Training Outline

Automated Mask Alignment Series | EVG620

EV Group Proprietary and Classified

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Scope
Course Description

This course introduces the Trainee to information and tasks, for the system, in the
following Training Tier Levels:
 Training Tier 1 (refer to "Personnel Qualification" on page 2)
 Training Tier 2 (refer to "Personnel Qualification" on page 2)
 Training Tier 3 (refer to "Personnel Qualification" on page 2)

Target Audience

 Maintenance Technicians / Engineers

Personnel Qualification
As a precaution against accidents, misuse or misinterpretation of the system, the
operating and service personnel should be trained by EV Group.
All Operating and Maintenance procedures in this document indicate the minimum
Training Tier level required to complete the procedure.

The minimum Training Tier qualification can be fulfilled by completing an appropriate

Training course for the corresponding system.

Unqualified personnel performing tasks and procedures may

 result in injury or death of the personnel or damage to the equipment,
 cause a change in equipment stability and reliability, or
 affect the process behavior and the stability of the manufactured product.

Therefore EV Group strongly recommends that the required Training is completed

before performing a procedure.
For details please contact EV Group Training Department
(E-Mail: Training@EVGroup.com).
We are looking forward to assisting you to obtain the required Training Tier
qualification for your personnel.

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Classification of Training Tiers

Definition according to SEMI-Standard E161 "Guide for Identification and

Classification of Training Tiers".

Training Tier Definition Description

Training Tier 1  Environmental, Health Fundamental skills and
(Operation) and Safety knowledge required to
 Theory of Operations safety operate the
 Basic Operations equipment. Tasks that are
 Simple Error Recovery fixed and routine.
 Basic Symptom Understanding of the user
Recognition interface and software
functions.
Training Tier 2  Environmental, Health General understanding of
(Advanced Operations and Safety the control system and
and Preventive  Advanced Operations maintenance software,
Maintenance)  Routine Preventive including error recovery
and/or Scheduled and basic data collection.
Maintenance Tasks can include basic
 Minor Corrective parts removal and
Maintenance replacement (e.g. wafer
 Minor Calibration chuck replacement)
 Symptom Recognition
 Error Recovery
 Data Collection
Training Tier 3  Environmental, Health Complex tasks that are
(Maintenance) and Safety not routine and require a
 Major Corrective high level of background
Maintenance knowledge and
 Infrequent Preventive independent judgment.
Maintenance Infrequent preventive
 Major Calibration maintenance and
 Problem Diagnosis/ complex removal and
Troubleshooting replacement procedures,
 Equipment to include non-
Performance consumables. Expertise
Optimization with the control system
 Equipment Integration and maintenance
 Advanced Control software. Equipment
System Functions integration in cleanroom.
 Data Analysis and Data/log analysis, root
Correction cause analysis.

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Training Outline
The content in this Training Outline is time based structured and reflects the
experiences made in a standard Training class. Minor changes in the Training
order/time are possible, based on the preliminary knowledge / experience of the
Training course participants as well as their interest and learning pace.

Contents Training day 1

Safety Training Tier

Lock out/Tag out procedure TT 1 ☐
EMO circuit TT 1 ☐
Interlocks TT 1 ☐
Hazards and warnings TT 1 ☐

System Overview Training Tier

Process Flow TT 1 ☐
System Overview TT 1 ☐
Facilities TT 1 ☐
Safety TT 1 ☐

Start System Training Tier

Power On System TT 1 ☐
Power On ULPC TT 1 ☐
Start Lamp TT 1 ☐
Power On Electronics TT 1 ☐
Login TT 1 ☐

Shutdown System Training Tier

Switch off Lamp TT 1 ☐
Shutdown ULPC TT 1 ☐
Shutdown Electronics TT 1 ☐
Logout TT 1 ☐

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EVG Device Configurator Training Tier

CAN BUS Overview TT 1 ☐
Check I/O with I/O list TT 2 ☐
Replace ( Scan, Add ) CAN BUS TT 3 ☐

EVG 6XX Software Training Tier

High level TT 2 ☐
Low level TT 2 ☐

Process Flow Training Tier

Start, Open, Save Recipe TT 1 ☐
Teach Wafer Pattern TT 3 ☐
Vision System TT 3 ☐

Contents Training day 2

Z-Travel unit Training Tier

Overview TT 1 ☐
Remove Z-Motor TT 3 ☐
Replace Belt TT 3 ☐
Grease Motor TT 3 ☐
Check and adjust endswitch position TT 2 ☐
Replace ball switch TT 2 ☐
Check tolerance of Cover with Z-Motor in highest TT 2 ☐
position

Tray Training Tier

Overview TT 1 ☐
Adjust middle position TT 2 ☐
Adjust micro switches TT 2 ☐
Adjust up/down speed TT 1 ☐
Adjust height TT 1 ☐

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Copley Motor Training Tier

Overview TT 1 ☐
Change Copley Motor TT 2 ☐
Adjust magnetic rod TT 2 ☐
Teach Copley Motor TT 3 ☐
Teach Copley Motor with Oscilloscope TT 3 ☐
PID Tuning TT 2 ☐

Way Measurement System Training Tier

Overview TT 1 ☐
Check tolerance on the WMS TT 1 ☐
Adjust height of WMS TT 1 ☐

Cover Training Tier

Overview TT 1 ☐
Remove Cover unit TT 3 ☐
Replace silicone clamping tubes TT 2 ☐
Replace cutting insert TT 2 ☐
Adjust cover height TT 2 ☐
Adjust cover up/down speed TT 2 ☐
Check proximity switch for cover up/down TT 2 ☐
Adjust tolerance between Cover and Top Side TT 2 ☐
Microscope

WEC Training Tier

Overview TT 1 ☐
Remove WEC TT 3 ☐
WEC Test TT 3 ☐
Replace suction cup TT 2 ☐

Stage Training Tier

Overview TT 1 ☐
Check and adjust stage middle posiotion TT 2 ☐
Check and adjust overlay position of chuck/maskholder TT 2 ☐

Contents Training day 3

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Top Side Microscope Training Tier

Overview TT 1 ☐
Remove Top Side Microscope TT 3 ☐
Illumination TT 1 ☐
Adjust optic up/down switch TT 2 ☐
Adjust optic up/down speed TT 2 ☐
Adjust software limits X-Axis TT 3 ☐
Calibrate WMS TT 3 ☐
Adjust optic movement X direction TT 3 ☐
Adjust camera picture TT 2 ☐
Adjust Z-WMS TT 2 ☐
Check Z-Values after moving in X direction TT 2 ☐
Check safety distance TT 2 ☐
Calibrate Top Side Microscope TT 3 ☐

Bottom Side Microscope Training Tier

Overview TT 1 ☐
Remove Bottom Optic TT 3 ☐
Illumination TT 1 ☐
Adjust Bottom Side Optic movement in X direction TT 3 ☐
Adjust camera picture TT 2 ☐
Adjust X and Y WMS TT 2 ☐
Calibrate Bottom Side Microscope TT 3 ☐

Contents Training day 4

Lamphouse Training Tier

Overview TT 1 ☐
Remove Lamphouse TT 3 ☐
ULPC Overview TT 1 ☐
Adjust position X Y Z Knobs (lamp adjust unit) TT 2 ☐
Uniformity check TT 2 ☐
Check lamp temperature TT 1 ☐
Check and adjust light integrator TT 3 ☐
Calibrate ULPC TT 2 ☐
Replace mercury lamp TT 2 ☐

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Smart NIL Training Tier

Overview TT 1 ☐
Detachment Tool Configuration TT 3 ☐
Roll On Tool Configuration TT 3 ☐
Program Digital Fiber Light Sensor TT 2 ☐
Roller Pressure Unitformity TT 2 ☐
Smart Nil Settings – Recipe TT 2 ☐

Contents Training day 5

Robot Handling System Genmark GB4

GB Toolbox Training Tier

Overview TT 1 ☐
Station file TT 3 ☐
Parameter file TT 3 ☐

Robot Training Tier

Overview TT 1 ☐
Level Robot TT 2 ☐
Replace and level end effector paddle TT 3 ☐
Teach stations TT 3 ☐

Prealigner Training Tier

Overview TT 1 ☐
Replace prealigner chuck TT 3 ☐
Check prealigner vacuum TT 1 ☐
Level prealigner TT 3 ☐

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Robot Handling System ISEL ROBOTIK

Robot Training Tier

Overview TT 1 ☐
Level Robot TT 2 ☐
Replace and level end effector paddle TT 3 ☐
Teach stations TT 3 ☐
VNC (virtual network client) – user interface TT 2 ☐

Logosol (Prealigner) Training Tier

Overview TT 1 ☐
Adjust Prealigner-chuck (load, scan, pin positon using TT 2 ☐
File Manager

Scanner Training Tier

Overview TT 1 ☐
Mapping parameter TT 2 ☐
Teach scanner TT 3 ☐
Scanning Position and Parameter TT 3 ☐

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Training Confirmation
Training period:
Training Course:

Name of Trainee:
Company:

hereinafter referred to as “Trainee”

EV Group Europe & Asia/Pacific GmbH

DI Erich Thallner Straße 1, 4782 St. Florian am Inn, Austria

hereinafter referred to as “Instructor”

Trainee hereby confirms that Instructor has provided the Training in

accordance with the Training outline and that the Trainee will fully
comply with and has understood any and all contents and instructions
given in the Training Course.

For the avoidance of doubt the Training is provided on an “AS IS” basis
and the Instructor shall not be held liable for any loss or damage caused
by Trainees’ wilful misconduct, misuse and/or negligence and any
behaviour inconsisent with the instructions in the Training
outline/manual.

By signing this document Trainee confirms the attendance at the above

mentioned Training Course and the acceptance of these provisions.

Instructor Trainee

Name: Name:
Date: Date:
Signature: Signature:

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