides, the digital signal processing and the absolute
In (28), LP is the signal period length of the outer circle. position angle calculation process are undertaken by the MCU.
(WOO+WOI)/2 is the width of the copper sheet of the outer circle At last, the absolute position angle P is transmitted through the
which is about 2/3 of the period length according to experience. C&P part.
Then RIM, the central circle radius of the inner copper sheets, B. Establish The Experimental Platforms
is determined as equation: To test and calibrate the senor system at different rotating
R IM = ( N -1) LP 2π = 3( N -1)(W IO + W II ) 8π (29) speeds, two experimental platforms are established. Fig.10
gives us an illustration to the experimental platform with the
III. DESIGN OF THE SENSOR AND THE EXPERIMENTAL maximum rotating speed is 5 r/min while the high rotating
PLATFORM speed experiment setup which can reach up to 1000 r/min is
shown in Fig.11.
A. Design of The Sensor
Main structure of the sensor can be seen in Fig.9 and two
inductors, the code disc and the signal processing circuit board
constitute the sensor.

Fig. 10. Low-speed experiment platform.


In the low-speed experimental platform, the sensor
installation device is labeled (a) in Fig.10 and the detailed
structure can refer to the 3D decomposition figure shown in the
lower part of Fig.10. Parts 4 and 7 are used to fix the code
disc(5) and the signal processing circuit board(6), respectively.
Fig. 9. Main structure of the senor.
In this paper, the five planar spiral copper coils mentioned The part 7 is a three dimensional movement platform which can
above are embedded into the inductor using MEMS adjust positions of the inductors in XYZ directions. In fact, the
(Micro-Electro-Mechanical System) technology. The coils etch part 3 is a highly integrated robot joint used to rotate the code
on different layers of the silicon chips. Configuration and the disc. The code disc is fixed on the joint through part 4. The
X-ray photograph of the inductor are shown in Fig.9 (b). These output part of the joint is labeled 3-1 and an absolute
two inductors are fixed on one side of the board as shown by photoelectric encoder with measuring precision of 0.03 degree
Fig. 9(e). Their centers are on the central circles of the outer and is installed in this part to calibrate the sensor. Part 1 and 2 are
the inner copper sheets and the angle between the inductors is the assisting components to fix the joint on the platform 8. In
90 degree. the experimental platform, all the signals such as the position
The code disc, another part of the sensor is shown in Fig.9(c). information measured by the sensor and the photoelectric
There are two circles of copper sheets listing on the surface. encoder, status of the joint are delivered to the joint controller
The substrate material of the code disc is copper-clad laminate. represented 3-4 in Fig.10. Part (b), a signal acquisition system
is developed to store, observe and process signals of the joint

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controller. To be easily observed in the testing process, an IV. EXPERIMENTAL RESULTS AND ANALYSIS
oscilloscope (d) is used. Some other necessary components Based on the testing platforms above, the experiments with
such as the power system (c) is elaborated. different rotating speeds are carried out.
In the high-speed experimental platform, a robot joint
labeled (5) in the low part of Fig. 11 is used. An absolute A. Experiment with low rotating speed
magnetic encoder with measuring precision 0.05 degree is In this experiment, rotating speed of the code disc is about
inserted in the joint to measure position of the motor. However, 2.47r/min and the original signals of the sensor are shown in
code disc (2) of the sensor is fixed on the motor output port Fig. 12. The number of the sampling points is 375621 and the
through a clutch (4). Electrical system of the joint (6) is placed total sampling time is about 75.1s. In each circle, the number of
on the platform. Besides, similar to the experimental platform the sampling points is about 121400 and therefore, there are
above, the power system (b), oscilloscope (c) and the signal two integral cycles shown in Fig. 12. Sin1 and Cos1 are the
acquisition system (d) are used. signals of the outer inductor and the others are the inner one’s.
Supply voltage of the inductors is 2.5v and the amplitudes of
the signals are between 0 to 2.5v. Comparing with the same
channel signals of different circles, it is clear that the signals
have better performance on repeatability. Both of the sine and
cosine signals of the same inductor have a similar changing
tendency at the same position.

Fig. 11. High-speed experiment platform.


Some important parameters of the sensor and the
experimental platforms are listed in TABLE I.
TABLE I
IMPORTANT PARAMETERS OF THE SENSOR AND THE EXPERIMENTAL
PLATFORM

Items Values

inner radius of the sensor 21 mm


outer radius of the sensor 40 mm
width of the sensor ≤4.5 mm
weight of the sensor 19 g
distance between the copper sheets and the inductors 0.2 mm
dimension of the inductor 9×8×0.9 mm3
width of the copper sheet 0.85 mm
length of the copper sheet 3.3 mm
numbers of the copper sheets on the outer circle 150
numbers of the copper sheets on the inner circle 149
radial run-out error of the code disc +0.02 mm
side face run-out error of the code disc ±0.03 mm
communication clock of the sensor 6.25MHz
absolute position can be obtained once 200us Fig. 12. Original signals of the sensor at 2.47r/min.
low-speed experiment platform ≤5 r/min To be easily observed, three cycles of the signals of the two
high-speed experiment platform ≤1000 r/min
inductors are presented in Fig.13, respectively.

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dCos11 and dSin11 are the fitting signals of Cos11 and Sin11,
respectively.

Fig. 15. Filtered and ideal signals of SinP1 and CosP1.


In order to calculate conveniently, dCos11 is changed to the
Fig. 13. Selected signals of the inductors.
standard trigonometric function dpCos11 and dSin11 is
In Fig.13, the blue ones are one cycle signals with maximum converted to dpSin11 while maintaining amplitude, phase and
amplitudes and the red ones are with minimum amplitudes. median value relationships between the signals.
Besides, in each inductor, two cycles of random signals are  dpCos11 = cos( w × t ) (31)

selected which are represented by green color in Fig.13.  dpSin11 = A sin( w × t + ∆ P ) + B
From Fig. 13, the high frequency noise exits on the signals. In (31), dpCos11 is the standard trigonometric signal
There are amplitude, phase and median value differences transformed from dCos11 and dpSin11 are the signals
between the sine and cosine signals of the same channel. corresponding to dpCos11. A, Δp and B are amplitude, phase
Therefore, the signals need to be processed in these two and median value relationships of dpCos11 and dpSin11,
aspects. respectively.
Firstly, to eliminate noise, the amplitude-frequency Based on the processed signals SinP1 and CosP1, the angle
characteristics of the signals are acquired by FFT method. As value is obtained shown in Fig. 16. Fig. 16 gives us an
frequency characteristics of all the four channel signals are the illustration to one cycle of angle value curve of the inductor 1.
same, we take the SinP1 signal for example and the analysis The blue line is obtained by Cos11 and Sin11 while the red one
results are illustrated in Fig. 14 is calculated by dpCos11 and dpSin11. It is obvious that
linearity property of the angle curve is improved after
compensating amplitude, phase and median value difference
between sine and cosine signals.

Fig. 14. Amplitude-frequency characteristics of SinP1


From Fig. 14, the core frequency of the signals is about
6.3Hz. Therefore, a band-pass filter with bandpass frequency is Fig. 16. Angle value curves.
0.3-12 Hz is designed. One cycle of SinP1 and CosP1 signals Fig. 17 gives an illustration to the absolute angular position
after filtering can be seen in Fig.15. It is known that the curves curves. In the upper part of Fig. 17, the red line is measured by
are more smoothly after filtering the noise. Besides, the time the absolute magnetic rotary position sensor and the position
delay caused by the filter is about 6ms which can be accepted in curve measured by the absolute photoelectrical encoder
the applications. represented as the blue line is used to calibrate the sensor
Secondly, to analyze amplitude, phase and median value designed in the paper. From Fig. 17, these two lines are in good
relationships between cosine and sine signals, the curve fitting agreement. Taking the blue line as the standard, measuring
method is used. dCos11 and dSin11 signals are used to fit error of the sensor can be obtained shown in the lower half part
Cos11 and Sin11 signals. The general expression of Cos11 and of Fig. 17. The measuring precision of the sensor is [-0.5, +0.5]
Sin11 signals are shown in equation (30). degree.
 Sin11 = dSin11 = A1 sin( w × t + ∆ P1 ) + B1 (30)

 Cos11 = dCos11 = A2 cos( w × t + ∆ P2 ) + B 2

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Fig. 19. Absolute angular position curves and errors.


Fig. 17. Absolute angular position curves and errors. Based on the original signals, the signal processing which is
similar to the part B is undertaken. Through signal filtering and
B. Experiment with high rotating speed
compensation, the absolute angular position is obtained as
In this experiment, rotating speed of the motor is about shown in Fig. 19. In the upper part of Fig. 19, the red line is
720r/min and the original signals of the sensor are shown in Fig. measured by the absolute magnetic rotary position sensor and
18. The number of the sampling points is 625 and the total the position curve measured by the absolute magnetic encoder
sampling time is about 0.125s. One entire circle is from 0.03s to represented by the blue line is used to calibrate the sensor.
0.113s. Measuring error of the sensor shown in the lower half part of
Fig. 19 is [-0.5 +0.5] degree which is the same to the measuring
precision of part B.
C. Error Analysis
From the equations (30) and (31), the position angle can be
calculated as follows.
 (dpSin11 - B - A sin ∆ P × dCos11) 
θ = a tan   (32)
 A cos ∆ p × dCos11 
A = A1 A2 ; B = B1 − B 2 ; ∆ p = ∆ p1 − ∆ p 2
In (32), θ is relevant to the parameters A, B and Δp and
therefore, their errors lead to measurement errors of absolute
angular position sensor. Firstly, as Fig. 12 and Fig. 18 show,
signal amplitudes changes with positions and therefore, the
values A are various at different positions. Based on A1/A2 ≠
(A1+Δ)/(A2+Δ), it causes errors to the absolute angle value.
According to the experiments above, the maximum and
minimum values of A1 are 2.39v and 2.08v and the maximum
and minimum values of A2 are 2.26v and 1.97v. The amplitudes
changing rate of the original signals are about 12.4% and 11.6%,
respectively. However, the amplitude differences of any two
neighboring signals, named Δ1 and Δ2, are 0.149v and 0.04v,
respectively. Their changing rates are 0.6% and 0.8%. From the
experiments results, the amplitude values are the same at the
same point of different circles, which means the sensor has
good performance on consistency. From this phenomenon, it
indicates that the errors are caused by hardware errors. For
example, the manufacturing errors of the senor and
experimental platform. They lead to the distances between the
code disc and the inductors are not same at different positions.
Besides, the error of the median value B is another reason
leading to measuring errors. From the experiment results, the
Fig. 18. Original signals of the sensor at 720 r/min. median value error of different signals is about 0.025v and

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takes about 1.0% ratio of the signals. It is also caused by the magnetic sensors. As shown in TABLE II, width of AMRS-1 is
distance error. As the amplitudes of sine and cosine signals vary only 4.5mm which is much smaller than other sensors.
in different cycles, the median values B1 and B2 are different in (2) It is easy-to-integrate. As the inner diameter of AMRS-1
different cycles and consequently, B is not constant in the is with large inner diameter and small width, it is easy to be
whole circle. integrated into the devices with hollow structures such as robot
At last, the phase difference Δp is another parameter which joint.
has effect on the values of the absolute angle. Through signal (3) It is light. Weight of the sensor is only 19g which is only
processing, changing range of the phase difference Δp1 and Δp2 half weight of the other magnetic sensors.
is from 0 to 0.1 radian. In theory, it is a constant value in the (4) Like some of the other magnetic sensors, it has no
whole circle. However, as the manufacturing errors of the requirement to the rotating speed.
copper sheets, the phase differences of sine and cosine are (5) The excitation signals of the sensor is 4MHz and
different in different periods. therefore, it can tolerant to the disturbance and vibration with
From the analysis above, measuring errors of the sensor are frequency of 2MHz which is much higher than the other
mainly caused by the manufacturing errors of the sensor and the commercial sensor.
experimental platform. All the errors are accumulated and lead (6) Similar to the other magnetic sensors, it is robustness and
to the absolute position measurement error reaching up to [-0.5º, tolerance to dust and oil.
+0.5º] which is about 0.27% of the total measurement range. As discussed above, measuring precision of the AMRS-1 is
low comparing with the commercial magnetic sensors listed in
V. CONCLUSION the TABLE II. However, it is only a prototype of the sensor. In
In the paper, a novel absolute magnetic rotary sensor has the developing process, we find some reasons for low
been developed. The output signals are optimized through measuring precision, and some further measures will be taken
analysis of the dimension of the planar spiral copper coils and to improve performance of the sensor. Firstly, design a
the position relationships among the big coil, the smaller coils mechanical structure packaging the sensor to improve the
and the copper sheets. The simulation and experiment results mechanical assembly precision of the sensor. Besides, the
show effectiveness of the sensor. Through calibration with high signal conditioning circuit of the sensor should be optimized.
precision encoders, measuring precision of the sensor is [-0.5º, Then, a parameter identification method will be developed to
+0.5º] which is low comparing with some commercial sensors. identify the phase, amplitude and median value differences
However, it still has some advantages and the detailed among the signals. At last, the calibrating method and devices
parameters comparison with some other commercial absolute will be designed to improve measuring precision of the sensor.
magnetic sensor can be shown in TABLE II. In the table,
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This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. Citation information: DOI
10.1109/TIE.2014.2387794, IEEE Transactions on Industrial Electronics
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

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Hong Liu received the Ph.D. degree from Harbin


Zijian Zhang received the B.S. degree from Institute of Technology, Harbin, China, in 1993.
University of Jinan, Jinan, China, in 2008 and the M.S. From 1991 to 1993, he was a Research Fellow with
degree from Harbin Institute of Technology, Harbin, the Institute of Robotics and System Dynamics,
China, in 2010. He is currently pursuing the Ph.D. Germany Aerospace Robotics Establishment,
degree from the State Key Laboratory of Robotics and Wessling, Germany. He is currently a Professor with
Systems of Harbin Institute of Technology, Harbin, the State Key Laboratory of Robotics and System,
China, all in mechanical engineering. Harbin Institute of Technology. His current research
His research interests focus on sensors, electrical interests include the development of a dexterous
system design of robot arms, synchronous impedance robot hand, space robotics, sensors, control
control and multi-spaces priority impedance control. algorithms, etc.

Fenglei Ni received the B.S. and M.S. degrees in


electrical engineering and the Ph.D. degree in
mechanical engineering from Harbin Institute of
Technology, Harbin, China, in 1998, 2002, and 2007,
respectively.
Since 2012, he has been a Associate Professor in
mechanical engineering with Harbin Institute of
Technology. His research interests are ac motor
drives, power converters, and robot control
technologies.

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