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LED ZnO Nanorods
LED ZnO Nanorods
ABSTRACT
We investigated the influence of the growth method, growth conditions, and post-growth treatments on the ZnO nanorod
properties and the performance of heterojunction light emitting diodes (LEDs) based on ZnO nanorods. Due to small
lattice mismatch between GaN and ZnO, we will mainly consider p-GaN/n-ZnO nanorod heterojunctions. The influence
of p-GaN substrate and the influence of growth method and growth conditions used for ZnO nanorods on the LED
performance will be discussed.
Keywords: zinc oxide, electrodeposition, vapor deposition, LED
1. INTRODUCTION
Zinc oxide is a wide bandgap (3.37 eV) semiconductor with high exciton binding energy (60 meV) that has attracted
significant interest for studying its growth, nanostructured morphologies, optical and electronic properties, as well as its
application in optoelectronic devices, such as solar cells and light emitting diodes (LEDs).1-4 Since the stability and
reproducibility of p-type ZnO has not been completely solved, the p-GaN/n-ZnO heterojunctions are very promising
candidates for ZnO semiconducting devices because of relatively low lattice mismatch between GaN and ZnO (~1.8%2).
Consequently, LEDs based on p-GaN/n-ZnO heterojunction with various device structures fabricated by different
approaches have been reported.5-24 In general, a variety of device architectures and device performances have been
reported in the literature. Reported emission colors include UV,12,13,17,24 blue,6,21 violet,16 yellow,5 yellow and blue,9
violet-blue and UV,10,19,20 violet and yellow-green,11 UV and green,15 UV-violet and red,18 violet, yellow and white,23 and
white.14 In addition, the light emission under forward6,10-21 reverse,5,9 and both forward and reverse7,8,22 bias was reported.
A very wide range of turn-on voltages for the devices was also reported. Different behavior was attributed to various
factors, and changes in the device architecture are frequently attempted to improve the device performance. Thus, the
reported devices also include more complex device structures such as heterojunctions with the structure p-GaN/intrinsic
layer/n-ZnO,6,12,18,20 including devices with one-dimensional ZnO.6 In general, ZnO nanorods (NRs) and nanowires are
expected to result in a better performance than thin film or bulk devices.6,9 It has also been demonstrated that significant
changes in the device performance can be achieved by changing the substrate, interfacial layer and/or annealing.7,8
Usually ZnO nanorods for heterojunctions can be grown by vapor deposition and solution based methods. Vapor
deposited ZnO NRs are typically grown on catalyst10 or seed layer.5 The influence of different seed layers for vapor
deposited ZnO NRs LEDs has been studied.5 Different solution methods, such as hydrothermal method and
electrodeposition, have been also compared.7,8 In this work, p-GaN/n-ZnO heterojunction LEDs were fabricated and two
kinds of methods were employed to grow ZnO nanorods on p-GaN: vapor deposition (VD) and eletrodeposition (ED).
The influence of oxygen flow rate and post-growth annealing to VD ZnO NRs and that of different precursors in
electrodeposition were studied in detail. ZnO nanorod morphologies, photoluminescence (PL) and I-V curves and
electroluminescence (EL) of p-GaN/n-ZnO devices were characterized.
Oxide-based Materials and Devices II, edited by Ferechteh Hosseini Teherani, David C. Look, David J. Rogers,
Proc. of SPIE Vol. 7940, 79400B · © 2011 SPIE · CCC code: 0277-786X/11/$18 · doi: 10.1117/12.878940
In all cases, p-GaN films on sapphire used as the substrates were grown by metal organic chemical vapor deposition
(MOCVD). 550 nm of Mg:GaN p-type layer was deposited on top of structure consisting of 550 nm highly resistive
Mg:GaN/2.2 μm undoped GaN layer/30 nm GaN nucleation layer/sapphire substrate. The samples were activated by
annealing in nitrogen at 825ºC. The hole concentration determined by Hall measurement was ~5×1017 cm-3.
For VD ZnO, acetate-derived seed layer was prepared using ethanol solution of zinc acetate5 (5 cycles of placing
solution droplets, rinsing and drying, then annealed at 350ºC for 20 min., and the entire procedure was repeated to ensure
complete coverage of the substrate). In a tube furnace, Ar gas flow was set to ~0.1 Lpm and 0.2 zinc powder (99.995%,
Aldrich) as the source material was placed into the furnace. The substrate was placed above the source, facing down.
Then the system was pumped down to 1.1 Torr and then was heated up to 500oC, after which O2 gas (1 ccm or 5 ccm)
was added. The growth time was 1 hr and then the system was cooled down to room temperature.
ED ZnO was fabricated using a two-electrode system.7 A platinum foil was used as the anode and the substrate was
used as the cathode. Three precursors were used to deposit ZnO NRs directly on bare p-GaN substrate, respectively. For
zinc nitrate precursor, the solution contained 8 mM zinc nitrate hydrate (Zn(NO3)2·xH2O, 99.999%, Aldrich) and 8mM
hexamethylenetetramine (HMT, 99+%, Sigma-Aldrich) in de-ionized (DI) water. When using acetate precursor, the
solution consisted of 4 mM zinc acetate ((C2H3O2)2Zn, 99.99%, Aldrich) and 4 mM HMT in DI water. For chloride
precursor, the solution contained 3 mM zinc chloride (ZnCl2, 99.999%, Aldrich) and 3 mM HMT in DI water. The water
bath temperature was 83oC for nitrate and 80oC for acetate and chloride precursors. At the beginning, the current of 10
mA was applied to nitrate and chloride solutions while the initial current for acetate was 15 mA. After 1 min., the current
was switched to 1 mA for another 29 min. The temperature was fixed during the whole procedure. After
electrodeposition, all the samples were annealed at 600oC in air for 10 min. The growth conditions for different
precursors have been chosen in such a manner to result in a similar ZnO nanorod morphology, i.e. dense array of ZnO
nanorods with a high degree of orientation perpendicular to the substrate.
The LED device structure was Au (70 nm)/Ni (30 nm)/p-GaN/ZnO NRs + insulating layer/Ag (200 nm). For VD
ZnO, spin-on-glass (SOG, Futurex, Inc.) insulating layer was prepared by spin-coating (3000 rpm, 40s), followed by
annealing at 200oC for 1 min. For ED ZnO, polymethyl methacrylate (PMMA, molecular weight: 950 000,
MicroChem.) was used as the insulating layer. 2% PMMA solution in chlorobenzene was spin-coated at 4000 rpm for 45
s on the substrate and then baked at 200oC for 1min., after which oxygen plasma was used to etch the excess PMMA on
the top of the NRs. All the electrodes were prepared by evaporation in high vacuum, using a thermal evaporator AST
PEVA 500 EL. Ni/Au contact has been used as the contact for p-GaN, while Ag (evaporated through a shadow mask
with 1 mm radius) has been used as a contact for ZnO NRs. Both contacts to p-GaN and ZnO were verified to be ohmic.
The device diagram is shown in Fig. 1.
Fig. 5 shows the SEM images of ED ZnO NRs using different precursors and the corresponding PL spectra. We can
observe that the obtained spectra are quite similar, possibly because all the samples have been subjected to the same
annealing conditions. In the case of chloride precursor, in addition to the UV and defect emission of ZnO, we can also
observe the p-GaN emission from the substrate (centered at ~440 nm), which is likely due to the fact that for chloride
precursor some areas of the substrate contained less dense nanorods. LEDs with ED ZnO nanorods were lighting up
under reverse bias with the turn-on voltage at 4 V for nitrate and 3 V for acetate and chloride as shown in Fig. 6. The
emission was uniform across the device area under the top electrode. In these devices, emission under forward bias was
Figure 5 SEM images of ED ZnO NRs fabricated from different precursors (a) nitrate; (b) acetate; (c) chloride. (d) PL spectra of ED
ZnO NRs.
Figure 6 EL spectra of ED ZnO NRs LEDs prepared using different precursors (a) nitrate; (b) acetate; (c) chloride; (d) I-V curves of
ED ZnO devices.
4. CONCLUSION
We have prepared p-GaN/n-ZnO nanorods by different deposition methods, namely vapor deposition and
electrodeposition and investigated the influence of deposition conditions and/or post deposition treatments on the device
performance. We have previously studied a number of different combinations of ZnO growth methods, p-GaN substrates
and p-GaN/ZnO nanorod post-deposition treatments. From all the data obtained, we can conclude that the device
behavior and emission color are predominantly determined by the GaN substrate and GaN/ZnO interface, and to a
smaller degree by native defects in ZnO.
ACKNOWLEDGEMENT
Financial support from the Strategic Research Theme, University Development Fund, and Seed Funding Grant,
(administrated by The University of Hong Kong) is acknowledged.
REFERENCES
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