Gas & Metal Compatibility Table

Chemical Suggested Choosing a Mott High Purity Gas Filter:

Gas FormulaFilter Media Choosing the best metal filter is not always a simple matter,
Ammonia NH3 SS/Ni because in addition to easily identified variables (i.e., gas, pressure
Argon Ar SS/Ni
and flow), there are subjective considerations. Some gases are
Arsenic Pentafluoride AsF5 SS/Ni
Arsine AsH3 SS/Ni(1) compatible with more than one type of metal which allows
Boron Trichloride BCI 3 H/Ni you a choice when selecting the right filter for your application.
Boron Trifluoride BF 3 H/Ni
Carbon Dioxide CO2 SS/Ni
Carbon Monoxide CO SS The information contained in this table is a guideline for
Carbon Tetrachloride CCl4 SS/Ni appropriate filter selection. Consultation with your gas
Carbon Tetraflouride CF4 SS/Ni
Chlorine Cl2 H/Ni/SS supplier is recommended to ensure
Diborane B2H6 SS/Ni(1) gas compatibility. Because so many
Dichlorosilane SiH2Cl2 H/Ni factors can affect the chemical resis-
Diethyltelluride Te(C2H5)2 SS/Ni
Fluorine F2 H/Ni tance of a given product, you should
Freon 13 CClF3 SS/Ni pretest under your own operating
Freon 14 Tetrafluoromethane CF4 SS/Ni conditions. As with
Freon 23 Trifluoromethane/Fluoro-form CHF 3 SS/Ni
Freon 115 Chloropentafluoroethane C 2ClF5 SS/Ni any chemical
Freon 116 Hexafluoroethane C 2F6 SS/Ni application, safety
Germane GeH4 SS/Ni
precautions as noted
Helium He SS/Ni
Hydrogen H2 SS/Ni on MSDS sheets
Hydrogen Bromide HBr H/Ni should be observed.
Hydrogen Chloride HCl H/Ni
Hydrogen Fluoride HF H/Ni
Hydrogen Selenide H 2Se SS/Ni Mott engineers are available to recommend which filter best
Hydrogen Sulfide H 2S SS/Ni
meets the criteria of your application. Toexpedite that selection
Krypton Kr SS/Ni
Methane CH4 SS/Ni process, you should have the following information available:
Methyl Fluoride CH 3F SS/Ni
Nitric Oxide NO SS/Ni
Nitrogen N2 SS/Ni Type of Gas:
Nitrogen Trifluoride NF3 H/Ni/SS
Nitrous Oxide N 2O SS/Ni Gas Flow Rate:
Neon Ne SS/Ni
Oxygen O2 SS/Ni
Ozone O3 H
Inlet (or system)Pressure: PSIG
Perflouropropane C3F8 SS/Ni
Phosphine PH3 SS/Ni(1) Maximum allowable ∆P: PSID
Phosphorus Trifluoride PF 3 H/Ni
Phosphorous Pentachloride PCl5 SS/Ni Inlet & Outlet Connections:
Phosphorous Pentaflouride PF5 SS/Ni
Silane SiH4 SS/Ni
Available Envelope/Footprint Dimensions (if known):
Silicon Tetrachloride SiCl 4 H/Ni
Silicon Tetrafluoride SiF 4 H/Ni
Stibine SbH3 SS/Ni
Sulfur Hexafluoride SF6 SS/Ni
Tetraethyl Orthosilicate TEOS SS/Ni
Trichlorosilane SiHCl3 H/Ni
Trimethyl Borane (CH3)3B SS/Ni
Trimethyl Phosphate (CH3)3PO4 SS/Ni
Tungsten Hexafluoride WF 6 H/Ni
Xenon Xe SS/Ni

SS = 316L Stainless Steel

Ni = Nickel
H = Hastelloy C-22
(1) - Compatible to 25 degrees C and concentrations to 1000 ppm
(2) - Compatible to 150 degrees C

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