Digital Microscope

VHX-7000

Revolutionising
Microscopy
with Digital Microscopes vol. 2

Example Applications for

Cutting-Edge Research
vol.2
 Revolutionising Example Applications

Microscopy
See details, both small and large, with the VHX
Accurate, high-resolution imaging

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P.5 P.5 P.6

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Reach a new level The imaging performance of a digital microscope greatly

of observation surpasses that of conventional optical microscopes.

Real Zoom Lenses - challenging the limits of optical observation

Wide magnification range from 0.1x to 5000x Large depth-of-field for vivid and sharp 3D observation
Image captured with an optical microscope Image captured with a digital microscope

Stereoscopic Metallographic Electron microscope

microscope microscope (SEM)

Connector pins
RZ Lenses covering 0.1x to 5000x support every application.

Dark-field, bright-field, transmitted, polarised and differential interference

observation are available to support all methods of observation

Transmitted light observation Differential interference observation

Bright field

Differential
interference

Cell (2000x) Surface of ACF (500x)

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 NEO REMAX
RZ LENS 12.22 million pixel CMOS (High-speed processing graphic engine)

P7 P.8 P.8

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P.8 P.8 P.8

Achieves observation of high accuracy images of up to 108 million pixels by using the high-resolution function by means of
the motorised stage shift. & NEO REMAX (High-speed processing graphics engine) overcome the limitations of optical microscopes

The 108 million pixel CMOS camera with pixel shift 3D image stitching enables full-focused imaging, 3D
technology provides ultra-high resolution images
with unparalleled colour reproduction display and observation of an expanded field-of-view.

The wide-field 3D display allows easy

understanding of the target as a whole

50000
pixels

50000pixels
Feather (100x)

3D image created using the

standard field of view
16-bit gradation exponentially increases the level 1200pixels
1600pixels

of observable colour gradation

With the console, split screen function, high-capacity filer and PC mode,
reports can be generated immediately. XX OBSERVATION REPORT
Device : KEYENCE VHX-Series

File name
Grain.tif

■ Prepare reports immediately Captured on

Date
on-site
Capturing conditions

■ Various antivirus programmes Magnification 500x

Lens VH-Z500

are supported
Conventional 8-bit gradation HDR (16-bit gradation) Title
Subtitle
Prepared by

3
 Revolutionising Allows you to observe items
Microscopy
that previously could not be seen
Unlike conventional polarised microscopes, it is possible to perform observation at a
distance. In addition to polarised observation, differential interference observation is
also possible.

Lens 300x

Complex (300×)

Featured functions Universal zoom lens, lighting adapter

Wide-Range Zoom Lens VH-Z100R/Z100T NEW 100 1000

❚ Achieves bright and dark-field and polarisation/differential

interference observation with a single lens.
❚ Ultimate depth-of-field, 20x greater than conventional models
❚ An observation distance of 25 mm in all magnifications from
100 to 1000x

Coaxial vertical Ring Differential

illumination illumination Diffusion Variable Polarisation interference ❚ Lens
Model VH-Z100R/Z100T

Bright-field Differential interference Magnification * 1 100× 200× 300× 500× 700× 1000×

Horizontal 3.05 1.53 1.02 0.61 0.44 0.30

Field-of-view
(mm)

Vertical 2.28 1.14 0.76 0.46 0.33 0.23

Diagonal 3.81 1.90 1.27 0.76 0.54 0.38

Working distance
25 (20 * 2)
(mm)
*1 Magnification on a 15-inch monitor with a 1/2-inch CCD camera.
*2 With triple illumination adapter attached

Hard disk head (200x)

4
Obtain high resolution 3D images, even at high magnification by using optimal light
settings.

MEMS red pitch variable guided-mode resonate grating (1000×)

Various Lighting Adapters

State-of-the-art illumination technologies for creating ideal lighting conditions

Applicable lenses VH-Z20R/Z20T/Z25/Z20UR/Z20UT/Z100R/Z100T/Z100UR/Z100UT

Variable Illumination Adapter Polarisation Illumination Adapter

VH-K20 OP-87429
Standard Paper surface Variable illumination Standard Light bulb Polarised illumination
illumination (200x) illumination (50×)

Coaxial Vertical Illumination Adapter Diffuse Illumination

Diffuse illumination Super-diffuse
adapter Illumination adapter
OP-35324 OP-42305

OP-35416
When the adapter IC (1000x) When the adapter is used Non-contact Standard Solder (200x) Diffuse illumination
is not used (Bright field illumination) Multi-diffuse adapter diffusion adapter illumination
(Dark field illumination) OP-35469 OP-35414

5
 Revolutionising Equipped with a multitude of
Microscopy
measurement tools

Capture a fully-focused image of any sample, even in 3D. Display height scale and
highlight the surface topography with a height/color map on the 3D image.

Welding marks that have been created on the surface of a free-electron

laser resonator mirror (500×)

Featured functions
Auto adjust, glare removal, 3D display,
real-time measurement, 3D image stitching

It is possible to use the glare removal function in conjunction with the quick 3D display function.
An advanced 3D construction function

Auto Adjust function prevents image blurring during depth By combining our glare removal and quick 3D display functions,
composition even highly reflective objects can be used for a quick 3D compilation

Edge displacement and image blurring are automatically corrected,
allowing users to always capture a fully-focused image. This method
is 5 times faster and more accurate than conventional methods and is
able to gather accurate information for easily distorted, low
magnification areas.
Once applicable only to still images, the glare removal function has
now been enabled to be used on live images and 3D display. By
removing the reflectivity, it is possible to create an accurate 3D
display of the sample.

Conventional image Using the Auto Adjust Solder (200×) Conventional image Image subjected to glare removal
Function and Quick 3D display processing

A target can be quickly measured in real-time 3D display mode

Various measurements can be made on the 3D display.

You can complete measurements directly on the system
during 3D observation.

3D Measurement Function Height Measurement Roughness Measurement

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If the image stitching function is used to create a 3D display, it will be possible to
perform 3D measurement over a large area.

BGA 3D measurement with the conventional field-of-view (500×)

BGA 3D measurement with image stitching

Large high-magnification observation area

3D image stitching World’s first

At lower magnifications, the depth-of-field is very deep, Target focus method World’s first
making 3D display impossible. Technology that performs image stitching in real-time

With regard to 3D construction, it was impossible to display areas of
low magnification with deep depth-of-field in 3D. 3D image stitching
has made it possible to perform 3D construction over a wide viewing
area and targets that conventionally were impossible to produce in 3D
can be observed in 3D. In addition, measurement can also be
performed in the Z direction.
If height data is captured in the initial field-of-view, the focus will be
accurately adjusted though pattern matching, even if the field is
moved freely. This method is essential in order to freely achieve
manual 3D image stitching.
1 Initial field-of-view 2 Shifted field-of-view

High
Full focus
Medium
Low
Set the depth composition range Track focus information based on
acquired height information while
With low-magnification, full-focus images, height information pattern matching is performed
cannot be acquired but at high-magnification, height
information can be acquired by tracking focus.

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 Revolutionising Microscopy Example applications

LSI (2000×) Oxide crystal (300×)

It is possible to check the fluctuation of cathode etchings that are not fully-round With light shift, the borders of layered structures are clearly visible.

Defects on the surface of lead casting (1000×) Micro-pyramid glass array

SCC fractures under high-temperature water on the welded section of stainless steel (50×) Tribology friction test (image stitching)

Observation of a meteorite (image stitching) Observation of a tooth cavity (30×)

Other functions The VHX-7000 can automatically save images based on

Video record/replay & Timer capture function a time setting. Using the LAN function, you can observe
the images being captured by having them sent directly to
your personal computer. The light used for observation is
The VHX-7000 is equipped with a Video record/replay
automatically turned off between image captures, saving the
function that can accurately and completely records
life of the lamp.
chronological changes and subtle movements of the
target. Data can be recorded for up to 50 minutes, at up
to 50 frames per second. You can fast forward, advance
the frame, and capture a still image from the video. Solder separation test (50x)
Further more, the video is recorded as an AVI file that
can be replayed with the VHX-7000 or a computer. Bacterial growth

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A new level of detailed imaging Generate reports immediately and easily

Freedom and flexibility with the console and joystick

The console is designed to help perform observation more quickly and easily. Equipped with a joystick that controls the stage and shortcut buttons for
frequently used functions, the VHX achieves clear observation of any target with just a push of a button. It is possible to adjust the stage and perform
observation just by manipulating the joystick.

Split-screen function &

Save captured images to HDD
comparative observation

The screen can be split into two (horizontally or
vertically) or four sections, enabling comparative
observation. This could be applied to a wide
variety of applications including comparing an
acceptable part to a defective one, or showing a
macro-image and micro-image side-by-side.
The main unit has been equipped with a large-capacity hard disk drive, so images can be
easily recorded on-site just as they are viewed. Our original high-speed filing system ensures
effortless handling of a high-volume of images. File names, titles, organisation names, lenses
and comments can be registered, providing for quick image searches.

Scale of moth
SUPPORTED FILE FORMATS

JPEG

TIFF

WDP
[Windows
Media Photo]

(200×) (500×)

Immediate report preparation on-site OBSERVATION REPORT

Device: KEYENCE VHX-Series

PC mode allows installation of Microsoft Word or Excel onto the microscope unit. You can prepare File name
Grain.tif
reports on-site immediately after observation or image capture.
Captured on
**, **

Date
**, **

Capturing
conditions
Various antivirus software programmes supported Title
Magnification:
500x
Subtitle Lens: VH-Z500
Prepared by

Various antivirus software programmes can also be installed as needed.

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 SAFETY INFORMATION
Please visit: www.keyence.com Please read the instruction manual carefully in
order to safely operate any KEYENCE product.

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The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice. WW11-1039
Company and product names mentioned in this catalogue are either trademarks or registered trademarks of their respective companies. Unauthorised reproduction of this catalogue is strictly prohibited.
Copyright © 2019 KEYENCE CORPORATION. All rights reserved. VHX7000Advncd2-WW-TG-GB 1099-1 600U14