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Journal of Industrial and Engineering Chemistry 14 (2008) 52–59


www.elsevier.com/locate/jiec

Formation and mechanistic study of self-ordered TiO2


nanotubes on Ti substrate
Soon Hyung Kang, Jae-Yup Kim, Hyun Sik Kim, Yung-Eun Sung *
School of Chemical & Biological Engineering & Interdisciplinary Program in Nano Science and Technology,
Seoul National University, Seoul 151-742, Republic of Korea
Received 18 April 2007; accepted 12 June 2007

Abstract
The formation of anatase TiO2 nanotubes by anodic oxidation on a pure titanium substrate in an aqueous solution containing 0.5 wt.% NaF was
investigated. Nanotubes with a length of 3 mm in a nanotubular TiO2 film were obtained in the pH 4.2 electrolyte. In strong acidic solution (pH 1.5),
TiO2 nanotubes of short length were formed due to the fast chemical dissolution rate. In this case, there was no variation of the average pore
diameter and wall thickness of the TiO2 nanotubes. From this experiment, it was again confirmed that the pH value of the electrolyte controls the
thickness of the well-aligned TiO2 nanotubes. A mechanistic study of the formation of the TiO2 nanotubes was performed based on the observation
of the surface morphology (top-view and cross-sectional view) using FE-SEM and the analysis of the current density–time curves. Furthermore, the
morphology of the anodized TiO2 film shows a rough surface and irregular wall thickness, since the anodic reaction was performed in an aqueous
solution containing F ions. The origin of this morphology was dealt with in detail in the FE-SEM study. The crystal structure of the TiO2
nanotubes was confirmed using XRD and Raman analyses.
# 2007 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.

Keywords: Anodic oxidation; Titanium oxide; Nanoporous structure; Nanotube; NaF electrolyte

1. Introduction conditions, such as the applied voltage, electrolyte composi-


tion, the pH of the electrolyte, duration, and magnetic agitation
In the past few years, high surface area and nanoporous TiO2 [16,17]. Especially, the composition of the electrolyte is an
nanotubes have attracted much attention for their potential use important factor during anodization.
in several practical applications requiring an interconnected In earlier research work, titanium oxide with a nanotubular
and large internal surface area, such as photoelectrochemical and porous structure was fabricated via anodic oxidation in an
solar cells [1–3], electrochromic windows [4,5], photocatalyts acidic HF-based electrolyte [18], while, typically, the porous
[6], sensors [7], and Li ion batteries [8]. More recently, titania TiO2 layers were grown only up to a length of about 500 nm.
nanotubes with different sizes and various geometrical shapes This limited growth may be assumed to be due to the fast
were prepared using various physical and chemical synthesis dissolution process of the TiO2 layer rather than the formation
routes such as sol–gel [9], template synthesis [10,11], of a titanium oxide layer by the chemical oxidation process,
hydrothermal process [12–14], and anodization [15]. As an hindering the thickening of the porous layer. Herein, we studied
effective fabrication technology, the electrochemical anodiza- a variety of electrolytes in an attempt to grow longer TiO2
tion process is useful because of its low cost, large area nanotubes, viz. H2SO4/HF-based [19], NaHSO4/KF-based [20],
fabrication, good mechanical adhesion, and electrical con- NaF/Na2SO4-based [21], and organic-based electrolytes [22].
ductivity due to the nanotubes being directly connected to the Recently, the Patrick group reported on the formation of anodic
substrate, while the limited thickness of these anodic TiO2 TiO2 nanotubes in neutral (NH4)2SO4/NH4F aqueous solution
nanotubes must be adjusted by controlling the anodic [23]. In this study, self-ordered TiO2 nanotubes with a high-
aspect ratio and a length of 2.5 mm were formed in a neutral
aqueous solution of NH4F and (NH4)2SO4. The authors
* Corresponding author. Tel.: +82 2 880 1889; fax: +82 2 888 1604. suggested that controlling the pH at both the tip and bottom
E-mail address: ysung@snu.ac.kr (Y.-E. Sung). layer of the tubes is important to grow longer TiO2 nanotubes.
1226-086X/$ – see front matter # 2007 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.
doi:10.1016/j.jiec.2007.06.004
S.H. Kang et al. / Journal of Industrial and Engineering Chemistry 14 (2008) 52–59 53

However, some irregularity in the pore formation process and


an uncertain formation mechanism were reported.
Herein, we obtained high-aspect ratio and self-organized
porous TiO2 nanotubes (3 mm) and conducted a formation and
mechanistic study in a NaF-based electrolyte using a DC power
supply as an applied power source.

2. Experimental

Titanium sheet (99.9% purity, Nikko Metal, Japan) with a


thickness of 0.5 mm was cleaned by sonicating it successively
in acetone, ethanol, and deionized water (DI), for 10 min each,
followed by drying in an air stream. A specimen of the Ti sheet
with a size of 1.5 cm  2 cm was cut and copper wire was
attached to the upper front side of this specimen using
conductive epoxy adhesive. Then, after drying, all areas, except Fig. 1. Current–time response at a constant voltage of 20 V in the pH 4.2
for the actual exposure area of 1 cm2 on the front side, were electrolyte. The sample anodized for 18 h, with the inset showing the magnified
view in the initial stages of anodizing time.
pasted using nonconductive epoxy adhesive on both sides and
dried in the oven. For the electrochemical anodization of the Ti
sheet, we used a DC power supply (ODA technologies,
0120 V) connected to a multimeter interfaced to a controlling anodization (up to 30 s), an abrupt decrease of current was
computer. Constant voltage anodization was carried out using a observed, due to the formation of a barrier layer which induces
two-electrode configuration with a working electrode made of a voltage drop between the working electrode (Ti sheet) and
Ti sheet and a counter electrode made of Pt wire. All electrolyte [24]. In the second step (from 30 to 45 s), a sudden
experiments were conducted at room temperature, viz. 23 8C, increase of current was observed due to the active chemical
and an applied voltage of 20 V. The distance between the anode dissolution reaction of the suddenly formed oxide layer induced
and cathode was kept at about 3 cm. Various experiments were by F ions from the electrolyte, leading to the formation of a
conducted, in which the anodizing time was varied for the porous structure. In the third step (after 45 s), a relatively
mechanistic study. As the electrolyte for the electrochemical constant equilibrium state was maintained with increasing the
anodic reaction, we used a mixture of 0.5 M Na2SO4, 0.5 M anodizing time, while the current density slightly increased,
H3PO4, 0.2 M sodium citrate, and 0.5 wt.% NaF solution and showing an oscillation curve. The previously reported reaction
the pH was adjusted to between 1.5 and 5 by adding NaOH scheme includes an abrupt decrease of current in the initial
reagent. The electrolyte was stirred continuously at 150 rpm stage of anodization, followed by a gradual increase of the
using a magnetic stirrer. The anodized samples with a porous current density and then a decrease of the current density up to
structure were washed and sonicated in DI water for 5 min to the final stage [25]. However, in the present experiment, the
remove the remnants on the surface and then blown dry in an air anodic current during anodization kept increasing slowly, while
stream. In order to improve the crystalline properties and the anodic reaction was maintained at the equilibrium state
remove the remnants or barrier oxide layer after the anodic between the chemical dissolution process and chemical
reaction, the as-anodized samples were annealed at 500 8C for oxidation process. This result may be attributed to the remnant
2 h under air ambient. of the anodic reaction, [(TiF6)2], and the decrease in the length
The thickness and morphology of the anodic TiO2 nanotubes of the barrier layers. Moreover, the anodic current in the overall
were confirmed by means of a JSM-6330F field emission reaction steadily increased. The related mechanistic process for
scanning electron microscope (FE-SEM, JEOL, Inc.) operating the formation of self-ordered titanium oxide has been
at 10 kV. The surface composition of the samples was analyzed previously reported [26].
using energy dispersive spectroscopy (EDS). The crystalline
phase and structure were analyzed using high-power X-ray Ti þ 2H2 O ! TiO2 þ 4Hþ ðhydrolysisoftitaniumÞ (1)
diffraction (Rigaku D/MAX 2500 V diffractor) with Cu Ka
radiation at 40 kV and 100 mA. Raman spectroscopy was TiO2 þ 6HF ! ½TiF6 2 þ 2H2 O þ 2Hþ
conducted at room temperature using a Jobin Yvon Model ðdissolution of TiO2 to form the poresÞ (2)
(LabRam HR) Raman spectrometer from France equipped with
a CCD detector. The 632 nm radiation from a He–Ne laser was The above two reactions proceed alternatively in the overall
used as the excitation source. reaction. The hydrolysis of Ti and the dissolution of TiO2 lead
to an increase in the pH value due to the large quantity of H+
3. Results and discussion ions that are released. The variation of the pH value is about
0.05 in the pH 4.2 electrolyte and about 0.08 in the pH 4.8
Fig. 1 shows the current density as a function of the electrolyte (not shown here). After 1 min of anodization, the pH
anodization time in intervals of 60 s. In the initial step of value oscillated in the range of 0.03. This means that proton
54 S.H. Kang et al. / Journal of Industrial and Engineering Chemistry 14 (2008) 52–59

Fig. 2. FE-SEM images showing the formation of highly ordered TiO2 nanotubes based on the aqueous electrolyte (0.5 wt.% NaF + 0.5 M H3PO4 + 0.5 M
Na2SO4 + 0.2 M sodium citrate) with the pH adjusted to 4.2 by NaOH reagent. (a) Top-view, (b) cross-sectional view, and the inset of (a) displays the bottom view of
TiO2 nanotubes.

ions were suddenly released, influencing the pH value, reported that the thickness of anodic TiO2 nanotubes depends
following which the pH immediately returned to its original on the chemical dissolution rate of the TiO2 layer, which is
value. After that, the pH value is dependent on the progression related to the pH value of the electrolyte [23,30]. In this
of the anodic reaction. The Patrick group [23] previously experiment, similar findings were observed. It is evident that
reported that they obtained the desired pH profile, which highly ordered nanotubes were produced, while no discernible
involves lower pH values at the pore tip and higher pH values at variation in the nanotube dimensions (average pore diameter of
the pore mouth. Furthermore, they suggested that the key to 110 nm (20 nm) and average wall thickness of 20 nm
achieve longer TiO2 nanotubes is to control the dissolution rate (5 nm)) was observed, except for the increase of the surface
of TiO2, which is highly dependent on the pH value. For the roughness with increasing pH value in the electrolyte. This may
growth of high-aspect ratio TiO2 nanotubes, we observed that be due to the fact that the slower chemical dissolution rate of the
controlling the pH is important, as described in more detail anodic reaction leads to the predominant formation of straight-
below. line nanotubes in the more stable sites, resulting in a rough
Fig. 2 shows the FE-SEM images of the nanotubes in the surface morphology, as compared with that of the nanotubes
electrolyte consisting of 0.5 wt.% NaF + 0.5 M Na2SO4 + produced by the fast chemical dissolution process which brings
0.5 M H3PO4 + 0.2 M sodium citrate (pH 4.2) whose pH value about the formation of a uniform surface morphology because
was adjusted using NaOH reagent. The applied bias was 20 V there is insufficient time for the nanotubes to search for more
for 18 h. No magnetic agitation was conducted. Highly ordered stable sites [31]. The length of the grown TiO2 nanotubes is
TiO2 nanotubes with a porous structure were obtained with an dependent on the pH value of the electrolyte. The length of the
average diameter of 110 nm (20 nm) and a wall thickness of nanotubular layer gradually increases with increasing pH, being
20 nm (5 nm) and a somewhat rough surface, as shown in 1, 1.5, 2.6, and 3 mm in the pH 1, 3, 4.2, and 5 solutions,
Fig. 2(a), meaning that a morphology consisting of longer respectively. In the strongly acidic electrolyte, there are enough
grown TiO2 nanotubes and shorter grown TiO2 nanotubes was H+ ions to increase the chemical dissolution rate of thin
observed. The length of the grown TiO2 nanotubes is about titanium oxide layer formed on the pore bottom. If the chemical
2.6 mm (Fig. 2b), as measured from the cross-sectional SEM dissolution reaction is dominant, it limits the growth of the
images for a TiO2 nanotube separated from the Ti substrate nanotubular TiO2 layer, because the anodic electrolyte
after bending the flexible Ti substrate. The self-ordered TiO2 containing F ions directly connects to the bare Ti substrate,
nanotubes were tightly connected to each other forming TiO2 instead of the titanium oxide layer, which terminates the anodic
ridges at constant intervals, which were caused by the reaction. On the other hand, in the weakly acidic electrolyte, the
periodical current oscillations whose amplitude and period chemical dissolution rate is retarded, due to the decreased
decreased with increasing anodizing time and the distance quantity of H+ ions by the Eq. (2), and is accompanied by a
between the ridges on the side wall was estimated based on the slight increase in the rate of the chemical oxidation reaction so
units of time from the current–time curves [27,28]. Moreover, as to form more thick anodic TiO2 nanotubes. In this condition,
these interconnected TiO2 ridges play an important role in thicker TiO2 nanotubes were grown. Above pH 5, thick TiO2
transporting the photoinjected electrons to the electron layers with densely connected nanoparticles were grown,
collector (Ti substrate) in dye-sensitized solar cells. This instead of self-ordered TiO2 nanotubes. In this case, the surface
illustrates the possible application of the grown TiO2 nanotubes morphology shows a dendrite structure which is formed due to
resulting from the anodic reaction in photovoltaic cells. It is the limited ion concentrations [32]. These limited ion
also clear that the pore mouths are open at the top of the layer, concentrations are influenced by the ion concentration of the
while the pore bottoms are closed, a result which is similar to electrolyte and duration of anodization. The reduced amount of
the previously reported anodic bottom layer [29]. H+ ions at the pore bottom degrades the chemical dissolution
The evolution of the top-view and cross-sectional view of rate and causes the formation of a thick and compact TiO2 layer
the TiO2 nanotubes anodized at different pH values of the with dendrite-shaped surface morphology. All of the grown
electrolyte is shown in Fig. 3(a) and (d). Several groups already TiO2 nanotubes were interconnected, except for those grown in
S.H. Kang et al. / Journal of Industrial and Engineering Chemistry 14 (2008) 52–59 55

Fig. 3. SEM top-view and cross-sectional view of TiO2 nanotubes for various pH values of the electrolyte adjusted by NaOH reagent. The composition of all of the
electrolytes is identical. (a) pH 1.5, (b) pH 3, (c) pH 4.2, and (d) pH 5.

the pH 5 solution, and kept the constant strain among them to SEM, the length of each TiO2 nanotube is somewhat different.
impede the formation of the exceptionally dominant grown This will be discussed in more detail in the next section.
TiO2 nanotube which leans to downward direction and limits To investigate the mechanistic process of the anodic
the thickness of TiO2 nanotubes. In the magnified image of reaction, samples were taken out from the electrolyte at
56 S.H. Kang et al. / Journal of Industrial and Engineering Chemistry 14 (2008) 52–59

Fig. 4. SEM top-views and cross-sectional views of samples anodized for various anodizing times in the study of the mechanism of formation of the porous TiO2
nanotubes in the aqueous electrolyte with pH 4.2. Additionally, an EDS analysis was conducted to investigate the composition of the nanotubes at designated points.

various times during the anodic reaction. Especially, for the reaction coincides with the time that the anodic current reaches
analysis of the formation of the barrier oxide layer and the a minimum value in the current density–time curve. This proves
occurrence of the chemical dissolution reaction, SEM studies, that the titanium oxide layer is formed by the chemical
shown in Fig. 4, are required to determine the mechanism of the oxidation reaction, resulting in the decrease of anodic current.
initial formation of porous TiO2 nanotubes. Initially, the Ti In the case of the sample anodized for 90 s, the thickness of the
substrate is smooth, but has some large particles which may barrier oxide layer is estimated to be about 100 nm. The
ultimately induce a rough surface. After 10 s of anodization, formation of a thick oxide layer is encouraged due to the large
semicircle-shaped oxide layers with various sizes were amount of Ti ion dissolution resulting from the fast scan to 20 V
randomly distributed on the Ti substrate. The formation of (about 3 s). This fast scan leads to the formation of bulky
several grooves in the upper part of the oxide layer can be titanium oxide layers at random positions. The grown TiO2 film
observed. This may be attributed to the tensions applied to the with considerable thickness is compact and round-shaped holes
surface by the oxide layer before its detachment. The initially were regularly observed on the substrate. Before this point, the
formed upper layers were composed of titanium (78.22%), anodic current greatly increases due to the formation of pores at
oxygen (16.12%), carbon (4.89%), and sulfur (0.77%) the breakdown sites and then decreases to reach the equilibrium
according to the EDS analysis. This result confirms that state. The breakdown sites were assumed to be the interface
titanium oxide was preferentially formed and that additional spaces between the amorphous TiO2 nanoparticles, which were
components (carbon and sulfur) from the supporting electrolyte regarded as being the most unstable sites and easy pathways for
contribute to the formation of a round-shaped titanium oxide the penetration of the ions from electrolyte [33]. After this
layer. The surface morphology of the anodized sample taken point, the pores for the nanotubes are continuously grown under
after 30 s shows somewhat different properties. The round- the equilibrium state in the current density–time curve.
shaped titanium oxide layers become huge and the formation of From this point up to 20 min of anodization, the favorable
many grooves is observed. In addition, in the curvature at the chemical oxidation reaction proceeded, resulting in the
edge of the oxide, the higher dissolution rate may be caused by formation of a thick oxide layer. After 30 min of anodization,
the increased electric field. This influences the surface the chemical dissolution reaction starts to increase due to the
morphology of the TiO2 nanotubes, with the result that some formation of round-shaped holes on both sides (semicircle-
cracked parts still remain after the formation of the TiO2 shaped oxide layer and plain surface region). Then, the growth
nanotubes. In other parts (at the plain surface) of the sample, of the pores is accelerated and the oxide layer which acts as a
pore formation was initiated due to the chemical dissolution barrier layer shows rough and porous properties. Rugged
process induced by F ions. This part of the surface is cracking between the thick oxide layers whose length is on the
composed of a compact oxide layer which plays the role of a micrometer-scale is observed from the SEM images. After 3 h
barrier layer to electrolyte diffusion and is comprised of of anodization, the re-precipitator and grown barrier oxide layer
amorphous TiO2 nanoparticles. This stage in the anodic remained on the surface. In addition, the area of the bulky oxide
S.H. Kang et al. / Journal of Industrial and Engineering Chemistry 14 (2008) 52–59 57

Fig. 5. SEM top-view and cross-sectional view of samples anodized under magnetic agitation to overcome the problem of limited diffusion of ions from the
electrolyte.

layer became smaller and smaller. The oxide layer prevents the reactions is maintained [34]. After this step, the growth rate of
migration of OH ions from the electrolyte to the metal/oxide the TiO2 nanotubes is gradually decreased due to the limitation
interface, giving rise to the growth of the barrier oxide layer on of the ion concentration of the electrolyte (as confirmed through
the surface of Ti substrate, and that of the [TiF6]2 ions the grown length of TiO2 nanotubes by the cross-sectional FE-
remaining from the reaction from the metal/oxide interface to SEM images). That is, the growth rate of TiO2 nanotube is
the electrolyte, thereby blocking the diffusion of the ions in the different in accordance with the anodizing time. As a result, the
electrolyte. From the EDS measurement, the composition of length of the totally grown TiO2 nanotubes is 2.6 mm. Herein,
barrier oxide layer consisted of titanium (52.96%), oxygen magnetic agitation was conducted in the electrolyte to resolve
(39.55%), carbon (1.07%), and fluorine (5.39%). The limited diffusion of electrolyte. The result is shown in Fig. 5.
composition of the open surface without the barrier oxide Longer and well-aligned TiO2 nanotubes with a length of
layer (spectrum 2) is titanium (71.33%), oxygen (22.99%), 3.2 mm were obtained after the diffusion problem of ions in the
carbon (0.9%), and fluorine (4.79%), wherein the atomic electrolyte due to the barrier layer was so cleared up.
percentages of the F ions related precipitates of the anodic A schematic representation of the growth mechanism is
reaction are quantitatively decreased. This result means that the shown in Fig. 6 which shows the curves of the current density as
bulky formed oxide layer on the surface plays the role of a a function of the duration and the SEM images. The states of the
barrier layer. After the anodic reaction has proceeded for 3 h, titanium substrate and electrolyte before biasing are shown in
the length of the TiO2 nanotubes is about 1.7 mm, showing fast Fig. 6(a). As soon as the voltage is biased on the titanium
initial growth. At this point, the equilibrium state of substrate (Fig. 6b), a large quantity of OH ions and various
alternatively processed chemical dissolution and oxidation other ions (SO42 and C6H5O73) form a barrier oxide layer,

Fig. 6. Schematic diagrams which explain the formation process of the TiO2 nanotube layer. (a) Before biasing on the titanium substrate; (b) immediately after
applying biasing to the titanium substrate, resulting in the formation of a barrier oxide layer; (c) the favorable reaction of chemical oxidation, corresponding to the
slow chemical dissolution process at the designated sites; (d) the formation of a thick oxide layer and growth of the TiO2 nanotubes; (e) the favorable chemical
dissolution process required to grow the TiO2 nanotubes, showing a decrease in the area of the barrier oxide layer covering the surface area.
58 S.H. Kang et al. / Journal of Industrial and Engineering Chemistry 14 (2008) 52–59

including several components at random positions, according to


Eq. (1). At the same time, a partially round-shaped oxide layer
is formed on the Ti substrate. It is apparent that the oxide layer
is composed of interconnected nanoparticles, as observed in the
enlarged view of the SEM images (Fig. 4; 90 s). Up to about
30 min of anodization, the predominant formation of the oxide
layer is maintained, resulting in the formation of a thick oxide
layer along with a slow chemical dissolution process. When
anodization continues, the chemical dissolution process
actively proceeds according to Eq. (2). The sites designated
with arrows are based on the formation of pores. That is, the
electrolyte containing F ions is apt to attack the interfacial
space, which allows the ions of the electrolyte to easily
penetrate into the interface and form pores. Furthermore,
round-shaped holes were also formed in the semicircle-shaped
oxide layer, causing the breakdown of the thick oxide layer.
These breakdown sites cause a local increase in the current Fig. 8. Raman spectra of TiO2 nanotubes in electrolytes with various pH values
transient and accelerate the growth of the TiO2 nanotubes. (1.5, 3, and 4.2).
In the final anodic reaction, a periodical current fluctuation
was observed, indicating the alternative creation of and
breakdown of the oxides and the passivation of the breakdown TiO2 nanotubes, an amorphous structure with no crystalline
sites. This presents the possibility of small pores being phase was exhibited. Only peaks related to the titanium
generated in the thin titanium oxide layer formed on the bottom substrate were observed. In the case of the thermally treated
of the tubes. In addition, the precipitators of the anodic reaction nanotubes, however, all of the peaks which represent the
and barrier oxide layer were still left on the surface underneath formation of TiO2 phases showed good agreement with anatase
which the TiO2 nanotubes continued to grow. The barrier oxide phases with (1 0 1), (0 0 4), (2 0 0), and (1 0 5) (2 1 1)
layer increasingly disappeared as the anodic reaction con- orientations and high crystalline properties. Furthermore, as
tinued. After the completion of the anodic reaction, surface the thickness of the TiO2 nanotubes increased with increasing
remnants were hardly observed. Finally, the annealed sample pH value of the electrolyte, the intensity of the peak for the
showed a neat and clean surface morphology. It has been main (1 0 1) plane of TiO2 nanotube is increased. Additionally,
reported that the TiO2 nanotubes formed in aqueous electro- no peak shift was observed as a function of the pH value. To
lytes show a rough surface and irregular wall structure, which confirm the formation of the TiO2 layer, Raman spectroscopy
prevents their use as templates, photonic crystals, photovoltaic was performed. Fig. 8 shows the spectra of the TiO2 nanotubes
cells, and photocatalysts [35]. for various pH values of the electrolyte. Useful information was
The crystal structure of the samples depending on the pH obtained from the Raman spectra, such as the structure,
value of the electrolyte was identified with X-ray diffraction composition, and crystallinity, using the molecular vibration
(XRD) and is shown in Fig. 7. In the case of the as-anodized modes. It is known that TiO2 compound produces a six or four
transition spectrum for the anatase and rutile phases,
respectively [36]. Also, the Raman active mode of anatase is
A1g (519 cm1), B1g (399 and 519 cm1), and Eg (144, 197, and
639 cm1), and the Raman active mode of rutile is A1g
(612cm1), B1g (143 cm1), B2g (826 cm1), and Eg
(447 cm1). In the case of the anodized TiO2 nanotubes, the
typical peaks corresponding to the anatase phases were
obtained. When the pH value of the electrolyte was increased,
the peaks of the anatase phases were intensified, which is
ascribed to the increased thickness of the nanoporous TiO2
nanotubes [37]. The long and well-aligned TiO2 layer shows a
crystal structure consisting of anatase phases, as confirmed by
the XRD and Raman analyses.

4. Conclusions

In summary, we produced self-ordered and highly crystal-


Fig. 7. High-power XRD pattern of nanotubular TiO2 layer (a) Ti substrate, as- line TiO2 nanotubes by anodic oxidation by controlling the pH
anodized TiO2 nanotube, and annealed TiO2 nanotubes obtained after anodiza- value of the electrolyte. In the strongly acidic electrolyte, the
tion in electrolytes with pH 1.5, 3, and 4.2. fast chemical dissolution rate restricts the growth of the TiO2
S.H. Kang et al. / Journal of Industrial and Engineering Chemistry 14 (2008) 52–59 59

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