Actual Static Control Market Situation and How to

Choose Suitable ESD Flooring Systems for ESD Control

Working Areas
Toshikazu (Toshi) Numaguchi
Sumitomo 3M Co. LTD.
3-8-8 Minamihashimoto Chuuouku, Sagamihara, Kanagawa Pref., Japan
tel.: +81427792239, email: tnumaguchi@mmm.com

Abstract - The ESD Association (ESDA) developed ANSI/ESD STM 97.1 and 97.2 and also supported the
development of IEC 61340-4-5 for flooring and footwear evaluation while the footwear is being worn.
Unfortunately, these procedures are not well understood or utilized in the Asian market. Many electronics
companies are handling miniaturized ESD susceptible devices (ESDS) within their working areas. Many
companies are developing an understanding of the ESD susceptibility voltage of their parts; but at the same
time, defining and measuring the control level for personnel handling the parts often only relies on electrical
resistance measurements. This paper presents some measurements of the personnel body voltage in actual
factories handling miniaturized devices and shows the need to confirm not only resistance to ground but also
body voltage generation must be measured when qualifying a flooring and footwear grounding system for
operators. Recommendations are made in this paper, based on test data, for improving static control systems for
use in ESD protected areas (EPA). This paper is the result of extensive ESD survey experience at Japanese
OEM companies throughout the Asia-Pacific region.

I. Introduction footwear system is acceptable for personnel

grounding as long as the resistance to ground is less
The industry has been using many of the ESDA static than 3.5 x 107 ohms. S20.20 says that no other
control test methods and ANSI/ESD S20.20 as well as measurements are required for qualifying the
IEC 61340-5-1 for some time now. It is also much grounding system if the resistance specification is
easier to obtain these documents now due to on-line met. Many installed floors have a resistance to ground
ordering. Coming from Asia, we would like to say that is too high to allow personnel to meet the
thank you to the ESDA and the standards committee < 3.5 x 107 ohms resistance value regardless of their
members for their valuable contributions to the footwear. Method 2 describes an alternative way to
industry. control the limit for personnel. The floor and footwear
We all understand that our electronics companies are resistance must be less than 1 x 109 ohms using
handling many static sensitive semiconductor devices ANSI/ESD STM 97.1 and the body voltage less than
at many different types of static control EPA’s. The 100V using ANSI/ESD STM97.2.
Scope of the new version of S20.20 released in 2007
expects that in the future we will have to protect
devices sensitive to less than 100 volts HBM. ESD
Table 1: Personnel Grounding Requirements from S20.20
control programs will have to adjust in order to safely
1
handle more sensitive parts. This means that we need
to understand the ESDS susceptibility voltage and the
limits of the various ESD control solutions. Table 1
lists the personnel grounding requirements from
S20.20. Wrist straps are the first line of defense when
it is possible to use them. The alternative personnel
grounding system shown in the table uses a floor and
footwear system. Method 1 states that a floor and

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 In this paper, it will be shown that simply relying on
the 35Mohm resistance to ground for personnel using
a flooring and footwear system does not guarantee
that personnel will always be kept below 100 volts
when the walking test is performed to check the body
voltage.
II. Static Control Using ESD
Protective Flooring and ESD
Control Footwear
This 2nd section describes our test results on ESD
All of these materials can be found in electronics
manufacturing facilities. The type of floor that is
selected is most often driven by cost considerations.
Personnel resistance is measured according to
IEC61340-5-1 ANNEX A test methods. Figure 2
shows the normal factory test method that is based on
the IEC and ESDA methods. After the operator passes
this test they are allowed into the working area of
their EPA. Many times these test results are collected
and recorded to a PC with operator ID information so
a history is maintained.
装置

control flooring and ESD control shoes for operator

with ESD control. ESD control flooring materials
were evaluated using ANSI/ESD S7.1 flooring
resistance test methods. Each company determines the
resistance to ground (RTG) value they want to specify
for their operations and the test procedure shown in
Figure 1 is used to make the actual measurements.

Flooring RTG Test methods

履物用電極

3M 702 Flooring Tester

Test Voltage : 100V

Figure 2: IEC 61340-5-1 test method for Operator resistance to

Electrode : 2.27kg
metal plate.
Conductive Rubber

As shown in Figure 2, the person stands on a stainless

IEC 61340-4-1 ed.2.0
steel plate and presses a button on the tester to make
Test sample
ANSI/ESD S 7.1 the resistance measurement from their hand over their
feet to the metal plate. This test method is being used
Ground in many electronics companies in Asia. Table 2 shows
test data of operator resistance to the stainless steel
Figure 1: Resistance to ground measurement (RTG). electrode plate tested by the IEC 61340-5-1 test
methods. There is information about 3 different
Table 2: ESD Flooring Resistance to ground operators in Table 3.
Flooring Samples Test methods
Resistance RTG
Table 3: Operator body Resistance to stainless steel plate
MΩ
Sample A P ANSI/ESD. S.7.1 0.65 Test methods Body Metal Plate
Sample B M ANSI/ESD. S.7.1 1.38 Operator MΩ
Operator A IEC61340-5-1 7.85
Sample C T ANSI/ESD. S.7.1 0.22
Operator B IEC61340-5-1 6.32
Test condition: Temp = 26.3°C, Humidity = 53.7%Rh
Operator C IEC61340-5-1 2.87
Most electronics companies have RTG specifications Test condition: Temp = 24.3°C, Humidity = 53%Rh
for ESD control flooring in the range from less than or
equal to 100 Megohms to under 1000 Megohms. As can be readily observed, the resistance of the 3
Table 2 shows some results for several different types operators, their socks, ESD footwear and stainless
of flooring materials. The samples include: Epoxy steel electrode is well within the <35 megohm
paint (P) floor, resilient floor mat (M), and ESD floor specification of S20.20 & IEC 61340-5-1. Please note
tile (T). The measurements were made using the however, that this measurement does not take into
procedures of ANSI/ESD S7.1. account the actual floor in the facility.

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 The next part of this investigation involves measuring Table 5．ESD survey Test results of Company A
the static voltage on personnel. The measurement Flooring No Install Flooring Floor RTG Body Charge voltage Body RTG
Body Resistance to
Metal Plate
method follows ANSI/ESD STM97.2 walking voltage Address
Operator Name MΩ V M Ω (Actual Floor) M Ω (SUS Plate)
Staff A 68 47 2.8
test procedures. Floor sample C from Table 2 (floor Staff B 35 45 2.2
tile) and operator C from Table 3 were used in this TP-1
Staff C
Staff D
63
55
45
50
1.8
2.1
0.3
test. Locker Room Operator E
Operator F
129
119
197
>200
22
18
Operator G 86 >200 16
ESD Flooring & ESD Footwear Systems ANSI/ESD STM97.2 Operator H 131 >200 30
Body Voltage < 100 volts Test condition: Temp = 25.8°C, Humidity = 53%
Electrical Connection for Flooring/ Footwear System Walking test
H passed inspection test of shoes (see Table 5–Last
Graphical Recording Device
column). They were then cleared to handle ESDS
Use a 36X36 Inch or
Larger Flooring Samples
devices and products in the EPA working area.
Operator E, F, G and H show less than 30 M ohms
shoe test on while standing on a stainless steel
electrode. But, static control voltage levels are over
Support Material 100V. This company ESD management wants to
Insulative if required Gap 10 mm
control to <100V body voltage at EPA working area.
They had made a significant investment in static
control solutions.
Charge Analyzer
Material Under Test So, we would like to consider another viewpoint from
ANSI/ESD S20.20. The test this company uses to
Figure 3: ANSI/ESD STM97.2 Static charge voltage on personnel. verify that the footwear is meeting requirements is
IEC 61340-5-1 and the results shown in the data are
Table 4: Performances of ESD Floor
less than 35M Ohms. However, if you look at the test
Test item Flooring RTG Body RTG Body Body
on the Floor on SUS Plate Static Charge results STM97.1, all operators and staff are greater
Sample
ANSI/ESD.S.7.1 ANSI/ESD.S.97.1 IEC61340-5-1 ANSI/ESDS.97.2 than 35M Ohms. Also, please notice that the static
M ohms M Ohms M Ohms V
charge voltage on the staff personnel are all less than
Sample C T 0.22 4.71 2.87 >300
100V, which is a very good result and meets the
S20.20 recommendation. But, notice that operators E,
Table 4 indicates the test results of operator C and F and H are over 100V and operator G is very close.
shows the static charge voltage. This test method is
During the survey, we could not understand this
performed at every customer working area now when
company’s static control system and policy. They
conducting an ESD survey. This particular ESD floor
were just checking PASS and FAIL of ESD shoes
tile static control performance was not so good when
using the wrist strap and footwear tester and stainless
you look at the operator static charge voltage, since it
steel plate. While this is a completely normal and
was over 300V.
common test, they are only managing the operator and
Table 5 shows the ESD survey test results of ESD shoes using this method. While the test method is
flooring evaluation at Company A. This company acceptable, more work is needed to make sure that the
specifies <100V ESD control voltage (human body test voltage and measurement circuit is providing the
Voltage) level and has a good ESD control proper information. The shoe test procedure can
documented procedure. As the data shows, the staff certainly be used for routine measurements on a daily
people had walking body voltage averaging about 50 basis, but the footwear and flooring system must be
volts so were within the company specifications. qualified first using the walking voltage test.
However, the operators had walking voltage levels
In summary, the resistance test procedure with the
that exceeded the 100 volt level.
operator standing on a stainless steel plate can be used
This electronics company required that the operators but should not be considered as the only procedure.
had to check their shoes while standing on a stainless After the floor and footwear system are properly
steel plate before working every morning and after selected, making sure that the resistance to ground and
lunch. Operators passed the test resistance upper limit the walking voltage generation meet the requirement,
set at <100M ohms. This means Operator E, F, G and then the stainless steel plate resistance test can be used
to track changes in the footwear.

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 III. Operator ESD Control properly. It is very important though to make sure the
flooring and footwear system only allow acceptable
Recommended Test Methods voltage levels on personnel.
We would like to consider a more suitable set of Table 6 shows the ESD survey results of Company B.
proper test methods for establishing operator ESD This company has installed a very good ESD control
control systems. We recommend using the procedures system and has established an ESD control voltage
shown in Figure 4 and Figure 5. Today, several level of <50V in their EPA.
companies are using STM97.1 and STM97.2 test
methods for measuring performance of flooring and Table 6．ESD survey Test results of Company B
ESD shoes while being worn by personnel. Flooring Install Flooring Floor RTG Body Charge voltage Body RTG
No Operator Name MΩ V MΩ
ESD Flooring & ESD Footwear Systems ANSI/ESD STM97.1 李　明友 10.7 23.7
TP-1 王　楊 0.6 14.3 38
R < 35 x 106 ohm
沼口 1 24.4
李　明友 12.1 49.6
Floor Materials and Footwear- Resistance easements
TP-2 王　楊 0.3 15.4 24.2
沼口 1 15.4
李　明友 12.1 59.4
TP-3 王　楊 0.6 16.2 19.6
沼口 1 27.2
李　明友 17 84.7
TP-4 王　楊 2 19 24
沼口 1 37.4
李　明友 25 66
TP-5 王　楊 0.1 17.2 20
Use a 36 X 36 inch or 沼口 1 27
Lager Flooring sample 李　明友 17 96
TP-6 王　楊 0.3 11.3 19.9
沼口 1 29.3
李　明友 14.2 80
TP-7 王　楊 0.3 13.4 23.6
沼口 1 35
李　明友 23 77
TP-8 王　楊 0.2 16 32.4
Figure 4: STM97.1 Operator body resistance to ground 沼口 1 39.9
李　明友 11.5 89
TP-9 王　楊 0.3 10.2 32.3
沼口 1 47.6
ESD Flooring & ESD Footwear Systems ANSI/ESD ST M97.2 李　明友 18.8 99
Body Voltage < 100 volts TP-10 王　楊 0.4 17.4 36.1
沼口 1 51
Electrical Connection for Flooring/ Footwear System Walking test 李　明友 16.1 53.9
TP-11 王　楊 0.8 17.6 30.5
Graphical Recording Device 沼口 1 32.2
李　明友 13.6 62.4
Use a 36X36 Inch or
TP-12 王　楊 0.5 14.9 35.5
Larger Flooring Samples
沼口 1 34.3
李　明友 15 84
Locker
王　楊 0.3 20 16.7
Room
沼口 1 29.9

Support Material
Insulative if required Gap 10 mm Test condition： Temp. 24.6°C Humidity 48%

Please see that the highest static charge voltage on

Charge Analyzer
Material Under Test
Figure 5: STM97.2 Static charge voltage on personnel
These tests include the operator body, operator socks,
ESD shoes, and the actual ESD floor materials. This is
the methodology stated in S20.20 personal resistance
requirement of Method 2 for flooring and footwear
qualification. A correlation needs to be developed
between all the test methods during the qualification
process. Once this is done, it may be possible to use
the simple operator resistance test as a way to
continue to verify that the footwear is still working
personnel is +25V with a corresponding RTG at 66 M
Ohms for this person. Also, please see that the highest
RTG is 99 M ohms but with a corresponding static
voltage of 18.8 volts. This shows that there is no
direct relationship between RTG and body voltage.
Operator body resistance to ground control limit is
from 1M ohms to 100M ohms at Company B. They
are investigated lots of test data with many local
operator’s resistance to ground and charge voltage on
many different personnel. They had enough
experience and data to be able to set the RTG
specification to 1 to 100Mohms and a body voltage of

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 <50 volts. They have based these specifications on the
ESDS susceptibility level of the parts that are handled.
IV. Standard Recommendation of
35 M ohms of Operator Resistance
test of scuffing and walking voltage on personnel. An
example of the data is shown in Figure 6 and all the
data summarized for all three floors in Figure 7.
Charge of

to Ground Scuffing

Please consider again the Table 5 test results. The

main industry standards require operator body
resistance to ground of less than 35M ohms.
However, as the data shows, the operator static charge
voltage is not less than 50V under the test conditions.
In company B, the RTG exceeds 35 Mohms as
required by the standards but has successfully
maintained personnel at less than 50 volts in the
walking tests. However, Company A could not
maintain the 100V ESD control level that they
specified even though the RTG level was consistently
under 35 Mohms.
As has been shown so far in this paper, the S20.20
Flooring / Footwear system Method-2 for measuring
the grounding requirement is necessary for flooring
and footwear qualification, even in areas where the
RTG levels are met under Method 1. The S20.20
Scope focuses on handling 100V HBM ESDS devices
within static protected areas and then to control
personnel to less than 100V static charge voltage.
Soon the industry will handle ESDS of less than 100V
HBM, so there will soon be a need to consider
personnel grounding requirements of both Method-
Charge of
walk
Sampling speed: 10mmSce.
Measuring Range: ±25V Body Static Charge voltage
Figure 6: Static charge voltage on operators walking on Floor B
from Table 7
Figure 6 is 3 operators static charge voltage test STM
97.2 results of scuffing and walking on Floor B. This
test result is for ESD flooring and ESD footwear
while the operators walked and scuffed their feet. Test
measuring range is 25V. It was less than 10V static
charge voltage on personnel walking and scuffing
shoes on Floor sample B.
ESD Flooring and Operator Body Static charge voltage
Static Charge Voltage On Personnel

1and Method-2. This means not only 35M ohms but 120
Scuffing
also static charge voltage in the personnel walking 100
test. Of course it is necessary to make adjustments 80
according to the sensitivity of ESDS handled in the
(V)

60

facility. 40
20
Table 7 shows additional data for three different
0
floors where personnel had worn the same type of White Black White Black White Black
shoes. This Table shows that even low RTG can result Shoes Shoes Shoes Shoes Shoes Shoes

in high body static voltage. Floor A Floor B Floor C

Table 7 ESD floor static control performance test results Figure 7: Static charge voltage on personnel on Samples
Test item Flooring RTG Body RTG Body to Metal Body
on the Floor Plate Static Charge Here we summarize our test results. At this point we
Sample Floor ANSI/ESD.S.7.1 ANSI/ESD.S.97.1 on SUS Plate ANSI/ESDS.97.2
+White Shoes M ohms M Ohms IEC61340-5-1 V cannot say that low RTG always leads to low static
Floor A 0.07 8.27 2.21 112 charge voltage on personnel.
Floor B 0.28 6.81 2.3 10
Floor C 0.2 4.75 2.2 27
The three ESD flooring samples are described
below:
Test condition： Temp. 25.3°C Humidity 51%Rh A）Static conductive Epoxy Paint floor. Gray color.
B）Static conductive tile.
Again, the test results were a bit puzzling. The
C）Static conductive tile.
resistances are very good and at low resistance values,
however, Floor A allows the generation of high static
charge voltage on personnel. We ran a confirmation

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 ESD Footwear Samples： continue on a predetermined frequency such as
1) Static control conductive safety shoes. Black color. monthly or quarterly. After a period of time, if the
2) Static control conductive shoes. White color. floor and footwear values are stable and do not change
substantially, the frequency of the tests can be
We have to consider static charge voltage evaluation extended at the company’s discretion.
first. After the selection of shoes for test, it is
necessary to conduct the walking voltage test Conductive wax for ESD flooring. The application
of wax to otherwise good ESD control flooring may
according to STM97.2 first. When the footwear is
cause many problems. Wax should only be used
selected and shown to meet the necessary body
following the flooring manufacturers
voltage specification, then a correlation can be made
recommendations. It is necessary to completely strip
to RTG testing for monitoring the shoes and personnel
old wax off periodically using a manufacturers
over time.
approved wax remover. Wax can also be very
expensive to install and maintain. Maintenance costs
V. Other Considerations can be quite high.
This section offers some additional considerations that Aging test of ESD Flooring There is a wide range of
need to be taken into account during the floor and costs associated with flooring materials and in
footwear selection process. particular with tile flooring. The composition of floor
Consideration of ESD footwear and socks/stocking tile varies greatly from manufacturer to manufacturer.
materials. Most floor tiles have a base of polyvinyl chloride with
various types of plasticizers added to provide desired
Table 8: Body (Socks + Shoes) RTG measured by 61340-5-1 properties. The cost of the plasticizer often controls
Socks Bare Foots Acrylic Cotton Thicker Acrylic the cost of the tile. Lower cost tiles will often have a
Sample Socks Socks Socks
IEC61340-5-1 IEC61340-5-1 IEC61340-5-1 IEC61340-5-1
shorter life expectancy due to containing less
ESD Shoes M Ohms M Ohms M Ohms M Ohms plasticizer. It is not uncommon for high quality floor
Shoes A 2.1 780 8.4 1510 tiles to maintain their electrical properties for more
Shoes B 1.9 1510 3.1 1601 than 10 years without any degradation. Table 9 shows
Shoes C 2.6 1180 3.4 1380 the initial electrical properties of three (3) different
Shoes D 62.1 420 83 980
Shoes E 59.1 570 80 1118
floor tiles.
Shoes F 0.83 15 4.6 1031
Shoes G 1.1 16 4.1 1350 Table 9: Initial performance of ESD flooring
Shoes H 2.1 530 37 1278 Test item Flooring RTG Body RTG Body
Shoes I 2.9 390 41 1318 on the Floor Static Charge Conductive
ANSI/ESD.S.7.1 ANSI/ESD.S.97.1 ANSI/ESD.S.97.2 WAX
Sample M ohms M Ohms V
Test condition: Temp = 25.3°C, Humidity = 51%Rh Tile H 0.16 5.7 <20 Need
Tile M 0.46 6.9 <10 Not Necessary
on Stainless steel Plate Electrode. Tile CM 0.28 6.37 <30 Need
Test condition: Temp = 25.3°C, Humidity = 51%Rh
This set of test results shows bare feet and cotton
socks test results with very good body RTG. The samples from Table 9 were placed in a high
However, acrylic and thicker acrylic socks show very temperature aging chamber for 7 days at 40°C. This
high Body RTG. The green color column shows simulates about 1 year of actual aging time. Chart 10
footwear that meet low RTG requirements. However, shows the results of the electrical tests after aging.
this procedure is for personnel wearing the footwear The samples were removed from the test chamber and
and socks while standing on a stainless steel electrode allowed to return to room conditions before testing.
test plate.
ESD flooring qualification test and periodic test. Table 10: After aging performance of ESD Flooring
Prior to installing a new floor, samples of the intended Test item Flooring RTG Body RTG Body
on the Floor Static Charge Conductive
floor and the footwear that will be used should be ANSI/ESD.S.7.1 ANSI/ESD.S.97.1 ANSI/ESD.S.97.2 WAX
evaluated together using STM97.1 and STM97.2 Sample M ohms M Ohms V
procedures. It is very important to mention at this Tile H 0.78 9.7 <60 Need
point that the qualification testing must also be Tile M 0.44 7.3 <10 Not Necessary
performed at low “Humidity and Temperature level” Tile CM 0.31 6.23 <50 Need
to see the situation under ”worst case conditions”.
After the floor is installed, the evaluations should Test condition: Temp = 25.1°C, Humidity = 51%Rh

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 Please compare the initial results for Tile H to the This is a very high reliability connection by copper
results after aging. The initial walking test voltage wire. However, Figure 10 shows an operator
using STM97.2 showed less than 20 volts but after connected to ground through socks, footwear, and
aging 7 days at 40°C the tile allowed about 60 volts. ESD flooring. There is no copper wire making the
The reason for this dramatic change is because the connection from the person to ground. This complex
plasticizer in the tile bled out to the surface. The tile system on the Right depends on many personal
was very sticky after the aging test and this tile would properties: body weight, shoes size (contact area),
tend to do this over time as well. It is necessary to do sock materials and thickness, skin condition (very
some very good evaluations of flooring materials dry?), etc. Except for the socks, a company cannot
before installation to make sure that floor that is control any of these human factors that can lead to
selected will meet the company needs for a long time. large differences in the resistance path to ground for
An ESD floor is expensive and it is expected to last a people using a floor and footwear grounding system.
long time so some diligence is needed in the selection
process to make sure your company is getting what is Body Resistance to Ground
expected.
ESD flooring ordering and responsible persons.
As mentioned above and is obvious in the industry,
installing an ESD floor is expensive. It is very Ω Ω
R1 R2
important for purchasing, engineering, manufacturing,
quality, facility design and the ESD engineer in the RBody RSocksR RShoesR RFloor1
facility to work together to select and install the best
RWS=1Mohm
RBody

floor available for the money. Installing an ESD floor

Rcontact 1 RSocksL RShoesL RFloor2

Rcontact 2
that does not meet the requirements in terms of Ω
R1
RGround Ω
R2
Rcontact 1 Rcontact 2 Rcontact 3
Rcontact 4
protecting sensitive devices is a very big waste of RGround

money.
Figure 9: Wrist strap Figure 10: Flooring & Shoes
An example of the cooperation needed among the
groups involved is shown in Figure 8. Very large
Next, Table 11 shows the test results of a person
problems can occur if the floor selection is made
wearing a wrist strap system connected to ground
without the input and discussion with the people that
through various resistances. The person is moving
have to handle ESDS parts in the manufacturing areas.
around during this test to measure the static charge
voltage using the STM97.2 method. The wrist strap
Static control flooring installation has good connection to the operator’s skin and the
To install ESD floor for New Plant. path to ground is by copper wire. Even when the
Electronics Company resistance is allowed to be quite high, the body
Facility. Construction G General Construction
Company voltage remains at under 100 volts. LOW
ESD floor is,
RESISTANCE results in LOW STATIC CHARGE
Conductive Floor, <10e6 Ohms. VOLTAGE on personnel since there are no other
Static control
Supplier
Clean room resistances involved. This method also has very
Contractor
repeatability test results.
Resistance & Cost? Total Clean room Cost?
No information for Mfg. ESD Team.
Table 11: Resistance to Ground & Voltage on a Human body (to
ESDS Handling use Wrists strap)
Manufacturing

Resistance to ground Voltage on Human Body

Figure 8: ESD Flooring ordering and personnel interactions 0.27MΩ Less than 1 V
1 MΩ Less than 1 V
Operator static charge voltage Vs RTG. Figure 9 10 MΩ 6V
shows operator body connecting to ground through 35MΩ 40 V
two different paths of resistance. We have 2 different 100MΩ 85 V
Operator static control methods. Figure 9 shows a
wrist strap static control solution. This wrist strap
solution uses a wire grounding connection between
the operator body and an identified ground point.

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 VI. Conclusions
We would like to recommend these test methods for
more suitable ESD Flooring and ESD footwear
selection
1. Figure 1. Qualification test using ESDS 7.1 –
Floor Materials.
2. Figure 4. Qualification test using ESD STM97.1 –
Operator body resistance to ground on actual
floor.
3. Figure 5. Qualification test using ESD STM97.2 –
Static charge voltage on personnel while walking
on the actual floor.
These test methods are very important for determining
the ESD control performance of flooring and
footwear. Using these test methods during the floor
selection process will allow companies to make better
choices for flooring systems that will last a long time
and deliver the expected performance. The methods
evaluate not only the electrical resistance of the
flooring and operators but will help determine the
voltage levels on personnel that handle ESDS devices.
A proper level of risk analysis can then be made to
determine the sensitivity level of parts that can be
handled without fear of ESD damage from personnel.
Finally, please measure operator’s static charge
voltage while they are in their actual working area and
compare the results to your ESDS devices
susceptibility levels. This information can be used to
monitor changes in your EPA conditions. Please
consider Chart 1 that shows S20.20 Table 2 Flooring/
Footwear Method 1 and Method 2 requirements.
Today we strongly suggest considering Method 2 as a
very good discussion item for your ESD team. As has
been shown in this paper, the 35 M ohms to ground
requirement may not provide the best solution by
itself. The operator body, shoes, floor and total system
has an effect of static charge voltage generation.
Please consider the complete system when making
decisions.
What is most important for your ESD control? It is
not just low resistance, as the static charge voltage on
personnel must be determined as well. If, the body
charge voltage level is in an acceptable range when
compared with your ESDS susceptibility voltage data,
then you can measure the operator body resistance to
ground with actual flooring. If the resistance to
ground through the operator is not over 1 x 109 ohms,
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and the charge voltage level is under the ESDS
susceptibility voltage, your system should meet your
requirements. The upper limit of personnel resistance
to ground using the standard footwear tester and
stainless steel plate may be established after you have
sufficient test data to compare to the actual floor and
footwear test data. Please consider your ESDS
susceptibility voltage and the measured operator static
charge voltage to set your company requirements.
Remember to add a safety margin to make sure the
risks are acceptable.
References
ESD Association
[1] ANSI/ESD S20.20-2007. Protection of Electrical
and Electronic Parts, Assemblies and Equipment
(Excluding Electrically Initiated Explosive
Devices).
[2] ANSI/ESD S7.1-2005. Floor Materials
Characterization of Materials.
[3] ANSI/ESD STM97.1-2006. Floor Materials and
Footwear –Resistance Measurement in
Combination with a Person
[4] ANSI/ESD STM97.2-2006. Floor Materials and
Footwear –Voltage Measurement in Combination
with a Person.
IEC TC101 Series
[5] 61340-5-1. 2007 (IS). Part 5: Specification for the
protection of electronic devices from electrostatic
phenomena. Section 1: General requirements.
[6] 61340-5-2.2007 (TR). Part 5: Specification for the
protection of electronic devices from electrostatic
phenomena. Section 2: User Guide
[7] 61340-2-3. 2000. Methods of test for determining
the resistance and resistivity of solid planar
materials used to avoid electrostatic charge
accumulation
[8] 61340-4-1 Ed.2. 2003. Standard test methods for
specific applications-Electrical resistance of floor
coverings installed floors.
[9] 61340-4-5. 2004. Standard test methods for
specific applications-Methods for characterizing
the electrostatic protection of footwear and
flooring in combination with person.