(19) PH A RSA AAR Ba AUAOIQUUQ pp (12) RASA : OBLAST CV 101676995 8 (45) ALA A 2012. 10. 10 (21) IRS 200010170752. 1 (66) 55 SHE fac cite US 2007030768 1, 2007, 02.08, US 2001033454 A1, 2001. 10.25, eae JP 4177679 A, 1992. 06, 24, 12/211, 569 2008. 09. 16 US REA KW (73) SARA FER ERE AER TAS a] eg Ay BTA 2) BABA ME MA FE 4) SABLA AC TERS BT 11105 ROEA Wiehe (1) Int.ct 6118 5/48 (2006.01) 6118 5/55 (2006. 01) AER 2 ROLE SL HERS G4) RAB FAL ile Pete AT CR AR aS 6) HE ARE a8 UL 3 FP a a 8 (ES SE PSN PPR a Hees Wie He the (RV) VA AB fe AB a SM ad EES SE AREE PARA. AMER AEH -MilS $1, S248 SIR Saye Hd RA a A A ie / mS Ae RETR LBL (VM) Boy a8 HELD. TLR GLH] S182 SUES ACRE LE “5 (PES) fe uf ALA IS FT 48 2 RV HA (RVEP) Sik. AGNY RVPF RCRA] PES Afi RR aR SL AA S2 PEA HA, Bee Hb se 1 ah ai I KL U2 PEAY A» 8 J LN Sk BF PUK 2. PRE RI HL a MN AF kD ke A cq HEME S182. CLUB HLH S12 fe SHI ag FE RVEP fer HSH i fis AMD LA eS VOM BUH aa A RV AMES YS 6 CN 10167699:CN 101676995 B RHE RK FH 2K 1, EF FE By eC ASU Mie Be Pe ic 2) HAR, TR AA AT BE IRL, HAA 8 IE BIS FAO RE SATE LBS), PT YA BiG LAE 6 ERA RETR (A a RE Re B 3 AES — HRS NF FRR BS EE HR ATS fg FEF SS NF FRR FF — ESRI A BE OES» BRAS CLIC — 1 DLS ARTIC TS RB RF AIAN AUS — FABRE et EP EER 5 ATE Ee He Bd MLA 7 CELA EER ff 5 HAE ISU HLH LAE Hi 8 ZI WARE aR ef LA dG TT ER EOE — AS — I A 2. ASABE LOTR ATTA HH TES — 2 a DP OH SAG BE DBA AS A (OS TA FIT HY ER ANE EAR FFAS» TEAK SS a BP RSS PE EB, ELSE HP SS — SB a BL FAD 2 BRR LA FG ES RH IG A AF SRT MB ALLIES Ss TEA — Hi Re IF PET ETO BARI ALA BER 2 PIRES AT TAS AE Ae AI AER BS RTH He OF FE VBA FARA EAR A A GF SEL TAR Ta BA 4A, AREA BES LATTA, SEA, ITA he CL ET LA FPL IT HERA BN De I 4 BA GRE ZETA ET FEL ACE 0 5. HEE SABE 1 RITA, BEA a AE PA > PB ‘Fai DRAPE, 2 1 aS AIF HT 6. ARS BER 1 ITT, B53 BA REEL, SES EA 7. HU BOA BER LARISA, idk A A RES ERS SIN, JT AEE FART 8. HES BESR 1 TA AIK, EA LA TAs EE PRK ES BT WDAEE AS Jet FRM BE PEMA 7 9. AFT) P48 bl RE Tc AE BS TH VE BS A TBP HLA OL aR ELE IS PAL RRS, SEO IL A GR EK ES SERRA REET OH ATA I EAST, ELL FP FRE 2 A RH PROEARAS TRS Fp Ab SH A ABT SDA Ft ess LDA TAR A PAL be SALES EUR LAAT TART TATE SSPE RTE (a) DAIS — BEER GB AS BE BOE ALAS SL, FEI SB — IE te AER AB WARP ALATS 82 5 (b) Hf SL FRLAS — HH aa cL, SF ELA S2 FELL SS IM mY 2 5 (o) WEAR k14S2 5 k24S2 ZAIN ME PE RON ATTE S CG) AERA fet SS HLS 7 Ss 2 AA EE RELL ES A PBCN 101676995 B RHE RK FH 22H (Co) CAMERA HU eS EF LER eT Ss CE) LFA aL LES a (er SF FB ea LF» SCOR: Ae ST RRR IAS 3 (ie) EAL BER 22 fet S TL SE — A — RF eA he2 5 AB (h) (EALEAERR Cg) PRCT kL AT 2 Ke SS ARE (a) BI Cg) Beef, SS RAB Fie b> — Fe a as PHL ELT, AE aD NE. 10. HER BORER 9 AY A FBS PAT HE et STIS 3 a BNF KFA LAEAE SL HRA IIT IMR LT Fest SEAN — SBE IT Kel PD 7 AER, IH ELSE APA HET oh STIRS — I a 2 TRL SO PR LTH i TS FE IMRT F 2 PURI ETC AE TE TL, EASES 10 ARAYA, FE PRT TT TR — AL Ae SREDIEAS S1 FELLA BBA AR, IPLAC FP RAT CR it ST I a 2 FE ARLEN S2 FEU MRS BER 12, HAYSESR 9 PTAA A Td: EH PTA a 2 A ET A IP EL SASF RAR He 8 eS TIA TA BLECN 101676995 B eH VsK AA me AAMS MIC R 2 AT [ooo] ALATA ARES RDS A BE ick US 5 HEL SL i Be ED Re PE PRON OA ARAN SS 0 BRA [0002] RL a RAH EFS AS (SORE, HERE MLL (VOM) Beate) FAPHE ISENBERG (track) LEAL / EI, (head) © ARIK Z AS FA fel MRE Ail ELS 4 SA RSET iH id i AS AME AL Fe ef (PES), TEI Ae VOM HAT AS EA eH SE RE TERRE LENGE TF AS [ooos] ASIAN AS TE IE ALR PE MHL 28 i he eA ALLA Hy (disturbance force) BCE (hn ea TP VOM BN Be Hie) LAER Ce TA SCHEER Bi FEA BEE ATE AEE RB ike eS PA SHINY, HPCE AR AS) ) PPA Loong] ESE) (RV) FURIE AUF fe AB 25 fe he Pees 3 SLi ee Pe S| A FR RRA SEI PES (7) ATT EAE PSE IM RHR He (SS BRELEAK Bio) BF) ELA EEL ABEL: ) HALE RV 2 HRT BAHAY RV ASU TS Ss, ETT Sih A RE GME VOM aS TALS det SAH HT TREES. TAA RR RV HT (RVEE) «RE FAY OMI AT IF EL ACNE A PES ALA AS AMEE SOY VER OG BL PR HRCI fe AB A ELA Sie a PRE BRT A AE ESE PSB RAZ AVTEM EAM (primary-axis) RAGUSA KALE, ACES (of f—axis) TUBULE AKA Gh HE BER ELPA SA ALA EU EAT ILI» I (EE AL ASP PUGH» VAG |ABG RV FAAS BAAD Ae RSA CORTES) 9 DRL, HU RITE AEF] VER TAS {REAR PES MAE UA Be ob EAS Ae FA SHI AE BA WU A HEE A BE Ae RAS AEB ABO ALE AS Re EH [000s] US. SUSBL 4858 SEL ial 45 4 Ale a8 in A 9 ies Be pe SS (scabe) EAT RAEI PS 28 HEH fe HB 25 1 EA ABE PY A FCLUEY RVEF Td 6 AA EAR SRD AEP S| A Ey Aad RS eS Ate a a PLEA EAB A 1S) A a SARE FE ARI 2 POS El A Dc aL HAS ie) TTA RV HP RV feeds SPL Ae A PR a ABE 4 A ka FAL AR AS TL 3F HL % RPI Er eR aA TS 2 SBI A AA TR wT Coons] US 7, 035, 03482 $48 TAM BESSA RVEP ELPA BCR Fh Se OSM CHS See RAE Hy FAL EVE (0 Fi (EL) RG a EP A 8 A TY REP Op the Looo7] Air aae BEA AE LAA REY RUFF Fy HSA ALON Se ITS HAAS a BE HE SREY LAI (ER BNA ATHY SE ABEL A PE 0) SC ER aA HEN TS AGE: A 2 FID ER 9 FP ACN 101676995 B eH 2/5 Kk BAAS Coos] Ax Be BIE Be Aik By eh CA Ae ie ek Et Se UL AS SC AS 1 RR HS AF PERERA) (RV) CARAS RR SES at CE ERAS ERE FARE AIK. AL BY LATA PERE INGA HE» ESD Sal el ALT 2 A i AEE A HE ET et SL S20 Mb FEA SL, S2 AIRC IctTS (PES) (E24 A, LZ AT Ee RV AE (RVEF) GA. A SED RVEF SERS PES DADE fe RA EY SL FAL S2 (aR 5 2 SRE Sa sR DSF bd MT 2 fy FREE TE» 8 JA ES A ST KL FAT 2 Ra LLP TE SPAR kA Vk2 ABBR AMIS SLS2. EMCI MY S182 fF 5 MAHER LTS ABO WY RVPF fri, EAP AMERY VOM BC) ae RV AMET SLL kL AM ko (RESET, AIA ARSE ALBIS 1 k2 (RAL. (ooos] USE RVFF JE RTA E AY (WN, RU ae A ER Re a eee CHEE BRBEL ) Why BAF ESL TE TEE RAL Eee BARD), MUZE TE ASR ETA) a SF SHR 3 a (SOA a FG Be I APL TTR 6 A TAT AE 9 FR) Ba REE Mb SA "AB AY SI, BPE EF PBA Se BRS SEER HSL FR SR a I LPI (SEAL. Coon) Hy F REAR RET DAL AL a 9 SE SSE 8 5 Pits SP PSEA Loony] Pay 1 J HR AR Az HH] Ey EL 2G a fle a Ae Pee HABE (RV) ff ibid ak AE DH 38 (AE TH Coon2] fel 2 RFE TPE aA AC eH 8) RV Ay BEL 1 Pas RS OPE dR hi RFE. Coons] YY 3 eee AS OY KEY RVR 245 MTA) (go TS FY PR A ty fe a eS PES Z ATUL BSH fs PLFA HAR 5 ABTHAK C0014] A A AEH A SAR AEE. IR AS ALC Seat 12, Fea SLES ALI 88 SP TERAEME 16 HVACR ALDL (Rat) La Wel 15 SRA ERE 13 ESE. EDA FLBAAR 19 FP SDSE 16, IPSC PARE HE 12 HOTELL (pattern) Mes VD SE REL (He 98 REE 5051) VA BR Ar DCS HH fr HI EX 60.6162) fT FRE ACRGEIS PAE IC SE «fd URLS DL 7 aE Ak Po RSH HL WA — Ai AE AREAL) FL BEA APF PET 9 dE Ey eb — 4 dO SI, Or Hs a FO FR CD SE Bas (STM) EL i SE SEE SSUACNUR PITA SUKI AP PE SI AE A ORES AER IES PES [001s] ARIK LAG ESE ME 16 [SCRAPE PE PELL (VOM) Baas 14. Baas 14 BE SN LT ACHE PEE LARAMIE BD AE 18. MAE 20 LES He 23, HF ALBEM WE 18 (HED. HERES Boek We SHH (air-bearing slider) 22 PtP" th itt 23. 7EF 4H 22 HY 22 (trailing surface) 25 [JB RUMEICAE /'S (R/N) HES 24. AF HEHE 23 AL 5CN 101676995 B eH 3/5 AOR 20 (245 SN HE WS AHL HL Bee a 12 TET CHE“ ORAAI (pitch) "AUTRE (roll) ”. Coors) 44k 12 AEA wl 15 PERE INS, Hl i SK SEHR Bd DC 1 9 A et ASL JGR ie BE BY R/W FER 110, Aad ARRAS 112 Bevo A R/W Pe EE 110 ARAL SEAR fal TS PED A et A,B IE 5 REMI BRYA AF 5 Wp iA a (SCP) 120 ff] PES. SCP 120 RIEL Je FADS 8 RA AEE ALES 5 I EL 2h SAB KOR Tt #8 122, [0017] fr AREAS AG 120 HEA] PES fy RYE SERA, DL at VOM ied) AS 0 EI ERE TERRE 122 VALE Se TRE HY “kA (plant) ” (I, VM 14) SiR ASAIBL ASHEN AAS BY “HEHE” FEM EL AUT L AEM IESE, IP ALAR Hh es SL ARAL LEAR GP HL, IF ELA LER] pe MESS 120 FLAIR RARE 122 Po [ors] AKA eRe), WNT: 70 Aas, Bana CEPT AB C UUHEEE VOM 14 (1322) ) AU LESI A (AUREL SEA AR 2 FY HE IR TD EB» BR PE HE HRP I FRE Pee Wa AGRE AS) rE. RMD SLR / 5 ESL RHE AS Fi (track misregistration) (TMR) » DAI, (lak SR yeh Ib AFP Ra Bie Pea (We He tea) (RV) FE AB AB AL CAE. LGAGSL RV fle RS AEG ER TE I A Ht BRA fle RA 201202, FE AE ANAS FETA BA ARE 19 CISA PEAR ay He A 201 202 Je ASA a WF A J EME}, A Murata Model PKGS-OOLD Sida PE Hf Amuse ME tts 204th FY EDM FEB AR 19, (EL FLAN FAERE 16 AVI AB SY 6 Coors] 5} i) rH RSA EPEHAE (ADC) 203,204 AHR HE MME 201,202 HATE BEI. TIS BORE HE BRE 203.204 SP AGES HEAR ARTS S1\S2 HEH Ae] MAE HAAS 120, SEP PERM PREAH RAR EIA 201 202 FHS HEE FAY BASEL FY Ps AAT A UR OT 2 VUES. fe URPS HDS 120 (HFRS S12 AGT EF Es eich LH Ha SRT EH aM SHY RV HUE (RVEF) (eS. PRE. SCP 120 4G BEENU RAL RV AMENUREI TS 151 HE DEVE REUSE (DAC) 152. DAC 152 AYE] VOM Baas 154, TIS VOM Sa a8 154 SiS VOM 14 (HLTA / “5 RES 24 BSUS AI EL IEA Re CF PEA BURA Coozo] fe ACACIA fey RVFF fj PSEA — ABS}, MOF Be 120 GEA] PES oe AEE OE HOP S182 AURAL. ELSE MUR 1 tA ASRE, re MeSH RS 120 EH Sea UIE TERN RE 122 Ph 4F GE NOPEAP TE (9 ALE RVEF SC CARY RVEF BSE) UES RVEF Mee 0 PSIIT, PEAS SUA, RVBF AEH a) A Ed BU AOL i I A Hs, AULRUBRAIOR AGAR AS 201202 HET SFE RVEF 1755» AA Je Ze fal AEH AAS 120 CLR SEE PEHMES 150 Z Jake RVEF GES SFR GGT S150 AD. Cooat] Fay 2 APR 1 PUT as a8 9 OPE fd AE il AAAI. HUN 2 Bias, VOM 14 HURFGEE PAE (torque) Hi 4 301. fal RAHA SCALE DAC 152, SORE Mee Ad HATS 151 EAR VOM Uke a 154, SRE PH PAS Bae 18 ABET: 2 AR AC. SCRE HIE S 151 KERR TE HAE 302 FEES VOM 14. HEC RES BLT 9 303 AE LAL PUES 304 HANES UREIR AS 112 FURR RES 24 UGA CHS BETS 303 HHA8 ) BEATS 304 KEN Ppa as 0 REE AB A 2 TS ECA ERTS 304 5 SLIP AE RSE RE 305 OTT SAREE, UPA AES 120 BENCH LAR Fe fet (PES) » bs 6CN 101676995 B eH 45K 5 120 HEFE PES HRI AT HEH LP ERE fet S150. Cooze] ARSE ai 5) ol IE A} Halts BULATT S 307.309 HEA BURL AEB BS (ADC) 203, 204 NUDES ER ME INGA 201,202, PTA BURL F PEAS 203.204 4) WERE EBA TS SL S2 PEEING IAL AS 120. Jan 2 Aas, FERRERS 307,309 FE MANY FARE RB MIRE SK 24 RAN TTP ANY. ASAE 120 GRAY S1\S2 FB PES ISAT AIG RVEF SEI. AE RVEF SERA ACAL PES Alte Sts HY S1\S2 1 248A Bee ER PS HED A 2 ABE GFAP ETE» ELAR ev AT EES a DLE kd AL 2, 6 GCG) SL SEN A FA 2 RAB SL, S2. CBCAY SL, S215 He FAR SEATS 150 ARIMA RV AMEE ‘3 151 (9 RVFF {7750 Coozs] Phd FAURE AE RVEF SAREE T (7G S182. S1\S2 HILLEL Pat (1) Al (2) dean : [0024] SI = gi (LV+a1#RVinl) Fak (1) [0025] S2= g2(LV-a 2#RVin2) Fak (2) (oo26] SEH gi. g2 Jefe Read, LV ERED), RV JEREM LRA, nl Al n2 Rea TT a1 AM a 2 APE Fe RR AEM S1. S2 PAG LY ASAD RV TSAR. 1A 2 AYE ROR PG SE 18 ACL Be ST A AY LV A RV EP EE aL ASL ALDT k1, k2 RABOK SI, $2, FF LLCS Y SLAM S22 TAI Se AE RVEP fer Ss BO EK (3) SES IBEE « [0027] RVFF = k1#S1-k2#S2 xk (3) Coozs] dai AE HEAT ATHY PES JAPA RV, UZ RVEF (ef SKF SLAG PBS Wh), WSR (4) BTA [0020] PES = RV-RVFF = RV-[k1#S1-k2#S2] ak (4) [0030] Ai RVFF Fi ACA HR AL k 1, k2 ede PES. Sak (4) fA TeLSPaBCAT EL aK (5) ean [oost] (d/dt)PES = -S1#[ (d/dt) k1]4#82*[ (d/dt)k2] PK () [0032] lik [0033] (d/dt)kl = y #S14PES ext (6) Al [oos4] (d/dt)k2 =~ y #824PES Bak (7) Cooss] SEH yb SCE AGERE EARP a MEL, IBA (5S) EW [oos6]_ (d/dt)PES = ~y #[(S1)*+(S2)"]#PES ax (8) (0037) Ly ALE AE AEB, ATT. y AACE, WU sa FARES, MOP" AEA AI 1 BR 2 BERL ACRST. PALE, SU” yA EA TE PH AURA RE ETA. BY Bas th 7 BY PES AIPA) PCIE Hy SEL. AK, Sak (8) AP PES AAD CSC Set). Coose] TANI. FEA ACUL A RABEL (9) ARTEL RVEP AS [0038] RVFF (m) = k1 (m)*S1 (m)-k2(m)#S2(m) aK (9) (oo4o] SEH m aT ORPE, FF ALSE SC (0) FETE (3) AYR PEG AL. RE PAB ATF HL (10) AT CLD) AEF S182 HEARED A PES, BT HS EI KL 2 A FAA, Hk (10) A C11) PHF 6) A (7) YORE EG FEE Ts ALPE RY TAD [0041] ki (m+1)-K1 (m) = y #51 (m+1) #PES (m+ 1) #Ts. Ht (10) 7CN 101676995 B eH 5/5 [0042] k2(m+1) -k2(m) #S2(m+1)¥PES (m+l)*Ts Bak (11) Coo4s] BLAH SRR EA ECAP 2, te RA AS Ae A 12 AT HE RV SETIERTE « CERRTEFPAGINT 28 bl AU 2 ICEL REY AO TALE AE. kL AT 2 A EME LI’ ADEA AR PERCE CELA“ ARS A EL ESTE Me a A Ra EH EAL, JA EE SL FA S2 RA BYARIE SS 120. SP HAG SL, S2 WME IRLA kL 2, JEL ak (9) HSE RVEF {FT AJa%E RVER SRST S 150 HIM. Pea AEHY PES, FEAT LG fe PES (m+L) . RAI AG “FRE SL (mel) , S2(m+2) FRAT SL y APES (m+ 1), Lt SEGAL (10) Al (11) HA HH. REACH kA K2 WY CSTE SL, WAAR Sk (10) FT LL) PEAY kK, PR IT TAREE, EES HEAT 1 AL FBI kL k2 REALL. FTE PEPE IE kL A kD. ASE Heep RVEF DUR CEASE, Bee FUE RVEF ASAT PRAT LAARSE k1 2 HSE fl WOT AY DARE AL 2 SE YAR Be EE My SUE ede PY TR ER PPE RE PIN A. HEL, SB RR AEM RES 9g — RE HES ) I, ATLAS AE kl Al k2 YB. [loose] (3 Aba HE PEARLY AS Az A EEE. RVR SERDAR CT eB TR] 9 BCA PES brite (PES ZA) ARM ALDIY KI k2 (ASSEN RY MRL HE 1, 2 AE Be ABE 0, (ADEE Lo HHP RV, PES Mb PREY 0. 15 AREER EEL. RTI Hees th fe RV, FEELS KL K2 CRN EATS ELEY, PES BAH ALY 0.03 BEER LL. Cooas] Axe AY AY ATA ASE RRA ISA ELA a OO A BE DE ET ALP A AREAS. IPFL HEP 13 iS NSP a DIF PL TS a AMR FRM RBI AT Bh AA 5S) Be A Re A EY ET A A JB AB IAT REY AAR ) (loose) ZEJ4 BE RVPP AACE AS TE HOR CE ST BU Aa 2k TA Pa SL ERE ER GEL EC PAAELER BEE) BRE RES PA A BRS I CG aE a PS, FDP Bs LS AF Li Be ESA A NAC TT. RST. GATT IA A CAA Ay AMA 2 it A — BGP TT SI EN PE EI PE TR SB I REAL T. (004 7] AYR LEE SS AE A SHA HN A as GAS AR Ae OY AE A ACA BE, PEASE AS Be ES ASE TTR PE SY EE PBL AGIA SF HS BE LG HS a PEAY» I ADR OT PAS AS BER AS Ph 9 BAT PE BR i A BD fast.CN 101676995 B i om oH Mt V3 ag 163H i A fA it CN 101676995 B (= j> > Wee >| Re Wo v2: S| aa i 208. bh e0e74 Rew es WOA Say Whey ; PSL a aut 0 v0e a ova dos 2gh 7A Ea Biew)— 1SL Sa WE AAAY HE LIN “NES wRe #02: 608-202 2 |_lis Nee le ov} ew 4 xT) 7 D0 + (SEH £02. ct 102 10 fl 2cN 101676995 B wow WM 3/3 PES 2 > ( Hii ) 0 0.5 7 1.8 ay ie] CY) 3