Real-time 3D Shape Measurement with Digital Stripe Projection by

Texas Instruments Micromirror Devices DMDTM

Frankowski, G., Chen, M., Huth, T.

GFMesstechnik GmbH, Warthestr. 2 1 , D-145 1 3 Teltow/Berlin

ABSTRACT

The fast, contact-free and highly precise shape measurement of technical objects is of key importance
in the scientific-technological area as well as the area of practical measurement technology. The appli-
cation areas of contact-free surface measurement extend across widely different areas, e.g., the auto-
mation of production processes, the measurement and inspection of components in microsystem tech-
nology or the fast 3D in-vivo measurement of human skin surfaces in cosmetics and medical technol-
ogy. This paper describes methodological and technological possibilities as well as measurement tech-
nology applications for fast optical 3D shape measurements using micromirror-based high-velocity
stripe projection. Depending on the available projector and camera facilities, it will be possible to shoot
and evaluate complete 3D surface profiles within only a few milliseconds.

1. INTRODUCTION

After great reservations from industry against optical measurement techniques, which were founded on
failures and unfulfilled expectations in the 70s and 80s, these measurement techniques are currently
regaining increasing interest in industry. This is caused by increased requirements for the assessment of
3D component geometry in research and development and above all in quality assurance. Conventional
mechanical sensoring devices can fulfill the upcoming measurement tasks only partially or not at all.
Moreover, developments in microcomputer technology, digital signal processing and optoelectronics
offer completely new possibilities for the design and performance capabilities of optical measurement
systems, which could not be thought of in the past. Among these many possibilities is the use of pixel-
wise controllable digital light projectors on the basis of micromirrors for measurement technology.

Keywords: Shape measurement, digital stripe projection, optical measuring, micromirrors

In Three-Dimensional Image Capture and Applications Ill, Brian D. Corner, Joseph H. Nurre,
90 Editors, Proceedings of SPIE Vol. 3958 (2000) • 0277-786X/00/$1 5.00

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 2. OPTICAL MEASURING METHOD

The basic principle of the optical 3D measurement technique used is the stripe projection. Stripe pro-
jection techniques have already been used for many years in the optical 3D measurement technology,
for widely differing measurement tasks in research and industry. Applications extend to the micro- as
well as the macro-area. For the generation of stripe patterns, various methods are used. In early years,
solid grids were used as projection systems, produced by photographic or photolithographic means.
Due to extensive developments in the area of multimedia projectors, pixel-wise addressable projection
systems on the basis of micromirror projectors [1 , 2] are currently increasingly used. Micromirror pro-
jectors in optical 3D measurement technology offer the special advantage of generating freely
choosable digital light pat-tems in the form of stripes, markings or ring structures [3, 4, 5].

2.1. Basic Principle

Stripe projection is a triangulation process in which the projection of an equidistant stripe pat-tern onto
a surface (measurement area or area of interest) and its observation (picture taking) under a certain an-
gle, the triangulation angle, takes place.

CCDcamera CCD-camera
sensor

U,
projection optics

point triangulation line triangulation area trtangulation

a b C
Fig. 1 Diagrams of the principles of spot, line and areal triangulation, respectively
(a) Point triangulation (b ) Line triangulation (c ) Area triangulation

Analogous to the known triangulation processes, which are based on the projection of a single light
spot or light section, the stripe projection is an area triangulation process. Thus, with this method, the
3D scanning of the component geometry can be achieved without movement of the optical sensor or
the measured object.

91

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 CCDcamera

D: projection area

ct: projection angle

measuring object

Fig. 2 Function principle of a stripe projection array

For practical measurement facilities, in most cases, a stripe projection array according to fig. ic or fig.
2 will be chosen, where the camera axis (observation direction) is positioned vertically to the plane of
the measured object. In this way, the influence of perspective distortions of the object shape by the
camera lens can best be kept under control.

2.2 Evaluation of Stripe Projection Images

For the automated computer-assisted evaluation of stripe projection images, the concept of double-
beam interferometry is used as a basis. In this way, the intensity curve of a projected stripe pattern is
interpreted as an interference stripe and described by the following equation:

I(x,y) = Io(X,Y) + [1 + V(x,y)cosA(x,y)] (1)

where, in equation (1): I(x,y) is the intensity curve of the stripe patterns registered by the image-taking
camera, Io(x,y) is the background intensity, V(x,y) is the amplitude, and A(x,y) is the phase position of
the observed intensity curve, always in the x-y plane.

According to equation ( 1 ), the height information to be measured is included in the phase term A(x,y)
and can be determined by solving the linear equation ( 1). In practical surface measurements, equation
(1) will usually be solved experimentally, by application of the so-called phase-shift technique { 6].
The basic idea of the phase-shift technique is the step-wise shifting of an equidistant stripe pattern by a
constant phase angle (x,y) within a 3600 period and the taking of single images by CCD camera.

92

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 Depending on the number of phase shifts, the camera therefore takes several single images of the
measured object's unaltered surface, exposed to different stripe patterns that are shifted by a constant
phase angle. This can be represented as follows, using an example with four phase shifts of 900 each
(four-step algorithm):

Ii(x,y) 10(x,y) [1 + V(x,y) cos{(x,y) + oo

12(x,y) 10(x,y) [1 + V(x,y) cos{A(x,y) + 900 ( 2)

13(x,y) 10(x,y) [1 + V(x,y) cos{A(x,y) + 18o0

14(x,y) = 10(x,y) [1 + V(x,y) cos{(x,y) + 2700

In the evaluation result of the linear equation system ( 2 ), the A(x,y) phase, and thus the interesting
profile height in the x-y plane, is determined by an arctan function:

z\(x,y) = arctan 3 {[I3(x,y) — 12(x,y)]/[211(x,y) — 12(x,y)-13(x,y)]} modit (3)

To avoid erroneous results from the stripe evaluations, it is necessary that the measured object is abso-
lutely at rest during the image taking of the respective phase-shifted stripe patterns. Particularly when
practical measurements are conducted directly at production sites or on complicated surfaces like hu-
man skin, there is a danger that erroneous position changes of the measured object can occur between
the respective image takings, which will naturally limit the measurement possibilities and also the
measurement accuracies considerably.

To avoid error influences resulting from external disturbances during stripe projection, the possibility
of a high-velocity stripe projection was created which uses digital micromirror projectors and makes it
possible to scan and evaluate a complete 3D surface profile within only a few milliseconds.

2.3 Digital Stripe Projection with Micromirrors

2.3.1 General Basics
Digital stripe rojection works on the basis of micromirror projection units (Digital Micromirror De-
vices - DMDT ), which were developed and introduced by the Texas Instruments company, U.S.A. [6,
7]. With its DMD solution, Texas Instruments has opened up a completely new concept of digital light
projection. The DMD matrix is based on a chip with currently 800 x 600 and 1024 x 768 mirrors, re-
spectively. The micromirror arrays consist of minute Al mirrors with an area of 16 im2. The average
diameter of a human hair thus corresponds to an area of about four micromirrors. An REM image of
micromirrors is shown in fig. 3 below.

93

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 part of a DMD array single mirror

Fig. 3 Raster electron microscopic image of micromirrors

[TriPi Each pixel (micromirror) constitutes a "binary

light switch", which either does (ON position) or
Tifl
ON
does not (OFF position) direct the infalling light
into the aperture of the projection optics, as
clarified by fig. 4. In this process, every micro-

0
minor is tilted at an angle of± 100, controlled by
a computer. The movement between "ON" and
"OFF" takes less than 20 is. In "ON" position,
OFF /1
the light is then projected via the projection op-
// tics directly onto the measurement point of the
/
object to be measured, while in "OFF" position

//
/ the light is projected onto an absorber. In this
way, all micromirrors can be moved exactly by
1O computer control and make the generation of a
grey-scaled projection image within a video
frame possible.
l6pm
Fig. 4 Function principle of a DMD

In case one or more corresponding micromirrors are in ON position during a video frame, a sequence
of binary images with a maximum intensity (8 bit grey scale: 255) is produced. E.g., if the grey value of
128 is to be produced, the respective micromirrors exposed to this grey value by the computer are kept
in OFF position for one half of the video frame and in ON position for the other half. For the projection
of other grey values, the process is analogous.

94

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 The complete digital principle of the micromirror projection units makes a whole series of essential
advantages possible for the optical measurement technology, consisting in
. High light performance
The hidden mirror hinge realised in DMDTM enlarges the portion of the active mirror area to 90%. In
practice, due to losses from scattering, about 80% of the light coming in from the lamp will be re-
flected. Compared to that, the filling factor will be around 50% in the case of transmission LCD pro-
jectors, due to the necessary control electronics, and the required polarisers decrease the light yield
further to altogether 25%.
. High image contrast
Besides increased light performance, the high filling factor also improves the signal/noise ratio in the
stripe patterns, because the portion of information-free gaps between the square pixels only amounts to
1 0%. Together with the good reflection properties of the DMDTM, an excellent image contrast (> 50:1)
can thus be achieved.

S Precise pixel projection

The evenness of the micromirror array produced by semiconductor technology guarantees the precision
and stability of the projection direction for each pixel, which is crucial for measurement technology
purposes. According to the DLPTM principle, each point is represented completely independently from
its neighboring pixel, so that no spatial noise is generated. Short switching times let the projected
stripes stay free of artefacts, even at fast changes.
. Exact reproducibility
The whole range of grey values is subject to digital control of the ON and OFF times and depends in no
way on material properties, saturation effects or the environment temperature. The projected light in-
tensities are therefore exactly reproducible and long-time stable, which is advantageous for the respec-
tive measurement process.
. Perfect color convergence
The respective color components reach the projected image point by the same optical way, one after
another in time. From that, perfect convergence results. As already in the grey-value image, every color
value can be set precisely by digital control.

For application in stripe projection technology, micromirror projectors offer the possibility, by exact
intensity control, to generate exact sinus-shaped intensity distributions of the projected stripe patterns.
Non-linearities in the intensity curves of the projected stripe patterns are, as a rule, responsible for sys-
tematic errors in the measurement result. An analysis of the stripe-pattern intensities theoretically cal-
culated and generated by micromirror projection yields the two intensity curves shown in fig. 5 below.

95

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 sin-fringes: theory sin-fringes: ODS 800
250
200

100 300 500 700

- 900
CCD pie1

Fig. 5 Comparison between the theoretically calculated and the CCD-camera-taken digital
sinus-shaped stripe patterns

2.3.2 Real-time Data Acquisition by Micromirror Devices

Pixel-wise controllable digital light projectors on the basis of micromirrors are built by the Texas In-
struments company with the goal of using them in the area of multimedia. For this area of application,
it is necessary and sufficient that the projector projects images which are free of disturbances for the
human eye.

The use of proj ectors in optical measurement technology requires, in addition to a disturbance-free
projection of the generated images (stripe patterns), that these are taken by a CCD matrix camera and
can be fed into a measurement and evaluation computer for further processing in the sense of 3D meas-
urement technology. In this way, a closed control circuit between measurement and control computer,
measured object and CCD shooting camera is created, as depicted in fig. 6.

Fig. 6 Control circuit in digital stripe projection with micromirrors

96

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 In contrast to analogous light projection, the introduction of this digital light projection in optical 3D
measurement technology offers the decisive advantage that the measured object can be exposed to a
known intensity pattern (stripe pattern) which was precalculated or stored in the measurement and con-
trol computer. In the subsequent evaluation of the images, the changes in the precalculated light struc-
tures that were registered by the shooting camera can be taken into account in the evaluation.

A lot of practical applications of the digital stripe projection within the industrial 3D measuring tech-
nique needs fast velocity for the recording and evaluation of the measurement data. This is very im-
portant, for instance, in the integrated manufacturing inspection in the automotive industry such as the
fast optical 3D invivo measurement of skin in cosmetics industry or medical applications, respectively.

The lasing rate in the optical 3D measuring technique based on digital stripe projection by digital mi-
cromirror devices is determined essentially by
. the refresh frequency of the used CCD-camera
. the pattern build-up time ofthe digital micromirror device
. the data transfer from the CCD-camera to the host computer.

In the optical 3D metrology are normally used CCD-cameras with a refresh frequency of 30 or 60 Hz,
what is very important in connection with the use ofthe digital micromirror projector.

The complete image build-up frequency of the digital micromirror projector to the projection of colour
pictures is 60 Hz or 33,3 ms. In this time is projected the coloured picture consisting of the three pri-
mary colours and produced by a colour multiplexing. In case of the one-chip DMD, most interesting for
optical 3D measurements, colour multiplexing is carried-out by a colour wheel rotating in the optical
path of the DLP-projector. In the process of a DLP clock pulse of 33,3 ms three primary colours will be
splitted in for parts of the DLP clock pulse of each length 2,8 ms or 360 Hz. In this way are projected
light intensities between 0 and 255 bits analogous an ON/OFF-switch. The diagram in the following
fig. 7 shows exemplary the separation of the DLP clock pulse in the twelve individual periods of col-
ours.

DMD Clock Pulse

R
2,8 ms

33 3 ms

Fig. 7 Separation of the DLP clock pulse in twelve individual colour periods

Because the stripe projection is based on interferometric concepts only grey-scales of the light intensity
is from interest and no colour information. In this way can be refused on the use of a colour wheel in
the path of the digital projection system. In case of the stripe projection to the measuring of 3D shapes
are always used the recording of single picture sequencies consisting of stripes with different width
(grey-code technique) and/or stripe patterns highly precisely shifted by a small amount (phase-shift

97

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 technique). To the protection of a highly precise evaluation of stripe projection patterns in the optical
3D measuring it is from fundamental importance to avoid synchronization errors in the pattern build-up
of the DLP-projector. In case of use of the so-called grey-code technique, using stripe patterns with
different width it could be possible that the CCD-cameras takes a picture although the complete pattern
build-up of the DMD is not finished. As result it will occur a error in the 3D profile computed from the
taken stripe patterns. The stripe patterns in the following fig. 8 and 9 show the twelve single pictures of
a DMD clock pulse taken in 4,6 ms (= 225 Hz) by means of a high-velocity camera. In fig. 8 is possible
to see a mixed picture consisting of two stripe patterns with different width of the stripe.

The stripe pattern in the following fig. 9 shows the finishing of the picture build-up of the DMD pro-
jector.

Fig. 9 1 welve single pictures 01 a DMD clock pulse showing a finished picture build-up

98

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 On account of the fact that the complete clock of the DMD consists of single clocks of 360 Fly, or 2,8
rns, respectively, clarifies that the shortest time to project and to record a stripe pattern at the moment is
2,8 ms. In order to realize a very short time of 2,8 ms for stripe projection an recording a high velocity
CCD-camera with a refresh frequency of 360 Hz is necessary. The time to evaluate than a complete 3D
picture of a surface shape by means of the four-step phase-shift algorythm then is about 12 ms.

3. MEASUREMENT RESULTS

The applications of digital stripe projection in micromeasurement technology presented here extend to
optical 3D scanning of microprofiles and optical roughness inspection.

In both cases, the MikroCAD optical 3D measurement system is used, whose 1 -axis and 3-axis ver-
sions are shown in fig. 10. According to the required vertical and lateral resolutions, suitably adapted
projection and shooting optics and CCD matrix cameras are used.

measuring neau witn i axis unit measuring head with 3 axis unit
Fig. 10 Versions of the MicroCAD optical measuring system

The CCD camera with telecentric shooting optics can be directly integrated in the optical measuring
head or mounted on the side of the measuring head case. integration of the CCD camera with shooting
optics in the optical measuring head is advantageous in cases where the user is not supposed to make
changes in the measurement field. Mounting the shooting optics with camera outside the measuring
head offers the user the possibility to replace the shooting optics as well as the CCD camera according
to his own needs. The optical measuring head itself is designed according to the laws of stripe projec-
tion, as can be seen from the principle drawing in fig. 11, and consists of the following three main
components:
• DMD (Digital Micromirror Device)
• TI mainboard
• projection and shooting optics

99

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 As light source, a 270-W metal vapor discharge lamp is used, which is removed br reasons of warming
the optical measuring head and coupled into the optical measuring head via a light connection fibre.

Taking some typical application examples, the measurement possibilities of the N'likroCAD optical
measuring system for the scanning and evaluation of microstructures will be demonstrated.

CCE)-camra
collimation optics

- --
DLP-main board

DMD

projections-
lens

Mcasuring area
Fig. 11 Optical diagram of the MIcroCAD measuring head

In fig. 12, the scanning of the 3D profile of microcontacts on a chip is demonstrated. The goal of this
measurement technology application from the area of microelectronics was the provision of a 3D
measurement facility for the fast geometrical surveying of microcontacts in a near-production environ-
ment.

o os
mm
004—

003—

002—
001
000 . - -- -
-o0l
-032—
-
.303—--------------- --—-—--- -
CO 02 04 06 08 0 12 14 16 16
mm
Large

Color-coded height profile 2D profile with measurements (height. length)

Fig. 12 Application example: 3D measurement of microcontacts

In the production of reading heads for computer hard disks, the exact execution of the respective read-
ing tracks constitutes an essential criterion for the quality of the reading head and thus for the function-
ality of the whole hard disk drive. Usually, the assessment of such reading tracks is undertaken with the
use of raster electron microscopes, which are located in a special measurement laboratory of the manu-
facturer. For this purpose, some reading heads are singled out in the framework of series control or in

100

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 the case of quality assurance measures and examined and assessed by specialists in the measurement
laboratory. It was the intention of the application of the optical 3D measuring system shown below to
provide the operator or quality controller with a fast and easy-to-handle measuring possibility directly
in the near-production environment. The following two measurement graphs demonstrate that.
analogous to the measurement of microcontacts, it is possible to carry out the measurement task with
the MicroCAD system without a problem.

JJJ // //
- ________________________________
' /0

273C

Sc
cc
.;o ,.o iO
b'.6.
On./ltX' 2
grey-scaled height picture 3D-Model
40
zipml
35

30

25

20

15

10

0
0 1 2 3
X (mm)

2D-profile intersection with grove measurements

Fig. 13 Application example: 3D measurement of magnetic heads for hard disks

As becomes clear from the two application examples from the areas of microelectronics and microsys-
tern technology, the use of the digital stripe projection technique on the basis of micrornirrors is very
manifold. But the application of this micro-optical 3D measurement method is not limited by far only
to the area of microtechnology. Due to the very simple technical handling as well as the favorable cost
requirements, its application possibilities extend to very different technical areas, as will be clarified by
the following three application examples from the measurement of criminological objects, the incas-
urement of structured metal sheet surfaces from automobile manufacturing and the measurement of
bank notes. Criminology is, among other things, faced with the task of fast reading the scratch traces of
burglary tools, e.g., in order to draw conclusions whether such a tool was used for different criminal

101

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 acts. The following pictures and measurement graphs in fig. 14 show an example for such an applica-
tion, where the typical scratch image of a burglary tool was read by way of the 3D profile, and charac-
teristic features were determined.

—
$015 *1 0e 01i0O C C

IC

camera picture grey-scaled height profile

-ohe (rr
I 200
.. .

/VJ Ij

e49e i
3D- model 2D-profile intersection

Fig. 14 3D profile measurement on two different burglary tools

The fast 3D scanning of surface roughness is evolving into a fundamental requirement in industry and
particularly for the assessment of functional surfaces in automobile construction. Functional surfaces
determine the functional behavior, on the one hand in the production process and on the other hand in
the actual operational state of the component.

E.g., this applies, to a very large degree, to the production of vehicle body parts. The metal sheets used
there must, on the one hand, continue to become thinner, due to extreme light-weight construction. On
the other hand, they must be suitable for high-velocity deformation in metal-sheet transfer lines and
optimal subsequent application of paint. With the goal of fulfilling these requirements, the steel indus-
try produces sheets that are furnished with a micro-structure in the production process which more and
more conforms to said requirements. Such microstructures can be created by surface treatment with

102

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 erosive processes, with electron beam treatment or by laser structuring. As a result, the surface of an
automobile metal sheet will have a microstructure that can only be assessed confidently by three-
dimensional scanning. The fast scarming of the 3D surface structure of automobile metal sheets has
thus recently become a target of intensive investigations and developments for the adaptation of the
MikroCAD measuring system to this measurement task. Based on the results of a 3D surface pro flc
scan on an electron-beam-treated metal sheet (EBT structure), the application possibilities of digital
stripe projection with micromirrors and the MikroCAD optical measuring system, respectively, will be
documented.

I
.22 •tC 22 2 24 34

Fig. 15 Result of a surface profile scan on an EBT-treated metal sheet

(AOl: 0.7 x 0.7 mm2; CCD camera: 1024 x 1024 pixels; software package: ODS-CAI))

The measurement graphs in fig. 15 show the typical surface structure of an automobile metal sheet
which was surface-structured by an EBT process and is marked by small crater-shaped profiles. These
crater-shaped profiles, which are microscopically small and only a few micrometers deep, provide for
good shaping properties of the sheet during the high-velocity deformation, by advantageous distribution
of greasing agents, and at the same time for a structure well suited for subsequent painting. The fol-
lowing fig. 15 shows a 2D-profile intersection and geometric measurements of the microstructure of a
EBT-treated sheet metal taken from the 3D plot in fig. 15.
.200

0 800

0.400

-0 39

-Q ?9

-I 20

-t 60

Fig. 16 2D-profile intersection of a EBT-treated sheet metals

103

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 The surface roughness was determined, according to fig. 17, first by stating the surface roughness pa-
rameters. If the anisotropic behavior of the metal sheets is also to be examined and assessed, it is possi-
ble to calculate the so-called "star roughness", for which, as shown in fig. 18 , many intermittent profile
sections are set by software and the line roughness is calculated.

Fig. 17 Result of determining the area roughness parameters on an EBT-treated metal sheet
by digital stripe projection based on micromirrors

..( ''.. O..,A 0.485

,—.,— ..32 2.850 3.204 2733 6182 2711 2.941 2433

1,021 0.480 0.621 0638 0609 4076 0571 0.632 0539

. 5.924 2447 3.691 4874 4275 2L28 3695 4419 2711

Iz 1.331 1.891 1.831 1943 5662 1931 1.795 1545

4.504 1678 2.036 2640 2.733 2056 2.174 2,357 1849

1647 0858 1133 1149 1179 5587 1094 1.110 1.064

5.203 2354 3172 3544 3.180 20.63 2.914 3360 2.489

1470 0.780 0.970 0.808 0967 5.237 0.942 0.991 0.915

22.05 .2436 1815 17,35 13.01 50.72 13.36 16,02 23.41

7 0.180 0,207 :01)80 0.152 4.223 0.136 0136 0.255

129 1,008 1.020 1.022 1,035 1,025 1038 1.026 1.018

Result of determining the area roughness parameters on an EBT-treated metal sheet

by digital stripe projection based on micromirrors

104

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

 SUMMARY

Starting with measurement technology and methodology fundamentals of the digital stripe
projection with micromirrors, application possibilities of this measurement method in the op-
tical 3D measurement technology were described. Special application possibilities and advan-
tages ofthis method for conventional measurement technology as well as specifically new ap-
plications in the micro- and automobile measurement technology were presented by the use of
practical measurement examples.

REFERENCES
1. Monk, D. W. : Digital Micromirror Device Technology for Projection Displays, EID Ex-
hibition & Conference, Sandown, UK (October 26, 1994

2. Hombeck, L. J. : Digital Light ProcessingTM and MEMS: Timely Convergence for Bright
Future, Micromachining and Microfabrication '95, Austin/TX, USA, I 995

3. Optical 3D Measuring by Digital Micromirror Devices DMDTM; Company Information,

GFMesstechnik GmbH, 2000

4. Frankowski, G. : The ODS 800 - a new projection unit for optical metrology; Proceedings
ofFringe '97; 3rd Int. Workshop on "Automatic Processing ofFringe Patterns"; Bremen,
September 15 - 17, 1997

5. Frankowski, G., Reil3ner, H.. Rapid 3D Surface Shape Measuring Using Digital Fringe
Projection by Micromirror Devices, Internationales Oberflachenkoioquim 2000, Chem-
nitz, Feb 1 - 3, 2000

6. Monk, D. W. and Gale, R.: The Digital Micromirror Device for Projection Display (invi-
ted paper), Microelectronic Engineering, Vol. 27, pp. 489-493 (1995)

7. Yoder, L. A.: The Digital Display Technolgy of the Future, INFOCOM '97, 5-7 June
1997, Los Angeles, CA; USA

Correspondence: Email: gfmessaol.com; WWW:http://gf-messtechnik.de; Phone: +49/3328/305 188

105

Downloaded From: http://proceedings.spiedigitallibrary.org/ on 08/14/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx