ern ELS-F125 ae esa ene el ELIONIX Inc.Nanotechnology ror the Next Generation, HCC MA balers Cl Siac) Key features ~ Superior large field writing : Uniform 10nm lines in entire 600 um field Small beam diameter at high beam current : 2nm beam diameter at InAUltra High Precision Electron Beam Lithography System Best Pattern Writing Capability 5 ce ER 7 aoe ‘Sam Lines in fine pitch Key features + Line width of Snm or less is guaranteed at 125kV * + 1.7nm beam diameter & minimum proximity effect at 125kV 15m Rings User-friendly Interface (CAD and SEM interfaces on Windows] - Easy patter design function - Easy control of beam condition CAD Interface ee 2jum thick pattern for SAW device 5Onm Squares ‘SOrm TrianglesSPECIFICATIONS Tinooraphy | {rmine meted Vectr scon Pr 4 mW) x3 mD) X25 mf) or larger Ea | 2822 | Se rere) Sty eat 2 = [ Glecton beam shape } Sct beam (Gaussian) EM [Power Sinele chase A200 V, GVA. 50/60 He NF) FA {owes Sats} 26002800 On) | [N| Serna tesou oun 7sumx75um tomy — A axdod cece aah {Men ne ith} Srmer ee H Acne era 5 CTeocascreeorecmie an shine EI tone, heron el gd oa z ean tonalmateowtna 39 ovvon Elocvon | {Emitter} 20/W thermal ld emitter q ‘he power set) optics [Acceleration voltage } 125 KV (Maximur) & system | (Beamelameter] 1.7 nm Dy aivogen | Pressure: 02. 1.0 MPa Pn oF na tox 60 Ue Comecton: 68 nmin ube By] ren 08- 1.008 Litoeaphy | {Oxencurnt] BA 1000 Feomoressed | Mesum fw: 60min Un” eeouue wee) 210 ren 210 mm se erecta 98 rm mintibe {ome nommectrnelX ater 210m farsi or Spraus poa] Somest NZS er #24 mn OD. poe Yates £90 Sam ocrantn ued ty pow { earn soectnn ot trae aera trate 20-25 Reem ure | cor bem wen zoe nssneone weaomesoma teres a [or Pero| 4 vm feald. Pea! (Fig —] €0% or tas gS 1 | 4 3 Stray 03 vTee a mouse) or het | a | Feheti eld) Otte nnan ee rte woop H ns > Floor ocean: 05 glares sce 4 unas T Fee ion _| vena OZ subs Outros Sevmereans: W090 Acoustic 70 48(0) of less by sound level meter FAM scecifed specimen holier ml Anaog scanning Graphical functions language pack BSE seca oer ener poe, Srourrne) MODS. OXF ta conven stare Verte fod son function \mPrinter_miSuper fine caater (ESC-101) PEC (Proximity Efect Correction) sattwore Specifications subject to change without notice ELIONIX Inc. 3:78 Motoekayama Hach. Tox, Jaan Tel +8)-0428260811 Wed ste esd/awlereeaie Snore :WONG'S KONG KING Singapore) PTE LTD. 41 Gentng Lane, Singapore 39556. Woo ete ts/r.wcncor 15-1F,Na37, SEC2, San Nin Ra Panehiao, Taal, Talwan TTabwan: Great Domain Enterprise Co. Lt {ove an einer ‘et 286 o2eoseeas8 care Kaneol Scone Co. i Wee ste nt great oman com tw kyweram Bde. Noa02 163-16, USA: SEITech Salutons Ine. Seongrae ong, Kanedone, Seoul, 194.092, Keres Tet +82(0;2473.9567 Woo sts nts/wm.ste-toni cor Ma o1e82. Usa