Hyper-Edge Computing and Machine Learning for Testing of

Advanced Semiconductor Products and Technologies

May 2022
TISES
Sunil Banwari
VP, Advantest America Inc

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Advantest at a Glance

A global leader in the ATE Our nanotechnology products Our diverse workforce Eco-friendly policies
industry with a WW installed support leading-edge includes 5,500 employees emphasize reduction of
base of over 30,000 systems semiconductor processes at from 50 countries our carbon footprint
the 1Xnm node

60+
2018 Global Technology Leader Innovating in the measurement arena A VLSIresearch 10 BEST supplier
by Thomson Reuters for 60+ years for 32 consecutive years
#1 BEST supplier for 2020 & 2021
Horizontally Integrate Semiconductor Production Test
Semiconductor Test Ecosystem

Post Wafer Wafer Final Burn-in System

Silicon Acceptance Sort Test Level
Validation Testing Test

The Test Ecosystem is Highly Complex and Sophisticated

• Multiple test insertions, each with its own set of challenges
• Global test supply chain with massive automation
• KGD (Known Good Die), SoCs (System On a Chip), SiPs (System in Package)
• 3D packaging and stacked-die, Chiplets
• Extreme thermal
Semiconductor Test Value Chain Too Complex to Optimize with Point Solutions
Today we have many Siloed Data Solutions
 We know what a little data can do.
The Billion Dollar Question Is:
What can Big Data do for Semiconductor
Manufacturing and Design?

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Big Data and AI Use-Cases in Semiconductor Test
What can the Semiconductor Ecosystem do with Fully Integrated Work-Flows

Today
Mobile Manufacturers
Savings Estimate
USD $30.3M / Year
Future
Adaptive Test
Rebalancing
Big Data and AI Use-Cases in Semiconductor Test
What can the Semiconductor Ecosystem do with Fully Integrated Work-Flows

Today
Mobile Manufacturers
Savings Estimate
USD ~$880M / Year
Future
Root-C Analysis

This Photo by Unknown Author is licensed under CC BY-NC

ACS Edge Server and ACS Solution Store
ACS Solution Store Critical features
• Real-time compute (millisecond delays)
• Protect customer data and analysis IP
• Reliable and resilient software/analytics environment
• Analytics decoupled from test program source
• Open solutions ecosystem to be released July 1st

Implementation
• X86 server with optional GPU accelerator
Cloud with • 10 GB dedicated encrypted ethernet link
on-prem copy
• Open Container Initiative (OCI) docker containers for customer
analytics
• Container Hub for management and deployment of analytics
workloads
• Simple integration with SmarTest 7, SmarTest 8
• APIs integrated with ATE datalog for debug support
• Multiple ecosystem partners lined up for launch
ACS Solution Store: Open Solutions Ecosystem
URL: acs.advantest.com/store/ACSEdgeApps will go live July 1st 2022
HOME STORE PUBLISH COMPANY SUPPORT CONTACT US

Apps for ACS Edge

ACS Edge Enabled ACS Edge Enabled ACS Edge Enabled

ACS Edge Enabled ACS Edge Enabled
Real-time Real-time Statistical Process
Adaptive Test DPAT
Outlier Detection Statistical Rules Control (SPC)
Dynamic test flow s based on PAT (univariate outlier detection), Dynamic Part Average Test, Carry out real-time statistics of mass
test process control rules Adjacent Rank Delta, Interpercentile Detect statistically based compliant to AEC-Q001 production data and perform
(test more and test less) Range, Single Regression Residual drifts/changes during test (WS, FT) production control action according
to SPC rules
Details Get Details Get Details Get Details Get Details Get

Proteus Edge™ Proteus Edge™ Proteus Edge™

Process Binning Inferred Process Personalized
per Device Parameters Outlier Detection
Accurately quantifying where each
Inferring process parameters (ldsat, Comparing actual lddq w ith
chip (or sub-chip) is located w ithin
loff, Vt) per chip (extended WAT) predicted lddq per chip
the process distribution

Details Get Details Get Details Get

ACS Edge Success Stories
Large Fabless
• Large fabless complex digital SoC customer who uses
ACS Edge for complex machine learning inferences for
parametric predictions.
• Initial validation & PoC on lab-based systems in ~2
months
• Successful roll-out at top OSAT for >1yr and ramping
multiple products at multiple OSAT’s.
• Initial cost savings estimate due to improved yield >
$100M+.

Two other major digital SoC fabless

• GPU accelerated ACS Edge version on open container
standard (Dockers)
• Fabless1: Initial validation & PoC phase at Engineering
Lab.
• Fabless2: One system each at two continents and now
in POC phase.
• Deployments completed, in process
– Three major OSAT facilities
– Multiple fabless engineering sites
– Two sites at large IDM
Advantest’s Open Solutions Ecosystem Vision

Advantest Cloud Solutions™ (ACS) – Open Solutions Ecosystem

ACS Products & Services Customer Applications Third Party Applications
ACS TE-Cloud ACS DPT Customer App 1
ACS EM360 Third Party App 1 ACS … Party App 2
Third

Control
Control

Control
Control
Control

Data
Data

Data
Data
Data

ACS Technology Platform

Data Data Data Data Data Data

ACS Edge
Control

Control

Control

Control

Control

Control

Control

Control
Data

Data

Data

Data

Data

Data

Data

Data
PSV WAT WS FT Burn-in SLT
Challenges of Machine Learning
https://blogs.gartner.com/andrew_white/2019/01/03/our-top-data-and-analytics-
predicts-for-2019/

According to a recent Gartner report, only between 15% and 20%

of data science projects get completed.
If these figures are
accurate, then this would
amount to an astonishing
2% success rate.

Of those projects that did complete, CEOs say that only

about 8% of them generate value.

ACS supports our customers in shaping the success of their Data Analytics journey !
A Machine-Learning Lifecycle powered by ACS
ACS supports an Industry-ready ML Lifecycle to bring Data Science to Silicon Life Cycle

• Data Science Part

• Training of Models
• Visual Exploration
• Use-case specific implementations
• Clean data Availability 1 2 • Partner/ACS-developed Apps
• Assess Potentials Problem Data Science • Yield/Quality Improvement
Exploration & & Machine • Test Capacity Optimization
Understanding Learning • Design-mfg closed loop
• Customer Applications

• Constant effectiveness monitoring Monitoring & Deployment & • Secure Test Floor Integration
• Detect environmental changes Validation Execution • Traceable Deployments
• Process Variations • High-performance execution
• Test Setup
4 3 • Ease of use
• Device Changes

ACS Edge
Start-Ups / Niche Players / Industry
Peers / EDA Vendors
Advantest Cloud Solutions – Wait there’s more !
ACS TE-Cloud - Integrated Test Program Development
• Product in-situ remote debug and development
• Test program remote debug and development

AI-Based Pre-Silicon Verification

• Visualize n-dimensional shmoos, fully automatically in a simple to use cloud-based environment.
• Gain access to highly sophisticated machine learning models for characterization and tuning tasks.
TE-Cloud
ECOTS – Integrated Test Cell Management
• A configurable production tool for effective high-volume manufacturing.
• Correlate equipment data with test results for unique, in-depth root cause analysis & predictive maintenance

Dynamic Parametric Testing – In-Situ Test Outlier Response

• Dynamically react to test-results within milliseconds on the V93000/SMU8 parametric tester.
• Forecast functional test yields using your parametric data and thus gain insight into yields weeks before final test.

PDF Solutions Exensio: Manufacturing Analytics and Test/Assembly Ops

• Utilize the full power of PDF predeveloped algorithms and AI advisors to achieve faster time-to-yield reliably.
• Realize the production ready power of a fully integrated data management solution that works across the entire supply chain.
 New Directions in PSV
Manages Complexities of Post-Silicon Validation

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Complexity Demands New PSV Methodology
Complexities: Design performance & modes, process, IP blocks, global teams
PSV must ensure that (physical) chip & FW meet all specifications after tuning under all operating
conditions & modes with sufficient yield.

Today‘s PSV relies on expert knowledge / assumptions. Shmoos scan expected dependencies.

Challenges
• Process variations, design complexity and black-box IP blocks lead to unexpected, hard to debug
problems under peculiar conditions
• Schedule pressure
• Increasing quality expectations
• Complex collaboration between global teams
• Tuning becomes too complex
• Experts are sparse
AI-based PSV Manages Complexities of Post Silicon Validation
For RF / mixed-signal / HSIO / PLL, system-level digital, ...

• Automate tedious tasks

• Faster insight / debug
TTM • Efficient communication
Share Generate

Auto- • Comprehensive, quantified

mate coverage
Tune Quality
Visualize Analyze

• AI-based tuning improves

yield or performance / power
Debug consumption
Yield

Integrated workflow automation based on data-driven, AI-powered PSV methodology

ACS AI-based PSV Methodology
Parameterized test program
Voltages Measurements • Vary everything, measure everything
Registers Device Status • Validates chip + FW + test program
Ext. Instrum Sensors
Gen
... Parameterized ... Quality through black-box coverage
Test program • No assumptions → Constrained random tests
• Coverage metrics

Data base Self-learning device exploration loop

Relate inputs to outputs

Machine Learning • Create model
Analysis • Identify important influences
• Debugging & tuning tools

Interactive post-processing analysis

• Based on comprehensive data
• Generate more data from within plots
Ensure Quality With the Help of Coverage Reports
System-level coverage
• Fraction of covered value combinations
• For any pair / triple / ... of quantized
variables

Empirical studies show that most problems

depend on 3 variables or less.
[Kuhn: Introduction to Combinatorial Testing, 2013]

Fill coverage gaps with targeted test cases

automatically.
Self-Exploration Collects Relevant Data Faster

Dynamically add most informative test cases Fewer test cases than random tests for same
based on already gathered data. understanding about DUT.

Random sampling
Self-Exploration

Prediction error
Self-Learning
DUT
Device Exploration

Number of test cases

Variable Selection - Key Feature to Gain Understanding
For a given target variable Automatically plots target variable vs found
... and a (long) list of candidate variables most influential variable subset.
... find the most influential variable subset.

Returns ranked list of variable subsets

No need to examine hundreds of plots.

Interactively Run Tests from within Plots
A New Level of Interactivity
Learn more about specific region to ...
• Increase coverage.
• Reduce uncertainty
• Verify repeatability.

Select range of interest.

Additional test cases are executed.

Plots are updated with new results.

Key Value Propositions
Yield Improvement1 Time To Market in days2 Device Power
100% 45 Consumption /
99% 40
Performance
10
98% 35 9
97% 8
30
96% 7
2-3% Yield 25
6
95% 80 % plus
Gain 20 5
94%
TTM reduction
4
15 In Private Beta
93% 3
10 2
92%

5 1
91%
0
90% 0 Bench SmartInsight SmartInsight
Bench SmartInsight Bench SmartInsight per Design per Part
Yield Min Max Series 1 Series 2 Series 3

1 Validation on sample runs of n=100 devices

2 As reported by customer, assumes familiarity w ith ATE
Thank You