Scanning Electron Microscopy

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 Electron verse Light
 Wavelength: 400-700 nm (for light)
0.001-0.01 nm (electron)
 Electrons are very much strongly scattered by gases than light
 In order to use electrons, all optical paths must be evacuated to
a pressure of better than 10-10Pa
 Use of magnetic field for negligible change in refractive index on
passing through each lens
 Hence reflective index (n) can be assumed to be unity
 Angle of deflection is very small

𝟎. 𝟔𝟏𝝀 𝟎. 𝟔𝟏𝝀
𝒅𝐦𝐢𝐧 = =
𝒏𝐬𝐢𝐧𝜶 𝜶 2
 Electron verse Light
 Resolution for electron of wavelength 0.0037 nm, and angle
of deflection is 5 degrees (0.1 radians)

𝟎. 𝟔𝟏𝝀 𝟎. 𝟔𝟏𝝀
𝒅𝐦𝐢𝐧 = =
𝒏𝐬𝐢𝐧𝜶 𝜶

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 Basic Electron Optics

 Electrons and ions are charged particles; they can be

accelerated in an electric field

 The trajectory of an accelerated charged particles can be

changed (deflected) by E and/ or B field.

 The accelerated particles also behave like waves

similar to light

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Scanning Electron Microscope (SEM)

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 Scanning Electron Microscope (SEM)
 A source (electron gun) of the electron beam which is accelerated
down the column;
 A series of lenses which control the diameter of the beam as well as
to focus the beam on the specimen;
 Controls for specimen position (x,y,z height) and orientation (tilt,
rotation );
 An area of beam/specimen interaction that generates several types
of signals that can be detected and processed to produce an image or
spectra; and
 All of the above components are maintained at high vacuum levels
(the value of the upper column being greater than the specimen
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chamber).
Schematic of SEM

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A look inside the SEM column 9
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Desk Top Model of SEM 11
 Electron Optical Elements & attachments
 Electron source
 Lenses
 Deflection coils (scanning)
 Specimen stage with X,Y movement control and
tilt arrangements
 Electron detectors (SE, BSE, AE)
 Photon/X-ray detectors (CL, X-ray)
 Fluorescent screen/camera

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 Electron Sources

Generation of electrons that can be accelerated by high tension

to obtain the illuminating electron beam.

 Thermionic gun:
 Triode or self-biasing gun,
 W, Lanthanum Hexaboride (LaB6), CeB6
 Field Emission Gun:
 Single crystal W

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 Electron Sources

Thermionic Emitters Field Emitters

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Electron Gun Sources

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Electron Gun Sources

LaB6

Field Emission
Electron

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W

LaB6 17
 Electron Gun
Thermionic Electron Gun
 Thermionic:

 Electric current passes through bent W wire (or sharpened

LaB6 crystal tip),

 Heating it and adding thermal energy which permits

electrons to overcome the work-function energy barrier of

the material and to leave the wire.

 A high voltage potential then can “aim” the electrons at

nearby anode 18
 Thermionic Electron Gun
 Electrons are emitted from a heated tungsten filament and then
accelerated towards an anode; a divergent beam of electrons
emerges from the source which is focused at the cross over
(electrostatic lens).
 Commonly used electron source
 Robust, cheap and does not require relatively high vacuum
 Source spot size:
 30 μm for W
 5 μm for LaB6

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 (a) (b)
Scanning electron micrograph of W filament:
(a) unused, (b) failed 20
 Field Emitter Electron Source

Single oriented crystal of tungsten etched to a fine tip

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 Field Emission Electron Gun

 Field emission
 A single crystal, shaped to a very sharp point, and a high
voltage potential is placed between it and nearby anode
(cold and hot)
 Because of the electric field, electrons can jump the energy
barrier to the nearby anode
 Very strong electrical fields (109 V/m) used to extract
electrons from a metal filament.
 Temperatures are lower than those required for thermionic
emission
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 Field Emission Electron Gun

 Field emission tip is made of a single crystal tungsten wire

sharpened by electrolytic etching; typical tip diameter 10 to

100 nm

 Both the tungsten tip and electrostatic anodes are sensitive to

surface contamination.

 In addition the field emission process is extremely sensitive to

the size, shape and surface condition.

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 Field Emission Electron Gun
 The emission process depends on work function of the metal,

which can be affected by adsorbed gases.

 This is the reason a very high vacuum is required.

 Sustaining high electrical field gradients is also essential to

emission, so a worn out tip may not emit electrons at all.

 Requires higher vacuum and

 Much more expensive, but has longer life.

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 Schottky Electron Gun

 Single crystal W wire with {100} planes normal to the wire

axis;
 end etched to a tip of ~ 10-100 nm dia;
 other end spot welded to polycrystalline W wire of the same
dia.
 Half way along the wire a reservoir of ZrOx is attached.
 Work function is lowered
 Source operated at 1800 K in a vacuum of ~10-9 mbar and the
electric field at the tip is 0.5 –1V/nm

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Comparison of various filaments

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Comparison of various filaments

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