Introduction

Medical Sensors
➢ Definition
• Medical instrumentation sensors
- Sensor(Transducer)
- Electrode
• These sensors act as an interface to, and may be introduced into
human body.
• Medical diagnostic instruments derive their information from
sensors(transducers or electrodes).
- A electrode is a sensor that directly acquires the electrical signal
without the need to convert it to another form; that is, both input
and output are electrical signals.
- A biopotential electrode monitors the electrical signal generated
by the heart, muscles or brain.
- Sensors(transducers) coverts a nonelectrical physical variables
such as pressure, flow, or temperature, or biochemical variables
such as partial pressures of gases or ionic concentrations, to an
electrical signal.
 Medical Sensors
➢ The Importance of Medical Sensors
• Biomedical sensors are the main building blocks of diagnostic medical
instrumentation found in many physician offices, clinical laboratories,
and hospitals.
• Used in clinical laboratories to measure in vitro physiological quantities
such as electrolytes, enzymes, and other biochemical metabolites in
blood.
• Used in vivo to follow continuously (monitor) the condition of a patient.
(to measure pressure, flow, and the concentrations of gases, such as
oxygen and carbon dioxide).
• Sensors used in medicine have to be physically compatible with both
the measurement function and the physiological function of the patient.
 Physiological Signals
➢ All physiological signals can be grouped into the following
categories
(a) Biopotential
EEG(electro encephalogram)
(b) Pressure
(c) Flow EOG(electrooculogram)

(d) Dimensions( for example : imaging) ERG(electroretinogram)

(e) Displacement (such as velocity, ECG (electrocardiogram)

force, and acceleration)
EMG(electromyogram)
(f) Impedance IPG (impedance pneumography)

(g) Temperature
(h) Chemical concentration BSR(basic skin
resistance)
and composition
GSR(galvanic
skin resistance)

David (Michelangelo)
 Sensor(Transducer) Classification
➢ Biopotential Measurement
• Electrodes
- ECG electrodes
- EMG elecrtrodes
- EEG electrodes
- Microelectrodes
➢ Physical Measurements
• Displacement sensors
• Pressure Sensors - blood, spinal, brain cavity
• Force sensors – muscular, organ, tissue tension
• Flow sensors
• Temperature sensors
➢ Blood Gas Measurements
• Oxygen sensors
• pH electrode
• Carbon dioxide sensor
➢ Biosensors
• Glucose sensors
Displacement Sensors
 Displacement
➢ Displacement and Distance
• The vector change in position associated with a motion is called the displacement.
• The displacement of an object is defined as the vector distance from some initial
point to a final point.
𝑑𝑖𝑠𝑝𝑙𝑎𝑐𝑒𝑚𝑒𝑛𝑡 ∆𝐫
Displacement = ∆𝐫 = 𝐫2 − 𝐫1 Velocity = =
𝑡𝑖𝑚𝑒 ∆𝑡
𝑑𝑠𝑖𝑎𝑡𝑛𝑐𝑒 𝑡𝑟𝑎𝑣𝑒𝑙𝑒𝑑 𝑑
Distance = Path of travel Speed = =
𝑡𝑖𝑚𝑒 𝑡

𝑎 d=Distance =Path of travel

𝐫1 ∆𝐫
𝑏
𝐫2
 Displacement
➢ Linear Displacement and Angular Displacement
• Linear displacement: S
𝑑𝑖𝑠𝑝𝑙𝑎𝑐𝑒𝑚𝑒𝑛𝑡 𝐒 𝑑𝐒
Velocity = = ← Velocity =
𝑡𝑖𝑚𝑒 𝑡 𝑑𝑡

𝑎 S 𝑏
θ
• Angular displacement: θ Angular velocity = 𝜔 = (angular velocity = constant)
𝑡
𝑑θ 𝑑 𝑆 𝑣
𝜔= = =
𝑑𝑡 𝑑𝑡 𝑟 𝑟
𝑣 = 𝜔𝑟
 Displacement Sensors
➢ Type of Displacement Sensor
• Displacement and rotation of a part of the body can be measured using various
types of sensors.
- Resistive potentiometers
- Photoencoders
- Capacitive sensors
- Magnetic sensors
 Potentiometer
➢ Structure and Operation
• The resistive potentiometer consists of a resistant element and a movable contact
or slider.
- Translational
- Rotational
• Translational type
- Used when the motion of the object is linear
- Typical models of translational type have stroke lengths from 10 to 250 mm
with a resolution of about 0.1 mm, nonlinearity of about 0.1%, and friction of
about 10 gf.
Core

𝑅𝑏𝑐 𝑥 Winding
𝑉𝑜 = 𝑉𝑠 = 𝑉𝑠 = 𝐾𝑥
𝑅𝑎𝑏 𝐿 Slider or wiper
Motion
𝑉𝑆
𝑥
𝑉𝑜 = 𝑉
𝐿 𝑠

Motion
 Potentiometer
• Translational type
- Example
Figure shows an example of a transient motion measurement in a shockwave experiment.
An originally designed translational potentiometer having a stroke length of 60 mm was
used for recording the displacement of the chest and abdominal walls, and other body parts
of laboratory animals.
The weight of the slider system attached to the object was about 1 g, the force necessary
to overcome the friction of the slider was between 20 and 50 gf, and the resolution of the
displacement was about 0.1 mm.

A sensor for measuring tissue displacement

under blast experiment
 Potentiometer
• Rotational type
- Used to measure rotational motions of the body such as joint motion.
- Rotational type have a resolution of about 0.01%, a nonlinearity of about 0.1%,
and a torque of about 3 gcm.
𝑅(𝜃) 𝑘𝜃
𝑉𝑜 = 𝑉𝑠 = 𝑉 = 𝐾𝜃
𝑅𝑎𝑏 𝑅𝑎𝑏 𝑠

Winding Core

wiper

𝑉𝑜
𝑉𝑆
 Potentiometer
• Rotational type.
- Example: Goniometer
The goniometer is an instrument which is
attached to the body and measures angular
displacements of a joint.
> A simple goniometer consists of a rotational
potentiometer as shown in Figure a. (goniometer)
However, an actual joint motion is not a
simple rotation around one fixed axis, but
has a higher degree of freedom.
> The flexible goniometer shown in Figure b
consists of plastic endblocks that are
connected at each end by a conductive
piece of rubber. The voltage output is
proportional to the angle between the
endblocks. The strain gauge housing
inside the conductive rubber changes its
electrical resistance in proportion to the Electrogoniometer systems: (a) A goniometer consists
change in the angle between the of a rotational potentiometer. (b) A flexible goniometer
longitudinal axes of the endblocks. consists of conductive rubber.

> The rotation of the head is sometimes measured by a rotational potentiometer where
a flexible rod is attached to a helmet and its end is connected to a rotational
potentiometer.
 Potentiometer
• Disadvantages
- The friction of a potentiometer may cause measurement errors when the force is
small.
- Friction-free measurement is possible by using optical, capacitive, or inductive
types of sensors.

cylindrical type capacitive sensor for

measurement of large displacements

Optical encoder
 Linear Variable Differential Transformer
(LVDT)
➢ Structure
• Core attached to the moving element
• Primary coil
• Two secondary coils : The two secondary coils are
connected in opposition in order to achieve a wider
region of linearity

Core
Secondary coil Primary coil Secondary coil

Motion
Core vp

vS1
vS2
vp
vo
 LVDT
➢ Operation
• Magnetic Circuit
- Self inductance: L - Mutual inductance: M

𝑑𝑖 𝑑𝑖1 𝑑𝑖1
𝑣=𝐿 𝑣1 = 𝐿1 𝑣2 = 𝑀
𝑑𝑡 𝑑𝑡 𝑑𝑡

𝑀1

𝑣𝑝 = 𝑉𝑚 sin𝜔𝑡
𝑀2
 LVDT
• Output
𝑑𝑖𝑝 𝑑𝑖𝑝 𝑑𝑖𝑝
𝑣𝑜 = 𝑣1 − 𝑣2 = 𝑀1 − 𝑀2 = (𝑀1 −𝑀2 )
𝑑𝑡 𝑑𝑡 𝑑𝑡

• Core position: at center

𝑑𝑖𝑝
𝑀1 = 𝑀2 → 𝑣𝑜 = (𝑀1 −𝑀2 ) =0
𝑑𝑡

𝑀1

Core: center

𝑀2
 LVDT
• Core position: Up
𝑀1 > 𝑀2 → 𝑣1 > 𝑣2
𝑑𝑖𝑝
• Core position: Down 𝑣𝑜 = 𝑣1 − 𝑣2 = (𝑀1 −𝑀2 )
𝑑𝑡
𝑀1 < 𝑀2 → 𝑣1 < 𝑣2
𝑑𝑖𝑝 𝑀1
𝑣𝑜 = 𝑣1 − 𝑣2 = (𝑀1 −𝑀2 )
𝑑𝑡

𝑀1
Core : up

𝑀2 Core: down

𝑀2
 LVDT
➢ Signal Conditioning
• Two absolute value circuits followed by two filters are used to detect the
amplitude of the A and B channel inputs.
• Analog circuits are used to generate the ratiometric function(A-B)/(A+B).
Note that this function is independent of the amplitude of the primary winding
excitation voltage, assuming the sum of the LVDT output voltage amplitudes
remains constant over the operating ranger.

20 Hz ~ 20 kHz
 LVDT
➢ Characteristics
- LVDT characteristics include linearity over a
large range, a change of phase by 180˚ when Output (+)
the core passes through the center position,
and saturation on the ends.

- Specifications of commercially available

LVDTs include
> Sensitivities: the order of 0.5 to 2 mV for
a displacement of 0.01 mm/V of primary
voltage. Output (-)

> Full-scale displacement : 0.1 to 250 mm Range

> Linearity of 0.25%.

(-)max Center (+)max

displacement displacement
 LVDT
• Disadvantages
- While higher linearity and sensitivity can be attained, it has the disadvantage that the inertia
of the moving element is increased by the core attached to it.
- It may be affected by external magnetic fields due to the proximity of magnetic materials.
- It requires more complex signal processing instrumentation.
> Essentially the same magnitude of output voltage
results from two very different input displacements.
> The direction of displacement may be determined
by using the fact that there is a 180˚ phase shift
when the core passes through the null position. A
phase-sensitive demodulator is used to determine
the direction of displacement.

(a) As x moves through the null position, the phase

changes 180˚, while the magnitude of vo is proportional
to the magnitude of x.
(b) An ordinary rectifier demodulator cannot distinguish
between (a) and (b), so a phase-sensitive demodulator
is required.

➢ Application
• The LVDT is widely used in physiological research and clinical medicine to
measure pressure, displacement, and force.
 Capacitive Displacement Sensors
➢ Structure and Operation Principle
• Capacitance
𝜖𝐴
𝐶=
𝑑

𝜖 = 𝑝𝑒𝑟𝑚𝑖𝑡𝑡𝑖𝑣𝑖𝑡𝑦 𝑜𝑓 𝑡ℎ𝑒 𝑑𝑖𝑒𝑙𝑒𝑐𝑡𝑟𝑖𝑐

• Parallel plate
Moving plate

A A’ Displacement
A’

𝜖𝐴 Fixed plate ′
𝜖𝐴′
𝐶= 𝐶 =
𝑑 𝑑
 Capacitive Displacement Sensors
➢ Structure and Operation Principle
• Cylindrical(concentric) type capacitive sensor for measurement of
large displacements

Moving tube Fixed tube

Displacement

➢ Use
• Most of them are designed for industrial use.
• Fairly accurate sensors of this type are available.
 Optical Encoder
➢ Structure and Operation Principle

Optical encoder
Force Sensors
 Force
➢ Force
• Any influence which tends to change the motion of an object.
• A force usually results from an interaction.
- Contact force: a force resulting from physical interaction
- Action-at-a-distance force: a force resulting from non-physical interaction

Contact force Action-at-a-distance force

• In mechanics,
- Force : the causes of linear motion
- Torque: the causes of rotational motion
 Stress and Strain
➢ Stress
𝐹
𝜎=±
𝐴
1 Pa = 1 N/m2 (-) compressive stress
1 psi = 6.89 × 103 Pa
(+) tensile stress

➢ Strain
∆𝐿
𝜀𝑎 = ±
𝐿
∆𝐿 = 𝐿 − 𝐿′
𝐿′
𝐿′ ∆𝑑
(+) tensile strain 𝜀𝑡 = ± (-) compressive strain
𝑑
∆𝑑 = 𝑑 − 𝑑 ′

➢ Poisson's ratio
𝜀𝑡
𝜈=±
𝜀𝑎
 Stress and Strain
➢ Stress–strain relation
• Hook’s law
𝜎 = 𝐸𝜀
E: modulus of longitudinal elasticity
(Young's modulus

➢ Shear stress and strain

• Shearing stress
𝐹
𝜏=
𝐴
• Shearing strain
𝑏
𝛾=
𝑎
For small strain,
𝛾 = 𝑡𝑎𝑛𝛿 = 𝛿
 Strain Gages
➢ Definition
• A strain gage is a sensor whose resistance varies with applied force.
• It converts force, pressure, tension, weight, etc., into a change in electrical
resistance which can then be measured.

Applied force
𝐿 → 𝐿 + ∆𝐿
𝐿
𝑅=𝜌 A → 𝐴 − ∆𝐴 𝑅 + ∆𝑅
𝐴
ρ → 𝜌 + ∆𝜌

𝐿 𝐿 + ∆𝐿
𝜌 𝐅 𝜌 + ∆𝜌 𝐅
𝐴
𝐴 − ∆A
 Strain Gages
➢ Types of Strain Gages
• Metal strain gages
- Wire type
- Metal foil type
> Base : PI, 30~70 um
> Metal foil : NiCu or NiCr, 3~10 um
Width End loops
- Thin film

Length

• Semiconductor strain gages

Solder
tabs

Base
 Strain Gages
➢ Principle of Operation
• The differential change in R is found by taking the differential

Width End loops

• Gage factor: G or GF Base

Strain Gages
 Strain Gages
➢ Wheatstone bridge
• The Wheatstone bridge circuit is ideal for measuring small changes in resistance.
• Resistance-type sensors may be connected in one or more arms of a bridge
circuit.
• The variation in resistance can be detected by measuring (v2 - v1) with a
differential amplifier feeding an analog-to-digital converter (ADC), which feeds a
computer.

𝑉𝑠

𝑅 + ∆𝑅 𝑅 − ∆𝑅
𝑣2 𝑣1

𝑉𝐼𝑁
𝑅 + ∆𝑅
𝑅 − ∆𝑅
𝑉𝑜𝑢𝑡 = 𝐴 𝑣2 − 𝑣1
𝑉𝐼𝑁 = 𝑣2 − 𝑣1
 Force Measurements
• Muscles produce forces and may cause body movements which in turn cause a
reactive force from the environment, such as the reaction from a floor when a subject
walks on it. Many forces can be applied to the body passively from the environment
due to natural or artificial phenomena.
Force measurements are required when these forces are studied quantitatively.

• Muscle Contraction Measurements

In physiological studies of the muscles, the contractile force of the isolated muscle is
measured.
• Measurements of Stresses in the Bone
In physiological studies of the muscles, the contractile force of the isolated muscle is
measured. Direct measurement of internal stress distribution in a bone is always
difficult, and thus it has to be estimated indirectly. If the stress–strain relation of a
bone is known, the stress can be estimated by measuring the strain.
• Ground Force Measurements
When the body moves, the force exerted on the ground or on the body varies in its
strength and direction due to the acceleration or deceleration of the body. Thus the
force exerted on the ground, which is called the ground force, provides information
about the body motion. The ground force measurements have been performed
clinically in the gait analysis,in stabilometry, and for the evaluation of athletic capacity
in sports medicine.
 Force Measurements
➢ Muscle Contraction Measurements
• Figure shows an implantable myocardial force sensor which is sutured to the
ventricular wall of a heart.
• A bonded strain-gauge element was cemented onto a spring bronze plate, and
glued with epoxy resin.
• The measurement range was 0–2 N, and the resonance frequency was 450 Hz..

An implantable myocardial force sensor.

 Force Measurements
➢ Muscle Contraction Measurements
• Implantable force sensors have also been used for recording the activities of the
gastrointestinal tract
• It consisted of a Be-Cu sheet of 3 × 9 mm, onto which a foil strain-gauge was bonded.
• The sensor was molded with silicone rubber, and Dacron mesh was embedded in it for
suturing it to the intestine at right angles to it.
• The average life time of the sensor was 24 days.

Implantable force sensors for recording of gastrointestinal tract activities.

 Force Measurements
➢ Measurements of Stresses in the Bone
• Direct measurement of internal stress distribution in a bone is always difficult,
and thus it has to be estimated indirectly.
• If the stress–strain relation of a bone is known, the stress can be estimated by
measuring the strain.
• In animal experiments, the strain of a bone can be obtained by attaching strain
gauges onto it.
• Measurement of strain can be performed in vivo as long as the strain gauges
can be attached to the bone surgically.
• The stress–strain relation of a bone can be determined if the bone is extracted
after the measurement without removing the strain gauges.
 Force Measurements
➢ Ground Force Measurements
• The ground force measurements have been performed clinically in the
gait analysis, in stabilometry, and for the evaluation of athletic capacity
in sports medicine.
• The ground force can be measured either by sensors placed on the
ground or attached to the foot.
• While forces measured by these two methods must be the same in their
strength and the directions are opposite to each other, the obtained
data are apparently different, because the sensor on the ground
measures the force with reference to the fixed coordinate system
whereas the sensor attached to the foot measures the force referring to
the moving coordinate system.
 Force Measurements
➢ The Force Plates
• The instrument installed on the ground so as to measure the ground force, is
called the force plate or force platform.
• The force plate has a plate supported by force sensors.
• The simple force plate has sensors
that measure only vertical forces and
provide outputs of the vertical
component and point of application of
the ground force.
• The force plates used more commonly
have force sensors which measure
one vertical and two horizontal (shear)
components of the force, so that the
strength, direction, point of application,
and torque of the ground force can be
obtained.

The force plate.

 Force Measurements
• Strain gage type force plate
- The platform is supported by four
metal pipe pylons on which strain
gauges are attached so that the
compression, bend, and twist of
the pylon can be detected.
 Force Measurements
➢ Stabilometer
- Clinical examination of stability of the posture is called stabilometry, and the force plate
designed for stabilometry is called the stabilometer.
- Simple stabilometer only measures the locus of the point of application of the ground force
using their triangularly arranged vertical force sensors.
- If the coordinates of these sensors in the x–y plane are (0, a), (−b, −c), and (b, −c), and their
vertical force components are F1, F2, and F3, then the x- and y-coordinates of the application
point of the ground force (𝑥,ҧ 𝑦)
ത is given by

The stabilometer

- When the subject is standing still, the

point of application of the ground force
stays right below the center of gravity
of the body.

- However, when the body is accelerated in a horizontal direction, the point

of application deviates from the point right below the center of gravity.
Thus the locus of the point of application does not simply reflect the
excursion of the center of gravity.
 Load Cell
➢ Structure
• A load cell is a sensor which converts the weight or load acting on it into electrical
signals.
• Spring element configuration: binocular
• Strain gages: fore foil-type strain gages
• Measuring circuit : Wheatstone bridge

𝑅1
𝑅3

𝑅2
𝑅4

Spring element
(Al alloy)
 Load Cells
➢ Principle of Operation

tensile
Compressive 𝑅1
𝑅3
𝑅2 𝑅4

Compressive tensile

𝑅1 𝑅2
𝑅4 𝑅3
 3.5
Pressure Sensors
 Pressure
➢ Definition
• Pressure
𝐹
𝑃=
𝐴

• Atmosphere pressure

• Water pressure or hydraulic pressure

 Pressure
➢ Pressure Units
• SI unit
N −5
1 Pa pascal = 1 = 10 bar 1 hPa hectopascal = 100 Pa
m2 = 1 mbar
• Non-SI units(Technical unit)
100000N pound
1 bar = 1 2 = 105 Pa 1 psi = 1
m inch2

1 MPa

kgf
1
cm2
 Pressure
➢ The relationship between atmospheric pressure, gage
pressure, vacuum, and absolute pressure

대기압

760 mmHg

진공

Absolute pressure Gage pressure

 Pressure
➢ Physiological Pressure Ranges and Measurement Sites
• Pressures in the human body are measured as a part of clinical
examinations and for physiological studies.
• Figure shows the ranges of pressure in normal and abnormal situations.
 Pressure Sensor
➢ Component of Pressure Sensors
• Pressure sensing element(spring element)
- Initially convert pressure into a displacement Diaphragm

- Example : diaphragm

• Sensor
- convert displacement into an electrical signal

Strain gages

• Signal conditioning
- Amplification or filtering
 Diaphragm-type Pressure Sensor
➢ Diaphragm
• Most pressure sensors for direct pressure measurements have an
elastic diaphragm, and its displacement or strain is detected by a
sensing element such as the strain gauge or a variable capacitance.
- Metal Diaphragm
- Ceramic Diaphragm
- Silicon Diaphragm

(Metal)
 Diaphragm Pressure Sensor
• Deformation of a thin circular diaphragm with clamped edge,
- displacement of the diaphragm at a
distance r from the center

- Maximum displacement at the center

- A radial component of strain

- A tangential component of strain

 Diaphragm Pressure Sensor

- The strain components are equal at the center

➢ Metal Strain gauge type

• The strain gauge type has been widely used.
This principle utilizes metal or semiconductor
elements as a sensing element.
 Diaphragm Pressure Sensor
➢ Silicon Strain gauge type
• Figure shows a cardiovascular pressure sensor in which a beam-type
semiconductor strain gauge element is used to detect displacement of the metal
diaphragm.

metal

A pressure sensor using a beam type silicon strain gauge

 Silicon MEMS Pressure Sensor
➢ MEMS(MicroElectroMechanical Systems)
• Micromachining
 Silicon MEMS Pressure Sensor
➢ Types of Si MEMS Pressure Sensors
• Piezoresistive pressure sensor
Piezoresistors

Si diaphragm
Si
Anodic bonding

Glass

• Capacitive pressure sensor

ε𝐴
𝐶=
𝑑
 Silicon MEMS Pressure Sensor
➢ Piezoresistive Pressure Sensors
• Piezoresistive Effect
𝐿 L A
𝑅=𝜌
𝐴

Piezoresistor:
P-type diffused layer
∆𝜌
= 𝜋𝜎 = 𝜋𝐸𝜀
𝜌
π: piezoresistive coefficient
σ: stress
σ= Eε
ε: strain
 Silicon MEMS Pressure Sensor
➢ Piezoresistive Pressure Sensors
• Piezoresistive pressure sensor consist of a silicon diaphragm and four
piezoresistors.
 Silicon MEMS Pressure Sensor
➢ Piezoresistive Pressure Sensors
• Note the locations of the maximum strain along the edges
 Silicon MEMS Pressure Sensor
➢ Piezoresistive Pressure Sensors
• Example: OMRON

Atmospheric pressure

Null Pressure Add Pressure

 Silicon MEMS Pressure Sensor
➢ Piezoresistive Pressure Sensors
• Example: OMRON

Top view
Cross section view

Inside top view

 Silicon MEMS Pressure Sensor
• Example: OMRON
- Calculation of constant current

𝐼𝑠 𝐼𝑠

𝑉+

𝑉3

Example of Recommended Circuit Diagram

 Silicon MEMS Pressure Sensor
➢ Piezoresistive Pressure Sensors
- Calculation of Gain

𝑉𝑠 = 𝑉4 − 𝑉1

𝑉1 𝑉4
 Silicon MEMS Pressure Sensor
➢ Piezoresistive Pressure Sensors
- Output characteristics
> The output characteristics at room temperature (25˚C) when applying the pressure from
-10 kPa to 50[kPa at the condition of the constant current 100 uA.
> The guaranteed measurement range: 0 kPa to 37 kPa.
> Span voltage at 0 kPa to 37 kPa is typically 31 mV.

31 mV
 Silicon MEMS Pressure Sensor
➢ Piezoresistive Pressure Sensors
- Output characteristics
>When using the circuit configuration at the condition of Gain =21 as described in Fig,
the output characteristics for low pressure range between 0 kPa and 7 kPa.
> In this case, Ref voltage is connected to 1.0 [V]. This is a result of monitoring the
output Vout shown in Fig.

> Ideal Span voltage=123mV

(=7kPa / 37kPa x 31mV x 21)

> Actual Span voltage=122.6mV

122.6mV
 Diaphragm Pressure Sensor
➢ Capacitive type
𝐴

𝜀
𝑑

𝜀: permittivity of the medium

Capacitive pressure sensor

structure (omron)
 Diaphragm Pressure Sensor
➢ Capacitive type
𝐴

𝜀
𝑑

𝜀: permittivity of the medium

𝑉𝑖 − 0 0 − 𝑉𝑜
j 𝑗= =
1 1
0 𝑗𝜔𝐶𝑖 𝑗𝜔𝐶𝑥

𝐶𝑖 𝑑
𝑉𝑜 = − 𝑉𝑖 = − 𝐶𝑖 𝑉𝑖
𝐶𝑥 𝜀𝐴
 Silicon Pressure Sensor

Examples of Specifications of Commercial

Medical Pressure Sensors
 Silicon MEMS Pressure Sensor
➢ Medical Applications
• Used in non-invasive medical equipment since 1980’s
- Blood pressure cuffs

Omron

- Respiratory equipment
A respirator is a device that is worn over the
mouth and nose to protect the wearer from
occupational and environmental hazards such
as harmful airborne particles and gasses.
Unlike a ventilator, a respirator does not
perform any actual breathing function for its
wearer.
Instead, its purpose is to purify inhaled air
before it enters the lungs by trapping harmful
particles and fumes.
 Silicon MEMS Pressure Sensor
➢ Medical Applications
- Ventilator
A ventilator is a device that aids or performs the breathing process for hospital
patients whose respiratory function is impaired, such as individuals with lung
injuries or those under general anesthesia.
Most ventilators are highly complex, computerized machines that use a
compression system to force air, which may be tempered with oxygen, into the
patient’s lungs several times each minute.

Typical components and potential locations for

pressure sensors in a ventilator
 Silicon MEMS Pressure Sensor
➢ Medical Applications
- Ventilator
Continuous positive airway
pressure(CPAC) machines for treating
sleep apnea.
This device works by applying positive
pressure to the patient’s airway.
Medical pressure sensors (typically4kPa)
are used to measure the positive airflow
to the patient.
Pressure sensors are used in sleep apnea, a
condition related to high blood pressure,
weight problems or cardiovascular disease.
 Silicon MEMS Pressure Sensor
➢ Medical Applications
• Invasive uses increasing
- Clinical pressure sensors such as disposable sensors and catheter-tip sensors.

the silicon-diaphragm type pressure sensor its attachment to a tubing

A disposable pressure sensor

 Silicon MEMS Pressure Sensor
• Example : Catheter-tip pressure sensor 1
- The catheter-tip pressure sensor has a pressure sensing element at the tip of a
catheter.
- It has been developed primarily for accurate measurement of pressure waveforms
in the cardiovascular system.
> Arterial and ventricular blood pressures
> Spinal pressure
> Tumor pressure
> Airway pressure

A catheter-tip pressure sensor with a beam-type silicon strain gage

 Silicon MEMS Pressure Sensor
• Example : Catheter-Tip Pressure Sensor 2

Cross section of a silicon

diaphragm pressure sensor

Catheter-tip pressure sensor

having the diaphragm in its end
 Silicon MEMS Pressure Sensor
• Example : Catheter-Tip Pressure Sensor 3
- Capacitive type sensors for the catheter-tip pressure sensor
Assembly for the catheter-tip sensor

A silicon chip with a diaphragm

bonded to a glass support using
electrostatic seal.

Construction of a capacitive type pressure sensor