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AN OVERVIEW OF ESD PROCESS CONTROL PROBLEMS

G. BAUMGARTNER
Lockheed Missiles & Space Company, Inc.
P.O. Box 3504 B/151 014893
Sunnyvale, California 94088
( 4 0 8 ) 742-6997

Abstract The problems of applying procedures and 2 . Total - Level 2 -- Install "total pro-
measurement methods for the control of electrostatic tectTo%n- ing additional Frotection to
discharge (ESD) are identified for the implementation l e v e l 11a
."L:::# protection uses every
or improvement of an ESD control program. Adherence to available Drotection device such as les strap
military, industrial, and in-house ESD requirements is grounding-with a conductive floor or mdt, room
difficult because of diverse electrostatic charge and/or bench t o p ionization, conductive/
sources, erroneous tests, and unknown sensitivities of dissipative tote boxes, double bagging by
devices in various configurations due to the inade- adding a metal foil outer bag, ESD gloves,
quacies of the sensitivity classification method (i.e. grounded conductive storage racks, grounded
human body model test). This complicated situation is dissipative plastic shelves, ionized dry
analyzed to determine ESD procedures and packaging nitrogen storage boxes, static alarms and
protection limitations. Improved procedures and pro- monitors, etc.
tection result from considering sensitive devices to be
of two distinct classes - voltage sensitive or energy (Of course it i s possible t o have an ESD
sensitive. program tailored to use some or almost all of
the items listed in Level 2.)
I. Introduction
Management may support Level 1 if i t seems to be
ESD control varies widely from company to company. adequate. However, support of Level 2 may result in
Company programs range from basic t o excessive overkill[l] that may not be obvious. Developing what
controls, while some have no control programs. It is is mistakenly called total protection" is expensive
practically impossible to cover all aspects of ESD and may include a variety of unnecessary procedures.
control because problems effect almost every department While a comparison of ESD controlled to non-controlled
of a company, along with their suppliers and customers. production lines have been reportedr21, no reliable
Some of these ESD control problems and the underlying studies have compared ESD failure rates for Level 1
reasons are discussed. versus Level 2 manufacturing lines. Also, no data is
available for comparing protection of Levels 1 and 2
11. ESD Program Start-up versus the sensitivity levels o r other types of
sensitivity. Engineers must be aware that Level 2
A. Management Support protection measures may provide little or no increased
protection over Level 1 and that some elements may
Management support is essential for an effective ESD actually increase ESD risk.
program. This support can be obtained by determining
the cost effectiveness of instituting an ESD program. The difficulty is in determining which additional ESD
However, accurate ESD damage cost data are not often procedures provide more protection, especially for
available to determine the cost benefit ratio. This is electrostatic field (E-field) sensitive devices.
because accurate ESD failure rate information is not Sometimes using some elements of Level 2 may be prudent
always obtainable due to the lack of failure analysis t o satisfy customer concerns, even if increased
or of differentiation from electrical overstress (EOS). protection is unproven. No ESD program can provide
Developing cost estimates of implementing, training total protection even if human error is excluded.
gersoniel, and maintaining ESD protection is straight
orward For Example a good wrist strap for grounding Unfortunately, ESD protection methods have not yet been
personnel costs $10 t; $15. The cost of a good tabre developed into exact agreed upon procedures based on
top mat, which provides a grounded worksurface is directly applicable electrostatic and electrical
about $50. The cost of heat sealable polyethylene'ESD engineering principles. Level 1 protection can be very
protective bags range from about 4 cents for a small cost effective from a contract and a hardware stand-
bag to 39 cents for a large bag. The training costs point. Although in most cases, an ESD protection
vary depending on the length of training time and program has to be tailored by a knowledgeable engineer
whether it is in-house training. The cost of ESD to meet the specific needs of the particular manufac-
damage is more difficult to obtain and should include turing or service operation.
the replacement part, repair, and retest. The pro-
bability of additional damage due to rework and the Engineers are faced with recommending a protection
reliability of reworked items should be considered. level of basic, total, or somewhere in between based on
Because of many undetermined and uncontrolled factors, their understanding of ESD protection methods. Engi-
decisions may not always be able to be based on enough neers developing, defining or maintaining an ESD
data to justify an ESD program. Sometimes, decreasing protection program must be aware of the difficulties,
the possibility of ESD damage may be enough justifi- limitations, and uncertainties of measurement associ-
cation for implementing an ESD program. ated with the ESD protection. A knowledge of why
certain sensitive devices are only damaged by direct
For an ESD program to be effective there needs to be discharges while others are damaged by E-fields i s
plant wide compliance and cooperation. This can only needed to provide proper protection for the different
occur if management is supporting the program. But, types of devices.
enqineerinq has to decide what level of orotection is
needed and determine which controls ark appropriate. C. In-House, Industry, and Military Requirements
This is accomolished bv understandinu the Drotection
requirements of the-product and acquiring as much Any ESD program must conform to established require-
reliable failure data as possible. ments, either based on in-house, industry, or military
standards. Requirements are used to define protective
B. Developinq an ESD Program methods and procedures for the control of ESD packag-
ing, handling, processing, and, possibly, circuit
Determining what departments will be involved in the design. The electronics industry in the late 1960's
ESD program is important, however, what kinds of damage became aware of the need for controls when unprotected
is considered as ESD must also be defined. The ESD MOS transistors began to experience ESD failures - the
program must be extended to the original device manu- need for a protection circuit had not been thought of.
facturers, vendors, subcontractors, etc., through to
customer repair services if they handle sensitive The Military established comprehensive requirements and
parts. suggested guidelines in May 1980 with a Department of
Defense Standard and Handbook[3,41. These documents
For discussion, an ESD program can be divided into two and others generated by the Military have some elements
levels a s follows: that became obsolete as the industry progressed, there-
fore DOD-STD-1686 was revised 8 August 1988. DOD-HDBK-
1. Basic - Level 1 -- Install an ESD "basic 263 is being revised to reflect the new requirements of
protection" program that includes only four MIL-STD-1686* REV A. MIL-HDBK-263* will contain know-
elements - a grounded dissipative (or possibly ledge that has been gained in the industry over the
conductive) worksurface, personnel wrist strap last ten years. (*Formerly DOD now MIL)
grounding (1 megohm to ground), pink (surfact-
ant loaded) polyethylene protective packaging, The military standards are now being complemented by
and a basic ESD training class of 1 to 2 hrs. recently published industry standards such as the
90/CH 2935-5/90/ooo(M859$01.0001990 IEEE

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Electronic Industries Association (EIA) and Electrical Some manufacturers have repackaged all types of elec-
Overstress/Electrostatic Discharge (EOS/ESD) Associa- tronic parts, sensitive or not, including mechanical
tion Standards. There are also some requirements in hardware, in ESD packaging when these items had to go
the military and industry standards which are contro- into ESD protected areas. The increased protection is
versial in that they contain tests and procedures that not necessary and can not be demonstrated by measured
are not universally accepted or shown to be effective E-fields. Non-sensitive parts can be unpackaged and
for ESD protection. the non-ESD packages disposed of before the sensitive
parts are unpackaged. When VS devices are unpackaged,
The non-universal acceptance of ESD procedures and test chargeable material removal becomes a mandatory ESD
methods is due to standards committees not following discipline, otherwise removal of these materials is
good engineering practice of defining the problem, only a housekeeping discipline.
stating the requirements, developing measurement
theories, and documenting test methods with "round ESD protective packaging is not supposed to generate a
robin testing. Following good engineering practice charge when handled by grounded personnel. But
would lead to test methods that would measure the contrary to popular belief, ESD protective packaging or
amount o f protection provided to a device. Then other ESD safe items such as conductive gloves often
protection criteria could be related to the what is tribocharge fiberglass, insulated wiring, conformal
adequate for a class or type of device. These methods coated printed circuit boards (PCB), etc. Pink poly-
may never be able to measure protection with the ethylene will readily tribocharge many insulative
certainty needed to establish total confidence. materials, such as a PCB, until the insulative
Present test methods lack credibility for assessing ESD materials have become contaminated with antistatic
protection provided by workstations, protective compound, whereupon the tribocharging effect is no
packaging, and other ESD protection systems, although longer exhibited. If the PCB is then cleaned with
they do provide an estimate of protection. alcohol, the charging process can be repeated. Tribo-
charging of an insulative material is hard to prevent
Military requirements are intended to institute strict even if the other surface is a d i s s i p a t i v e or
ESD controls. Adhering to military and industrial ESD conductive material.
requirements can result in unnecessary costs if not
tailored by in-house documents. Complete and continual The size and kinds of plastic chargeable materials can
compliance with protection requirements of devices be limited. These materials such as pieces of tape,
after their manufacture is a difficult but important cups, etc, are necessary for efficient operations.
task to insure against latent defects. The existence Small amounts of tape can be safely removed by contin-
of latency is controversial and cannot be found by ually regrasping the tape close to the point of
testing. Latency has diminished as an issue over the removal. The use of air ionization can only reduce the
last few years. Latency failures have been estimated induced peak voltage as the tape is being removed from
to be less than 1 percent of the ESD failures[5]. the PCB[6].
111. Program Problems Instructions for the use and handling of these
non-groundable materials must be stated, particularly
A. Inadequacies of Classification System when VS devices are present. Removal of all tribo-
charging materials such as PCBs, teflon wires alumi-
Inadequacies exist in the sensitivity classification num, etc. from the ESD station is not feasible: Pro-
method, i.e. the human body model (HBM) test. Class- tecting VS or other extremely ES devices from E-fields
ification aids the designers by identifying sensitive requires ESD program procedures to be specifically
items but it is not always helpful in determining the tailored to protect these devices as much as possible.
protection level required for a given device. The A Level 1 ESD program does not Zliminate all risks to
protection procedures could be improved b considering VS devices and neither does a total protection" level
sensitive devices as two distinct typesy6,7], voltage 2 program.
sensitive (VS Type -
unprotected) or energy sensi-
tive[8] (ES Type - protected). When the type of It is important to note that VS devices can be damaged
sensitivity is not identified, it is more difficult to by E-field induced voltages due to handling (tribo-
determine what kind of ESD protection procedures are charging) of a PCB by grounded personnel. Styrofoam
needed for a given device. Unless devices are cups used to mix potting components can harm VS devices
identified, programs may consider every device as VS but are wrongly considered deadly to ES devices. A
even though VS devices are rarely used by the majority charged cup laid directly in line with the circuit
of the electronics industry and are the only devices trace can induce hundreds of volts across a VS device.
sensitive to E-fields. The same magnitude voltage can be induced by a grounded
person rubbing the conformal coated trace. A Styrofoam
The large difference in sensitivities between types of cup in the hands of a grounded operator is not likely
devices adds to the protection problem. ESD procedures to damage ES devices because the device will not
and packaging requirements must be analyzed to deter- receive a direct discharge of sufficient magnitude.
mine what level of protection is provided to the item Damage to VS devices due to PCB handling has given rise
when the package is exposed to different ESD sources. to holding the PCB at the edges only so contact area is
minimized. This procedure is not necessary for ES
B. Differentiating EOS From ESD devices.
Defining ESD protection prevents confusing it with EOS Identifying a particular device as ESD sensitive, and
requirements such as the soldering iron tip voltage. even more importantly E-field sensitive, is a problem.
ESD damage is a particular type of EOS but some EOS Once devices are taken out of the protective package
control requirements are erroneously being specified as and the protective shunts are removed, VS devices are
ESD protection requirements. EOS, other than ESD more vulnerable and are hard to identify. Packaqing
damage, should usually not be considered in an ESD and handling errors are possible unless specific
protective program. There are some exceptions. EOS instructions for proper identification, handling and
requirements for soldering irons may be handled more packaging of VS and ES types are available. Special
conveniently by the ESD protection program. precautions are needed to prevent damage to VS items.
ESD packaging of VS, ES, and non-sensitive electronic
DOD-STD-~OOO[~]and other high reliability soldering components in ESD packaging causes confusion as to what
specifications set EOS limits by specifying the maximum is especially sensitive. There is no simple solution
soldering iron tip voltage of 2 mV. The 2mV speci- for these problems so the tendency is to over-package
fication is unreasonably low when compared to actual ac and treat everything as VS sensitive.
voltages on worksurfaces. Up to 2 volts can be mea-
sured on ESD worksurfaces and personnel even though ESD hardening of all devices would be a solution and
they are connected to ground through a 1 Megohm resis- the military is encouraging this in MIL-STD-1686. IC
tor. Power line cords from ac electrical equipment manufacturers are driven by customer demands for
lying o n the dissipative worksurface cause these increasingly hardened devices. IC advertisements are
induced voltages because of capacitive coupling. now starting to claim greater ESD hardness for devices
Worksurface grounding and wrist strap monitor equipment than devices offered by competitors. ESD hardening
may also cause more than 2 mV to appear across a cannot completely solve the problem of identification
device, which technically exceeds the DOD-STD-2000 and special handling because some devices cannot be
requirement. A more realistic tip voltage requirement hardened without degrading their operational per-
would be 100 mV. formance. Unprotected devices are still used in special
applications such as high impedance inputs, extremely
IV. ESD Protection for Manufacturing Operations high speed circuits, and microwave devices.
A. Implementation and Control Problems B. Degree of Protection
Implementation of a Level 1 program does present some Even if all VS devices could be provided with on-chip
problems for manufacturing, but not as many as a Level protection, uncertainties of protection would still
2 program. To the inexperienced engineer, ESD protec- exist. VS vulnerability would no longer be a concern,
tion seems to be straightforward but a lot of attention but, Class IA* devices[lOl remain easily damaged by a
has to be given to problems such as how to identify, charged device model (CDM) discharge. Also, the
classify, handle, and package sensitive items or costs adequacy of protection procedures still have to be
will increase needlessly. confirmed by measurements. (*EOS/ESD ASSOC. STd. S-5)
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Test methods need to be developed that measure E. Accurate Failure Analysis
rotection procedures relative to device sensitivity
gefore damage prevention can be demonstrated. These An ESD program and its improvement relies on failure
measurement methods would also show if additional analysis to determine if electronic devices are damaged
protection procedures such as ionized air blowers, by ESD and not some other form of EOS. Failure analy-
metallized packaging, or double bagging of Class 1A sis can be costly and unfortunately not always conclu-
devices are useful. Some aspects of additional sive or accurate. Therefore, the facts must be con-
rotection may be shown to increase the chance.of sistent with theory, if not, they should be questioned.
$amage. For example, if the PCB's conformal coating
becomes charqed by contact to the plastic covered metal To illustrate, a wafer tribocharging situation was not
film shielding, the total protection could be reduced. critically questioned before being presented to the
These issues cannot be resolved presently because publicJ13J. The author, when questioned, could not
reliable measurement methods are not available. explain important points. Points like, does deionized
water tribocharge a wafer- why does the water conduc-
At present the degree of protection required for tivity (18 Megohm) not nhutralize the charge build-up,
sensitive classes is not established because only a few why does damage (and charging) occur only at the wafer
arbitrary material characteristics are being verified center: why does pressure and time make a difference;
by measurements. For example, packaging materials are why does the failure site in figure (5B) look like it
selected based on these measurements and protection is was caused by cavitation or fatigue and not ESD; and
assumed when the requirements are met. These measure- most important of all, why did the protection circuit
ments do not directly relate to device protection. All not function?
the aspects such as the magnitude of the ESD, the
degree of capacitive coupling to a sensitive device or A lot of information can be obtained by observing the
circuit, the oxide breakdown threshold, or the energy ESD failure site carefully. A fast high energy pulse
required to damage a bipolar device, are not set or (6 mJ) will cause multiple sites of damage that can be
even considered in the measurement design or require- seen without removal of metallization. See Figure 1A.
ments. In other words, the worst case standard for Is the odd shape of the failure in Figure 1B the result
environmental ESD exposure for an ESD package has not of ESD? (poly-oxide removed - Fig. 5B after Renaud h
been established. Hill). Compare it to a lower energy (0.2 uJ) discharge
in Figure 1C which faintly shows a symmetrical melted
C. Monitoring and Control Devices oxide. The metallization had to be removed before
damage coul? be seen[6].
Monitoring devices are available for ESD protective
equipment to check for proper operation. Monitors
check items such as wrist straps and table tops for
open or broken ground wires. Some monitors check wrist
straps for contact with personnel and some even detect
an ungrounded operator at the workstation. Wrist strap
continuity is verified by applying a low voltage to the
person through the wrist strap. This voltage must not
result in an energy that is capable of causing an EOS
in devices such as Schottky Barrier diodes, point
contact mixers, and detector diodes[lll.
If air ionizing equipment is used, it must be checked
or certified at periodic intervals because it can fail
or become unbalanced. Some bench and room ionizer
systems have built-in monitors to check positive and
negative ion balance[l2] which also can fail. If room Fig. 1 SEM Photographs of FET Damage
ionization is installed, fail safe monitoring is
important because of the large area covered. Experi- Once the oxide is damaged by an ESD event current will
ence with an experimental negative ion dust control go through a damage site that is shortdd or an open
system produced charges on items in the room. This gap. A second ESD occurrence, although unlikely to
caused perceptible shocks to personnel and damage to strike the same pin, should not create a new damage
devices besides failing to control dust particles. site. No proof or theory supports multiple damage
sites being caused by a series of ESD strikes as some-
The lesson to be learned from active ESD monitoring and times reportedIl41. Single high energy HBM discharges,
control equipment failures is that there are trade-offs producing easy to detect multiple damage sites, have
of protection and risk. been confirmed. (See Fig. 1A)
D. Cost Effective Protection Improvement Sources of single pulses may be charged cables or test
equipment EOS sources. Comparing the BBM test damage
The cost of ESD protection improvements or process to an actual EOS failure can lead to a false ESD
changes are easy to justify if there is an identified indentification. Due to the variables of rise time and
ESD problem. Once the problem is determined to be ESD ringing, an actual destructive pulse may have little
and related to specific equipment or process, solutions resemblance to a RBM test pulse. Analysis can deter-
can be proposed. The cost benefit ratios can then be mine the pulse duration and energy to confirm an ESD
determined for the various solutions. event, but it is costly and may do little to identify
the source[l5]
ESD is often incorrectly blamed for causing device
failures. In one episode, a cleaning or conformal F. Better Engineering Data Required
coating operation was firmly believed by manufacturing
engineers to be causing ESD damage to IC memories. The It is very difficult to relate HBM classification data
investigation did not produce any likely ESD source, to ESD protection of real world devices. This is
although failure to follow procedures was a possi- partly because the devices are only classified by HBM
bility. T h e failures were then analyzed more testing, therefore, damage from charged device dis-
completely and it was discovered that a vendor charge or other sources such as E-fields are not
metallization problem was the cause of the failures. considered. So far there are no CDM or E-field test
If the first analysis was not questioned, Level 2 standards although the EOS/ESD Association is develop-
Yocedures might have been employed which would have ing a CDM standard. Although more test methods and
ncreased the cost with no effect. The implementation data may only complicate classification, engineers will
of an ESD procedure could coincide with on-going engi- have better data on device ESD hardness.
neering design change improvements. It would then
appear that installation of additional ESD equipment Classification by type would identify VS and ES devices
has solved the problem, when in fact, it could really resulting in cost effective protection. Attention to
be because the design engineer has specified a less E-field protection is necessary only for VS type
sensitive device or a new supplier. This actually devices which require more costly protection from ESD
occurred at the start of a production run. After 8 and E-fields. Because VS devices do not have any
years of using Level 1 protection procedures, it was built-in gate oxide protection circuits, little ener y
the only confirmed ESD problem in the manufacturing is needed to cause sudden damage if the gate oxiBe
facility. breakdown voltage is exceeded. Voltage is the critical
parameter. Even if voltage breakdown does not occur
With well disciplined personnel and a Level 1 program, charge injection can cause disruptive shifts in th;
an identifiable ESD problem is not likely to occur. If operational parameters. Determining the type of
any ESD damage does occur, it will most likely be due sensitivity can be accomplished by referring to data
to random, hard to trace, human errors. When failure sheet specifications on protection or a curve tracer
data is unable to show a trend or leads to a location test, but the test destroys VS Type devices.
where ESD occurs, the addition of an ESD protection
procedure or equipment is ineffective. Although not many devices are VS types VS devices
always come with pins shorted by mekal rings or
conductive foam for increased protection from E-field
sources. An E-field source can easily induce an exces-
sive voltage on a MOS gate because of the low gate to
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drain capacitance - the smallest capacitance has the A surface resistivity value is understood to be a
highest voltage for series connected capacitorsI61. If measurement of a substrate surface. The concept of
a VS type device leads come near a charged plastic surface resistivity is lost if the measurement current
surface, damage can result because of induced voltage travels sub-surface such as in a thick conductive car-
or a corona discharge (ESD) from the charged surface. bon block or buried metal layer. Surface resistivity
Little data is available on protection procedures for measurements in the low dissipative or conductive range
these devices. are confusing values because the measurement does not
determine the surface property as does the measurement
ES type devices are bipolar or protected MOS[8] devices of a surface resistivity o f an insulator. Sheet
requlring a certain level of energy to damage the resistance of a thin deposited film should also not be
devices. E-fields generally do not produce enough confused with surface resistivity because thickness is
induced energy[6] to destroy these devices. When the not in the surface resistivity equation[7,18].
forward or reverse protection diode conduction voltages
are exceeded, ES devices begin to conduct current. The volume resistivity concept is lost if the material
Conduction is not harmful to devices unless a damaging has layers of different conductivities because the
current level is reached which i s very unlikely. measured unit area resistance measured must be normal-
Therefore chargeable materials, protection procedures, izedl71 to a cubic centimeter resistivitv value. This
and workAtation requirements are not so critical for reqiices dividing the reading only by a homogeneous
energy sensitive devices. material thickness value. The solution is a resistance
measurement under fixed electrode conditions. Several
V. ESD Packaging methods are being tested by the EIA and ASTM.
A. Incoming Inspection The Appendix E test1171 can show an electrical differ-
ence for identically manufactured bags but the method
ESD sensitive items must be properly packaged and does not provide a fair comparison of different size
labeled during device manufacture, test, and shipment. bags. The induced voltage inside a bag is measured,
Questionable ESD protective packaging material needs to but because the electrode impedance varies with fre-
be identified or tested at incoming inspection. Iden- quency and is shunted by the load impedance of the bag,
tifying ESD materials is no easy task with the variety the energy inside the bag can not be easily determined.
of materials now available. When questionable packag- The voltages measured do not have a direct relationship
ing has been used, a determination has to be made about to the protection of devices. Also, ambiguities have
the device protection. Device testing is the only been observed in the measurement which reduces confi-
solution if critical items are received improperly dence in the measurement reliability.
packaged.
A protective package test must be devised, using a
If packaging of the devices is deemed inadequate or the discharge with the upper voltage limit (15.999 KV) of
material is not to specifications, especially if the Class 3 of MIL-STD-1686 REV A. to determine adequacy of
device is extremely sensitive, it could be returned. bag materials. Also, "real world" assumptions must be
However, a replacement shipment may be repacked from developed which establish a standard worst case cou-
the inadequately packaged lot at the suppliers and pling configuration for a device in the package to
little is gained. determine voltage or energy levels on devices inside
the bag. Unfortunately, the EiA-541 Appendix E test
B. Selecting ESD Protective Packaging method cannot be extended K L make the necessary
measurements because of instrumentation and other
Selection of ESD protective packaging is a complicated limitations.
and arbitrary decision not based on conclusive measure-
ments. The Military standard has material requirements Tribocharge tests are the most difficult and time
and establishes a qualified products list - MIL-B-81705 consuming tests to perform, repeat, and evaluate[l91.
& QPL[16]. The EIA-541 Standard[l7] also has material When two surfaces are contacted and separated, the
requirements and test methods that evaluate packaging charge density value for the device's surface must be
materials. But selection of materials such as pink determined and the calculated energy must be related to
polyethylene, metal film, and metal foil for protection device damage. The Appendix G test[l81 method is a
of particular devices are left up to the user. Mater- tribocharge method being used to test packaging. The
ial and packaging requirements are presently not measurement method has not been shown to be repeatable.
related to a device sensitivity class or type.
The appendix F[17] decay test is still controver-
Cost is also a selection factor, for example, if it is sia1[20,211 because it is a test that is restricted to
desired that metallized bags should be used to protect ideal materials and is not usefu; for metallized
energy sensitive devices they cost 3 to 4 times m:re composite materials because of the Q=CV drop"12ll.
than pink polyethylene bags. When used on restricted materials that cannot properly
be measured by the method, the charge decay data become
C. Adequacy of Protective Packaging meaningless.
Protective packaging engineers have the problem of VI. Manufacturing/Test - ESD Controls
determining the adequacy of ESD packaging. Even when
QPL[17] material is used, complete protection should A. Worksurfaces
not be assumed. Experience has shown that energy
sensitive items are usually protected by any ESD Level 1 ESD control uses a dissipative or conductive
material that does not conduct charge readlly through worksurface. There is no agreement about the best
the bag. If the material is thin, damage can occur if range of surface resistance or resistance to ground for
an arc penetrates the packaging material. a worksurface as measured by the EOS/ESD Associations
Standard[lOl. In theory, if an item is not charged,
Puncture of the insulative coating on a metallized the resistance through the worksurface should be low so
surface allows more charge to be transferred than if that no tribocharging occurs. No significant tribo-
the insulation remains intact. Holes are easily blown charging occurs only if both contacting surfaces are in
in the 2 mil thick insulative coating on metallized the conductive range, but tribocharging can occur if
bags. A 10 KV HBM pulse will produce a hole, visible one material is an insulator. A PCB or nonconductive
when viewed with a microscope. Because the metallized components such as IC package lids can be charged even
coating is like a conductive plate it can accept a by a grounded surface. Fortunately, large PCB areas
greater charge than an insulative surface which results are not likely to make contact and become tribocharged
in a fast E-field pulse inside the bag. by the worksurface, due to varying component heights.
Tribocharged assemblies are often overlooked and make a
Definitive tests are lacking to determine how the static charge free work area an impossibility.
metallized film material performs as compared to metal
foil. Voltage sensitive devices require more shield- The selection of a proper resistance worksurface and
ing, but given all the variables contributing to resistance to ground[lOl is also arbitrary and not
induced voltage, it is difficult to determine if the supported by data to prove increased protection from
protection is sufficient for worst case conditions. ESD for any given resistance value. A conductive range
worksurface provides fast discharges of charged devices
D. Protective Packaqe Tests - EIA-541 that come in contact with the surface and produces high
peak currents reported by CDM tests. Worksurfaces in
Test methods have been established in the EIA-541 the dissipative resistance range decrease the peak
Standard[l7] for ESD packaging materials and bags. discharge currents and are generally selected for
Additional methods are being developed and some are manufacturing and assembly areas.
being improved.
Calculating the discharge time (t) or peak discharge
The resistivit requirements of EIA-541 need to be current (i) using the worksurface resistance ( R I and
rewritten in ferms of resistance because the ideal capacitance ( C ) of a charged object can give an
materials required for resistivity measurements are not erroneous value. (See equation 1 , 2 , & 3 . ) The
found in many ESD materialsr71. The resistivity calculation is erroneous because the discharge path
concepts cannot apply to composite or other non-ideal impedance ( 2 ) is not the worksurface resistance ( R I
materials. This makes it difficult to determine when which is a dc resistance[lO] measured with large
resistivity measurements are valid. electrodes. The impedance of the actual discharge path
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and the capacitance ( C ) on which the charge ( Q ) resides The use of a 1 megohm resistor for grounding a large
are difficult to determine. The inductance of the worksurface area brings up safety concerns, not an ESD
system cannot be ignored for extremely fast discharges. grounding deficiency. The EOS/ESD Association Ground-
ing Standard allows the 1 megohm current limiting
v = vo e +/RC (1) resistor but the Association is not recommending the
resistor. The assumption and concern is that a soft
t = RC In Vo/Vt (Eq. (1) solved for t) (2) grounding can result in a dangerous power exposure if a
fault occurs; while a hard grounding to the utility is
it+ = Vo/Z = Q/CZ # VO/R Where Q = CVo L R # Z (3) safer because a fault can trip the ac circuit breaker.
a
B. -Manufacturing and Test Workstations The wrist strap grounding of personnel is the most
important ESD protection procedure. Monitoring
Different resistance worksurfaces are found at work- equipment to remind personnel that they must connect
stations with different functional requirements. Clean themselves to ground is an important and worthwhile
rooms may require stainless steel worksurfaces. Care purchase. Although broken wrist straps should be
in the design of test workstations must be taken to removed as soon as detected, tests show that they still
prevent dangerous currents from being applied to the function when a charge is applied to the wearer even
assemblies or the operator because of the worksurface. though an open is measured with a low output voltage
Whether to connect a dissipative or conductive surface ohmmeter.
to hard or soft ground (1 Megohm res.) is controver-
sial. The utility ground[lO] (green third wire) at a D. ESD Safe Manufacturing Equipment
power outlet, that is verified by a periodic check, is
a satisfactory ground connection. Each piece of equipment may have its own peculiar ESD
problems. Worksurfaces on equipment must be checked
There is a tendency to require everything at work- for the desired resistance to ground. All large con-
stations to be static dissipative or conductive before ductive or dissipative materials that contact devices
the station is considered ESD safe. Smocks, chairs, should be grounded to prevent charge buildup. All
soldering iron cases, chemical dispensers, grounded insulative surfaces that could cause an ESD problem for
spra can nozzles, tools with conductive plastic the type and class of device being processed should be
handles, etc., are some of the many ESD products that replaced with dissipative materials connected t o
are called ESD safe. No definitive measurements show a ground. If replacement is costly or not feasible,
reduced risk and data are lacking to support this measurements may be able to show that no ESD damage can
notion. The unwarranted use of these products is a occur, but this can be a difficult task. Good judge-
result of not understanding and applying electrostatic ment needs to be exercised to prevent over protection
principles. Some items are used because of puffed up while still protecting the product.
claims; others provide useless protection; some are
worthless. For Example, a vendor at an ESD show was Wave soldering machines have been claimed to be a
shorting out the electrometer during an effectiveness source of ESD. Measurements that have been made on
demonstration of his product. No one noticed the error instrumented PCBs show no charge generation when
or even questioned the product’s function. processed through wave solder machines. Nylon flux
brushes contact the P C B but the flux has enough
Measurements from hand held E-field meters improp- conductivity ( < 1 X 10 Ohms) to drain any tribo-
erly[22] used or data incorrectly interpreted can also charge current off the wetted PCB back to the brush or
result in the installation of ESD protective items that through the holding fixture to ground. Just to be
are not required. Measuring E-field intensity and safe, after installing, check new equipment for
reporting voltages for insulative surfaces at work- possible ESD problems.
stations is a common error. Reporting thousands of
volts[23] (v) on insulative materials such as Styrofoam The air knives in wave soldering machines are also
cups is incorrect and useless data. Neither capaci- thought to cause tribocharging. I t i s a common
tance (C) nor charge ( Q ) of equation ( 4 ) can be deter- misconception that air or other gases tribocharge
mined from an E-field intensity measurement, therefore, surfaces when the charge generation is actually caused
“this voltage measurement means nothing[23]”. by particles in the air. Even when air is heated in
temperature controlled ovens or forced through a nozzle
Q=CV (4) under high pressure, air molecules do not have suffi-
cient kinetic energy to become ionized. Therefore,
Only the energy available or the voltage that can be they cannot cause a surface to be tribocharyed[23].
induced on a given fixed Capacitance of a circuit trace Hot flowing gases can dry out a surface causing items
by a charged surface is worthwhile data. to be highly susceptible to tribocharging when con-
tacted by other materials. This has resulted in the
Ionizers may be used at a workstation for special mistaken belief that air*[22,23] tribocharges. (*Air
circumstances although they are slow to discharge an has been removed from the EIA and the MIL-HDBK tribo-
insulative surface. Some desi ns have the possibility electric series.)
of causing damage to VS devicesfl21. Tribocharging of
a conformal coated PCB occurs in a fraction of a Carbon dioxide gas is an exception because expansion of
second; discharging takes seconds with air ionization. CO gas can form ice or CO particles. Particles in
Although, the peak E-field due to tribocharging is an$ gas stream can cau2e tribocharging to occur.
reduced somewhat upon separation[22]. Particles, such as those in bead blasters, are ra id
charge generators upon impact due to the materyal
C. Ground Connections contact and separation.
There has been a lot of discussion about ESD ground VII. Future of ESD Controls
connections and the proper method to connect ESD
worksurfaces or personnel to a ground. The EOS/ESD A. Protective Packaging Improvements
Association Standards[lO] specifies 1 Ohm maximum
between ground points on the workstation and 2 Ohms for ESD packaging concepts can be improved upon by applying
the workstation common ground point back to utility electrostatic and engineering principles to improve
power ground to assure equal voltage potentials. measurements and test methods. Measurement standards
Utility power ground is a satisfactory earth ground; a must set the amount of energy and the strength of an
copper rod at each workstation is not needed. A check E-field source, for worst case conditions. ESD packa e
of an ground attachment point at an ESD station can be selection will remain uncertain for different sensl-
made gy measuring the resistance between the point and tivity types into the foreseeable future because of
the third wire connection (qreen wire ground) of the these problems.
utility power outlet which 1s considered to be the
ground reference. Connections to conductive parts of a Improvement for ESD packaging lies in better under-
vehicle, ship or aircraft hulls are also a satisfactory standing of tests that measure material properties and
ground reference point. developing permanent and stable dissipative materials
that do not tribocharge devices while maintaining good
The worksurface is a large capacitance plate with stray transparency and reasonable price. These requirements
leakage resistance to the earth unless connected to are difficult if not impossible to meet.
earth ground. A current limiting 1 megohm resistance
in the ground path is common and still results in an B. ESD Control Improvements in Manufacturing
electrostatic charge decay rate faster than the charge
can be generated by human movement. A low ( < 1 Ohm) Manufacturing controls probably have reached or are
resistance path to ground has been over emphasized and close t o their limit in preventing ESD damage and
is not important when a 1 megohm series resistance is little improvement is possible except for proper
in the ground line which connects to a mat or person. applications. New monitoring or ESD detection systems
A 1 megohm resistance can result in small ac voltage would be of doubtful value because the energy of all
differences between grounded worksurfaces. Stray possible ESD sources cannot be monitored The problems
capacitive coupling to ac line cords can result in up left to Re solved are: human error, “I thought t;at was
to 4 volts ac on the worksurface. The combined 1 meg- correct ; forgetfulness, “?,‘m sorry I forgot ; and
ohm resistor and worksurface capacitance has too long a discipline, “I don’t want to.
RC time constant to suppress the 60 Hertz ac voltage to
near zero.
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Another area for which progress will be slow and Electronic Parts, Assembles and Equipment, excluding
arduous is the protection of devices that are very Electrically Initiated Explosive Devices, 2 MAY 80.
sensitive and carinot be made less sensitive by built-in (MIL-STD-263A pending.)
Drotection circuits because protection would impair
;heir performance. [5j Workshop and Panel Discussions, W.3 Latent
Failures, Chair. J. Soden, Sandia Nat. Labs.
C. Sensitive Device Protection
161 G. Bzumgartner, "ESD Analysis of Masking Tape
Often misleading statements are made by speakers at Operations , EOS/ESD Symposium, EOS-7, 1985; p.130,
meetings and repeated by salespeople to customers. New par.6&7; p.127 Fig.4; p.129, par.7.
IC chip designs are claimed to be increasing in ESD
sensitivity due to thinner oxides and smaller junc- [7] G. Baumgartner, "A method to Improve Measurements
tions. True, the sensitivity of the chip circuits is of ESD Dissipative Materials" EOS/ESD Symposium, EOS-9,
increasing but the protection circuits have been placed 1987; p.23, par.7&8.
on the input and output pins of most computer memory,
processor, and support ICs. This is an important fact [E] L. Avery, "IC Technology: Where It Going and What
concerning ESD protection that is often ignored. In It Means For The ESD Industry', EOS/ESD Symposium,
the past, unprotected MOS devices were so sensitive EOS-7, 1985; p.1 Fiy.1; p.3 Fiy.7.
that they experienced ESD damage unless protected by
on-chip protection. Another fact that is ignored is [9] MIL-STD-2000, Military Standard, Standard
that protection circuits have and will continue to Requirements for Soldered Electrical and Electronic
improve, therefore, reducing E-fields will be of Assemblies, 16 JAN 89 (MIL-STD-2000A pending)
limited importance.
[lo] EOS/ESD ASSOC. Inc., Std. for Device Test
Anyone who has measured electrostatic voltages with an Protection of Discharge Susceptible I t e m s :
electrostatic voltmeter on a circuit at an ESD work- Worksurface-EOS/ESD-S4; Grounding-Recommended
station knows that VS devices would be damaged. VS Practice-EOS/ESD-DS6.0-1990; Human Body
devices need on-chip input and output pin protection to Model-EOS/ESD-S5; Charged Device Model-(?).
reclassify them as ES. Protection circuits function
during handling by grounded operators without being [ l l ] Specifications - Applications Notes, Packages;
damaged. The strength of the latest generation of Microwave semiconductors & Modules, Appl. Note 80800:
protection devices is shown by many local Silicon Mixer and Detector Diodes, Transient and Electrostatic
Valley computer store employees handling PCBs and ICs Discharges p. 2-77, & Appl. Note 80850: Handling
without using any ESD precautio:s. When asked about precautions for Schottky Barrier, Point Contact Mixer,
ESD damage, their answers were no problem"
none that they can identify!
at least- & Detector Diodes, p.2-82

[12] GIDEP General Document Summary No. E9-F-86-01


VIII. Conclusion NOV. 86, Electrostatic Discharge, Ionizer, Pulsed DC
Protected (ES) devices make up the bulk of the sensi- 1131 D. Renuad and 8. Hill, "ESD i n Semiconductor
tive devices, and unprotected (VS) devices are the Wafer Processing - An Example", EOS/ESD Symposium
exception. Because of the large variety of electronic Proceedings, EOS-7, 1985, pp.6-9, p.7 Fig.5B; or
devices, it is not feasible to generalize protection Microcontamination, Mar. 8 6 ; pp.24-30, p.28-Fiq.5B.
procedures. Gathering accurate failure data for a
cost/benefit analysis is essential to obtain the [14] R . Trigonis, "ESD Experience With The IRAS Space
management support required. Voltage sensitive (VS) Craft , EOS/ESD Symposium Proceedings, EOS-7, 1985,
devices are still used in special applications and are p.179-par.5.
susceptible to damaged by strong E-fields. They
require special attention but should not drive pro- 1151 N. Kusnezov, J. Smith, "Modeling of EOS in
tection procedures for energy sensitive (ES) devices. Silicon Devices, EOS/ESD Symposium EOS-3, 1981,
pp.132-138.
Having identified and discussed many ESD protection and
measurement problems and cleared up some misstatements, [16] MIL-B-81705C ( & QPL) "Military Specification,
the problems that the industry faces must be put in Barrier Materials, Flexible, Electrostatic Protective",
prospective by identifying the types of sensitivity. 25 JAN 89.
Resolving measurement problems will result in under-
standing and improving present ESD procedures while [ 171 EIA Standard, "Packaging Materials Standards for
eliminating unnecessary ones. A Level 1 ESD program ESD Sensitive Items," Electronic Industries ASSOC.
installed with knowledge and thought will provide good ~ 1 ~ i - 5 4 1pp.1-11
, & App. ~(definitions), bag),
ESD protection with a few exceptions. Most of the F(DECAY), G(tribo)
problems must be put in the fine tuning category and
each ESD program must be developed to provide a cost [18] ASTM D-257 D-C Resistance or Conductance of
effective level that will handle the ESD protection Insulating Materials, p.130.
needs of the manufacturing and service operations.
[ 19.1 S . F o w l e r , "Triboelectricty and Surface
Resistivity Do Not Correlate", EOS/ESD Symposium,
References EOS-10, 1988; pp.102-112.
[l] G. Head, Microcontamination, Sept. 85, p.27; p.20 1201 S . Fowler, "Surface Resistivity and Static Decay
Do Not Correlate", EOS/ESD Symposium, EOS-11, 1989,
[2] T. Dangelmayer, "ESD - How Often Does It Happen?", pp.7-11.
EOS/ESD Symposium, EOS-5, 1983; pp.1-5.
[21] G. Baumgartner, "Testing of Ele5,trostatic
[3] MIL-STD-l686A, Military Standard; "Military Materials FED. STD. 101C, Method 4046.1 EOS/ESD
Standard for Electrostatic Discharge Control Program Symposium, EOS-6, 1984, p.100-Fig.5.
for Protection of Electrical and Electronic Parts,
Assembly and Equipment, Excluding Electrically [22] G. Baumgartner, "Electrostatic Measurement for
Initiated Explosive Devices, 8 AUG 88. (Superseding Process Control" EOS/ESD Symposium, EOS-6, 1984 - TRIBO
DOD-STD-1686 2 MAY 801 p.31; p.27.
[4] DOD-HDBK-263, Military Handbook; Electrostatic [23] N. Jonassen, "The Physics of Electrostatics",
Discharge Handbook for Protection of Electrical and EOS/ESD Philadelphia, Oct.84, Guest Lecture p.15; p.29.

864

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