Professional Documents
Culture Documents
10 NM
10 NM
10 NM
)LQ)(77UDQVLVWRUV6HOI$OLJQHG4XDG3DWWHUQLQJ&RQWDFWRYHU$FWLYH*DWHDQG&REDOW
/RFDO,QWHUFRQQHFWV
&$XWK$$OL\DUXNXQMX0 $VRUR'%HUJVWURP9%KDJZDW-%LUGVDOO1%LVQLN0%XHKOHU9&KLNDUPDQH*'LQJ4)X+*RPH]
:+DQ'+DQNHQ0+DUDQ0+DWWHQGRUI5+HXVVQHU++LUDPDWVX%+R6-DORYLDU,-LQ6-RVKL6.LUE\6.RVDUDMX
+.RWKDUL*/HDWKHUPDQ
./HH-/HLE$0DGKDYDQ.0DUOD+0H\HU70XOH&3DUNHU63DUWKDVDUDWK\&3HOWR/3LSHV
,3RVW03ULQFH$5DKPDQ
65DMDPDQL$6DKD-'DFXQD6DQWRV
06KDUPD96KDUPD-6KLQ36LQKD36PLWK
06SULQNOH$6W$PRXU&6WDXV56XUL'7RZQHU$7ULSDWKL$7XUD&:DUG$<HRK
/RJLF7HFKQRORJ\'HYHORSPHQW
4XDOLW\DQG5HOLDELOLW\(QJLQHHULQJ,QWHO&RUSRUDWLRQ
&RQWDFWHPDLOFKULVDXWK#LQWHOFRP
DQG PHWDO SLWFKHV RI QP ZLWK QP LPPHUVLRQ
$%675$&7
OLWKRJUDSK\ 6FDOLQJ RI GHQVLW\ FULWLFDO LQWHUFRQQHFW OD\HUV LV
$ QP ORJLF WHFKQRORJ\ XVLQJ UGJHQHUDWLRQ )LQ)(7 XSWR[YVWKHWUDGLWLRQDO[
WUDQVLVWRUV ZLWK 6HOI$OLJQHG 4XDG 3DWWHUQLQJ 6$43 IRU
7RPD[LPL]HWKHGHQVLW\VFDOLQJDWWKHQPJHQHUDWLRQ
FULWLFDO SDWWHUQLQJ OD\HUV DQG FREDOW ORFDO LQWHUFRQQHFWV DW
VHYHUDODGGLWLRQDODUFKLWHFWXUHIHDWXUHVKDYHEHHQDGGHG7KH
WKUHHORFDOLQWHUFRQQHFWOD\HUVLVGHVFULEHG)RUKLJKGHQVLW\
ILUVW HOLPLQDWHV WKH GXPP\ JDWH WKDW KDV EHHQ SUHVHQW DW WKH
D QRYHO VHOIDOLJQHG FRQWDFW RYHU DFWLYH JDWH SURFHVV DQG
FHOO ERXQGDULHV %\ LQWURGXFLQJ D PLQLPXP LVRODWLRQ VWHS DW
HOLPLQDWLRQ RI WKH GXPP\ JDWH DW FHOO ERXQGDULHV DUH
WKHERXQGDU\WKHWZRQHLJKERULQJFHOOWUDQVLVWRUVDUHLVRODWHG
LQWURGXFHG7KHWUDQVLVWRUVIHDWXUHUHFWDQJXODUILQVZLWKQP
E\WKHZLGWKRIDVLQJOHJDWH)LJ
ILQ ZLGWK DQG QP ILQ KHLJKW WK JHQHUDWLRQ KLJKN PHWDO
JDWH DQG WKJHQHUDWLRQ VWUDLQHG VLOLFRQ )RXU RU VL[ 7KH QH[W IHDWXUH LV WR SODFH WKH FRQWDFW WR WKH JDWH RYHU
ZRUNIXQFWLRQ PHWDO VWDFNV DUH XVHG WR HQDEOH XQGRSHG ILQV WKH DFWLYH DUHD RI WKH GHYLFH )LJ 7KLV LPSURYHV WKH
IRU ORZ 9W VWDQGDUG 9W DQG RSWLRQDO KLJK 9W GHYLFHV GHQVLW\ E\ HOLPLQDWLQJ WKH QHHG WR H[WHQG WKH JDWH RYHU WKH
,QWHUFRQQHFWV IHDWXUH PHWDO OD\HUV ZLWK XOWUDORZN LVRODWLRQWRPDNHWKHFRQWDFW
GLHOHFWULFV WKURXJKRXW WKH LQWHUFRQQHFW VWDFN 7KH KLJKHVW
,Q RUGHU WR SODFH WKH JDWH FRQWDFW RYHU WKH DFWLYH DUHD
GULYHFXUUHQWVZLWKWKHKLJKHVWFHOOGHQVLWLHVDUHUHSRUWHGIRUD
ERWKWKHGLIIXVLRQFRQWDFWDQGJDWHFRQWDFWVDUHIRUPHGZLWKD
QPWHFKQRORJ\
QRYHO VHOIDOLJQHG FRQWDFW SURFHVV )LJ 6HOIDOLJQHG
,1752'8&7,21 GLIIXVLRQ FRQWDFWV KDYH EHHQ XVHG LQ KLJK YROXPH
PDQXIDFWXULQJ VLQFH WKHQP JHQHUDWLRQWRHQDEOH WKHWLJKW
,Q WKH SDVW GHFDGH LQQRYDWLRQV LQ WUDQVLVWRU DUFKLWHFWXUH
FRQWDFW WR JDWH RYHUOD\ UHTXLUHPHQWV 6HOIDOLJQHG GLIIXVLRQ
KDYHDFFHOHUDWHGWUDQVLVWRUSHUIRUPDQFHIURPWKHLQWURGXFWLRQ
FRQWDFWV DUH IRUPHG E\ UHFHVVLQJ WKH JDWH PHWDO DQG WKHQ
RI VWUDLQHG VLOLFRQ >@ WR KLJKNPHWDOJDWH >@ WR WKH
GHSRVLWLQJ D VLOLFRQ QLWULGH HWFKVWRS RQ WRS RI WKH PHWDO WR
LQWURGXFWLRQ RI PXOWLJDWH )LQ)(7 GHYLFHV >@ 'HVSLWH WKH
SUHYHQWWKHGLIIXVLRQFRQWDFWIURPVKRUWLQJWRWKHJDWH:LWK
VORZLQJRIOLWKRJUDSK\VFDOLQJWUDQVLVWRUGHQVLW\VFDOLQJKDV
WKLVWHFKQRORJ\DQDGGLWLRQDOUHFHVVRIWKHGLIIXVLRQFRQWDFWLV
accelerated in Intel’s 14nm [4] and 10nm technologies 7KH
DGGHG DQG D VLOLFRQ FDUELGH HWFKVWRS OD\HU LV GHSRVLWHG WR
WUDGLWLRQDO QRGH QRWDWLRQ KDV ORVW LWV DELOLW\ WR DGHTXDWHO\
SUHYHQW WKH JDWH FRQWDFW IURP VKRUWLQJ WR WKH GLIIXVLRQ
PHDVXUH WKH WUDQVLVWRU GHQVLW\ EHQHILW EHWZHHQ WHFKQRORJLHV
FRQWDFW
%\XVLQJDWUDQVLVWRUGHQVLW\PHWULFWKDWFRPELQHVWKH1$1'
DQG VFDQ IOLSIORS GHQVLWLHV )LJ WKH DFFHOHUDWLRQ LQ :LWKWKHDJJUHVVLYHVFDOLQJRIWKHFRQWDFWVSDFHFRQWDFW
WUDQVLVWRU GHQVLW\ VWDUWLQJ ZLWK D [ VFDOLQJ DW WKH QP UHVLVWDQFH5H[WLVDNH\FRQVLGHUDWLRQLQRSWLPL]DWLRQRIWKH
JHQHUDWLRQFDQEHVHHQ7KLVQPWHFKQRORJ\FRQWLQXHVWKDW WUDQVLVWRU ,Q WKLV WHFKQRORJ\ WKH FRQWDFW PHWDO VWDFN KDV
DFFHOHUDWLRQDW[IURPWKHQPJHQHUDWLRQWKURXJKXVHRI LQWURGXFHG WZR IHDWXUHV WR ORZHU WKH FRQWDFW UHVLVWDQFH 7KH
6$43 ZQP LPPHUVLRQ OLWKRJUDSK\ LPSURYHG WUDQVLVWRU ILUVWLVUHSODFLQJWKHWXQJVWHQFRQWDFWPHWDOZLWKFREDOW7KLV
PDWFKLQJWRHQDEOHIHZHUILQVLQWKHVWDQGDUGFHOOOLEUDU\DQG SURYLGHV D UHGXFWLRQ LQ FRQWDFW OLQH UHVLVWDQFH 7KH
QRYHOSURFHVVIHDWXUHVWRHQDEOHWLJKWHUOD\RXW)LJ VHFRQG LV DGGLQJ D FRQIRUPDO WLWDQLXP OD\HU WR ZUDSDURXQG
WKH VRXUFHGUDLQ GLIIXVLRQ UHJLRQV WR ORZHU WKH VSUHDGLQJ
.(<'(6,*158/(6 7(&+12/2*<)($785(6
UHVLVWDQFH$WKLQ1L6LOD\HUKDVDOVREHHQDGGHGWRORZHUWKH
7DEOH,VXPPDUL]HVWKHNH\GHVLJQUXOHV&RQWDFWHGJDWH 3026FRQWDFWUHVLVWDQFH
SLWFKLVVFDOHGWRQPDQGWKHPLQLPXP765$0FHOOVL]H
7KHILQSDWWHUQLQJXVHV6$43WRDFKLHYHDQPILQZLGWK
LV UHGXFHG WR PP PDLQWDLQLQJ WUDGLWLRQDO VFDOLQJ
DWDQPSLWFK)LJ,QVLWXGRSHGUDLVHG6'VDUHXVHG
WUHQGV)LJ 6$43LVLQWURGXFHGDWWKHGLIIXVLRQPHWDO
WR SURYLGH ORZ 5H[W DORQJ ZLWK LPSURYHG PRELOLW\ IURP
DQGPHWDOOD\HUVWRDFKLHYHWLJKWILQSLWFKHVGRZQWRQP
VWUDLQHQKDQFHPHQW7REDODQFHGULYHFXUUHQWYVFDSDFLWDQFH
IEDM17-674 29.1.2
Gate Contact
Diffusion
Contact Diffusion
Contact
Gate
Contact
)LJXUH/RJLF7UDQVLVWRU'HQVLW\0XOWL*HQHUDWLRQ )LJXUH&RQWDFWRYHUDFWLYHJDWHOD\RXWFRPSDULVRQ
6FDOLQJ7UHQG
)LJXUH65$06FDOLQJ7UHQG )LJXUH6HOIDOLJQHG'LIIXVLRQDQG*DWHFRQWDFWLPDJHV
QRWVDPHVFDOH
Cell Cell
Boundary
Active Boundary
Active
Diffusion Contact Diffusion
Contact
Active Dummy Active Isolation
Gate Gate Gate
)LJXUH'XPP\*DWHHOLPLQDWLRQOD\RXWFRPSDULVRQ )LJXUH7UDQVLVWRU)LQDQG*DWH&XW,PDJHV
QRWVDPHVFDOH
29.1.3 IEDM17-675
)LJXUH6XEWKUHVKROG&XUYHV )LJXUH7UDQVLVWRU,9&XUYHV
)LJXUH1026,GVDWDQG,GOLQFXUYHV )LJXUH3026OHIWDQG1026ULJKW7''%
)LJXUH3026,GVDWDQG,GOLQFXUYHV
)LJXUH,QWHUFRQQHFW6WDFN
IEDM17-676 29.1.4