COXEM Education Cecoltec Agosto 20221

WINDOW FOR NANO WORLD
COXEM Education
Cecoltec Sales Division
SEM
Scanning
Electron
Microscope
01 What is the SEM
Introduce
Name : Carlos Salazar

Job : Comercial Manager CECOLTEC SAS
Email : csalazar@cecoltec.com
Phone : +57 310 239 9401
COXEM - WINDOW FOR NANO WORLD

01
What is the SEM
01 What is the SEM
VS
LOM SEM
Light Optical Microscope Scanning Electron Microscope

01 What is the SEM
SEM
10-3 nm
LOM
103 nm

01 What is the SEM

01 What is the SEM
•E-gun
Emission
•CL lens
Condense
•Specimen
Signal
•Detector
Detect
•Computer Image
Get Image

01 What is the SEM
E-gun : Emit the Electron beam
Condenser Lens : Condense the beam
Object Lens : Scanning the beam to Sample
BSE-D : Back Scattered Electron
STEM-D : SEM + TEM
Chamber : Can drive the Sample in Chamber
SE-D : Secondary Electron
EDS : Energy Dispersive Spectrometer

Oxford, Bruker, EDAX, Thermo

01 What is the SEM
Why use SEM ??
Use Short Wavelength Beam : High Resolution(In the vacuum system)
: Wavelength
- electron : 1pm / visible light : 1um
n : Refractive index
: Angle
Easy to operate : Can change the condition magnetic force
Many signal for analysis the specimen : Secondary Electron

Back Scattered Electron
Energy Dispersive Spectrometer
Electron Back Scattered Diffraction
Possible three-dimensional image formation : Large depth of field
Broad range Magnification : x15 to x1,000,000(Our SEM is x15 to 300,000)
Easy preparation to make specimen

01 What is the SEM
Topography
The surface features of an object or “how to looks”,
its texture: direct relation between these features
and materials properties.
Morphology
The shape and size of the particles making up the object;

direct relation between these structures and materials properties.
Composition
The elements and compounds that the object is composed of
and the relative amounts of them;
direct relationship between composition and materials properties.
Crystallography
How the atoms are arranged in the object;
relation between these arrangements and material properties.

01 What is the SEM

01-01
E-gun
01-01 E-gun

01-01 E-gun
E-gun make an electron beam or an electromagnetic wave.

Electrons in an atom are subjected to electrical force with the
nucleus.
Existence with specific energy.

Provide energy beyond the critical point that electrons have, and
electrons can come out into the air.
Emit the Beam
Temp
Up

01-01 E-gun
* Tungsten Filament
Cartridge
- Heat electrons are generated by heating about 2,700K
Filament - Used for Thermionic guns.
<Advantage>
- cheap and easy to replace

- EDS analysis is easy due to good current stability
Wehnelt cylinder
<Disadvantage>
Short life time of 40-100 hours

Not suitable for observing high magnification images

01-01 E-gun
W-hairpin
LaB6 Field Emission Gun

01-01 E-gun

01-01 E-gun
Over the point

Short lift time
Same resolution and BC
Filament Current
- A current applied to a filament to increase
the temperature of the filament
so that electrons can be released.
Emission Current
- The current emitted from the filament is returned
to a high voltage supply, direct by anode.
Beam Current
- The amount of current that through the Anode’s hole
Probe Current
- The amount of current that finally reaches the sample
while passing through CL, aperture, and OL.
False Peak Saturation point

Low resolution and BC High resolution
Long lift time Stable beam
01-02
Lens
01-02 Lens
In electron microscopes, electromagnetic waves are used to condense

magnetic particles into a single point.
When electrons move in a magnetic field,

they are forced to be bent the direction of movement.
When the collection is performed, the electrons gather in a spiral motion

and then spread out again after passing the focus.
Scan Coil

01-02 Lens

01-03
Aberration
01-03 Aberration
Spherical Aberration Chromatic Aberration Astigmatism

01-03 Aberration
Spherical aberration

01-03 Aberration
Chromatic aberration

01-03 Aberration
astigmatism
Cause by ??
- Lens making Technique of Asymmetricity
- Apertures
- Contamination
How to solve ??
- Adjust astigmator

01-03 Aberration
astigmatism
Adjust the eight electromagnet astigmator called Octupole.
How can adjust Astig
Find Focus
Astig X
Astig y
01-03 Aberration
astigmatism
On Astigmatism
Min Fine Max
Off Astigmatism
Min Fine Max

01-04
Electron Beam
01-04 Electron Beam
What can we take signal from Electron Beam ?

01-04 Electron Beam
What can we take signal from Electron Beam ?

01-04 Electron Beam
SE & BSE
Column
EDS detector
SE detector
BSE detector
Electron beam
Specimen
- The specimen that is struck by an electron beam is imaged with the signals of
SE, BSE signal
01-04 Electron Beam
EDS
Secondary Electrons
Auger Electrons
4-50 Å
Backscattered Electrons >Atomic No. 3
Electron
Characteristic X-rays
Atomic No. 4 EDX
Sample Surface
Volume of
Primary
Excitation
<1 - 3 mm

01-04 Electron Beam
Secondary Electron (SE) Backscattered Electron (BSE)
Characteristic X-ray(EDS)
01-04 Electron Beam
Shape of interaction volume by Acceleration Voltage

01-04 Electron Beam
Shape of interaction volume by Atomic Energy

01-04 Electron Beam
Shape of interaction volume by Angle

01-04
Condition for Image
01-04 Condition for Image
4 Condition for SEM Image
Probe
KV
Current
Aperture Working
Size Distance 1. Acceleration Voltage
- Control the beam acceleration.
- Control the beam current
2. Density of the Condenser Lens(CL)

- Control the beam density(size).
- Control the beam current.
3. Size of the Aperture(moveable)

- Control the convergence angle of electron beam
4. Working Distance
- Control the depth of field.
Acceleration Voltage
High
High Resolution Unclear surface structure
More edge effect
More charge effect
More heating damage
Acceleration
Voltage
Clear Surface structure Low Resolution

Less edge effect
Less charge effect
Less heating damage
Low
Acc : 10kV Acc : 20kV Acc : 30kV
x50k x50k x50k
x100k x100k x100k
- As the acceleration voltage increases, the resolution of the image increases as well
Acc : 20kV
x10k x50k
Acc : 5kV
x10k x50k
The area of the electron beam penetrating the specimen varies depending on the acceleration
voltage. so the signal of the secondary electron also shows a different aspect.
x5k x10k
x5k x10k
Heat damage caused by electronic beam energy.

it is caused by changes in acceleration voltage.
Energy of electron beam -> Heat
Increase the Heat

- Intensity of the beam(acceleration voltage)
- Scanning area
- Thermal conductivity of specimens
- Scanning time
How to reduce
- Use low acceleration voltage
- Use small scanning area
- Use coating thick surface
- Use short scanning time




Probe Current
High
Smooth image Deteriorated resolution
More damage
Large Current(for BSE, EDS)
Probe
Current
High resolution obtainable Grainy image

Less damage
Small Current(for BSE, EDS)
Low

Probe Current

Probe Current
Spot Size: 7 Spot Size : 10 Spot Size : 13
x100k x100k x100k
Smaller electron beam size increases resolution, which is advantageous

for observing high magnification images.

Probe Current
x10k x10k x10k
When observing medium magnification, the proper size of beam is advantageous for improving
image quality and resolution.

Probe Current
x3k x3k x3k
The first consideration when observing low magnification is to improve image quality.
In other words, the larger the electron beam, the greater the amount of secondary electrons,
which is advantageous for improving the image quality.

Probe Current
x100k x10k x3k
In other words, it is important to select the optimal electronic beam size based on magnification.
High Magnification : The purpose of improving resolution by selecting a small electron beam size
Medium Magnification : The purpose of improving resolution and quality by selecting an appropriate size for
electron beam size
Low Magnification : The purpose of improving image quality by selecting a large electronic beam size

Aperture Size
High
Large Current(for BSE, EDS) Low resolution
Small depth of field(Out focusing)
Aperture
Size
High Resolution Small Current(for BSE, EDS)

Large depth of field
Low

Aperture Size
Aperture size : 30 ~ 100 ㎛
Smaller size aperture reduces the number of

electrons passing through
Decrease spherical aberration by increasing the

focal depth
Larger size increases brightness

Working Distance
Aperture size : 100um Aperture size : 50um Aperture size : 30um
WD : 5mm
x3k x3k x3k
WD : 20mm
x3k x3k x3k
WD : 30mm
x3k x3k x3k

Aperture Size

Working Distance
High (far from OL)

Large depth of field Low resolution
Working
Distance
High Resolution Small Depth of field
Low (Close from OL)

Working Distance
Aperture size : 100um Aperture size : 50um Aperture size : 30um
WD : 5mm
x3k x3k x3k
WD : 20mm
x3k x3k x3k
WD : 30mm
x3k x3k x3k

Working Distance
WD : 5mm WD : 20mm WD : 30um
Aperture size : 30um
x3k x3k x3k
In other words, the depth depends on the aperture and the working distance.
- The smaller the size of the aperture, the smaller the angle of convergence,
which increases the depth.
- The longer the working distance, the greater the depth.

Scan Mode : Photo 1 Scan Mode : Slow 1
Pixel Size : 1024 x 960 Pixel Size : 640 x 480

Scan Speed : 30sec Scan Speed : 3sec
Image distortion can occur depending on scan speed when charging effects occur.
- The image on the screen is continuously moved in any direction

when the charging effect occurs.
- When scanning using Photo Mode, the image moves during that time, causing distortion.
- Scanning using slow mode produces relatively high noise but can produce images
without distortion.
01-05
Summary
01-05 Summary
1. High resolution mode

- Reduce the spot size.
- Reduce the aperture size.
- Shorten the Working Distance.
2. Depth mode of subjects

- Long Working Distance.
- Make bigger spot size
3. Component Analysis and Low Scaling Mode

- Increase the aperture size.
- Make bigger spot size
01-05 Summary
1. Identify the types of samples

- Metallic samples, polymeric samples,
semiconductor samples, bio-samples, etc.
2. Identify the purpose of a specimen's observation

- Surface analysis, cross-sectional analysis,
BSE analysis, EDS analysis, etc.
- Sample preparation for observation purposes
3. Identify the properties of samples for SEM observation

- Is it a heat-resistant specimen?
- Is it a magnetic sample?
- Is it a conductor, a negative conductor sample?
- How big is the sample?
02
Sample Preparation
02 Sample Preparation
If you want to get good image
1. High Quality SEM = COXEM
2. Operator = Kwon
3. Sample preparation
4. Good position and magnification
5. Contrast and Brightness

1. Prevent Charge-up of Samples
2. Protects samples from deformation

by preventing direct contact with the entire beam.
3. Produce durability so that samples can withstand heat
4. Prevent sample shrinkage and expansion
5. When a lot of secondary electron have occurred, take a good image
Paper (before coating) Paper (after coating)

Variable type of Sample stub
Carbon tape Ion coater Cool stage

Ag paste
Or other conduct tape
Impose the power Surface of cathode (Gold target)

Ion (or Atom)
Au Pt
Target
Sample R.P
Surface of cathode
e- Ion (or Atom)
Atom or Ion
In the vacuum,
By applying a voltage to the target, plasma

occurs when the ion form falls off the
target.
SPT-20 coating machine’s type is PVD coat Sample

using sputtering.
Stub
After coating, Sample will be conduct
sample even non-conduct sample <Sputtering>
1 4
2 3
Current Coating Time
0 mA 10 ~ 990 sec
1~2mA 10 ~ 500 sec

 SPT-20
3mA 10 ~ 400sec
1) Chamber
2) Display LCD 4~6mA 10 ~ 300 sec
3) Touch Buttons
7mA 10 ~ 240 sec
4) Soft Push Power Button
8mA 10 ~ 180 sec
9mA 10 ~ 120 sec

Abnormal contrast Damaged by electron beam
Distortion and Charging effect Moving image

03
SEM Image
03 SEM Image
Mineral
SE BSE-COMP BSE-TOPO
03 SEM Image
SE BSE
Parts of Vehicle
Ceramic
03 SEM Image
SE BSE
Parts of Vehicle
Ceramic
03 SEM Image
BSE SE SE+BSE
Ceramic
Electronic
Component
03 SEM Image
BSE SE SE+BSE
Spring
Alloy
03 SEM Image
High Vacuum Low Vacuum
Paper
Ant
03 SEM Image
Semi-
Conductor
Flower
03 SEM Image
Epidermis
of Onion
Petal
03 SEM Image
Mineral Semiconductor
(x1,000, 72 Stitched) (x1,000, 1440 stitched)
03 SEM Image
0° Angle
x20k x20k
45 ° Angle
x20k x20k
03 SEM Image
x5k x10k
x20k x30k
WINDOW FOR NANO WORLD
Thank you.
www.coxem.com 대전시 유성구 테크노2로 199, 미건테크노월드 1차 201호

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WINDOW FOR NANO WORLD

Name : Carlos Salazar

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

E-gun : Emit the Electron beam

Condenser Lens : Condense the beam

Object Lens : Scanning the beam to Sample

BSE-D : Back Scattered Electron

STEM-D : SEM + TEM

Chamber : Can drive the Sample in Chamber

SE-D : Secondary Electron

EDS : Energy Dispersive Spectrometer

COXEM - WINDOW FOR NANO WORLD

Why use SEM ??

Use Short Wavelength Beam : High Resolution(In the vacuum system)

Easy to operate : Can change the condition magnetic force

Many signal for analysis the specimen : Secondary Electron

Possible three-dimensional image formation : Large depth of field

Broad range Magnification : x15 to x1,000,000(Our SEM is x15 to 300,000)

Easy preparation to make specimen

The shape and size of the particles making up the object;

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

E-gun make an electron beam or an electromagnetic wave.

Existence with specific energy.

Emit the Beam

COXEM - WINDOW FOR NANO WORLD

- cheap and easy to replace

Short life time of 40-100 hours

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

Over the point

False Peak Saturation point

In electron microscopes, electromagnetic waves are used to condense

When electrons move in a magnetic field,

When the collection is performed, the electrons gather in a spiral motion

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

Spherical Aberration Chromatic Aberration Astigmatism

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

How can adjust Astig

COXEM - WINDOW FOR NANO WORLD

What can we take signal from Electron Beam ?

COXEM - WINDOW FOR NANO WORLD

What can we take signal from Electron Beam ?

COXEM - WINDOW FOR NANO WORLD

COXEM - WINDOW FOR NANO WORLD

Secondary Electron (SE) Backscattered Electron (BSE)

Shape of interaction volume by Acceleration Voltage

COXEM - WINDOW FOR NANO WORLD

Shape of interaction volume by Atomic Energy

Shape of interaction volume by Angle

4 Condition for SEM Image

2. Density of the Condenser Lens(CL)

3. Size of the Aperture(moveable)