How to Measure

UNDERSTANDING
DISPLACEMENT SENSORS/
MEASUREMENT SYSTEMS

Thickness

Radius (R)/
Inner Diameter

Meandering Warpage and Flatness Gap/Clearance

Eccentricity Width Profile 3D Shape

Stroke Height/Step Run-out/Vibration Outer Diameter Angle Positioning

 KEYENCE has been providing displacement sensors/measurement systems in a variety of industries. During our efforts to help
customers improve their business operations, they say 2 things;

"With all the different types of displacement sensors and measurement systems, it's difficult to make the right choice."

If you choose systems that are not suited for the application, this will lead to costs increasing more than expected and an increase
in operating man-hours, which should be avoided.
This Support Guide introduces correct measurement methods by specific application such as "thickness," "outer diameter" and
"shape," and suggests the optimum equipment for specific applications to solve customers' troubles such as those above.

A P P L I C AT I O N S

Various measurements are possible when using displacement sensors/measurement systems. The optimum way to measure differs
according to the type of target to be measured and installation space.

Thickness Width Height/Step Outer Diameter

P. 4, 5 P. 6 P. 7 P. 8

Stroke Run-out/Vibration Eccentricity Warpage and Flatness

P. 9 P. 10 P. 11 P. 12

Radius (R)/
Angle Gap/Clearance Meandering
Inner Diameter

P. 13 P. 14 P. 15 P. 16

Positioning Profile 3D Shape

P. 17 P. 18 P. 19

2
TYPES OF DISPLACEMENT SENSORS/MEASUREMENT SYSTEMS

In this Support Guide, we introduce applications using the following four categories of systems.

REFLECTIVE LASER REFLECTIVE PROFILE THRUBEAM OPTICAL

DISPLACEMENT SENSORS DISPLACEMENT SENSORS MICROMETER

CL Series LJ-V Series LS Series

• Multi-colour confocal method • 2D triangulation method • 1D telecentric optical method
• Not affected by material or colour • Multi-point measurement using line laser • Long life design with no moving parts
• Linearity ±0.09 μm • World’s fastest capture rate of • Fastest sampling rate in its class at 16 kHz
64000 images/second

THRUBEAM 2D
MEASUREMENT SYSTEM

LK-G Series LT Series TM Series

• Triangulation method • Confocal method • 2D telecentric optical method
• World's fastest sampling rate of 392 kHz • Spot ø2 μm • World-first inline profile projector
• 12 sensor heads can be connected • High performance demonstrated in • Simultaneous measurement of up to
thin film measurement 16 points possible

RELATED DOCUMENTS

These documents can be downloaded from the KEYENCE website.

DISPLACEMENT SENSORS/ SENSORS/

MEASUREMENT SYSTEMS DISPLACEMENT SENSORS
SELECTION GUIDE BEGINNER’S GUIDE
This introduces everything from First off, what’s a sensor?
measurement principles to methods of What is a displacement sensor?
selecting sensors and systems. This guide provides answers to the
questions!

3
 How to Measure "Thickness - Sheet Form"

Thickness
Measuring measurement
A A Measuring
between roll transparent targets
1 of glass

B Measuring B Measuring
above roll opaque targets

Thickness
measurement of

2
plastic sheet

Thickness measurement
after roll press

A Space in direction of
movement of target 3
B No space in direction of
movement of target

Thickness measurement of
rubber sheet

REFLECTIVE LASER REFLECTIVE LASER

1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS

When light is directed at a transparent target, light is reflected from Thickness is measured by passing a target between two sensor heads.
the top and bottom surfaces. Thickness is measured by identifying
reflected light from the top and bottom surfaces.

Install sensors so that

they are diametrically
(or directly) opposite
each other on the top Target run-out is absorbed
and bottom surfaces since the distance (A+B) is
of the target. fixed even if the target moves
up or down.

A
Reflected light
C
No. 1 or top surface B
Transparent body
No. 2 or bottom surface
Thickness t = C - (A+B)
Transmitted light

This is automatically calculated by

the controller.

POINT POINT

SELECTION OF DISPLACEMENT SENSORS IS IMPORTANT Optical-axis alignment and span adjustment are important to ensure that A+B is fixed
even if the target runs out in the vertical direction.
• Does the displacement sensor have enough range to see both the top and bottom
surface?
• Check to see if stable measurement is possible even if the reflectance of the top and
bottom surfaces is different.

4
 How to Measure "Thickness - Components"

Thickness
measurement of
coated film
A Measuring transparent targets
1
B Measuring opaque targets

Thickness measurement of
sealing material

A Measuring step from the reference 5

B Measuring in air

Thickness
measurement of
wafers
2

THRUBEAM 2D REFLECTIVE LASER REFLECTIVE PROFILE

3 MEASUREMENT SYSTEM 4 DISPLACEMENT SENSORS 5 DISPLACEMENT SENSORS

Sensor heads are installed so that the top Thickness is measured by the difference in Thickness is found by simultaneously
surfaces of the roller and target are projected height when the target is wound around (i.e. measuring the base surface and target
as a single plane on the captured image. held in close contact against) the roller with using a 2D laser displacement sensor and
Thickness is found by measuring step. the roller surface taken as the zero point. measuring the step from the obtained shape.

B
A (Zero point)

Thickness t = A-B Obtained shape

Roller run-out is automatically cancelled

(when timing sensor is used).
POINT

POINT Error occurs when there is a gap between the target and
the base surface.

The thickness of both transparent and opaque targets can be measured. Since the thickness of targets is measured in 1. Use a base surface having high precision such as
reference to the roller, ensure that no clearance is formed between the roller and the target. surface plate.
2. Use vacuum contact or magnetic contact.
Improving adhesion by performing the above measures
is important.

5
 How to Measure "Width"

Width measurement
of electrode foil

A Sheet form 1
B Other targets

Width measurement
of elastomer

A Narrow widths 2
B Wide widths

Width measurement
of building material
board
3

THRUBEAM OPTICAL REFLECTIVE PROFILE REFLECTIVE LASER

1 MICROMETER 2 DISPLACEMENT SENSORS 3 DISPLACEMENT SENSORS

Narrow targets can be measured using a
single sensor head. In the case of wide
targets, use two sensor heads to detect
the edge positions on the left and right to
measure the width.
The sectional shape of locations where the Width is measured by passing a target
line laser is incident is acquired and width is between two sensor heads.
measured from that shape.

Run-out is absorbed since

the distance (A+B) is fixed Width
even if there is target run-out
to the left or right.
C A L B
L C
A B
Width L = C - (A+B) Position (XZ coordinates)
Length L = C - (A+B)
Run-out is absorbed since the
This is automatically Width and position are measured at distance (A+B) is fixed even if This is automatically
calculated by the specified conditions. there is target run-out to the calculated by the
controller. left or right. controller.

POINT POINT POINT

• Higher precision measurement than reflective models
is possible.
• Even transparent targets can be measured stably by
changing the detection threshold values of the target.
• The width of locations where laser light does not
penetrate through can also be measured since the
measurement system is a reflective model.
• The width of the specified location can be measured
correctly even if the target shifts out of position to the
left and right.
• The end face of the target must be an area wider than
the measurement spot.
• Optical-axis alignment and span adjustment are
important to ensure that A+B is fixed even if the
workpiece runs out to the left and right.

6
 How to Measure "Height and Step"

Height measurement
of dispenser
A Measuring height at 1 point
1
B Measuring height at 2 points (step)

Height measurement
of connector terminal
Distance between measured A Measuring
A
locations is short from above 2
B Distance between measured B Measuring
locations is long from side

Step measurement of
electrode terminal

Height
measurement
of vehicle
1

REFLECTIVE LASER REFLECTIVE PROFILE THRUBEAM 2D

1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS 3 MEASUREMENT SYSTEM

To measure the height of one point, measure The sectional shape of locations where the The step section of the target is projected,
by a reflective laser displacement sensor. line laser is incident is acquired and step is and the step amount of two specified
measured from that shape. locations is found.

Measurement point

X Step

Reference point

The difference in height between the

measurement point and the reference
point is measured.
The distance to the location where the laser is incident is
measured to high precision.

POINT POINT POINT

The height of multiple locations can be measured by
using multiple sensor heads or by moving a single
sensor head.
Even if the target is tilted, step can be measured
accurately if the sensor head is provided with the
alignment adjustment function.
• Even if the shaft is tilted, step can be measured
accurately if the sensor head is provided with the
alignment adjustment function.
• Measurement is not affected by the colour of the target
surface.

7
 How to Measure "Outer Diameter"

Outer diameter
measurement of
Measuring the outer diameter high-speed wire
A Thin targets A
at one location 1
B Thick targets Measuring the outer diameter
B
at multiple locations

Outer diameter
measurement

2 of injectors at
multiple points

Outer diameter
measurement of

3 large steel pipes

THRUBEAM OPTICAL THRUBEAM 2D THRUBEAM OPTICAL

1 MICROMETER 2 MEASUREMENT SYSTEM 3 MICROMETER

The target is passed through collimated light The outer diameter of multiple points and Outer diameter is measured by passing a
to measure the size of its shadow. minimum and maximum values of specified target between two sensor heads.
ranges can be measured since a 2D optical
projection method is used.

A
Receiver Measurement target
Transmitter

D C

Focal distance

Outer diameter D = C - (A+B)

This is automatically
calculated by the controller.

POINT POINT POINT

• Outer diameter can be measured to high precision by
selecting the measurement system best suited to the
diameter you want to measure.
• A faster sampling cycle ensures stable measurement
even if there is target run-out.
Outer diameter values can be measured correctly by the It is important to adjust the parallelism of the two
position correction function even if the target is tilted. measurement systems to prevent values from changing if
the target moves to the left and right.

8
 How to Measure "Stroke"

Measuring the camera

module stroke
A Measuring from above
1
B Measuring from side

Measuring sheet
frame behavior
A Using a 2D laser
displacement sensor 2
B Using a thrubeam
sensor

Measuring blade
edge behavior

REFLECTIVE LASER REFLECTIVE PROFILE THRUBEAM 2D

1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS 3 MEASUREMENT SYSTEM

The sensor head is installed in the stroke The stroke amount is measured by irradiating The stroke amount is measured by finding
direction to measure the distance to the the line laser from the side and measuring the position of the specified point from the
target. the position of the target end face. image obtained by the 2D optical projection
method.

Stroke amount

Distance

Time
Stroke amount

POINT POINT POINT

• The stroke amount can be measured at high speed with
precision.
• Models capable of measuring long stroke amounts
also are available.
• Stroke can be measured even if the target surface is
not flat.
• Movement on both the left and right sides also can be
measured simultaneously.
Stroke amounts can be measured correctly by the
position correction function even if the target shifts to
the left and right.

9
 How to Measure "Run-out/Vibration"

Run-out measurement of
HDD surface
A Surface run-out of rotating bodies 1
B Other run-out/vibration

Vibration measurement
of ultrasonic welding

A Using a 1D laser displacement sensor 2 machine

B Using a 2D laser displacement sensor

Residual vibration
measurement of

3
robot

REFLECTIVE LASER REFLECTIVE LASER REFLECTIVE PROFILE

1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS 3 DISPLACEMENT SENSORS

Height fluctuations at a single point on Height fluctuations at a single point are The line laser is irradiated on the target and
a circumference are captured at a fast captured at a fast sampling rate by a the height of the characteristic point (e.g.
sampling rate by a reflective displacement reflective displacement sensor. peak point) is detected from the obtained
sensor. shape to measure the run-out amount.

(V) Judgment output

Surface Start of measurement

End of measurement
run-out
Max. value
Direction of rotation
Timing signal

Run-out amount

Min. value
Sampling time
ON
OFF
(t)

POINT POINT POINT

• Amplitude increases the further away from the rotation
center, which makes fluctuations in height easier to
capture.
• Measurement must be performed at a sampling rate of
at least ten times the oscillation frequency.
• The peak-to-peak value of the run-out amount is
found using peak-to-peak hold or a similar function.
• Measurement must be performed at a sampling speed
of at least ten times the oscillation frequency.
• If the peak point shifts to the left and right, the peak
cannot be captured at all times if you are measuring by
a 1D laser displacement sensor. The peak point can be
tracked at all times by using a 2D laser displacement
sensor.
• Measurement must be performed at a sampling rate of
at least ten times the oscillation frequency.

10
 How to Measure "Eccentricity"

Eccentricity
measurement of high
A Using a confocal sensor 1 precision roller

B Using a thrubeam sensor

Eccentricity
measurement of

A Measuring at one point 2 motor shaft

B Measuring at multiple points

Eccentricity
measurement of

3 sponge roller

REFLECTIVE LASER THRUBEAM OPTICAL THRUBEAM 2D

1 DISPLACEMENT SENSORS 2 MICROMETER 3 MEASUREMENT SYSTEM

The laser is pointed at the apex of the circle Fluctuations in the edge positions of the roll The eccentricity is measured by finding
to capture fluctuations in distance by high- are captured by high-speed sampling. fluctuations at the position of the specified
speed sampling. multiple points from the image obtained by
the 2D optical projection method.

Run-out amount

(V) Judgment output

Start of measurement
End of measurement
Max. value
Timing signal

Run-out amount

Min. value
Sampling time
ON
OFF
(t)

POINT POINT POINT

• Measurement must be performed at a sampling speed
of at least ten times the rotation speed.
• Error increases as the shaft becomes smaller in
diameter since the apex position shifts to the left and
right due to eccentricity.
• The peak-to-peak value of the run-out amount is • The run-out of V grooves and protrusions in the
found using peak-to-peak hold or a similar function. circumference can be measured.
• Measurement must be performed at a sampling speed • The run-out of a point at a predetermined distance
of at least ten times the rotation speed. from the end can be measured.

11
 How to Measure "Warpage and Flatness"

Flatness measurement
of chassis
A Using multiple sensor heads 1
B Using a single sensor head

Warpage measurement
of substrate
A Using a 1D laser displacement sensor 2
B Using a 2D laser displacement sensor

Warpage measurement
of material pieces

REFLECTIVE LASER REFLECTIVE LASER REFLECTIVE PROFILE

1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS 3 DISPLACEMENT SENSORS

Warpage and flatness are measured by The target or sensor heads are moved, and The line laser is irradiated to measure
calculating height data obtained respectively warpage or flatness is measured from the warpage from the obtained shape.
from multiple installed sensor heads. height data of each point.

Calculates variance between reference point and all Calculates variance between reference point and all
measurement points. measurement points.

Measured value 1 = B - (A+C) / 2... Measured value 1 = B - (A+C) / 2...

Calculates variance between MIN and MAX values Calculates variance between MIN and MAX values
within measurement points. within measurement points.

Peak
Warpage amount

Bottom

Measured value 1 = MAX (A,B,C...) - MIN (A,B,C...)... Measured value 1 = MAX (A,B,C...) - MIN (A,B,C...)...

POINT POINT POINT

• Measurement error caused by chattering when the
sensor head is moved does not occur.
• The inspection cycle time is fast since the sensor head
is not moved.
• A mechanism for moving the sensor head is not
required.
• Costs can be reduced since only one head is used. Warpage can be measured without moving the sensor
head.
• Chattering when sensor heads are moved causes
measurement error.
• A mechanism for moving sensor heads is required.

12
 How to Measure "Angle"

A Using a 2D laser displacement sensor 1

B Using a thrubeam sensor

Angle measurement of bevel during welding

Angle measurement of drill tip

REFLECTIVE PROFILE THRUBEAM 2D

1 DISPLACEMENT SENSORS 2 MEASUREMENT SYSTEM

The sectional shape of locations where the line laser is incident is The angle of specified multiple points is measured from the image
acquired and angle is measured from that shape. obtained by the 2D optical projection method.

Angle

Tilt from virtual line

Angle

Point of intersection
(X, Z coordinates)

POINT POINT

• The angle can be measured by one head. Outer diameter, step, and other parameters can also be measured at the same time as the
angle of multiple locations.
• The angle need not be computed externally.

13
 How to Measure "Gap/Clearance"

Gap measurement of
touch panel

A Gap measurement of transparent target 1

B Gap measurement of roll

Gap measurement
between rolls

A Using a thrubeam sensor 2

B Using a 2D laser displacement sensor

Gap measurement of rolls

and blades

REFLECTIVE LASER THRUBEAM OPTICAL REFLECTIVE PROFILE

1 DISPLACEMENT SENSORS 2 MICROMETER 3 DISPLACEMENT SENSORS

In the case of transparent bodies, gaps can The gap size is found by measuring the The line laser is irradiated to measure the
be measured by light transmitted through a width of the transmitted light. width from the obtained shape as a gap.
body since the target is irradiated by laser
light from above.

No. 1 or top surface

Transparent body
No. 2 or bottom surface

Inflexion point

Received-light wave pattern on

transparent body
t
256
No.1 No.2 No.3 No.4
224 surface surface surface surface
Gap
192
Gap
No.1 surface 160
Received light

128
No.2 surface
96

No.3 surface 64
Width
32
No.4 surface
0
Near Far

POINT POINT POINT

SELECTION OF THE SENSOR HEAD • Roll run-out and gap can be measured • Gaps can be measured correctly by the position
IS IMPORTANT simultaneously. correction function even if the target is tilted.
• Is a minimum gap or greater provided so that the two • Installation space is required on both the left and • Both the gap and step at the end face also can be
surfaces can be identified? right sides. measured.
• Can measurement be performed stably even if the two
surfaces have different reflectance?

14
 How to Measure "Meandering"

Meandering
measurement of
sheet

A Using a thrubeam sensor

1
B Using a 2D laser displacement sensor

Meandering measurement
of sheet

THRUBEAM OPTICAL REFLECTIVE PROFILE

1 MICROMETER 2 DISPLACEMENT SENSORS

The fluctuations of edge positions of the target passing The line laser is irradiated to measure the fluctuations of the
between sensors is measured. edge positions from the obtained shape.

Edge

Meandering amount

Time

POINT POINT

Even transparent targets can be measured stably by changing the detection threshold • Both meandering amount and height fluctuations also can be measured
values of the target. simultaneously.
• Meandering can be measured with the sensors positioned away from the target.

15
 How to Measure "Radius (R)/Inner Diameter"

Radius
measurement of
A Radius (R) measurement 1 drum seaming

B Inner diameter measurement

Inner diameter
measurement of

A Ring-shaped 2 bearing

B Cylindrical

Measuring inner
diameter of metal

3 pipe

REFLECTIVE PROFILE THRUBEAM 2D DIMENSION REFLECTIVE LASER

1 DISPLACEMENT SENSORS 2 MEASUREMENT SYSTEM 3 DISPLACEMENT SENSORS

The line laser is irradiated to measure radius The inner radius is measured from the The optical axes of two heads are reflected
(R) from the obtained shape. image obtained by the 2D optical projection 90° by a prism to measure inside apertures.
method.

Centre of aperture

The approximate R is
measured from the data in
the specified arc area. Diameter

The R of the free-form shape and the coordinates

of the center position of the specified point are
measured.

POINT POINT POINT

Radius (R) can be measured directly without having to
calculate the approximate R externally.
The radius can be measured correctly using a position
correction function even if the target shifts out of
position.
• The optical axes of the two heads form a single line
and the heads also pass through the centre of the
aperture.
• Rotate the target to measure equal pitch angle when
taking circular measurements.

16
 How to Measure "Positioning"

Positioning of liquid
crystal substrate
A Measuring by thrubeam models 1
B Measuring by reflective models

Stage positioning

A Using a 1D laser
displacement sensor 2
B Using a 2D laser
displacement sensor

Positioning of board

THRUBEAM OPTICAL REFLECTIVE LASER REFLECTIVE PROFILE

1 MICROMETER 2 DISPLACEMENT SENSORS 3 DISPLACEMENT SENSORS

The edge positions of a fluctuating target The laser is irradiated from the target The line laser is irradiated to measure the
passing between sensors is measured. movement direction to measure the distance position of the target from the obtained
to the target. shape.

POINT POINT POINT

Even transparent targets can be measured by changing Selective use of sensor heads enables long ranges to be Position measurement can be performed with the sensor
the detection threshold values of the target. measured and controlled. head installed perpendicular to the target's direction of
movement.

17
 How to Measure "Shapes - 2D"

Profile
A Using a 1D laser displacement sensor
1 measurement of
aluminum fin
B Using a 2D laser displacement sensor

Profile

2 measurement
of tire tread
groove

REFLECTIVE LASER REFLECTIVE PROFILE

1 DISPLACEMENT SENSORS 2 DISPLACEMENT SENSORS

Shapes are measured by moving the target or sensor head to The sectional shape of locations where the line laser is incident can
accumulate height data. be acquired. High-speed sampling enables detection even when the
target is moved.

LJ-V

Z axis
Xa
x is

POINT POINT

• Shapes can be measured at a precision higher than 2D laser displacement sensors. • The shape can be measured without moving the sensor head and target.
• A mechanism for moving the sensor head and target is required. • The shape of large targets can be measured by installing multiple sensor heads.
• Chattering when the sensor head or target is moved causes measurement error.

18
 How to Measure "Shapes - 3D"

A Measuring inline 1
B Measuring offline

Profile measurement of conrod

Profile measurement of solder

REFLECTIVE PROFILE REFLECTIVE LASER DISPLACEMENT SENSOR +

1 DISPLACEMENT SENSORS 2 X-Y STAGE

A 3D shape can be constructed by acquiring and overlaying multiple 3D shapes can be measured to high precision by combining a 1D
sectional shapes of locations where the line laser is incident. laser displacement sensor with an X-Y stage.

Sectional shape 3D shape

POINT POINT

The fastest sampling speed in the world achieves measurement of the entire shape inline. • Selective use of sensor heads enables shapes of various heights to be measured.
• The shape of transparent 3D objects also can be measured.

19
 APPLICATION EXAMPLES

THICKNESS/WIDTH MEASUREMENT

Thickness measurement of motor core Thickness measurement of plastic sheet Width measurement of rectangular wires
lamination

OUTER DIAMETER MEASUREMENT

Outer diameter measurement of wafers Outer diameter measurement of ultra thin Outer diameter measurement of feed rollers
wires

GAP/CLEARANCE MEASUREMENT

Gap measurement of doors Gap measurement of touch panel Gap measurement of rollers and blades

20
 R U N - O U T / V I B R AT I O N / E C C E N T R I C I T Y M E A S U R E M E N T

Run-out measurement of disk rotors Run-out measurement of high-precision Vibration measurement of speakers
rollers

HEIGHT/STEP MEASUREMENT

Height measurement of dispenser nozzles Lifting measurement of valve cotters Step/length measurement of injectors

WA R PA G E / F L AT N E S S M E A S U R E M E N T

Warpage measurement of building material Warpage measurement of glass substrates Warpage measurement of pressed parts
boards

21
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22
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