Factorial Design

2k Factorial Designs
22 Design

Figure 14-15 The 22 factorial design.

 2k Factorial Designs
22 Design

The main effect of a factor A is estimated by

 2k Factorial Designs
22 Design

The main effect of a factor B is estimated by

 2k Factorial Designs
22 Design

The AB interaction effect is estimated by

 2k Factorial Designs
22 Design
The quantities in brackets in Equations are called contrasts.
For example, the A contrast is
ContrastA = a + ab – b – (1)
 2k Factorial Designs
22 Design
Contrasts are used in calculating both the effect estimates and
the sums of squares for A, B, and the AB interaction. The
sums of squares formulas are
 2k Factorial Designs
Example
 2k Factorial Designs
Example 14-3
 2k Factorial Designs
Example 14-3
 14-5 2k Factorial Designs
Residual Analysis

Figure 14-19 The standard deviation of epitaxial layer

thickness at the four runs in the 22 design.
 14-5 2k Factorial Designs
14-5.2 2k Design for k  3 Factors

Figure 14-20 The 23 design.

Figure 14-21 Geometric
presentation of contrasts
corresponding to the
main effects and
interaction in the 23
design. (a) Main effects.
(b) Two-factor
interactions. (c) Three-
factor interaction.
 14-5 2k Factorial Designs
14-5.2 2k Design for k  3 Factors
The main effect of A is estimated by

The main effect of B is estimated by

 14-5 2k Factorial Designs
14-5.2 2k Design for k  3 Factors
The main effect of C is estimated by

The interaction effect of AB is estimated by

 14-5 2k Factorial Designs
14-5.2 2k Design for k  3 Factors
Other two-factor interactions effects estimated by

The three-factor interaction effect, ABC, is estimated by

 14-5 2k Factorial Designs

14-5.2 2k Design for k  3 Factors

 14-5 2k Factorial Designs

14-5.2 2k Design for k  3 Factors

 14-5 2k Factorial Designs

14-5.2 2k Design for k  3 Factors

Contrasts can be used to calculate several quantities:

14-5 2k Factorial Designs

Example 14-4
14-5 2k Factorial Designs

Example 14-4
14-5 2k Factorial Designs

Example 14-4
14-5 2k Factorial Designs

Example 14-4
14-5 2k Factorial Designs

Example 14-4
Example 14-4
 14-5 2k Factorial Designs

Residual Analysis

Figure 14-22 Normal

probability plot of
residuals from the
surface roughness
experiment.
 14-5 2k Factorial Designs
14-5.3 Single Replicate of the 2k Design
Example 14-5
 14-5 2k Factorial Designs
14-5.3 Single Replicate of the 2k Design
Example 14-5
 14-5 2k Factorial Designs
14-5.3 Single Replicate of the 2k Design
Example 14-5
 14-5 2k Factorial Designs
14-5.3 Single Replicate of the 2k Design
Example 14-5
 14-5 2k Factorial Designs
14-5.3 Single Replicate of the 2k Design
Example 14-5
 14-5 2k Factorial Designs
14-5.3 Single Replicate of the 2k Design
Example 14-5

Figure 14-23
Normal probability
plot of effects from
the plasma etch
experiment.
 14-5 2k Factorial Designs
14-5.3 Single Replicate of the 2k Design
Example 14-5

Figure 14-24 AD (Gap-Power) interaction from the

plasma etch experiment.
 14-5 2k Factorial Designs
14-5.3 Single Replicate of the 2k Design
Example 14-5
 14-5 2k Factorial Designs
14-5.3 Single Replicate of the 2k Design
Example 14-5

Figure 14-25
Normal probability
plot of residuals
from the plasma
etch experiment.