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Solar Energy 149 (2017) 285–293

Contents lists available at ScienceDirect

Solar Energy
journal homepage: www.elsevier.com/locate/solener

Determination of cutting parameters for silicon wafer with a Diamond


Wire Saw using an artificial neural network
Erhan Kayabasi a,⇑, Savas Ozturk b,c, Erdal Celik d,e,f, Huseyin Kurt a
a
Faculty of Engineering, Department of Mechanical Engineering, Karabuk University, Karabuk, Turkey
b
Faculty of Engineering and Architecture, Department of Material Science and Engineering, Izmir Katip Çelebi University, Izmir, Turkey
c
The Graduate School of Natural and Applied Sciences, Dokuz Eylul University, Izmir, Turkey
d
Faculty of Engineering, Department of Metallurgical and Materials Engineering, Dokuz Eylul University, Izmir, Turkey
e
Center for Production and Application of Electronic Materials (EMUM), Dokuz Eylul University, Izmir, Turkey
f
The Graduate School of Natural and Applied Sciences, Department of Nanoscience & Nanoengineering, Dokuz Eylul University, Izmir, Turkey

a r t i c l e i n f o a b s t r a c t

Article history: An Artificial Neural Network (ANN) simulation was utilized to predict surface roughness values (Ra) for a
Received 5 December 2016 Silicon (Si) ingot cutting operation with a Diamond Wire Saw (DWS) cutting machine. Experiments were
Received in revised form 30 March 2017 done on a DWS cutting machine to obtain data for training, testing and validation of the ANN. The DWS
Accepted 11 April 2017
cutting operation had three parameters affecting surface quality: spool speed, z axis speed and oil ratio in
a coolant slurry. Other parameters such as wire tension, wire thickness, and work piece diameter were
assumed as constant. The DWS cutting machine performed 28 cutting operations with different values
Keywords:
of the selected three parameters and new cutting parameters were derived for different cutting
Si wafer
Artificial neural network
conditions to achieve the best surface quality by using the ANN. Wafers 400 mm thick were cut from a
Cutting parameters n-type single crystalline Si ingot in a STX 1202 DWS cutting machine. Ra values were measured three
Surface roughness times from different regions of the wafers. In ANN simulation 70% of Ra values were used as training,
15% of Ra values were used as validation and 15% of Ra values were used to test data in ANN. The ANN
simulation results validated training output data with success above 99%. Consequently, the Ra values
corresponding to the cutting parameters, and also proper cutting parameters for specific Ra values were
determined for DWS cutting using the ANN.
Ó 2017 Elsevier Ltd. All rights reserved.

1. Introduction of wafers obtained after a cutting process directly affects the dura-
tion, energy and material consumption of the lapping operation
In solar cell production, growing and cutting ingot into wafers (Schwinde et al., 2015). Thus, DWS parameters must be deter-
(wafering) comprise 28% of the total cost distribution of solar mod- mined precisely to optimize material and energy consumption,
ule production (Anspach et al., 2014; Ranjan et al., 2011; Schwinde minimize Ra values and control total process duration (Wu et al.,
et al., 2015). In recent decades, cutting single crystalline and poly- 2014).
crystalline Si ingot with DWS became a conventional method due An Artificial Neural Network (ANN) is a simple and cost-
to its higher production capability, low material consumption, pre- effective method to derive new parameters and predict results
cise thickness determination and low Ra values (Zhuang et al., for all science branches. It is mostly used to discover complex rela-
2016; Bidiville et al., 2015; Sun et al., 2004; Pei et al., 2004; Yu tions between input and output data that may not be recognized
et al., 2012). Despite these advantages, however, there are some by theoretical expressions (Çetinel et al., 2006; Boutorh and
disadvantages such as high duration of cutting time, expensive Guessoum, 2016; Zăvoianu et al., 2013; Oliveira et al., 2015). In
and high quantity coolant slurries, corrugated surface shape for- ANN, some data are used for training the network, which provides
mation, and diamond wire and silicon wafer breakage due to network weights to achieve desired results (Boutorh and
non-optimized cutting parameters. All of these issues increase Guessoum, 2016; Ahmadizar et al., 2015). A network consists of
the total production cost of a solar cell (Schwinde et al., 2015; three layers such as an input layer, hidden layer and output layer.
Bidiville et al., 2015; Yu et al., 2012). Moreover, the surface quality The neurons are connected to each other by trained weights. Back
propagation (BP) is the most common method for training net-
⇑ Corresponding author. works to minimize errors (Çetinel et al., 2006). A feedforward
E-mail address: erhankayabasi@karabuk.edu.tr (E. Kayabasi). ANN is also another method used for training ANN. Feedforward

http://dx.doi.org/10.1016/j.solener.2017.04.022
0038-092X/Ó 2017 Elsevier Ltd. All rights reserved.
286 E. Kayabasi et al. / Solar Energy 149 (2017) 285–293

ANNs learn much like a human brain, but they don’t need a specific conjugate gradient algorithm (SCGA). Consequently, a Ra corre-
user for a defined problem algorithm. An additional feature is an sponding to several cutting parameters and several optimum cut-
inherent generalization ability (Boutorh and Guessoum, 2016; ting parameters for specific Ra values were predicted. Results
Benardos and Vosniakos, 2007; Ahmed and Hasegawa, 2013; Düg obtained from the simulation were represented graphically and
˘ enci et al., 2015; Yaghini et al., 2013). Because feedforward ANNs evaluated in terms of Ra, cutting duration, material and energy con-
are static networks, they do not have any feedback elements and sumption. The best cutting parameters were determined to mini-
do not include any delays. Thus, results are computed directly by mize the surface Ra, cutting duration, and material and energy
feedforward connections between input data (Boutorh and consumption for the next steps.
Guessoum, 2016). Together, these capabilities make ANN the best
choice for complex non-linear relations in many engineering appli-
2. Experimental and method
cations due to its precise and correct outputs (Düğenci et al., 2015;
Ozturk et al., 2016).
In a DWS process, z axis speed, spool speed and coolant oil ratio
Obtaining a surface with a low Ra in the cutting operation is sig-
are major factors on surface Ra, which are adjustable in a STX 1202
nificant in many engineering applications. There are several stud-
DWS cutting machine. As such, these three parameters were
ies for finalizing a surface with a desired Ra by using parameters
selected for experimental study. A simple general factorial design
derived with artificial intelligence. For instance, Zain et al. (2010)
was adopted for experimentation. Cutting operations were per-
predicted surface Ra in a machining process using ANN. They col-
formed in a STX 1202 DWS cutting machine with a capacity of a
lected 24 instances of data from samples machined with uncoated,
maximum 5 m/s spool speed and 10 mm/min z axis speed. Due
TiAlN coated, and SNTR coated cutting equipment. Their method
to many wire breakages at high cutting speeds and low spool
utilized a feedforward back propagation algorithm with Traingdx
speeds, cutting parameters were selected between 2.5 to 4.5 m/s
for training, Learngdx for learning, MSE for the performance func-
and 0.5 to 1 mm/min for spool speed and the z axis speed, respec-
tion, and Logsis for a transfer function. Several ANN models were
tively with a pure oil coolant. Process parameters and their factor
utilized to determine the best ANN structure. A 3-1-1 network
levels are summarized in Table 1. A Mitutoyo SJ 210 instrument
structure machined with SNTR coated cutting equipment gave the
was used in surface Ra measurements. To understand the effects
best Ra values. Another Ra study with ANN was performed by
of cutting parameters on Ra, material and energy consumption,
Mia and Dhar for hard turning using a coolant (Mia and Dhar,
and cutting duration per one wafer, Ra values were recorded for a
2016). For input data, they used material feed rate, cutting speed,
specific spool speed, z axis speed and coolant oil ratio. This was
material hardness and cutting conditions including dry and high
done because extended operating durations always increases
pressure coolant jet environments. ANN was trained with
material and energy consumption. Spool speed and z axis speed
Levenberg-Marquardt (Trainlm), Bayesian regularization (BR) and
should be adjusted properly to cutting duration for the lowest Ra.
scaled conjugate gradient (SCG). Root mean square error (RMSE)
Hence, high Ra values extend process durations for lapping because
was used to calculate the performance function. The effects of
of deep DWS damage on a Si wafer, as shown in Fig. 1.
parameters on Ra values were determined in a developed model
Moreover, some DWS damage remained after a chemical tex-
with a regression coefficient (R) higher than 0.997. Kumar et al.
turization process because of non-optimized cutting parameters.
(2014), studied Ra determination of titanium alloys during electric
A SEM image of a sample wafer surface subjected to our study is
discharge machining using a hybrid Taguchi-ANN approach and a
given in Fig. 2. There are many deep DWS prints between upright
feedforward back propagation algorithm. A Levenberg-Marquardt
pyramidal shapes formed in a micro texturization process. This
(Trainlm) algorithm was used for the training network. Tansig
deep damage decreases total efficiency and creates weak regions
and Purelin were preferred for the transfer function in the input
that can result in wafer breakages, thus impacting subsequent
and output layers. Tiryaki et al. (2014) used ANN to model Ra for
steps in solar cell production.
a wood machining process with the aim of low operation duration
Measurements were repeated three times from different points
and energy consumption. They selected wood species, number of
on the wafers and average Ra values were considered for ANN sim-
saws, cutting depth, wood zone, and abrasive grain size as input
ulation. The operating technique for the DWS cutting system is
data for their ANN. Çaydasß and Hasçalık (2008) studied ANN and
given schematically in Fig. 3. The main driver provides the spool
a regression analysis method to predict Ra values in an abrasive
speed for a diamond wire in the right and left direction. All system
waterjet machining process. Traverse speed, water jet pressure,
moves through the z direction to cut the Si ingot into wafers. The Si
standoff distance, abrasive grit size and abrasive flow rate param-
ingot was tightly fastened on a table to prevent vibrations to the
eters were used as input data to predict Ra. Feedforward back prop-
diamond wire and Si ingot. Dogit cutting oil was used as coolant
agation ANN was used consisting of 13 input neurons, 22 hidden
slurry, which is soluble in water. Wafers were washed in distilled
neurons and one output neuron. Karayel (2009) used ANN to pre-
water, acetone and a 5% HF solution for the cleaning step.
dict and control Ra in computer numerically controlled (CNC) turn-
ing machine. There were three input data: cutting depth, cutting
speed, material feed speed. Despite the considerable research in Table 1
Cutting settings used in experiments.
this area, there is no study with any type of artificial intelligence
approach predicting Ra values that correspond to determined Spool speed (m/s) z Axis speed (mm/min) Coolant oil [%]
parameters for a Si ingot cutting process in a DWS cutting machine. 2.5 0.5 100
In this study, we determined new cutting parameters that pre- 3.0 0.75
dicted new Ra values corresponding to these parameters for a DWS 3.5 1.0
4.0
process with ANN for the first time. Firstly, 28 wafers were cut
4.5
with two different coolant options in a STX 1202 DWS machine
2.5 1.0 30
and Ra values were measured. Secondly, data collected from mea-
3.0 2.0
surements were rearranged and used to train a feedforward ANN 3.5
with back propagation. Thirdly, new operating conditions were 3.75
determined and simulated in a trained ANN to predict Ra values 4.0
for new operating conditions. This study utilized a feedforward 4.5
5.0
back propagation multilayer ANN and trained with a scaled
E. Kayabasi et al. / Solar Energy 149 (2017) 285–293 287

Fig. 1. Deep damage of DWS on Si wafer.

Ra values measured under conditions in Table 1 were inserted


as input and output data to the ANN. The study input variables
were spool speed, z axis speed and coolant oil ratio in slurry; and Fig. 3. Schematic of STX 1202 machine cutting system.
the output variable was Ra as shown in Fig. 4. A feedforward back
propagation algorithm was used in the ANN, and is considered a
gradient-decent method. Furthermore, it shifts threshold and measurements and ANN simulation results were calculated with
weight values automatically while training ANN to provide a min- Eq. (1) (Kumar et al., 2014).
imum difference between target and output values (Kumar et al.,
2014; Beale et al., 2016). The ANN was trained by a Levenberg-  
Experimental Results  ANN Predicted Results
Marquardt (Trainlm) algorithm with a MATLAB ANN tool since % Relativ e Error ¼
Experimental Results
the Trainlm is the fastest function for training a network. Addition-
 100 ð1Þ
ally, trainlm works better on function fitting (nonlinear regression)
problems than pattern recognition problems (Beale et al., 2016). Spool speed, z axis speed and coolant oil ratio were inserted as
The Trainlm function also renews weights and biases with a Input data and Ra values were inserted as Output data into the ANN
Levenberg-Marquardt optimization (Kumar et al., 2014). Transfer in part 1. With these values, ANN was trained several times in
function Tansig is much preferred once the speed of the process order to reach the most successful trained ANN by examining
is significant, but the structure of ANN is not necessary (Kumar training, test and validation graphs in Part 2. Lastly, accuracy con-
et al., 2014). Mean square error (MSE) as a performance function trol of ANN results was performed in Part 3. Two different simula-
provided evaluation and comparison for minimum errors. tions were performed with a trained ANN. The first was performed
Consequently, a feedforward backpropagation method, Trainlm to predict Ra values versus spool speed, and the second was per-
training function, Learngdm adaptation learning function, mean formed to predict Ra values versus z axis speed. A flowchart of
square error (MSE) performance function, and Tansig transfer func- the whole process is given in Fig. 6.
tion were selected for the ANN. The number of neurons was During the experimental studies, the diamond wire saws had
selected as 10 for the hidden layer. Maximum epochs were chosen the same properties and all wafers were 400 mm thick and cut from
at 1000 and the error goal was written as 0. The learning rate for the same 100 mm diameter n-type single crystalline Si ingot. The
ANN was 0.01. Initial weights and biases were derived automati- duration of one wafer cutting operation can be calculated by divid-
cally by the MATLAB ANN tool (Beale et al., 2016). The architecture ing the ingot diameter by the z axis speed. To increase the speed of
of the ANN in our study is given in Fig. 5. Relative error between the operation, the z axis speed should be increased directly up to a

Fig. 2. Deep damage of DWS on textured Si wafer.


288 E. Kayabasi et al. / Solar Energy 149 (2017) 285–293

Fig. 4. Structure of ANN.

limited level. If z axis speed augments more than spool speed com-
pensation, this will cause breakage of the diamond wire, breakage
of the wafer, and formation of a corrugated surface shape. In addi-
tion, when the diamond wire breaks, the connecting wire is also
broken, resulting in a complicated replacement process and exces-
Fig. 6. Process flow chart of ANN.
sive wasted time. Moreover, after replacing the connection of wire
into the system, the first cutting process is used to obtain an initial
flat surface for cutting, and not for a new wafer. Furthermore, the All studied parameters, duration per one cutting process, aver-
total wire length decreases because the broken diamond wire can- age measured Ra values, ANN results for these average measured
not be spliced. In experimental studies, all these factors were con- values and relative error between measured and simulated values
sidered with an aim of obtaining minimum material consumption are given in Table 2. Table 2 shows the similarity between mea-
and a flat surface with the lowest Ra. sured and simulated Ra values. On the line, some results were
obtained at almost identical values with measured values. More
3. Results and discussion than half of relative errors are observed below 1%. Minimum rela-
tive error was observed in Experiment 2 with a value of 0.009%.
This study performed 84 measurements to determine 28 aver- Maximum relative error was observed in Experiment 22 with a
age Ra values that were inserted into an ANN simulation from dif- value of 13.167%.
ferent regions of wafer surfaces. After several trainings of ANN, a Figs. 8 and 9 present some information about Ra values of the
success level of more than 99% was achieved as given in Fig. 8. cutting process that was performed with a slurry consisting of pure
Training, test and validation slopes from ANN simulation proves coolant oil. As shown in Fig. 8, Ra versus spool speed can be
that there is a strong correlation between spool speed, z axis speed, observed for each z axis speed from 0.5 mm/min to 1 mm/min of
coolant oil/water ratio and the Ra values in terms of obtaining the first simulation mentioned before Fig. 8. Generally, it is under-
excellent accuracy as seen in the regression curves in Fig. 7. stood from Fig. 9 that higher z axis speeds increase Ra values. In

Fig. 5. A multi-layer tansig-purelin network with two input neurons and one hidden layer with 10 neurons and one output layer.
E. Kayabasi et al. / Solar Energy 149 (2017) 285–293 289

Fig. 7. Training, test and validation results of ANN.

Fig. 8. ANN results representing difference of Ra versus spool speed for the wafers cut with pure coolant oil.

detail, low z axis speeds, for example 0.5 mm/min and 0.6 mm/ Fig. 8 indicates that there is no advantage for the z axis speeds of
min, generally result in lower Ra values between the interval of 0.5 mm/min and 0.6 mm/s at higher values of a spool speed above
3–4.5 m/s in spool speed. In contrast, for spool speeds below 3 m/s. A 3 m/s spool speed provides the best Ra value when z axis
3 m/s, Ra values suddenly increasing up to 2.81 mm and 3.16 mm, speeds are 0.5 mm/min and 0.6 mm/min. In addition, even though
respectively, for z axis speeds of 0.5 mm/min and 0.6 mm/min. the Ra values are lowest for 0.5 mm/min and 0.6 mm/min, the
290 E. Kayabasi et al. / Solar Energy 149 (2017) 285–293

Table 2
Cutting parameters, average surface Ra values and ANN results for the experiments.

Exp. no. Cutting parameters Measured Ra [mm] ANN results for Ra [mm] Relative error [%]
Spool speed [m/s] Z axis speed [mm/min] Coolant oil [%] Duration of DWS [min]
1 2.5 0.5 1 200 3.269 3.165 3.177
2 2.5 0.75 1 134 2.036 2.036 0.009
3 2.5 1 1 100 2.080 2.074 0.298
4 2.5 1 0.3 100 1.745 1.745 0.020
5 2.5 2 0.3 50 1.431 1.430 0.051
6 3 0.5 1 200 1.141 1.142 0.075
7 3 0.75 1 134 1.432 1.428 0.271
8 3 1 1 100 2.219 2.178 1.863
9 3 1 0.3 100 1.569 1.542 1.738
10 3 2 0.3 50 1.424 1.427 0.245
11 3.5 0.5 1 200 1.157 1.088 5.942
12 3.5 0.75 1 134 1.499 1.538 2.587
13 3.5 1 1 100 2.176 2.209 1.499
14 3.5 1 0.3 100 1.377 1.376 0.078
15 3.5 2 0.3 50 1.406 1.410 0.282
16 3.75 2 0.3 50 1.416 1.395 1.473
17 4 0.5 1 200 1.087 1.088 0.137
18 4 0.75 1 134 1.786 1.714 4.008
19 4 1 1 100 2.303 2.299 0.154
20 4 1 0.3 100 1.321 1.322 0.100
21 4 2 0.3 50 1.358 1.376 1.346
22 4.5 0.5 1 200 1.256 1.091 13.167
23 4.5 0.75 1 134 1.839 1.881 2.283
24 4.5 1 1 100 2.906 2.905 0.036
25 4.5 1 0.3 100 1.304 1.298 0.454
26 4.5 2 0.3 50 1.340 1.336 0.332
27 5 1 0.3 100 1.254 1.256 0.133
28 5 2 0.3 50 1.259 1.258 0.060

Fig. 9. ANN results representing difference of Ra versus z axis speed for the wafers cut with pure coolant oil.

cutting duration takes more than three hours for one wafer as seen Ra values were lower for all spool speeds except for 2.5 m/s and
in Table 2. This creates other problems such as material and energy 2.75 m/s. Ra values then suddenly increase with spool speeds
consumption and low production level. In order to shorten the below 2.75 m/s and for z axis speeds between 0.5 and 0.7 mm/
duration of the cutting operation higher z axis speeds were inves- min. In comparison, Ra values increasing after 0.6 mm/min for all
tigated. A 2.5 mm/s spool speed gives the lowest Ra values when z spool speeds as shown in Fig. 9.
axis speeds was selected between 0.9 and 1 mm/min. In addition, a Comparing Figs. 8 and 9, they almost demonstrate the same
z axis speed 0.8 mm/min gives lower Ra values when the spool results for Ra values and draw the same roadmap for optimum
speed was 3 m/s. In other words, there is no advantage at higher parameters. Considering Figs. 8 and 9 together, the lowest Ra can
spool speeds of more than 2.5 m/s for z axis speeds at 0.9 mm/ be obtained with spool speeds between 3.5 and 4.5 m/s and with
min and 1 mm/min. between 0.50 and 0.6 mm/min z axis speeds, but at a maximum
Fig. 9 denotes output values of ANN in terms of Ra versus z axis duration. To decrease the duration with minor losses of Ra values,
speed, for each spool speed from 2.5 m/s to 4.5 m/s. It is clear from Figs. 8 and 9 are in agreement for selecting a spool speed of 3.5 m/s
Fig. 9 that for z axis speeds between 0.5 mm/min and 0.6 mm/min, and z axis speed of 0.60 mm/min. A further advantage in duration
E. Kayabasi et al. / Solar Energy 149 (2017) 285–293 291

Fig. 10. ANN results representing difference of Ra versus spool speed for the wafers cut with coolant oil/distilled water ratio 0.3.

Fig. 11. ANN results representing difference of Ra versus z axis speed for the wafers cut with coolant oil/distilled water ratio 0.3.

can be obtained at a 3.25 m/s spool speed and 1 mm/min z axis was no advantage in selecting a spool speed of 5 m/s versus select-
speed, but with a loss in surface quality. ing 4.75 m/s, as the same values were obtained at both spool
Results for the second ANN simulation are given in Figs. 10 and speeds. Furthermore, the two operations ended with the same
11. Ra values were considerably lower than the experiments with duration and selecting a higher spool speed results in high energy
pure coolant oil. When cutting parameters were selected maxi- consumption.
mum (spool speed = 5 m/s, z axis speed = 2 mm/min), the Ra value When Figs. 10 and 11 are evaluated together, the slopes always
was at a minimum (1.258 mm). Fig. 10 indicates that when the z validate each other. It’s clearly understood that there is a signifi-
axis speed is 1 mm/min, the Ra value becomes minimum at a cant advantage in using distilled water and a coolant oil mixture
5 m/s spool speed. However, Ra values increase gradually with an at a 7:3 volumetric ratio. Using distilled water and an oil mixture
increase in z axis spool speeds, and a 2 mm/min z axis speed at a coolant permits utilization of higher capacities of the DWS
5 m/s spool speed is more advantageous due to minor Ra loss, com- machine, resulting in the lowest Ra values. Figs. 10 and 11 also
pared to a 1 mm/min z axis speed and 5 m/s spool speed. Hence, reflect proper parameters for special cutting conditions of cutting
with a minor loss of Ra values, the cutting operation ended at only studies. Fig. 12 represents the surface view of a wafer cutting oper-
50 min per wafer and the loss in Ra value can be compensated with ation under cutting conditions at a 5 m/s spool speed, 1.5 mm/min
the short duration in the lapping step. z axis speed and 3:10 oil and distilled water mixture. Surface qual-
Fig. 11 shows that a 5 m/s spool speed in all z axis speeds gives ity improved visibly compared to the SEM view given in Fig. 1.
minimum Ra values, except at a 1 mm/min z axis speed. Ra values In DWS cutting, it’s not sufficient to only obtain a low surface Ra,
gradually increase with a decrease of spool speeds for all z axis but it is also important to have cutting done in a short period of
speeds. However, when the z axis speed was 1 mm/min, there time to minimize costs with various cutting parameters. Longer
292 E. Kayabasi et al. / Solar Energy 149 (2017) 285–293

Fig. 12. SEM image of a wafer cut with optimized parameters.

cutting durations will result in a low Ra, but also results in the use Production and Application Center (EMUM) at Dokuz Eylul Univer-
of additional material and energy consumption that increases total sity, Turkey.
cost. Meanwhile, short cutting durations utilize less material and
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