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Integrated Actuator Laboratory (LAI) – http://lai.epfl.ch

Dr. Y. Civet

PIEZOELECTRIC ACTUATORS
DESIGN & MEMS APPLICATIONS

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Piezoelectricity ?

1881
Inverse piezoelectricity
Gabriel Lippman
1880
Direct Piezoelectricity
Pierre and Jacques Curie

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History of Piezoelectric Motors

Prominence Large-Scale
(publications, patents, etc.) Commercialisation
Watch Motors
of Actuators
(AFM tip,
Piezo MEMS
waver positioning,
Thin
print-heads,
Nanopositioning Film
fuel injection…)
PZT
Micromotors
Advanced FUTURE OF
Autofocus Multilayer Control MOTORS ???
PZT Techniques
Converse Shinsei
Piezoelectric First Affordable
Effect Practical PZT
Early implementations Lead-free
Motor High Performance, PZT
Concepts Long lifetime PZT
PZT time
1881 1942 1970 1980 1990 2000 2010

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Non centro-symmetrical material

​𝐹 
​𝐹 

​𝑃 

Direct piezoelectric effect

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Synthetic ceramics

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High Performance Lead-free Piezoelectric Material

Yasuyoshi Saito, Hisaaki Takao, Toshihiko Tani,
Tatsuhiko Nonoyama, Kazumasa Takatori, Takahiko
Homma, Toshiatsu Nagaya, Masaya Nakamura

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Polarisation

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Electro-mechanical conversion

Classic material

Piezo material

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Constitutive equations
Mechanical:

Electrical:

Piezoelectric constants:

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Constitutive equations
Strain tensor [-]

Stress tensor [ Pa ]

Compliance tensor [ Pa-1 ]

Stiffness tensor [ Pa ]

Electric displacement field [ C/m-2 ]

Electric field [ V/m ]

Electric permittivity [ F/m ]

Piezoelectric coefficient [ C/N ]

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Practically

http://www.physikinstrumente.com/en/
products/piezo_tutorial.php
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Example z
A F

P V
l0
y

Questions:
–  Maximum displacement?
–  Maximum force?
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Example

E
F [N]

A.N.:
Noliac NCE55: A = 2 cm2
Δl [nm] d33 = 670E-12 C/N l0 = 2 mm
sE33 = 21E-12 m2/N
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Questions

•  How to increase the displacement ?

•  How to decrease the operating voltage ?

⇒  Stack actuators
-  Thin layers, high ​𝐸  even at low voltage
-  Total displacement = N*the displacement of one layer
PI P-010.10:
D = 10 mm, l0 = 17 mm
Δlmax = 15 µm, Fmax = 1.8 kN @ 1000V

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Our enemies

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Some literature

Matériaux piézoélectriques
Caractérisation, modélisation et vibration
Michel Brissaud – PPUR 2007

Piezoelectric Transducers and Applications

Antonio Arnau Vives (Ed.) – Springer 2004

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Travelling waves
SHINSEI USR60 Motor:
•  Invented in 1982 (Sashida)
•  Commercialized since 1987 by Shinsei
(www.shinsei-motor.com)

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Shinsei - USR60
Specifications
•  Power: 5W
•  Nominal speed: 100 rpm
•  Nominal torque: 500 mNm
•  Maximum torque: 1 Nm

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PCBmotor
www.PCBmotor.com
~ 0.20CHF/pce

No load speed: 60 rpm

Stall torque: 18 mN.m
200V

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Standing wave

No load speed: 600mm/s

Maximum force : 60N
200V
Pmech : 16W

Physik instrumente

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Stepper

Prof. Toshiro Higuchi

Tokyo University
www.aml.t.u-tokyo.ac.jp
http://en.wikipedia.org/wiki/
File:Piezomotor_type_inchworm.gif

http://www.elliptec.com/

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Stepper motor - Inchworm

NEXLINE N-216 de PI

Specifications :

Travel range: 20 mm
Max speed: 1 mm/s
Supply voltage : ± 250 V
Resolution : 0.03 nm / 5 nm
Dimensions : 51 x 72 x 115 [mm]

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Impact Drive Mechanism (IDM)

•  Tokyo University (Prof. Toshiro Higuchi)

www.aml.t.u-tokyo.ac.jp

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IDM, application example

Insertion of a micro pipette into the cytoplasm

hydraulic micro micro manipulator with

manipulator piezo IDM
(step size: ~4nm)
http://www.aml.t.u-tokyo.ac.jp/research/manipulator/manipulator_e.html

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Why MEMS?

2mm

Variables 100factor
Scale nm (α<1)
Dimension α
Area α2
Volume α3
Micro Electro Mechanical Systems
Frequency α-1
Thermal time constant α 100µm

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What MEMS?

Cheng-Hsien Liu, NTHU

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Why piezo ?

Zupan & Al. 2002

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Why Piezo MEMS actuators ?

•  Available force

Bell & Al. 2005

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Why Piezo MEMS actuators ?

•  Available force
•  Resolution

Bell & Al. 2005

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Why Piezo MEMS actuators ?

•  Available force
•  Resolution
•  Frequency

Bell & Al. 2005

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Why piezo MEMS sensors?

•  Resolution

Bell & Al. 2005

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Why piezo MEMS sensors?

•  Resolution

•  Frequency

Bell & Al. 2005

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Why Piezo MEMS ?

•  Strong force
•  High speed and high frequency
•  Low voltage (high dielectric constant)
•  High efficiency in energy conversion
•  High acoustic quality
•  Rather linear behaviour
Muralt 2008

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Where using piezo MEMS ?

Piezoelectric ultrasonic transducer pMUT

www.vermon.com

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Where using piezo MEMS ?

Ink Jet Nozzle

www.epson.com

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Where using piezo MEMS ?

Gyroscope Panasonic

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Where using piezo MEMS ?

Autofocus Lens
www.polight.com

www.polight.com

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Highlights

•  Thin Piezo Film

•  Applications of Piezo MEMS
•  Examples

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Highlights

•  Thin Film Piezo

–  FeRAM
–  Material
–  Manufacturing

•  Applications of piezo MEMS

•  Examples

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Thin piezo film history

•  Ferroelectric Nonvolatile access memories (FeRAM)

DRAM cell

FeRAM cell

Low power / low voltage

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FeRAM material

TI Toshiba
Fujitsu Matsushita Samsung Sony
Agilent Infineon
Technology
0.13µm 0.18µm 0.18µm 0.2µm 0.25µm 0.25µm
generation
Density 64Mbit 4Mbit 1Mbit 32Mbit 32Mbit 4Mbit

Material PZT PZT SBTN* PZT PZT SBT*

Cell size 0.54µm2 1.3µm2 1.1µm2 1.875µm2 0.93µm2 2.6µm2

*bismuth layer-structured family

SBTN: SrBi2(TaNb)
SBT: SrBi2Ta2O9

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Material
•  Bulk ceramic
•  Quartz
•  Langasite (LGS)
•  Lithium Niobate and Tantalum
•  Thin Film
–  Ferroelectrics (Poling)
•  PZT : Polycrystalline lead Zirconium Titanate (Actuator)
•  PMN-PT
–  Piezoelectric semiconductor
•  Groups III-V material (GaN, GaAs, AlN (CMOS compatible))
•  ZnO, SiC (gas sensor)
–  Relaxor material
•  Pb (MgNb)O3, PbTiO3, PbZrO3
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Material properties
•  k33, effective dij and eij

•  Electromechanical coupling coefficient

Property Units AlN ZnO PZT
(thin film)
Density g.cm-3 3.26 5.68 7.5 - 7.6

% 6.5 9 7 - 15
Tadigadapa & Al. 2009

2490 1770

160 160

C.m-2 -1.05 -1.0 -8 to 12

pm.V-1 3.9 5.9 60 - 130

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Thin Film manufacturing

Cheong & Al. 2005

•  MEMS technology

•  pMEMS

Subtractive approach Additive approach Integrative approach

Tadigadapa & Al. 2009

Jiang & Al. 2008

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Thin Film manufacturing

•  Machine
•  Ion beam Sputtering
•  Magnetron Sputerring
3 steps process :
•  MOCVD
Spin-coating dried @ 130°C
•  CSD
5min
•  PLD
Degreased @ 400°C 5min
•  Screen printing
(x3)Annealed @ 700°C 1min
•  Aerosol deposition (AD)
•  …
•  Temperature (PZT)
•  700 - 1000°C
•  200 - 500°C

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Thin Film manufacturing

•  Integration
–  Electrode : Pt, RuO2…plane or inter-digital
–  Buffer layers Ti/SiO2 or Ta/Si3N4
•  Temperature deposition : Orientation
•  Poling effec
t
k i n g
•  Crac
Thermal treatment 700°C
•  Piezo coefficient depends on
composition and crystal orientation

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Ferroelectric properties
•  Composition dependence

Trolier-Mckinstry & Al. 2004

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Ferroelectric properties
•  Composition dependence

•  Orientation dependence

Trolier-Mckinstry & Al. 2004

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Thin Film manufacturing

•  Intrinsic stress
–  Deposition process
•  Tensile stress up to +800MPa Pt / Ti
•  Compressive stress SiO2 −300MPa
Gross & Al. 2004

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Thin Film manufacturing

•  Intrinsic stress
–  Deposition process
•  Tensile stress up to +800MPa Pt / Ti
•  Compressive stress SiO2 −300MPa
–  Poling Gross & Al. 2004

Ledermann & Al. 2003

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Few processed devices

•  Piezo NRJ harvesting

Defosseux & Al. 2011

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Few processed devices

•  Piezo actuator
Casset & Al. 2013

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Soft Piezo MEMS

•  Kapton substrate
Petroni & Al. 2011

Replace EAP
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Bulk Vs thin Film

•  Higher coercive fields (50-100kV.cm-1)
•  Higher breakdown voltages (200-400kV.cm-1)
loss
d i e l ectric fference
r i
Highe tructural d
ro s ts
Mic ffec all
ace e ain w
Interf and dom xture
e te
Lattic ize, filed
a i n s
Gr
g
Dopin
…

Tadigadapa & Al. 2009

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Highlights

•  Thin Film Piezo

•  Applications of Piezo MEMS
•  Examples
•  Conclusions & perspectives

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Applications of Piezo MEMS : Actuator

•  TWUM :
–  Autofocus camera, automotive applications (Smith & Al. 2012)

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Applications of Piezo MEMS : Actuator

•  TWUM :
–  Autofocus camera, automotive applications (Smith & Al. 2012)

•  Switch (Proie & Al. 2011)

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Applications of Piezo MEMS : Actuator

•  Micropump
Koch & Al. 1997

Matsumoto et Al. 1999

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Applications of Piezo MEMS : Actuator

•  Micropump
Koch & Al. 1997

•  Inkjet nose

Grishin et Al. 2002

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Applications of Piezo MEMS : Sensor

•  Inertial sensor

Kunz & Al.

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Applications of Piezo MEMS : Sensor

•  NRJ harvesting
–  Vibration

Briand & Al. 2010

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Highlights

•  Thin Film Piezo

•  Applications of piezo MEMS
•  Examples
•  Conclusions & perspectives

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Example 1 : QCM
•  Quartz Crystal Microbalance
–  Thin piezo layer sandwiched between two electrodes
–  Shear wave → Resonant frequency
Rabe & Al. 2003, Kao & Al. 2009

Schematic Micromachined Packaged

Loading Elastic Viscous

Formula

Resolution zeptograms 69

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Example 2 : IR device
•  Infrared detector
–  Ferroelectric material with pyroelectric properties (TGS, LiNbO3…)
–  Modulated radiation absorption
–  Photocurrent

–  Micromachining techniques Hanson & Al. 2001

–  Quartz crystal oscillators → Increase performances

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Example 3 : pMUT
•  Piezoelectric Micromachined Ultrasonic Transducers
–  Array of transmitters / receivers
–  Flexural membrane motion
–  Passive material & piezoelectric layer
–  Sonar, medical imaging, non destructive testing…

Yamashita & Al. 2004

Intravascular ultrasound imaging

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Example 4
•  MEMS Image Projection display
Schroth & Al. 1999

§  PZT + SiO2

§  Vin – Bending

§  2 Vin – 1D rotation

§  2 Vin – 2D rotation

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Example 4
•  MEMS Image Projection display
Tani & Al. 2006

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Example 4
•  MEMS laser scanners
Holmstrom et al., 2014

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Conclusions

•  More than 100 years but…

•  Piezo coefficients & example
•  Macroscale devices
•  MEMS applications
–  P-mems miniaturize sensors
–  Classical micromachining technique
–  Bulk (Quartz…), thin film (PZT, AlN…)

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Perspectives
•  Hysteresis, Creep, drift
•  Deep understanding of poling
•  Driving
•  But…

Jeffrey & Al. 2012

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Thank you very much !

Any questions ?

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