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nHT SERIES
HIGH-THROUGHPUT
DIFFUSION PUMPS
THE PARTNER OF CHOICE
Edwards is a world leader in the design, technology and
manufacture of vacuum pumps for industrial applications with
over 100 years’ history.
We believe in delivering results that bring value to our customers by using
our breadth of industry experience to identify and apply solutions. Using the
most innovative and up-to-date modelling techniques, we can optimise the
pumping configuration for customers to provide a system design giving the
maximum performance in the most reliable and cost-effective way.
nHT SERIES
NEXT-GENERATION HIGH-THROUGHPUT DIFFUSION PUMPS
The Edwards nHT series diffusion pumps provide stable high-throughput vacuum performance. Designed
for optimum energy efficiency, flexibility and low maintenance, the nHT series is the ideal solution for a
variety of demanding industrial applications.

ENERGY EFFICIENCY
The nHT series diffusion pumps have been designed for optimum heat transfer to the oil, resulting in
faster heat-up times and a significant reduction in energy consumption. In addition, the use of the Energy
Efficiency Controller (EEC) provides further reduction in power consumption – up to 30% without the loss
of pumping performance.

Energy Efficiency Controller Cut energy consumption by up to 30%

• 100% power during the warm-up phase
• 70% power on reaching the required
oil temperature
• Further energy reduction with the use of
standby mode
• USB interface and Ethernet connectivity
• Ease of operation and control

EDWARDS nHT Diffusion pumps

BENEFITS
Performance and stability
Optimised pumping speed and high
throughput with good stability
between 10-2 and 10-3 mbar – critical
for many applications.
Flexibility
Available in both ANSI and ISO flange
options with voltage variants to cover
global requirements. A broad range of
accessories is available.

Economy
Significant energy savings through
innovative heating design providing
faster warm-up time. When used with
the Energy Efficiency Controller a
further energy saving can be
achieved – up to 30%.
Control
The Energy Efficiency Controller
enables ease of use and operating
convenience along with effective
monitoring with USB and Ethernet
interface.

Reliability
Smart temperature control and
on-board sensors as standard ensure
minimum load with a longer lifetime
for heaters and oil. Increased
productivity through long maintenance
intervals with non-wearing components
and easy-to-change heater cartridges.

ADVANTAGES
• High-throughput pumping performance
• Energy efficiency
• Fast warm-up time
• High system uptime
• Easy to operate
• Low and simple maintenance
• Control capability via Energy Efficiency
Controller (optional accessory)

EDWARDS nHT Diffusion pumps

APPLICATIONS
Metallurgy Coating
• Sintering, precision investment casting (PIC) • Glass coating
• Surface coating (plasma, spray, surface activation,
Heat treatment hard coating, reflective, decorative, plasma
• Quenching, tempering, annealing deposition)
Welding • Roll/web coating, optical/ophthalmic coating,
display coating
• E-beam welding, plasma welding
Vacuum drying
Research & development

EDWARDS nHT Diffusion pumps

FEATURES
High-precision jet assembly
ensures high stability and
consistent jet performance
Converging backing cone
increases the critical backing
pressure, enabling
effective cross-over from the
backing pump
Oil sight glass
combined with a drain and fill
port allows easy viewing and
maintains oil level and quality
EDWARDS
Integrated cold cap
prevents fluid back migration
to ensure a clean vacuum
system
Terminal box/Energy
Efficiency Controller
interface
provides connectivity
options for both the OEM
and end-user
Ejector stage
ensures high-pressure
pumping speed and greater
resistance to pressure surges
from the backing pump
Innovative cartridge
heating system
provides optimum heat
transfer into the oil resulting
in faster heat-up times,
reducing energy consumption
nHT Diffusion pumps
TECHNICAL DATA
nHT10 nHT16 nHT20 nHT32 nHT35
ANSI ISO ANSI ISO ANSI ISO ANSI ISO ANSI ISO
Inlet connection 10˝ ANSI 320 ISO-K 16˝ ANSI 500 ISO-K 20˝ ANSI 630 ISO-K 32” ANSI 800 ISO-F 35˝ ANSI 1000 ISO-F

Backing connection 2˝ ANSI 63 ISO-K 3” ANSI 100 ISO-K 4˝ ANSI 160 ISO-K 6” ANSI 200 ISO-K 6” ANSI 200 ISO-K
Pumping speed*
l/s 3,000 6,800 10,000 21,000 30,000
Nitrogen <10 -4 mbar
Pumping speed
l/s 2,750 6,350 9,000 18,000 26,000
Argon <10 -4 mbar
Pumping speed
l/s 4,500 9,500 17,000 30,000 42,000
Helium <10 -4 mbar
Gas throughput mbar l/s 8 11 17 36 36

Operating range mbar < 10 -1 to 10 -7 < 10 -1 to 10 -7 < 10 -1 to 10 -7 <10 ‐2 to 10 ‐7 < 10 -2 to 10 -7

Ultimate pressure
mbar < 5 x 10 -7 < 5 x 10 -7 < 5 x 10 -7 < 10 ‐6 < 10 -6
(Edwards 704)
Critical backing pressure
mbar 5 x 10 -1 5 x 10 -1 5 x 10 -1 5 x 10 -1 5 x 10 -1
(Edwards 704)
Heating power kW 3.6 7.2 10.8 21.6 21.6

Heating cartridges qty 3 6 9 18 18

Warm-up period min < 15 < 15 < 25 < 25 < 25

Weight kg 105 185 210 570 720

Recommended oil Edwards 704

Oil l 3.0–4.0 3.5–4.5 5.5–7.0 9.0–11.0 9.0–11.0

Recommended holding pump E2M40 E2M40 E2M40 E2M80 E2M80

nES200, E2M80, nES200, E2M175, nES300, E2M175, nES630, E2M275, nES630, E2M275,
Recommended backing pump
EDS200, EH1200 EDS200, EH1200 EDS300, EH1200 GXS450, EH2600 GXS450, EH2600

* Measures as per DIN 28 427

ORDERING INFORMATION
nHT series diffusion pumps
nHT10 nHT16 nHT20 nHT32 nHT35
Voltage variant
ANSI ISO ANSI ISO ANSI ISO ANSI ISO ANSI ISO
380–415V, 230V (50 Hz/60 Hz) B31130400 B31132400 B31230400 B31232400 B31430400 B31432400 B31630400 B31632400 B31530400 B31532400

440–480V (50/60 Hz) B31130460 B31132460 B31230460 B31232460 B31430460 B31432460 B31630460 B31632460 B31530460 B31532460

nHT Series Accessories

Inlet valve B61130100 B61132100 B61230100 B61232100 B61430100 B61432100 B61630100 B61632100 B61530100 B61532100

Extended cold cap - B61233100 B61433100 B61633100 B61533100

Inlet baffle - B61234100 B61434100 B61634100 B61534100

Energy Efficiency Controller

B61001100 (accessory cables not included)
(EEC)

Cooling fail switch 12284

Water flow monitor 500006623

EDWARDS nHT Diffusion pumps

PERFORMANCE CURVES
nHT10 nHT16

100 100
10,000 10,000

10 10

mbar ls-1

mbar ls-1
1 1
ls-1

ls-1
1,000 1,000

0.1 0.1

nHT10 nHT16
0.01 0.01
1. N2 2. N2 1. N2 2. N2
Ar Ar Ar Ar
He He He He
100 0 100 0
10-5-2
10 10-4-1
10 10-30
10 10-21
10 10-12
10 100 mbar 10-5-2
10 10-4-1
10 10-30
10 10-21
10 10-12
10 100 mbar
1. Pumping speed 2. Throughput 1. Pumping speed 2. Throughput

nHT20 nHT32
100,000 100 100,000 100

10 10

10,000 10,000

mbar ls-1
mbar ls-1

1 1
ls-1
ls-1

0.1 0.1
1,000 1,000

nHT20 nHT32
0.01 1. N2 2. N2 0.01
1. N2 2. N2
Ar Ar Ar Ar
He He He He
100 0 100 0
10-5-2
10 10-4-1
10 10-30
10 10-21
10 10-12
10 100 mbar 10-5-2
10 10-4-1
10 10-30
10 10-21
10 10-12
10 100 mbar

1. Pumping speed 2. Throughput 1. Pumping speed 2. Throughput

nHT35
100,000 100

10

10,000
mbar ls-1

1
ls-1

0.1
1,000
nHT35
1. N2 2. N2 0.01
Ar Ar
He He
100 0
10-5-2
10 10-4-1
10 10-30
10 10-21
10 10-12
10 100 mbar
1. Pumping speed 2. Throughput

EDWARDS nHT Diffusion pumps

DIMENSIONS
nHT10
370 407

295
85
68
295
85
68
320 ISO-K ANSI 10“

172
172

359
359 152
95

300

300
ANSI 2”

788
63 ISO-K

788

200
200
480 480

362 PCD 12x 24

341

2.5 o
.5
2.5 o

341
.5

25 o
25 o

471
471

20
20

o
o

42

300
.5
42

o
300
.5
o

4x 19
74 120.5 PCD
70 70

nHT10 ISO
nHT16 597
nHT10 ANSI
550
116
98
116
88

500 ISO-K ANSI 16“

265
265

652
610
610
652

300
300

191
130
1092
1092

ANSI 3”
100 ISO-K
200
200

552
480
60o
60o
42
0
15o 15
42
15o 15 33

0
61
0

0
61

o
o

33
.5
.5

o
o

300 300
68
68
4x 19
102
102 152.5 PCD

nHT16 ISO nHT16 ANSI

EDWARDS nHT Diffusion pumps
 nHT20
690 700

111
97
73

111
97
48
630 ISO-K ANSI 20“

458

457
584

584
180 230

300

300
1292
1292
160 ISO-K ANSI 4”

200
200
636 636
20x18
651 =360
3°

46 32

46
5

5
63

15°

2
63

15°
15° 15

15° 15
°

°
0
30 0
152,6 68 30
8 x Ø 1919 68
30° 33°
30° 33°

nHT32 nHT20 ISO nHT20 ANSI

Ø920 Ø965
116
102
56

116
102
56

800 ISO-F ANSI 32“

674
674

901
901
738

738
1740

1740
200 ISO-K
500

ANSI 6”
500
204

204

Ø1000 Ø1000

816
816
59
31

59
8

31
10

8
15

10

15
15

15
15

15

0
30 0
68 30
68
Ø18 33
33
8x 45

8 x Ø 19
30 30
241

nHT32 ISO nHT32 ANSI

EDWARDS nHT Diffusion pumps

 nHT35
Ø1120 Ø1060

116
102
56

116
102
56
1000 ISO-F ANSI 35“

801
801

908
908
808

808
1832

1832
200 ISO-K

500
ANSI 6”

500
204

204
Ø1000 Ø1000

32x 11,25
1,9 28x 1
2,9
Ø14 2,1
Ø23
64
73

64
0

73
10

0
15

10

15
15

15
15

15
0
30 30
0
68 68
33
Ø2 8 x Ø 19 33
13
30 30
241

nHT35 ISO nHT35 ANSI

SERVICE AND SUPPORT

The nHT series diffusion pumps are designed with a
number of features that enable routine maintenance
to be conducted, ensuring optimum performance and
safe operation. Scheduled routine maintenance shall
include activities deemed beneficial to the continued
performance and longevity of the product. All work must
be completed by suitably trained personnel. Before any
maintenance operations are carried out, the pump must
be isolated from the electrical supply and vacuum system.
Our field service teams carry out essential maintenance,
repair and commissioning service at your site. We can also
assist site staff in performing routine maintenance.
We offer original spares kits for the nHT series diffusion
pumps. This enables your maintenance team to start
work with all the materials they need to complete the job
successfully, saving time, reducing cost and extending the
life of your product.

EDWARDS nHT Diffusion pumps


Publication Number: 3602 402 0 01
© Edwards Limited 2020. All rights reserved
Edwards and the Edwards logo are trademarks of
Edwards Limited.
Whilst we make every effort to ensure that we
accurately describe our products and services,
we give no guarantee as to the accuracy or
completeness of any information provided in
this brochure.
Edwards Ltd, registered in England and Wales
No. 6124750, registered office: Innovation Drive,
Burgess Hill, West Sussex, RH15 9TW, UK.
Part ofEDWARDS
the Atlas Copco Group
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nHT Diffusion pumps