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Mech Lec
Mech Lec
Sensors
2.8 Passive or active sensor
1- Piezoresistive or capacitive
a- Piezoresistor or capacitor integrated in the
membrane
b- Pressure deflects the membrane
c- Resistance or capacitance changes proportional
to deflection and thus to pressure
- Piezoresistive pressure sensor
- Piezoelectric capacitive pressure sensor
2- Strain gage
- Strain gauge is
used to measure
deflection
(motion), stress,
pressure, etc.
- The resistance of
the sensing
element changes
with applied
strain
An amplifier electrical
circuit (Wheatstone
bridge) is used to
measure small
changes in the strain
gauge resistance Deflection of the strain gage
3- Microelectromechanical systems (MEMS)
a) Elastic pressure transducers with different
elastic deformation elements (diaphragm,
capsules, bellows, Bourdon tubes, etc.)
b) Mach-Zehnder interferometer
1- Laser light brought into the sensor by optical
fiber.
2- Light is split to two beams
3- One light beam crosses a micro-membrane
which is deformed by pressure
4- The deformation changes light properties
5- The beams are combined and brought to a
photodiode
6- Different propagation speeds creates an Output
of 14 μV/mbar