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    VLSI Sec5

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    Cyrille Magdi

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    VLSI Sec5

    Uploaded by

    Cyrille Magdi
    15 views6 pages

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    © © All Rights Reserved

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    Copyright:

    © All Rights Reserved
    Download as PDF or read online from Scribd
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    Download as pdf
    15 views6 pages

    VLSI Sec5

    Uploaded by

    Cyrille Magdi

    Copyright:

    © All Rights Reserved
    Download as PDF or read online from Scribd
    Flag for inappropriate content
    Download as pdf
    of 6
    wow ew er rw i Shak tiene ae Eps foxy & CVO PVD. see ' Qa iF 2 ath eteset een Sees ee perioy Naa aaagasanian ve eed y 2) Aeposited Sig thy Layer is. -owcrtes-( (tony tal) 3). = —equahon is not balanced ene Hy iterate iibast tts tite tes tated za, "Etching 5) T_,-O. Suitable tenperatre for silicon ate i - atoms to get te teie proper pasitoa. ~@ Low mete fraction of (Sy) — ) Hee PE = Nope Phas Epi Ky AE, __st lane ges or Oichbrasane ges it F 8) FF, OCS Ochlore sile itl oe oad in QyVy + -3-S;H2 Ch, see. vue," f Back seauby} Sith eS: <> -Asicle ‘etek le 6 Taso rout reackons Csilone + 3 one ehchay reaction Co ehchdug.L si teha chlorice) lo) F 5 ts healed by RF healer sa Q@ Graph 9) @ grout rahe = onl yam fin Y 4 we eee AAR aN =e Silly Chris "Hass tanspock Guibeo! => Si My is “reaction Limited" 2) Time = Sw 2 NDS min 7 anf iin 3) > sy © T= Vo% = Siy © Ts &7 0% y) Assume epitaxy @ Boo iad! grouse rate a> Such + greulh rahe = 0209S Ain nin _e grou ales 029 pompni 3) + Si Hy Che pus better (sr) asithas slimmer eyes th Fatey_ - 6). ne Lapidene se = (drawback for si (que) +f =k (Ng-Ns) tux" — BE. tohee k= fe ET Ngolt emann constant ( : p i « Growth rate = 6. “Cec z I + Tide Limiting. cases $--—» ko (Ng#Ns,. Cac = h--o CNs 2 Se cee + frouthvate = he *t ca (og Capt vale) 5 lo? Ke soures have the sam. slofe_ o& Sawe activation cng _—_s fo4 (0.2) — f09 (0.05). Of a No, siprificant dlference feo rejim a qe < | sloce Creachen Lisi wl] So, activation exergy is higher in_ceacdrn Coiled. [slope Coas = hunyport Cinuheel] RAKRKARVALE | Io) Silane equalron g 1) r AC ~ : a = 7 Sees eee Gy (alia 2] Dr eal occurs. i bp cide iow mr eyo tag 1 Gel He Late nih ai oe “=> As presented in Doc hr sloles Shuet (7) He lallzation de QaysT/F ea grows Se sd thes. 4) Tas 5) Va m At - p. lype| — Ae 'c = a0) (t= alype] —> Peeling Coke (achat — | y »__due_te 2 sally forsmall contzct) for each Size. 3 wer necet for ve_rnany. jay lape slacks. Cpt ray) TN AMA KEKE SL SS ys 2), because 264 3) a copacitne a Ue ie ee J be inging cp _ S

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