Copyright WILEY-VCH Verlag GmbH & Co. KGaA, 69469 Weinheim, Germany, 2020.

Supporting Information
for Adv. Mater., DOI: 10.1002/adma.202001466

A Self-Powered Angle Sensor at Nanoradian-Resolution for

Robotic Arms and Personalized Medicare
Ziming Wang, Jie An, Jinhui Nie, Jianjun Luo, Jiajia Shao,
Tao Jiang, Baodong Chen, Wei Tang,* and Zhong Lin Wang*
Copyright WILEY-VCH Verlag GmbH & Co. KGaA, 69469 Weinheim, Germany, 2020.

Supporting Information

A Self-Powered Angle Sensor at Nanoradian-Resolution for Robotic Arms and

Personalized Medicare

Ziming Wang, Jie An, Jinhui Nie, Jianjun Luo, Jiajia Shao, Tao Jiang, Baodong Chen, Wei
Tang*, and Zhong Lin Wang*

Note S1. Theoretical analysis of operating principle of the SPAS in short-circuit

condition
According to the triboelectric series, freestanding electrodes are positively charged
accompanied by an equal amount of negative charges generated on the Kapton film. Thus, the
operating principle of the SPAS can be qualitatively accounted as follows: Taking TENG A
as an example, electrostatic induced negative charges are accumulated on the left electrode,
while the right electrode is positively charged with the identical amount at the initial states.
Movements of robots bring about corresponding relative rotation between the rotator and the
stator, free electrons will keep flowing from the left electrode to the right one before the
freestanding electrode reaches the position that is precisely above the right electrode. Charge
distribution is exactly contrary to the initial states at that position, and the flow direction of
free electrons is reversed as the freestanding electrode rotating back to the left electrode.
Consequently, alternating flows of electrons are generated by the rotation-induced periodical
overlap between the freestanding electrode and the interdigital electrodes. The operating
mechanism of TENG B is similar to its counterpart except that the charge flow at each state is
in advance of TENG A by a quarter period when rotating clockwise or lagged behind when
rotate anticlockwise.
To quantitive deduce the charge distribution on each electrode, a simplified model of the
parallel-plate capacitor can be reasonably introduced in this analysis without taking fringe
effect into account, which is based on the assumption that the thickness of Kapton film is
much smaller than its width and length scale. Since the surface area of the dielectric layer is
three times larger than that of freestanding electrode, supposing triboelectric charge densities
on the tribo-surface of Kapton film is -σ, combining with the law of charge conservation, the
total charges on the bottom surface of the freestanding electrode are 3σS (S represents the
tribo-surface area of a freestanding electrode).[1]
Basic electrical principles of electrodes in short-circuit situation and the law of charge
conservation are combined to determine the charge distribution when the freestanding
electrode has rotated θ degrees from the initial state (as shown in Figure S6b). The charge
density of the overlapped area on the bottom surface of the freestanding electrode is defined
as σo(θ), and the unoverlapped area as σuo(θ). Supposing the quantity of transferred charge is
Q(θ), we can deduce the following expression based on the law of charge conservation:
QL  QR  Q( ) (1)
QL and QR are distributed charge on the left-hand and right-hand electrodes, respectively.
A fundamental feature for two electrodes in short-circuit condition is that their electric
potentials are equal. Thus, we can obtain another equation:

1
 VL-Electrode  VR-Electrode (2)
For the situation of 0≤θ≤α, Equation (2) can be specified by Equation (3) after combing
with Equation (1) and regarding the bottom surface of the freestanding electrode as the
potential reference point (zero potential point):
(   )
 o ( )   S  Q( )
Q( )
(  )
d
 
d
(  )
d
(3)
(   ) 2   2   S 2 
S 0 r 0 r 0 r

The first term on the left side of Equation (3) is the potential induced on the left-hand
electrode by the overlapped area of the freestanding electrode after comsidering the shielding
effect resulted from charges on the left-hand electrode. And, the second term represents the
potential caused by the Kapton film. The sum of these two terms consisits the potential of the
left-hand electrode. The potential of the right-hand electrode is mainly ascrbied to the charge
on the top surface of Kapton film and the shielding effect caused by charges on the right-hand
electrode. The expression of Q(θ) is obtained via solving Equation (3):
 ( )  S
Q( )  o (0     ) (4)

1
 
Since the total charge on the freestanding electrode is 3σS, the relationship between σo(θ)
and σuo(θ) is revealed by:
(   ) 
 o ( )   S   uo ( )   S  3 S (5)
 
Once the value of σo(θ), is attained, the quantitve of transferred charge between the
left/right-hand electrodes can be derived from Equation (4). Here, we consider charge
distributions at several featured points.
At the initial state, the freestanding electrode is precisily above the left-hand electrode,
σo(θ) is calculated to 3σ since θ=0 in Equation 5. Substituting σo(θ)=3σ to Equation 4 we can
obtain the charge distribution at the initiate state as follows:
3  S
QL  QR  Q(0)=  (6)
2
As the freestanding reaches the middle position, σo(θ) is 0 since there is no overlapped
area exists. Thus, the net charge distributed on the left/right-hand electrodes are both zero.
0S
QL  QR  Q( )=  =0 (7)
2
Similarily, the charge distribution under the condition of α<θ≤2α can be derived as:
(   )
Q( )
 ( )   S +Q( )
(  ) 
d
(
o
  ) 
d
(8)
S 2 0 r (   ) 2 
S 0 r

And the expression of Q(θ)within the range of (α, 2α] is solved as:
 ( )  S
Q( )   o (    2 ) (9)

1
 
At the final state that the freestanding electrode is precisily above the right-hand
electrode, the Q(2α) is calculated to be -3σS/2, which is exactly reversed to the charge
distribution at initial state.
The quantity of transferred charges under the short-circuit condition when the
freestanding electrode has rotated by θ degree is defined by:

2
 Qsc  QL   QL 0 (10)
Consequently, the total quantity of transferred charges when the freestanding electrode
has rotated by α, and 2α degrees are:
3 3
Qsc α  QL α  QL 0  0  (  S )   S (11)
2 2
3 3
Qsc 2α  QL 2α  QL 0   S  (  S )  3 S (12)
2 2

Theoretical analysis results are compatible with the schematics of working principle in
Figure 1c&d and Figure S1a&b.

3
Note S2. Theoretical analysis of operating principle of the SPAS in open-circuit
condition
Owing to the drift in induced charges between the left and right electrodes is forbidden in
an open-circuit condition, the open-circuit voltage (Voc) is thus defined as the difference
between these two electrodes, that is, Voc=VR-VL. Based on basic electrodynamics, the
variation of open-circuit voltages can be derived as follows: Since a maximum potential of the
left electrode and a corresponding minimum potential of the right electrode are achieved at
the initial state of TENG A, the magnitude of Voc of TENG A will increase from this state.
The half maximum appears when the freestanding electrode is exactly above the middle of the
left and right electrodes because of the symmetric structure of any single TENG in the SPAS.
The crest of voltage signals occurs when the freestanding electrode is aligned with the right
electrode on account of a reversed distribution of induced charges is established compared to
the initial state. Further movement of the freestanding electrode will induce a reversed
variation of Voc because of the periodic structure. As a result of the designed structure, a phase
lead of the TENG B can be reasonably inferred when the SPAS rotate clockwise, and a
contrary phase difference will be observed at anticlockwise rotation.
Quantitative deduction of this variation tendency is based on the model of volume-
changing capacitors, the relationship concerning about potential difference and transferred
charge between the left and right electrodes as well as open-circuit voltage can be assumed as
follows:[2]
1
VLR    QLR  VOC (13)
Ctotal
Since VLR=0 and QLR=Qsc in short-circuit condition, we can derive the following equation:
1
0  QSC  VOC (14)
Ctotal
where Ctotal represents the total capacitance of the whole system. Therefore, the open-circuit
voltage when the freestanding electrode has rotated by θ degree can be expressed as follows:
Q
VOC θ  SC (15)
Ctotal 
The transferred charge Qsc can be derived from equations in the Note S1. Variations of
the total capacitor during rotation is simulated by the COMSOL Multiphysics and exhibited in
Figure S6c. Hence, the open-circuit voltage when the freestanding electrode has rotated by θ
degrees can be quantitative calculated by the combination of Equation (10) and (15). Besides,
from this depiction, we can find that the total capacitor of the system merely fluctuates
between 19.37 pF and 22.55 pF. Thus, the variation tendency of open-circuit voltage (Voc) is
similar to that of the transferred charge in short-circuit condition (Qsc): As exemplified by
TENG A, since the transferred charge equals to zero at the initial state, the open-circuit
voltage reaches its minimum. Before the freestanding electrodes is exactly above the right
electrode, the rotation of freestanding electrodes is accompanied by the increment of
transferred charges, which will finally bring about the increase of Voc. Further movement of
the freestanding electrode will induce a reversed variation of Voc due to the periodic structure
and the decrement of transferred charges. Variations in potential distributions of the
clockwise-rotated and anticlockwise-rotated SPAS are visualized by Movie S1 and 2,
respectively.

4
Note S3. The reason for selecting open-circuit voltage signal of TENG A as the sensing
signal
One vital output characteristic of TENG is that the magnitude of open-circuit voltage is
much higher than that of short-circuit current because of the large internal resistance.[3]
Moreover, the peak-to-peak value of open-circuit voltage is, to some extent, irrelevant to the
angular velocity in this mode of TENG. Thus, it is reasonable to utilize the open-circuit
voltage as the sensing signal. Besides, combining Equation 10&15 we can conclude that a
larger quantity of transferred charge in short-circuit condition gives rise to a higher magnitude
of open-circuit voltage. Consequently, the open-circuit voltage of the TENG A was selected
as the sensing signal for its larger area of tribo-surface(S) will lead to an enhanced open-
circuit output performance, which is of crucial significance for improving both the resolution
and SNR ratio of the SPAS. These theoretical analysis results are validated by fundamental
electrical output performance tests of the SPAS as exhibited in Figure S6d and e.

5
Figure S1. Simulated and experimental results for the anticlockwise-rotated SPAS. a, b)
Schematics of working principle for the anticlockwise rotated SPAS, respectively. c)
Simulated potential distribution for an anticlockwise rotated SPAS. d) Numerically
calculated variations of open-circuit voltage of the anticlockwise rotated SPAS. e, f)
Simulated relationship between the central angle difference (β) and peak-to-peak values
of voltages. g-i) Simulated variances in voltage signals when the SPAS rotated
anticlockwise with the β/α equals to 1, 4/3 and 2 respectively. j-l) Corresponding
experimental results of (g), (h) and (i).

6
Figure S2. Characterization of a single TENG in SPAS. a) Digital photos and illustrations of
the established comprehensive closed-loop rotary platform. b) Schematics of enhancing
angular resolution to 2° via the introduction of the crest point. c-e) Enlarged views of
representative areas in Figure 3a, specific rotation conditions are listed in legends. f-h)
Demonstration of a pulse number of 20 is corresponding to a rotation angle of 80° even under
different angular velocity conditions. i-k) Magnified depictions of various combinations of
angular velocities and rotation angles in Figure 3c, detailed rotation conditions are exhibited
in legends. l) Depictions of the average open-circuit voltages under different angular
velocities with error bars. m, n) Graphical explanation of the incapability of discerning
rotational direction via a single traditional TENG.

7
Figure S3. Characterization of SPAS via synchronous measurement system. a) Digital
pictures of the established multi-channel synchronous signal measurement system. b)
Illustration of improving angular resolution to 1° via the introduction of the intermediate point.
c) Illustrations of the developed measurement system. d) Response time measurement of the
SPAS.

8
Figure S4. Application of SPAS in robots. a) Sketch and digital photos of the palletizing
robotic arm equipped with SPASs in its three joints. b) Weight and thick characteristics of the
SPAS. c) Schematics and geometric information of the three SPASs in the robotic arm. d)
Further validation of the identicalness of two calligraphic scripts via values of RGB of each
pixel.

9
Figure S5. Application of SPAS in personalized medicare. a) Circuit diagrams of the devised
microcontroller unit for recording flexion/extension of joints. b) Structural sketches of the
SPAS embedded in the medical brace.

10
Figure S6. Theoretical analysis and electrical measurement of the SPAS. a) Illustration of
translating voltage variations into rotational angles. b) Schematic illustration of the theoretical
analysis under the short-circuit condition. c) Variations of the total capacitor during rotation. d,

11
e) Basic electrical characteristics test of the TENG A&B, respectively. f) Schematics of
recognizing phase difference between sensing signals and reference signals.

12
Table S1. Parameters employed to proceed simulations
Length of electrodes of TENG A 10 mm
Central angle of electrodes of TENG 1°,10°,45°
A
Length of electrodes of TENG B 6 mm
Central angle of electrodes of TENG 1°,10°,45°
B
Central angle of intervals 1°,10°,45°
Angle difference in the rotator section 1°,10°,45°
Thickness of electrodes 50 μm
Dielectric coefficient 3.5
Thickness of dielectric layer 35 μm
Surface charge density of dielectric -3.5×10-6 C/m2
layer
Freestanding height 0 mm

13
Table S2. Simulated results of open-circuit voltages and corresponding CPR under
various combinations of α and γ/α
α (deg) γ/α Open-circuit Normalized CPR
voltages (V) voltages
0.2 68.77 1 150
1 0.5 204.13 2.9683 120
0.8 389.43 5.6627 100
1 562.48 8.1791 90
0.2 1431.20 1 30
5 0.5 2700.15 1.8866 24
0.8 3896.61 2.7226 20
1 4683.55 3.2724 18
0.2 4573.14 1 10
15 1/3 5812.67 1.2710 9
0.5 7171.30 1.5681 8
1 10807.50 2.3632 6

14
Table S3. Simulated and experimental relationship between β and phase difference
β/α Simulated Experiment
Crest Crest Period Phase Crest Crest Period Phase
of A of B (deg) difference of A of B (deg) difference
1 AC 2α 3α 4α 90 1.8528 2.8600 4 90.65
C 2α α 4α -90 2.0043 0.9983 4 -90.54
4/3 AC 2α (10/3)α 4α 120 2.0177 3.3403 4 119.03
C 2α (2/3)α 4α -120 1.9412 0.6202 4 -118.89
2 AC 2α 4α 4α 180 1.9879 3.9804 4 179.33
C 2α 0 4α -180 2.0116 0.0093 4 -180.21

15
Table S4. Positions of the trough, crest, and intersection of voltage signals in a period as
well as the position ratio of the intersection.
Crest Trough Intersection
Rotary direction
TENG TENG TENG TENG Position Ratio
A B A B
Anticlockwise 3.254 3.351 3.063 3.157 3.157 49.21%
Clockwise 6.993 6.892 6.793 7.088 6.892 49.50%

Table S5. Main features of commercial angle sensor and their comparison with SPAS.
Featu Operating Power CPR Weight Thickness Limiting
re Sensor
Mechanism Consumption (g) (mm) Resolution
Commercial Electromagnetic 0.5 W 100 100 53 3.6 degree
Sensor
SPAS Triboelectric Self-powered 90 11.1 1.87 2.03
nanoradian

Supplementary Reference
1. E. M. Purcell, D. J. Morin, Electricity and magnetism, Cambridge University Press, 2013.
2. Y. Zi, S. Niu, J. Wang, Z. Wen, W. Tang, Z. L. Wang, Nat. Commun. 2015, 6, 8376.
3. J. Nie, X. Chen, Z. L. Wang, Adv. Funct. Mater, 2018, 1806351.

16