Summary in Probe diameter vs.

probe current

Wisdom and Compassion J.G.Duh 1

The SEM and Its Modes
of Operation
Electron Probe Diameter
versus Electron Probe Current

Wisdom and Compassion J.G.Duh 2

The SEM and Its Modes
of Operation

Calculation of dmin and imax

Wisdom and Compassion J.G.Duh 3

The SEM and Its Modes
of Operation
 Minimum Probe Size

Wisdom and Compassion J.G.Duh 4

• Optimum aperture size
- Minimize the effect of the lens aberrations
on the final probe size.
• Minimum Probe Size
• Maximum Probe Current

Wisdom and Compassion J.G.Duh 5

 1.Electron beam diameter (beam size)
relationship
• 由電子槍提供電子束(直徑為D0)，當經過由電流通過線圈產生磁場
的電磁透鏡時，聚焦電子束(直徑變為Di)，再由objective aperture選
取一部份的電子束，使其發散角變小為αa，而電子束再經過
objective lens時，再聚焦一次，發散角為α，而電子束的直徑為d0 ，
又稱為probe size( dp )。

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The SEM and Its Modes
of Operation Gaussian Probe Diameter

Wisdom and Compassion J.G.Duh 9

The SEM and Its Modes
of Operation

Wisdom and Compassion J.G.Duh 10

The SEM and Its Modes
of Operation
 Minimum Probe Size

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Wisdom and Compassion J.G.Duh 14
The SEM and Its Modes
of Operation
 Minimum Probe Size at 10-30 kV

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