BIRLA SURYA LIMITED SPEAR TECHNOLOGY ALLIANCE - CENTRAL CHEMICAL SUPPLY SYSTEM EQUIPMENT LIST-CELL FAB

27-Dec-10

ITEM NO. HF 50%

DESCRIPTION
Type Dimension Material

SPECIFICATION
All Sides Closed Housing L 3050 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air Flow Sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading and Venting filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 25 TTZ 3.5m3/hr

Q'TY

REMARKS

CDC -101

CHEMICAL DISTRIBUTION CABINET

Manufacturer Accessory Type

IBC -101 & IBC-102 IBC TOTE DISCHARGE & RECIRCULATION

Volume Accessory

2 Two pieces(Discharge and Filling Head) per IBC TOTE 4 Valve 2 Two with a Reversed Check

DH-101,DH-102 DH-103 & DH- DISPENSE HEAD 104 PF-101 & PF-102 PARTICLE FILTER

Type Connection Type Manufacturer Type Connection Type Type Manufacturer Material Accessory Type Capacity

One piece per IBC TOTE

PC-101

CHEMICAL PUMP CABINET

P-101 & P-102

SUPPLY PUMP

Manufacturer Almatec Housing Material PTFE Diaphragm Material PTFE/EPDM Accessory Damper, Diaphragm Sensor, Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration Type Manufacturer Accessory Type Capacity Manufacturer Material Accessory

PUMP-101 & PUMP-102 ( SUPPLY & STAND BY)

P-103

WASTE CHEMICAL PUMP

CT-101

COLLECTING TRAY

HNO3 65%
Type Dimension Material Manufacturer Accessory Type Capacity Accessory DH-201,DH-202 DH-203 & DH- DISPENSE HEAD 204 PF-201 & PF-202 PARTICLE FILTER Type Connection Type Manufacturer Type Connection Type Type PC-201 CHEMICAL PUMP CABINET Manufacturer Material Accessory Type Capacity P-201 & P-202 SUPPLY PUMP Manufacturer All Sides Closed Housing L 3050 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air Flow Sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level Switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading and Venting filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 25 TTZ 3.1m3/hr Almatec 2 PUMP-201 & PUMP-202 ( SUPPLY & STAND BY) 1 2 4

CDC -201

CHEMICAL DISTRIBUTION CABINET

IBC -201 & IBC-202 IBC TOTE DISCHARGE & RECIRCULATION

2 Two pieces(Discharge and Filling Head) per IBC TOTE Two with a Reversed Check Valve One piece per IBC TOTE

Housing Material PTFE Diaphragm Material PTFE/EPDM Accessory Type Damper, Diaphragm Sensor , Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration

P-203

WASTE CHEMICAL PUMP

Manufacturer Accessory Type Capacity

CT-201

COLLECTING TRAY

Manufacturer Material Accessory

STA Confidential Project BSL - CCSS PKG

Page1 27-Dec-10 Rev.1

ITEM NO. KOH 45%

DESCRIPTION
Type Dimension Material Manufacturer Accessory Type

SPECIFICATION
All Sides Closed Housing L 3050 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air Flow Sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading and Venting filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Connection with Damper E 25 ETZ 3 m3/hr Almatec PE

Q'TY

REMARKS

CDC -301

CHEMICAL DISTRIBUTION CABINET

IBC -301 & IBC-302 IBC TOTE DISCHARGE & RECIRCULATION

Volume Accessory

2 Two pieces(Discharge and Filling Head) per IBC TOTE 4 Valve 2 Two with a Reversed Check

DH-301,DH-302 DH-303 & DH304 PF-301 & PF-302

Type DISPENSE HEAD Connection Type Manufacturer Type PARTICLE FILTER Connection Type Type Manufacturer

One piece per IBC TOTE

PC-301

CHEMICAL PUMP CABINET

Material Accessory Type Capacity Manufacturer Housing Material

1 Exhaust

P-301 & P-302

SUPPLY PUMP

PUMP-301 & PUMP-302 ( SUPPLY & STAND BY)

Diaphragm Material PTFE/EPDM Accessory Type P-303 WASTE CHEMICAL PUMP Manufacturer Accessory Type Capacity CT-301 COLLECTING TRAY Manufacturer Material Accessory Damper, Diaphragm Sensor,Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration 1 1

NaOH TECHNICAL
Type Dimension CDC -401 CHEMICAL DISTRIBUTION CABINET Material Manufacturer Accessory Type IBC -401 IBC TOTE DISCHARGE & RECIRCULATION Volume Accessory Type DH-401,DH-402 & DISPENSE HEAD DH-403 Connection Type Manufacturer PF-401 PARTICLE FILTER Type Connection Type Type PC-401 CHEMICAL PUMP CABINET Manufacturer Material Accessory Type Capacity Manufacturer All Sides Closed Housing L 1500 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air Flow Sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading and Venting filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 08 TTZ 0.2m3/hr Almatec PUMP-401 & PUMP-402 ( SUPPLY & STAND BY) 1 1 3 Valve 1

1 Two pieces(Discharge and Filling Head) per IBC TOTE One with a Reversed Check

One Dispense head is used to fill up IBC TOTE from Main Supply Tank One piece per IBC TOTE

P-401 & P-402

SUPPLY PUMP

Housing Material PTFE Diaphragm Material PTFE/EPDM Accessory Type Diaphragm Sensor, Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration

P-403

WASTE CHEMICAL PUMP

Manufacturer Accessory Type Capacity

CT-401

COLLECTING TRAY

Manufacturer Material Accessory

STA Confidential Project BSL - CCSS PKG

Page2 27-Dec-10 Rev.1

ITEM NO. FeCl3

DESCRIPTION
Type Dimension Material

SPECIFICATION
All Sides Closed Housing L 1500 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air Flow Sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading and Venting filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 08 TTZ 0.1m3/hr Almatec PTFE Diaphragm Sensor, Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration

Q'TY

REMARKS

CDC -501

CHEMICAL DISTRIBUTION CABINET

Manufacturer Accessory Type

IBC -501

IBC TOTE DISCHARGE & RECIRCULATION

Volume Accessory Type

1 Two pieces(Discharge and Filling Head) per IBC TOTE 2 One with a Reversed Check Valve 1 One piece per IBC TOTE

DH-501

DISPENSE HEAD

Connection Type Manufacturer Type Connection Type Type Manufacturer

PF-501

PARTICLE FILTER

PC-501

CHEMICAL PUMP CABINET

Material Accessory Type Capacity Manufacturer Housing Material Accessory

P-501 & P-502

SUPPLY PUMP

PUMP-501 & PUMP-502 ( SUPPLY & STAND BY)

Diaphragm Material PTFE/EPDM Type Manufacturer Accessory Type Capacity CT-501 COLLECTING TRAY Manufacturer Material Accessory

P-503

WASTE CHEMICAL PUMP

HCl 37%
Type Dimension Material CDC -601 CHEMICAL DISTRIBUTIONCABINET Manufacturer Accessory Type IBC -601 & IBC-602 IBC TOTE DISCHARGE & RECIRCULATION Volume Accessory Type DH-601,DH-602 DISPENSE HEAD DH-603 & DH-604 Connection Type Manufacturer PF-601 & PF-602 PARTICLE FILTER Type Connection Type Type Manufacturer PC-601 CHEMICAL PUMP CABINET Material Accessory Type Capacity Manufacturer P-601 & P-602 SUPPLY PUMP Housing Material Accessory Type P-603 WASTE CHEMICAL PUMP Manufacturer Accessory Type Capacity CT-601 COLLECTING TRAY Manufacturer Material Accessory All Sides Closed Housing L 3050 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air Flow Sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading and Venting filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 15 ETZ 1.5m3/hr Almatec PE Damper, Diaphragm Sensor , Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor &Leakage Aspiration 1 1 2 1 2 4 Two pieces(Discharge and Filling Head) per IBC TOTE Two with a Reversed Check Valve One piece per IBC TOTE 1

PUMP-601 & PUMP-602 ( SUPPLY & STAND BY)

Diaphragm Material PTFE/EPDM

STA Confidential Project BSL - CCSS PKG

Page3 27-Dec-10 Rev.1

ITEM NO. HCl TECHNICAL 33%

DESCRIPTION
Type Dimension

SPECIFICATION
All Sides Closed Housing L 1500 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air Flow Sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading and Venting filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 08 TTZ 0.1m3/hr Almatec PTFE Diaphragm Sensor , Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration All Sides Closed Housing L 3050 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air Flow Sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading and Venting filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 15 ETZ 1.5m3/hr Almatec PE Damper, Diaphragm Sensor ,Stroke Sensor & Counter E 08 TTZ Almatec PTFE Diaphragm Sensor KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration

Q'TY

REMARKS

CDC -701

CHEMICAL DISTRIBUTION CABINET

Material Manufacturer Accessory Type

IBC -701

IBC TOTE DISCHARGE & RECIRCULATION

Volume Accessory Type

1 Two pieces(Discharge and Filling Head) per IBC TOTE 3 One with a Reversed Check Valve One Dispense head is used to fill up IBC TOTE from Main Supply Tank 1 One piece per IBC TOTE

DH-701,DH-702 & DISPENSE HEAD DH-703

Connection Type Manufacturer

PF-701

PARTICLE FILTER

Type Connection Type Type

PC-701

CHEMICAL PUMP CABINET

Manufacturer Material Accessory Type Capacity Manufacturer Housing Material Accessory Type

P-701 & P-702

SUPPLY PUMP

PUMP-701 & PUMP-702 ( SUPPLY & STAND BY)

Diaphragm Material PTFE/EPDM

P-703

WASTE CHEMICAL PUMP

Manufacturer Accessory Type Capacity Manufacturer Material Accessory

CT-701

COLLECTING TRAY

H2SO4 95%
Type Dimension Material CDC -801 CHEMICAL DISTRIBUTION CABINET Manufacturer Accessory Type Volume Accessory Type DH-801,DH-802 DISPENSE HEAD DH-803 & DH-804 Connection Type Manufacturer PF-801 & PF-802 PARTICLE FILTER Type Connection Type Type Manufacturer PC-801 CHEMICAL PUMP CABINET Material Accessory Type Capacity P-801 & P-802 SUPPLY PUMP Manufacturer Housing Material Accessory Type Manufacturer P-803 WASTE CHEMICAL PUMP Housing Material Accessory Type Capacity CT-801 COLLECTING TRAY Manufacturer Material Accessory
STA Confidential Project BSL - CCSS PKG

IBC -801 & IBC-802 IBC TOTE DISCHARGE & RECIRCULATION

2 Two pieces(Discharge and Filling Head) per IBC TOTE 4 Check Valve 2 Two with a Reversed

One piece per IBC TOTE

PUMP-801 & PUMP-802 ( SUPPLY & STAND BY)

Diaphragm Material PTFE/EPDM

Diaphragm Material PTFE/EPDM

Page4 27-Dec-10 Rev.1

ITEM NO.

DESCRIPTION

SPECIFICATION

Q'TY

REMARKS

COMMON FOR CELL FAB AND WAFER FAB

Type LCT -100 & LCT150 LEAKAGE COLLECTION TANK Volume Accessory Type Capacity CT-100 & CT-150 COLLECTING TRAY Manufacturer Material Accessory Type Dimension CP-101 & CP-151 CONTROL PANEL Manufacturer Material Accessory Type PROGRAMMABLE LOGIC CONTROL Memory Manufacturer Type HMI-101 & HMI151 HUMAN MACHINE INTERFACE Memory Manufacturer Tag SCADA-101 SUPERVISORY CONTROL AND DATA ACQUISITION Model Manufacturer Intermediate Bulk Container (Empty IBC) 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches KTC-Station mono(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration IP55, Double Leaf door L 400 mm X W 1600 mm X H 2000 mm RITTAL Sheet Steel Power Supply Unit(24 VDC) (Phoenix) MCB- Siemens & Air Conditioning unit S7-300 128 k SIEMENS KTP 1000 1024 Kb SIEMENS 512 Win CC Flexible SIEMENS 1 Common for Cell Fab and Wafer Fab 2 One is for Cell Fab and Another for Wafer Fab CPU -3152 DP 4 Two is for Cell Fab and Another two for Wafer Fab 2 One is for Cell Fab and Another for Wafer Fab 2 2 One is for Cell Fab and Another for Wafer Fab

PLC-101, PLC-102, PLC-151 & PLC- 152

STA Confidential Project BSL - CCSS PKG

Page5 27-Dec-10 Rev.1

Customer Name Company Name EQUIPMENT LIST

27-Dec-10

ITEM NO. HCl TECHNICAL 33%

DESCRIPTION
Type Dimension Material

SPECIFICATION
All Sides Closed Housing L 1500 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust ConnectionDamper & Mass Air flow sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading & Venting Filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 10 TTZ 0.7 m3/hr Almatec PTFE PTFE/EPDM Damper, Diaphragm Sensor , Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration All Sides Closed Housing L 3050 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors Internal Lights,Exhaust Connection with Damper & Mass Air flow sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading & Venting Filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 08 TTZ 50 L /hr Almatec PTFE PTFE/EPDM Diaphragm Sensor , Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration

Q'TY

REMARKS

CDC -151

CHEMICAL DISTRIBUTION Manufacturer CABINET Accessory Type

IBC -151

IBC TOTE DISCHARGE & RECIRCULATION

Volume Accessory Type

1 Two pieces(Discharge and Filling Head) per IBC TOTE One with a Reversed Check Valve One Dispense head is used to fill up IBC TOTE from Main Supply Tank One piece per IBC TOTE

DH-151,DH-152 & DH-153

DISPENSE HEAD

Connection Type Manufacturer

PF-151

PARTICLE FILTER

Type Connection Type Type Manufacturer

PC-151

CHEMICAL PUMP CABINET Material Accessory Type Capacity Manufacturer Housing Material Diaphragm Material Accessory Type

P-151 & P-152

SUPPLY PUMP

PUMP-151 & PUMP-152 ( SUPPLY & STAND BY)

P-153

WASTE CHEMICAL PUMP

Manufacturer Accessory Type Capacity

CT-151

COLLECTING TRAY

Manufacturer Material Accessory

DETERGENT PreWa
Type Dimension CDC -251 CHEMICAL DISTRIBUTION Manufacturer CABINET Accessory Type IBC -251 & IBC-252 IBC TOTE DISCHARGE & RECIRCULATION Volume Accessory DH-251,DH-252 DH253 & DH-254 PF-251 & PF-252 Type DISPENSE HEAD Connection Type Manufacturer PARTICLE FILTER Type Connection Type Type Manufacturer PC-251 CHEMICAL PUMP CABINET Material Accessory Type Capacity P-251 & P-252 SUPPLY PUMP Manufacturer Housing Material Diaphragm Material Accessory Type P-253 WASTE CHEMICAL PUMP Manufacturer Accessory Type Capacity CT-251 COLLECTING TRAY Manufacturer Material Accessory Material

Two pieces(Discharge and Filling Head) per IBC TOTE Two with a Reversed Check Valve

One piece per IBC TOTE

PUMP-251 & PUMP-252 ( SUPPLY & STAND BY)

STA Confidential Project BSL - CCSS PKG

Page6 27-Dec-10 Rev.1

ITEM NO. DETERGENT InWa

DESCRIPTION
Type Dimension

SPECIFICATION
All Sides Closed Housing L 3050 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air flow sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading & Venting Filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 08 TTZ 40 L /hr Almatec PTFE PTFE/EPDM Diaphragm Sensor , Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration

Q'TY

REMARKS

CDC -351

CHEMICAL DISTRIBUTION Material CABINET Manufacturer Accessory Type

IBC -351 & IBC-352

IBC TOTE DISCHARGE & RECIRCULATION

Volume Accessory Type

DH-351,DH-352, DH-353 & DH-354

DISPENSE HEAD

Connection Type Manufacturer

Two pieces(Discharge and Filling Head) per IBC TOTE Two with a Reversed Check Valve

PF-351 & PF-352

PARTICLE FILTER

Type Connection Type Type Manufacturer

One piece per IBC TOTE

PC-351

CHEMICAL PUMP CABINET

Material Accessory Type Capacity Manufacturer Housing Material Diaphragm Material Accessory Type

P-351 & P-352

SUPPLY PUMP

PUMP-351 & PUMP-352 ( SUPPLY & STAND BY)

P-353

WASTE CHEMICAL PUMP

Manufacturer Accessory Type Capacity

CT-351

COLLECTING TRAY

Manufacturer Material Accessory

ACETIC ACID
Type Dimension CDC -451 CHEMICAL DISTRIBUTION Material CABINET Manufacturer Accessory Type Volume Accessory DH-451,DH-452, DISPENSE HEAD DH-453 & DH-454 Type Connection Type Manufacturer PARTICLE FILTER Type Connection Type Type Manufacturer PC-451 CHEMICAL PUMP CABINET Material Accessory Type Capacity P-451 & P-452 SUPPLY PUMP Manufacturer Housing Material Diaphragm Material Accessory Type P-453 WASTE CHEMICAL PUMP Manufacturer Accessory Type Capacity CT-451 COLLECTING TRAY Manufacturer Material Accessory All Sides Closed Housing L 3050 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors , Internal Lights,Exhaust Connection with Damper & Mass Air flow sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading & Venting Filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 08 TTZ 40 l /hr Almatec PTFE PTFE/EPDM Diaphragm Sensor , Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration 1 1 2 PUMP-451 & PUMP-452 ( SUPPLY & STAND BY) 1 2 One piece per IBC TOTE 4 Two pieces(Discharge and Filling Head) per IBC TOTE Two with a Reversed Check Valve 2 1

IBC -451 & IBC-452

IBC TOTE DISCHARGE & RECIRCULATION

PF-451 & PF-452

STA Confidential Project BSL - CCSS PKG

Page7 27-Dec-10 Rev.1

ITEM NO. NaOH TECHNICAL

DESCRIPTION

SPECIFICATION

Q'TY

REMARKS

Type Dimension CDC -551 CHEMICAL DISTRIBUTION Material CABINET Manufacturer Accessory Type IBC -551 IBC TOTE DISCHARGE & RECIRCULATION Volume Accessory DH-551,DH-552 & DH-553 PF-551 DISPENSE HEAD Connection Type PARTICLE FILTER Type Connection Type Type Manufacturer PC-551 CHEMICAL PUMP CABINET Material Accessory Type Capacity P-551 & P-552 SUPPLY PUMP Manufacturer Housing Material Diaphragm Material Accessory Type P-553 WASTE CHEMICAL PUMP Manufacturer Accessory Type Capacity CT-551 COLLECTING TRAY Manufacturer Material Accessory Type

All Sides Closed Housing L 1500 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air flow sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head 3 Flaretek 3/4" Loading & Venting Filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 08 TTZ 0.2 m3/hr Almatec PTFE PTFE/EPDM Diaphragm Sensor , Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration 1 1 2 PUMP-551 & PUMP-552 ( SUPPLY & STAND BY) 1 1 Two pieces(Discharge and Filling Head) per IBC TOTE One with a Reversed Check Valve One Dispense head is used to fill up IBC TOTE from Main Supply Tank One piece per IBC TOTE 1 1

FeCl3
Type Dimension CDC -651 Material CHEMICAL DISTRIBUTION CABINET Manufacturer Accessory Type IBC -651 IBC TOTE DISCHARGE & RECIRCULATION Volume Accessory Type DH-651 & DH-652 DISPENSE HEAD Connection Type Manufacturer PF-651 PARTICLE FILTER Type Connection Type Type PC-651 Manufacturer CHEMICAL PUMP CABINET Material Accessory Type Capacity P-651 & P-652 SUPPLY PUMP Manufacturer Housing Material Diaphragm Material Accessory Type P-653 WASTE CHEMICAL PUMP Manufacturer Accessory Type Capacity CT-651 COLLECTING TRAY Manufacturer Material Accessory All Sides Closed Housing L 1500 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors, Internal Lights,Exhaust Connection with Damper & Mass Air flow sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading & Venting Filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 08 TTZ 0.1 m3/hr Almatec PTFE PTFE/EPDM Diaphragm Sensor ,Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration 1 1 2 PUMP-651 & PUMP-652 ( SUPPLY & STAND BY) 1 1 One piece per IBC TOTE 2 Two pieces(Discharge and Filling Head) per IBC TOTE One with a Reversed Check Valve 1 1

STA Confidential Project BSL - CCSS PKG

Page8 27-Dec-10 Rev.1

ITEM NO. KOH 45%

DESCRIPTION
Type Dimension

SPECIFICATION
All Sides Closed Housing L 1500 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC doors Internal Lights,Exhaust Connection with Damper & Mass Air flow sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading & Venting Filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 08 TTZ 3 l/hr Almatec PTFE PTFE/EPDM Diaphragm Sensor,Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration

Q'TY

REMARKS

CDC -751

Material CHEMICAL DISTRIBUTION Manufacturer CABINET Accessory Type

IBC -751

IBC TOTE DISCHARGE & RECIRCULATION

Volume Accessory Type

DH-751 & DH-752

DISPENSE HEAD

Connection Type Manufacturer Type Connection Type Type Manufacturer

Two pieces(Discharge and Filling Head) per IBC TOTE One with a Reversed Check Valve

PF-751

PARTICLE FILTER

One piece per IBC TOTE

PC-751

CHEMICAL PUMP CABINET Material Accessory Type Capacity Manufacturer Housing Material Diaphragm Material Accessory Type

PUMP-751 & PUMP-752 2 BY) ( SUPPLY & STAND

P-751 & P-752

SUPPLY PUMP

P-753

WASTE CHEMICAL PUMP

Manufacturer Accessory Type Capacity

CT-751

COLLECTING TRAY

Manufacturer Material Accessory

HF 50%
Type Dimension CDC -851 CHEMICAL DISTRIBUTION Material CABINET Manufacturer Accessory Type IBC -851 IBC TOTE DISCHARGE & RECIRCULATION Capacity Accessory Type DH-851 & DH-852 DISPENSE HEAD Connection Type Manufacturer PF-851 PARTICLE FILTER Type Connection Type Type Manufacturer PC-851 CHEMICAL PUMP CABINET Material Accessory Type Capacity P-851 & P-852 SUPPLY PUMP Manufacturer Housing Material Diaphragm Material Accessory Type P-853 WASTE CHEMICAL PUMP Manufacturer Accessory Type Capacity CT-851 COLLECTING TRAY Manufacturer Material Accessory All Sides Closed Housing L 1500 mm X W 1600 mm XH 2200 mm PP-White Lotus Systems IBC,Collecting Tray,Double Leaf Transparent PVC door, Internal Lights,Exhaust Connection with Damper & Mass Air flow sensor Intermediate Bulk Container 1000L Dispense Head,Flexible Hose,Particle Filter & Level switches Quick Connect Dispense Head Flaretek 3/4" Honeywell or Entegris Loading & Venting Filter 1/4" Chemical Dispense Module Lotus System PP-White Pumps,Pipes,Fittings,Valves,Leak Sensor & Exhaust Connection with Damper E 08 TTZ 0.6 m3/hr Almatec PTFE PTFE/EPDM Diaphragm Sensor , Stroke Sensor & Counter Jet Pump GEA Aspirator-DIWater Operated KTC-Station duo(IBC) 1000L Denios PE Capacitive Leakage Sensor & Leakage Aspiration 1 1 2 PUMP-851 & PUMP-852 STAND BY) ( SUPPLY & 1 1 2 Two pieces(Discharge and Filling Head) per IBC TOTE One with a Reversed Check Valve 1 1

One piece per IBC TOTE

STA Confidential Project BSL - CCSS PKG

Page9 27-Dec-10 Rev.1