USOO7913623B1
(12) United States Patent
Fan et al.
(54) MEMS FUZE ASSEMBLY
(75) Inventors: Lawrence Fan, Vienna, VA (US);
Michael Beggans, Waldorf, MD (US);
Ezra Chen, Potomac, MD (US); Gerald
Laib, Olney, MD (US); David Olson,
Chesapeake Beach, MD (US); Daniel
Jean, Odenton, MD (US); John
Hendershot, Dunkirk, MD (US)
(73) Assignee: The United States of America as
represented by the Secretary of the
Navy, Washington, DC (US)
(*) Notice: Subject to any disclaimer, the term of this
patent is extended or adjusted under 35
U.S.C. 154(b) by 0 days.
(21) Appl. No.: 12/454,037
(22) Filed: Apr. 27, 2009
Related U.S. Application Data
(63) Continuation of application No. 1 1/894,628, filed on
Jul. 31, 2007, now Pat. No. 7,552,681.
(51) Int. Cl.
F42C I/34 (2006.01)
(52) U.S. Cl. ........ 102/254; 102/233; 102/246; 102/251;
361/247; 361/248; 361/249; 361/250; 361/251;
361/252
(10) Patent No.: US 7,913,623 B1
(45) Date of Patent: Mar. 29, 2011
(58) Field of Classification Search .................. 102/254,
102/233, 249,251
See application file for complete search history.
(56) References Cited
U.S. PATENT DOCUMENTS
6,314,887 B1 * 1 1/2001 Robinson ...................... 102.262
6,321,654 B1 * 1 1/2001 Robinson ...................... 102,251
6,568,329 B1 5/2003 Robinson
6,675,578 B1 1/2004 Sinclair
6,737,979 B1 ck 29: Sh et al. 1 f
6,964,231 B1 * 1 1/2005 Robinson et al. ............. 102,235
7,007,606 B1* 3/2006 Maurer et al. ......... ... 102,226
7,069,861 B1* 7/2006 Robinson et al. ...... ... 102.222
7.316,186 B1* 1/2008 Robinson et al. ............. 102,251
* cited by examiner
Primary Examiner — Troy Chambers
Assistant Examiner — Samir Abdosh
(74) Attorney, Agent, or Firm — Fredric J. Zimmerman
(57) ABSTRACT
A MEMS fuze having a moveable slider with a microdetona
tor at an end for positioning adjacent an initiator. A setback
activated lock and a spinactivated lock prevent movement of
the slider until respective axial and centrifugal acceleration
levels have been achieved. Once these acceleration levels are
achieved, the slider is moved by a V-beam shaped actuator
arrangement to position the microdetonator relative to a sec
ondary lead to start an explosive train in a munitions round.
3 Claims, 4 Drawing Sheets
U.S. Patent Mar. 29, 2011 Sheet 1 of 4 US 7,913,623 B1

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FIG - 1B
U.S. Patent Mar. 29, 2011 Sheet 3 of 4 US 7,913,623 B1
U.S. Patent Mar. 29, 2011 Sheet 4 of 4 US 7,913,623 B1
 US 7,913,623 B1
1.
MEMS FUZE ASSEMBLY
The present application is a Continuation Application of known as a secondary lead.
prior U.S. patent application Ser. No. 1 1/894,628 filed on Jul.
31, 2007 now U.S. Pat. No. 7,552,681.
STATEMENT OF GOVERNMENT INTEREST
The invention described herein may be manufactured and detonator
used by or for the Government of the United States of 1 O the main charge
America for Governmental purposes without the payment of tus is imbedded. of
any royalties thereon or therefor.
BACKGROUND OF THE INVENTION
1) Field of the Invention
The invention relates in general relates to MEMS (micro
electromechanical systems) devices and more particularly to
a MEMS fuze utilized to set off a main charge of a munitions
round.
2) Description of the Related Art
A fuze is a device designed to set off an explosive train in
a munitions round Such as a mortar round, artillery shell or
rocket warhead, by way of example. Conventional mechani
cal fuzes make use of a detonator, such as an M100, which is
cylindrical and approximately 3 mm (millimeters) in diam
eter and 10 mm in length. These detonators are mounted in a
rotor mechanism with mechanical locks, with a typical Vol
ume of greater than 10 cc (cubic centimeters).
Such detonators are much too large for use in MEMS type
fuzes and, in addition, they require assembly of multiple
mechanical components resulting in higher complexity,
higher costs and lower reliability.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide a fuze
assembly that is over 100 times smaller than conventional
detonators, thus leaving more space for electronics and explo
sive material.
A MEMS fuze for use in a munitions round in accordance
with the present invention includes a moveable slider with a
microdetonator carried by the slider for positioning relative to
a secondary lead to ignite the secondary lead when in posi
tion. A plurality of locks are provided, each having a respec
tive locking arm in interlocking engagement with the slider to
prevent movement of the slider. The locks are released upon
attainment of certain predetermined conditions to move the
locking arms out of engagement with the slider whereby
when the locking arms are disengaged from the slider, the
slider is operable to move the microdetonator into position for
igniting the secondary lead.
BRIEF DESCRIPTION OF THE DRAWINGS
In the drawings, which are not necessarily to Scale, like or
corresponding parts are denoted by like or corresponding
reference numerals.
FIGS. 1A and 1B illustrate an operation of an exemplary
microdetonator.
FIG. 2 illustrates an exemplary SOI (silicon on insulator)
wafer prior to fabrication of the MEMS device of the present
invention.
FIGS. 3A and 3B illustrate an exemplary embodiment of
the present invention.
DETAILED DESCRIPTION OF THE INVENTION
FIGS. 1A and 1B illustrate a microdetonator and its place
ment for initiating a charge sequence. In FIG. 1A, a micro
2
detonator 10 is carried by a slider 12 and is in an initial
position insufficient to set off a secondary explosive 14, also
When the slider 12 moves to the right as indicated in FIG.
1B by arrow 16, microdetonator 10 may be adjacent an ini
tiator 18 and directly above secondary lead 14, whereupon the
microdetonator 10 may be initiated or detonated by the ini
tiator
18. Secondary lead 14 may be initiated by the micro
10 and set off a main explosive charge 20, which is
the munitions round in which the appara
Movement of slider 12 may be inertial, such
as upon impact with a target, or may be mechanical, as will be
described herein.
FIG. 2 illustrates a portion of an SOI wafer 24 from which
15 the MEMS fuze assembly of the present invention is fabri
cated. The structure of FIG. 2 includes, in an exemplary
embodiment, a silicon Substrate 26 (also known as a handle
layer) covered by an insulating or intermediate layer 28, Such
as silicon dioxide, over which is bonded or deposited another
silicon layer 30, also known as the device layer 30, which is
the layer from which the MEMS fuze assembly components
are fabricated. The MEMS fuze assembly components may
beformed by a DRIE (deep reactive ion etching) process that
removes unwanted portions of device layer 30. The DRIE
25 process is a well developed micromachining process used
extensively with silicon based MEMS devices. For this rea
son silicon is an exemplary material for the MEMS fuze
assembly of the present invention, although other materials
are possible. In other exemplary embodiments, materials
30 other than silicon may be used as a Substrate, including glass,
stainless steel, and a plastic material. Such as, polycarbonate.
An exemplary embodiment of the present invention is illus
trated in FIGS. 3A and 3B. The MEMS fuze 32 in FIG. 3A
includes slider 12 which, in an exemplary embodiment, is
35 driven mechanically as opposed to inertially. As a safety
precaution and in accordance with safety regulations, move
ment of the slider 12 is initially prevented by a series of locks,
which are released upon attainment of certain predetermined
conditions. Slider 12 is in the safe position in FIG. 3A and in
40 the armed position in FIG. 3B. By way of example, the
arrangement includes a setback activated lock 34 and a spin
activated lock 36.
Setback activated lock 34 includes a setback inertial mass
38 having a latching arm 40 that engages with complementary
first and second holding arms 42 and 44, these latter first and
second holding arms may be connected to respective anchors
46 and 48. Setback inertial mass 38 is restrained from move
ment by spring 50 connected to anchor 52. Setback activated
lock 34 additionally includes a locking arm 54, which is in
50 interlocking relationship with slider 12. More particularly,
the end of locking arm 54 abuts a projection 56 on slider 12 to
prevent movement thereof.
Setback inertial mass 38 prevents movement of locking
arm 54 until setback inertial mass 38 is moved out of the way.
55 This movement occurs during launch of the munitions round
when the axial acceleration force allows setback inertial mass
38 to overcome action of spring 50 such that latching arm 40
may become latched with holding arms 42 and 44. With
setback inertial mass 38 out of the way, locking arm 54 is free
60 to disengage from projection 56 of slider 12.
The disengagement is accomplished with the provision of
athermoelectric actuator such as V-beam actuator 58. V-beam
actuator 58 includes first and second sets of actuator beams 60
and 62. One end of set 60 is connected to anchor 64, while the
65 other end is connected to locking arm 54. One end of set 62 is
connected to a second anchor 66, with the other end con
nected to locking arm 54. The first and second set of beams 60
 US 7,913,623 B1
3 4
and 62 are of a conductive elastic material with a high melting
point, Such as silicon. When a current is applied to anchor 64.
the beams 60, 62 expand, causing the locking arm 54 to move
in the direction of arrow 68. This current may be applied prior
to unlocking of spin activated lock 36 or Subsequent thereto.
Spin activated lock 36 includes a spin inertial mass 70
having a latching arm 72 which engages with complementary
third and fourth holding arms 74 and 76, these latter third and
fourth holding arms may be connected to respective anchors
78 and 80. Spin inertial mass 70 is restrained from movement
by spring 82 connected to anchor 84. Spin activated lock 36
additionally includes a locking arm 86, connected to spin
inertial mass 70, with the locking arm 86 in interlocking
relationship with slider 12. More particularly, the end of
locking arm 86 abuts a projection 88 on slider 12 to prevent
movement thereof. A sufficiently high centrifugal accelera
tion allows spin inertial mass 70 to overcome action of spring
82 such that latching arm 72 becomes latched, drawing lock
ing arm 86 out of engagement with projection 88 to allow
slider 12 to move.
A thermoelectric actuator in the form of V-beam actuator
90, similar to V-beam actuator 58, is used to move the slider
12 against action of springs 92 and 94, connected to respec
tive anchors 96 and 98. Slider 12 includes an enlarged end
portion 100 in which is located the microdetonator 10.
To operate as a MEMS fuze, the various springs, locking
arms and beam sets of the V-beam actuators must be free to
move and therefore must be free of any underlying silicon
dioxide insulating layer 28 (FIG. 2). One way to accomplish
the removal of the underlying insulating layer is by applying
an etchant, such as, hydrofluoric acid, which will dissolve the
silicon dioxide. The etchant may, in a relatively short period
of time, dissolve the insulation beneath the locking arms and
the beam sets of the V-beam actuators, as well as the springs
and slider because these components have small widths. The
setback inertial mass 38 and spin inertial mass 70 must be free
to move and therefore must be free of any underlying silicon
dioxide insulating layer 28 (FIG. 2).
To shorten the time for dissolving the silicon dioxide under
these relatively larger components (masses 38, 70), each is
provided with a series of apertures 102, which extend from
the top surface 30 down to the insulating layer 28, thereby
allowing the etchant direct access to the silicon substrate 26.
Although some of the etchant may dissolve the insulation
under the anchors, the process of freeing the other compo
nents is generally completed before the anchors are com
pletely freed so that they, that is, the anchors, remain immov
able.
An actuator arm 104 of V-beam actuator 90 carries one or
more teeth 106 at its end which are engageable with teeth 108
on the bottom of slider 12. When V-beam actuator 90 is
provided with current, actuator arm 104 moves to the left, and
teeth 106 on actuator arm 104 slide over teeth 108 on slider
12. When current is removed, V-beam actuator 90 reverts to
its original position Such that actuator arm 104 will move
back to the right. In so doing, teeth 106 engage with teeth 108
to move the slider 12 to the right.
A keeper arrangement prevents the slider 12 from moving
back under spring action once the slider 12 has been
advanced. Such a keeper arrangement includes a keeper arm
110 secured to anchor 112. Keeper arm 110 includes a set of
teeth 114, which are engageable with teeth 116 on the top of
slider 12. After slider 12 is advanced, teeth 114 engage teeth
116 to prevent backward movement of slider 12.
The process of providing current to, and removing current
from, V-beam actuator 90 is repeated until slider 12 has
5 moved a sufficient distance such that microdetonator 10 is
adjacent initiator 18, as illustrated in FIG. 3B. When in posi
tion, and at the proper time, current may be supplied to ini
tiator 18 to initiate microdetonator 10 and start the explosive
train.
10 Current is supplied to initiator 18, as well as to V-beam
actuators 58 and 90 by means of current sources (not illus
trated) via electrical connections depicted by double ended
arrow 118. A microprocessor (not illustrated) is operable to
receive signals via electrical connections when latching arms
15 40 and 72 latch, and when microdetonator 10 is in position, to
command the current sources to provide the respective cur
rents used in the operation.
It will be understood that many additional changes in the
details, materials, steps and arrangement of parts, which have
been herein described and illustrated in order to explain the
nature of the invention, may be made by those skilled in the art
within the principle and scope of the invention as expressed in
the appended claims.
Finally, any numerical parameters set forth in the specifi
25 cation and attached claims are approximations (for example,
by using the term “about”) that may vary depending upon the
desired properties sought to be obtained by the present inven
tion. At the very least, and not as an attempt to limit the
application of the doctrine of equivalents to the scope of the
30 claims, each numerical parameter should at least be construed
in light of the number of significant digits and by applying
ordinary rounding.
What is claimed is:
1. A MEMS fuze assembly, comprising:
35 a moveable slider;
a microdetonator being carried by said moveable slider for
positioning relative to a secondary lead for igniting said
secondary lead when in an armed position; and
a plurality of locks each having a respective locking arm in
40 interlocking engagement with said moveable slider to
prevent movement of said moveable slider,
wherein said plurality of locks is released upon attain
ment of certain predetermined conditions to move
said locking arms out of engagement with said move
45 able slider,
wherein said locking arms are disengaged from said
moveable slider so that said moveable slider is oper
able to move said microdetonator into said armed
position to ignite said secondary lead,
50 wherein said microdetonator, an initiator, said moveable
slider and said plurality of locks are fabricated from a
same layer where said same layer is a device layer,
and
wherein an integrated actuator is connected to one of
55 said locking arms to disengage from said moveable
slider.
2. The MEMS fuze assembly according to claim 1, further
comprising an actuator arm.
3. The MEMS fuze assembly according to claim 1, wherein
60 said device layer is situated over an insulating layer.
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