ke sl uamacain eas Joural of Mistrial Reseach Saree yah 25 YB AFUE she] CHE Pde} Sagas ae seid aaa ges) deta AGE saab aad epetewee apiesz at Effects of Temperature and Current Density on the Characteristics of Electroplated Pd Films In, Bae, Guang, J. Choi*, Ju H. Kim, Young D. Kim, Sang J. Sir, Kyoungja Woo and Young 8. Cho Cleon Technology Research Cowter, Korea Institut of Science and Technology, P.O. Box 252, Cheongryung, Seoul 130-650 *Corresyonding author; ghoi@hist.rekr (1999 49) 249 BE. L009 8a LOA EERE BY AF Sala AW MeEE De Patel PdCLE Heels WieaNCe Mesh ¥ Fe See 54 UE Pa SVPLY RAVAT ol GE SSae TD AAD PATI) BV. TEP AE SSI) Sa SHoim, 15221 FEVAYS] VES. Aaah MER, PACE ASHE B PAVE AAMAGE HOTS! Sat/e 2} Rae] Ses] Wok HM, Hate] SP Vole EME Hay Tato) ALA PAS Pee) SE ef 6OOkg/mmo| Sl. WE 2 SALES BA Ue Usb, Pacts] ee MARA old SORE ba, eel MPA ade Be 28 Asie Abstract Palladium thin films of uniform and highly dense microstructure were prepared by the eletroplating method using novel PdCl--based plating bath. Principal variables taken into account in this study were the plating tempera- ture and the current density. Blectroplated Pd films were characterized for crystalline orientation, morphology and hardness. The optimal temperature and current density were found be 50 and Sn\/cd, respectively, The measured hhardness value for the Pd films when prepared under the optimal condition was as high as 600kt/mm*. 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SBEEE WI We ESE FRE AHPe] 80, 40, 50CE ash) woo, p= SUol4 AF AU (Keithley 228A) & AMSso] AUES 25, 5, 7.5, lOmV/aies asta 208% Pd WIEBE Behaeh. Pd Soh SY PST ZAG Hah ah. AZ Pa SBE $4 how EBs EMS) AR AVE GAseld, ole de} Pa EE EM Ae bright gray, gray. dark gray] 4 7}a12 she} 7)$ Asich. 2a BAUS Seo] Wa Gaal eae Algsialeals) phe desist Sato) APE ‘Table 1. Bath composition and condition for Pd electro- plating process. Bath Composition & Condition Pach 3g/e Ethylenediamine OM Phosphate 50-100g/ € Ammonium salt 50-100 g/t Brightener 2Sa8/ Current Density 25-0 wail 20 min FE-SEM (Hitachi $4100) “H8aho} 741Gb ISKV 9] 2HA4 Bae Pd SEY BAFRE XRD (Rigaku Minifies A-Ssho} Sasha. XRDSAE CuK ake +889} 20" ~ 100" 2} -B}=H4) 5*/min gh ASEE Aldsbah SSLe BUG SS He sho] Pd Saf AES) PoE Sodebe oles] bole Se] Pa Seve) PE AAG F ole Faraday lel 18) AGS 14 SaeoS wyol Absbaieh. wa $04 gash dese] dole Faraday We de Sh pds} Bhol=e Bae wold +a7ks aba & aA 1B. aah a AS) Pa olge) Aehs]71 Hae 2719] alah Bae SSE chee} Ay yah ol ea & S Widow pas| lewd Es PE ALE sie. w exer xP OE.(%) = 100 w Hh CEt S38€00, Wie Pd BES FAG), Le AURA), GE ESA (sec), me Pas} Ware, 2 Pa 9} aap}, elt Pie Faraday 24 (965000) & Sole o Ni/P 3 Pd SBe}s] Fale XRFWeeco XRF- 4100)-& eso} @ Alael oat 1ORGlE 7b 15 E ob Saez ol gel Be Waele} estes Pa SS] AW 2ELT depth profile® AES (Perkin Elmer PHI-670)-& }88}0] S2dshach. B28, Pd & B22] ASL nano-indentation (MTS nanoindenter DS FEsbeh eh Shs BmNG} SA Satshaleh, 3, wa Da Ele Soe Bd Pd Sto SIS gel & Role YHUSA Atle] SHLE STS, EG URLS FU Tinted W47F 25-4 10nA/at al 2G le] SZ Eee) CS TVs eo] ale S au} gas BUTS IF Ue. deh Ese) Bae Ae SEU Wee lee] sad aS Mec Ae EF Neh S5] HWS 2omMertel AROS RE HEUG EES] Vshen, cle GRA ol Selsto} dhe BHolee Guslo] AGS aol See] FIV US of oz] £37) @eeleha FSsibe, SSLE VS AFol ole Wie] GS deb debi ae UE 7) LOmA/enial Fol dark gray $2 gray Mel SBF VYSIUEM ole UHUS7t UE sob Pa Saat dHbaleg Wehbge) depa7) wBeleba aebeleh AR LS Pd EES Aes BA salsa Ni/P FAHLTF LYS SEM OS VBE AIS BOIS 20} ch Ni/P SE RMS Bat Ae Pd SBS) oA 7} So] SS Ni/P SH AFD 1a VF SPS FE V7) aeelate. Fae N/P SBSMea Mae eR da ae Table 2. Color, morphology and thickness of Pd films at various temperatures and current densities. Temp. | pa sabes Slave aa ge. nt — ‘Carrent densi y ‘Thickness: a o | a _ tele 50 : Fig. 1, SEM micrograph of Ni/P underpate surface 60~180nm BES He AS FY WAS Ps} 3 Beta AWG SAPRE the EAS HIS B+ 3Y 2.8 46 tel es ot URW Zdoldel Pd 59% Hag SIME BOG WHE vele oleh a HVE! lOaVedd Bole SLES Fela Pa Este] Ags aad LoS dzge ts 2 o, olsh ol Pd av ahh Be ol WERE 7 oles Bt Meals] bse] B7ishat, Urs) o} ARs] $54 aol SsI7] HEolejat warsigheet, FET URLMAAE Fh2) aol Asse} Ada] 42 apleck: a @ a4 # ofS 9] ae aes] Baste) PoE MAT] ATS EH a 4, 30 40 SEM UEUS fol Pd SBS) Leo ceo} Bale) abs. clelt Ede 7 ELdoLd WHE wo}alol eh Hg Asslatedl, ot Pd Sate] Jah Fol ot Ge Fhe WM 2 Pad Bal aE FOG Aol Ade Aelehz asic. PAS sta RE Bel Fa7t ET SES} BPG/H BE WWE Pa AAPL ALAR, SFE FOE UE FEO oh AV WESIo} Pd ABH FAIL, oleigh dats) B- $e DES WEEE fuse Pd St) BBS oplalrieal.” lel F2849) Use UWS & ofatol ea} srbabehz hela let” Bal #UE Pd S8EEE BOCMA TR SAY ol obo} Batata, Pd SHEET HOTA Boe z dol 71a] Batsi2) eishe & obueh wana ate Fala} VAR olfolal AU APA SaS WANE E 4 sth oleit ashe Se VEUEN BF, SBE 7} Hobo leh Bol Sal LES Shee el £5) HEIST WASH Slo} PLA 1 Bao] AICHE “Fell 7leleiche wedaleh. eh eal AZKL Pd SBOE pin holest BE Heat ar)s} ABS slat Rao Basa Bake cls aol Pd SBS) olMFRE Ie 194 Balad Ni/P EB ve VER ZS YAS ol Sola} gels, eye SB Saas Bee] Vgsirtd sab Paw abd aA abel latch. web Pd Seshe Ni/PS| =la) Pho] hha S VPS Wal hecha wohl AU SE ASHLEY URVE Zaoe Ads) a APRE ARDS HIG DHE oS slalaldeld. + A AAEZEA Ni/P AUod MISE peaks BAL + Wake, cle Pag hg laste N/P Se 8S 719 WEE ole dae Sl weld, Ve ee BUA Pd SBSE foo PEE AG Us BL 9] HES) azeld dad pa Soe (11) a oe 8 7PILRH UA powders} XRD Fabslectroplated at 300 a raphe of Pa films electroplated at 401 and al779 2ueer) Beda) Ww ae wm ae (oor Fig. $. XRD patterns of Pa films electroplated at various temperatures and current densities, HAL, SEES ICU A VHC} 25, Sma/atel BOE (LUE ASHE ed alr} 7 Ale] oh Ashe WIFI Solspls (220) A} MPLS 7A A (LD 9] RS Ib AP ale, BS Sale} BS YF Use. XRDART SEM AIS Als] MR FHL EI} Bola BME (200) FE 20a Ue, Pd SSP APR oi Bol Hoh MY 9) MPS 7 $= aets Bassi” ass] eid] See} BAS) UIP AE SABZS) Le Bole SF SAA SFole9) Vase] Besta} loz sheeteh, Sole Serb Volaleel leit aes] Shel SE, JCPDSEVAA] VX Pa powders} XRDAGE F 7} Fels}. Sgesd deve Sy $e peak7} (111) Qo] Gebech" olzke Baez feo Sead) alee aed slat ol Fol’ + alah780 URARADA HOR MS 1990) 2 s38 (Cathode efficiency (%) e 2 Ss aso Current density (pica) Fig. 6. Plots of cathode efficiency versus temperature and cur- ont density, AY be EELS USES GE SSRs st Behe Ald. S5RES SFLEM eho) meh SD, ARUET VESR BE ATE Volta aeln SESE) 50 Bolte He east WEE A WHVEA GE SFE) Weber Sole, SRST A. ce dts SHEEN SSS Pa oles) olgE7} S7hbold £5 Za Pd eles} SE7t Bob] Ea FAS wae: Pd ayo] A Seo) Sri ete es dead!” olelah ast = Yo SS SEM Baste He} Dae a =e ach ee Pd SBESHE Aaele) Weert Se, FS STLEE Testa] ole Vee wish wo) ae WS B7IFH Pd] EUS $49) Do] Hola AIP] ho), PILED AUS OE Pd SEF SM OF S Seo) oP} S54 Pd SSS Ses le eS = CHEM, 2Y 72 50°C BHU Webel hE Pd Sats) 7 Sa Use Ueba aloe Pd Sao 9 AS AAS Sut 4 GODKG/mn? AES 7 AE ESET, TEnN/oiY As oF 550kg/mm', 25uA/e a AS 420kg/mm' AEE Yeh. 1OmVai se) WIS AY SES MAME whe Pd EBS] AEH B40KG/ mm! 4E2 F Vokch. Yet AW) AE Sa 2214 Pd SF) AEP Ni/P slEFSe4 Cu/ Be 7H} Ge weeal, 7h Pd Szeto] Fart gh 2 ARGS) 25a/eal) 229) AE Sah les SL Ni/P (eh 700kg/mmn'l 2} BE BAS 7H Bo} 27] AE) 982} BEDE 5, T5ai/oid BPBP ASA sole, Web BAGS] AS Fz Adis 49 Pd SES Bs Salsa FS, gs Hardness (jg/ar!) 8 Os 37 ir Current density (wA/a!) Fig, 7. Hardness of Pa films electroplated at varius current densities and at 50 Pd EBV ACE AZZ grains] MEN ha AZ Wve UE Foe SEM, Fae] we Ft AS 1D SS) eo) we ee $4513 Axe ASS IS + De AFSE MF Pla grange FAY ANG AAPA yeleh 2g 49} SEM/H1& 48] BH2a, Pd She] olPHAE A SUS Seid ob} Aden Bet PAE aS F soe, 2omA/ed obs UAE grain? 2S 2D slop Sa 71as Seale Saale) Bee} RE Weise PEt ahech clshe vel URLS 7.5aA/ of Mole A1d8b71= stlet grainel Im YES) wat AZ Uae gat Pao] FRE Be aed. 2g bl Be, ARVEZE 7.5m BPS (19) A840) aad, UEUE tAEES 200) Bo Wee) S7ehe AGS Belge. clei BE Sel Eee g, GUE) 2ow/aid ABS Pa SBS] YEE Saved AE SBehs) 37th wissbeioh 28 ASSIA, Jae) Fale 28a) Kal. clei a5) FUE 2U 64 Ged ILE AAA EF Mol, UES allele) ARE Pd BBH2] B47} WEE 25mA/eoi el AFA | FLSPHe] Cf A7] Ele}. EM” este Pd SF 4} gshe Gal le Pa Sate] Bert shoe deja sleh. ek} URES 75 EE 10nValz oF APS UAVS Sue Fol wed ASI, BASE Ae FLETES He Bola, Pd ES"2) oF EVP a + Eel URE HES Pa Ppa Ptebe ade APES Wael) Zeb Eee FSqd, WISE Pd SESS) APG + SETES BE Z MRE Ala. C11) Ft (200) 9}Wala Mab geal dada ae past G9 Aol Sat zh bd Wes Belale. 330 ~600kg/mm'2] ASS BY Au Sse) AEs WAAL 140~230 ka/mm'Beh 2m old ee ee efit Pas) Eeaywers S722 Basia. sepa} 2 Ut AST Pd ESRS switchs} PUFFS ABR AF 718] AL Aut Pa EeUhUCh | Ps UoPRae ee + gloele} 7lqjaich upxepos wal Gd ARG Pd SESH AA PAG switch aigabked he Bagh 100d a Fst eA Go] ES} Aa Au SFM ol Lucenvabel Pd SF AasdoR AE Pa UUs wate, duel doe seltatz fol Geshe Wert 3] Yoke. keh SPE EA ER Pd Sots SAS switens} a BLAZAS PPSAS wht 9 Beha ails ep, 2 4% 1) 22 8 AFUE whl ge pd ESS Ste SAFE Feo} SOC) LS} 2.5-7.5mA/aie| WT SAA BMo) GE AWE OVIFSE Be Pd SSS Aad + de. EBLE 30-40CD BEVEL 25-75ai/old Atle #2 Hol Ma Feo] Bas] WH, clei BUAES GRLE eolatol whet S7teh sich 2) Pd SHHL BOTS} 25-5 wA/eaie} LAA AE Sas Aseae SF UID asl aes blZ a Up. SA AWE Yoh +S (200) Be) whee] Deh IVE Belsaich. olziah wae SEM Faz ash ule BAe) E of, sto BRE grain] ee VD So] RAI BORE ole grains) west) wh US FES Fae Te walt 3) SSRES SE GOCE BH 7 esha Us srl RE SSRN TLE aid. ole SHE E7} RIES Pd clk] LEST} S7tsbo} Pd HEA Bo] S77] Soles FS s}sich. 4) Pd Sabo} ASE SOTA ESSE of 330~ 600kg/mm! AEC, AVE 5OmA/ald 2H AE Geluaich le] RS SAS 4a Wh Pas S39) AEE FSG FART lA Be ae Sekt ashe aol adsl azee LM. Antler, Plating & Surf. Finishing, 7816), 58 sechat web} AGP 25 9 URUE dad de. TL (1991) 2. JA. Abys, Plating & Surf. Finishing, 82(8), 67 (1995), CJ. Raub, ASM Handbook vol. 5: Surface Engi- neering, pp. 252, ASM international, (1994) | R, Duva, Plating & Surf. Finishing, 77(2), 42 (1990) Ad, Graham, MJ. Pike-Biegunski and S. W. Updegratt, Plating & Surf. 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