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  • M M31 (Tab) : Tshita

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    Akash Acky Arya
    33 views5 pages
    1. The document appears to be notes from an exam or experiment on plasma processing involving various parameters like temperature, pressure, power, and gas flow rates. 2. It discusses the setup which includes a plasma chamber, substrate, target, and components like pumps, gauges, and gas inlets. 3. Key parts of the process mentioned are plasma ignition, adjusting flow rates and chamber pressure, and using techniques like sputtering and deposition.

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    203110023

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    1. The document appears to be notes from an exam or experiment on plasma processing involving various parameters like temperature, pressure, power, and gas flow rates. 2. It discusses the setup which includes a plasma chamber, substrate, target, and components like pumps, gauges, and gas inlets. 3. Key parts of the process mentioned are plasma ignition, adjusting flow rates and chamber pressure, and using techniques like sputtering and deposition.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as pdf or txt
    33 views5 pages

    M M31 (Tab) : Tshita

    Uploaded by

    Akash Acky Arya
    1. The document appears to be notes from an exam or experiment on plasma processing involving various parameters like temperature, pressure, power, and gas flow rates. 2. It discusses the setup which includes a plasma chamber, substrate, target, and components like pumps, gauges, and gas inlets. 3. Key parts of the process mentioned are plasma ignition, adjusting flow rates and chamber pressure, and using techniques like sputtering and deposition.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    Download as pdf or txt
    of 5

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