1

EECE.3600 Engineering Electromagnetics I

Prof. Corey Shemelya

Lecture

Design Project
 Project 2

• Must design a RF plasma generator system

• Clearly define your application and the requirements of said application

• Clearly define why you are using each part and give the specifications

• Perform analysis on the impedance matching, reflected power, transmitted power to

the chamber, wave guide and connector Lumped/Distributed Element properties, and
any other properties that we have covered in class

• You must comment on the feasibility of a double stub tuner at your frequency of
interest.

• The matching network must be able to operate with two different gases
(i.e. two different load impedances)

Note: You must use double stub matching, an RCL matching network, and a simulation.
 Project 3

What components make up an RF plasma generator system?

• Matching element

• Feed-line

• Generator

• Chamber
 Project 4

What components make up an RF plasma generator system?

• Generator

• Feed-line

• Matching element

• Chamber

These come in a variety of frequency ranges and power

levels. For simplicity, let’s say this generator operates at:

13.7 MHz and 13.7 GHz

 Project 5

What components make up an RF plasma generator system?

• Generator

• Feed-line

• Matching element

• Chamber
 Project 6

What components make up an RF plasma generator system?

• Generator
You MUST use your knowledge of Double Stub
• Feed-line Matching to characterize your own or commercial
double stub to match your system!
• Matching element

• Chamber
 Project 7

What components make up an RF plasma generator system?

• Generator Most high-power systems use a circuit based matching
system. You MUST design one yourself.
• Feed-line
Think about what values you would need to add in
• Matching element parallel to your load to create a reflection-less interface

• Chamber
 Project 8

What components make up an RF plasma generator system?

Does your
• Generator tuning method makesystems
Most high-power sense use a circuit based matching
system. You MUST design one yourself.
• Feed-line for your generator?
Think about what values you would need to add in
1) You MUST• use double element
Matching stub matching at two frequencies and load
parallel to your comment if your
to create results
a reflection-less interface
make sense?
(i.e. are the •lengths feasible)
Chamber

2) You MUST make a R,C,L matching circuit that could also do the job. Due to 2 gases, you
also need to make some of these variables adjustable
(give the range of the adjustable parameter and impedance range of the overall network).
 Project 9

What components make

Tip (this is how you upmake
would an RF plasma
a circuit generator
matching network):system?

• Generator
To determine a RL or RC matching Most high-power
network, systems
first find use a circuit based matching
the wave
system.of your RLC circuit for
impedance (𝑍𝑍𝑤𝑤1 ) at the line location
• Feed-line
one frequency.
Think about what values you would need to add in
• Matching element
Your matching circuit (𝑍𝑍𝑚𝑚𝑚 ) mustparallel to your
be added load to to
in parallel create
youra reflection-less interface
load impedance and match the line impedance.
• Chamber 𝑍𝑍𝑤𝑤𝑤 ||𝑍𝑍𝑚𝑚𝑚 = 𝑍𝑍0
(it’s easier to do this step in admittance)

Repeat for other load impedances to find the range of

resistors and capacitors/inductors needed.

Remember, you can’t add a negative resistance!

 Project 10

Tip (this is how you would make a circuit matching network):

What components make up an RF plasma generator system?

• Generator Most high-power systems use a circuit based matching
system.
• Feed-line
Think about what values you would need to add in
• Matching element parallel to your load to create a reflection-less interface

• Chamber

https://web.ece.ucsb.edu/~long/ece145a
/Notes5_Matching_networks.pdf

Note: For these examples, the “input” impedance is the characteristic impedance of the
transmission line and the LC network is located at the end of the transmission line (𝑍𝑍𝐿𝐿 ). If your
matching network is not at the end of the line then 𝑍𝑍𝐿𝐿 = 𝑍𝑍𝑤𝑤
 Project 11

What components make up an RF plasma generator system?

• Generator

• Feed-line

• Matching element

• Chamber

Chamber
Impedance

You are required to

use:
𝑍𝑍𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐 = 5 − 𝑗𝑗 25
 Project 12

What components make up an RF plasma generator system?

• Generator

• Feed-line

• Matching element

• Chamber

Suggested Values
𝑍𝑍𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐 = 5 − 𝑗𝑗 25 1
𝑍𝑍𝐿𝐿 = 𝑅𝑅𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐 +
𝑍𝑍𝑃𝑃 𝑂𝑂𝑂𝑂𝑂𝑂𝑂𝑂𝑂𝑂𝑂𝑂 = 375 − j100 1 1 1
+ +
𝑍𝑍𝑃𝑃 (𝐴𝐴𝐴𝐴𝐴𝐴𝐴𝐴𝐴𝐴) = 350 − 200 𝑅𝑅𝐴𝐴𝐴𝐴 𝐶𝐶𝐴𝐴𝐴𝐴 𝐶𝐶𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐
 Project 13

Other possible plasma impedances

(as a function of power to the load)

Real portion

Imaginary
Impedance portion
Values

Power of Plasma
(you can change this when you switch gases!)
 Project 14

Example:

𝐴𝐴𝐴𝐴 𝑃𝑃𝑃𝑃𝑃𝑃𝑃𝑃𝑃𝑃𝑃𝑃 − 3 𝑊𝑊𝑊𝑊𝑊𝑊𝑊𝑊 𝑃𝑃𝑃𝑃𝑃𝑃𝑃𝑃𝑃𝑃 Real portion

Plasma Impedance:
250 − 𝑗𝑗𝑗𝑗𝑗 [Ω]

Chamber Impedance:
5 − 𝑗𝑗𝑗𝑗 [Ω]
chamber “cold”
resistance capacitance
Imaginary
Load Impedance portion
Impedance 1
Values 𝑍𝑍𝐿𝐿 = 𝑅𝑅𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐 +
1 1 1
+ +
𝑅𝑅𝐴𝐴𝐴𝐴 𝐶𝐶𝐴𝐴𝐴𝐴 𝐶𝐶𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐𝑐
1
𝑍𝑍
Power
𝐿𝐿 = 5 +
of Plasma = 7 − 𝑗𝑗𝑗𝑗.5
1 1 1
(you can change this when +switch gases!)
you +
250 −𝑗𝑗𝑗𝑗𝑗 −𝑗𝑗𝑗𝑗
 Project 15

What components make up an RF plasma generator system?

So what do you need?

• An application

• 1) Stub Matching, 2) RLC Matching network, 3) Simulation

• A transmission line <- You need to characterize this for you project!!!!! (find R, L, C, G, Z0)

• Feasibility of the system using Double stub and RLC Matching and 13.7 MHz and 13.7 GHz
NOTE: Assume that the plasma is easily excited at both of these frequencies with the same 𝒁𝒁𝑷𝑷
(this is not realistic, but a good learning exercise)

Groups of 1 or 2, both group members will be graded equally regardless of

participation!!