BESTRONIX

High performance ovens for

semiconductor manufacturing process
 Product list of BESTRONIX

Oven for semiconductor manufacturing process

Wafer bake oven

Bake oven Super-High
with high temperature
(Nitrogen atmospheric temperature oven Pressure chamber
(Nitrogen atmospheric
oven)
oven with O2 analyzer)

Customized chamber based on the customer’s specification

 BAKE OVEN
(NITROGEN ATMOSPHERIC OVEN)

MODEL: BST-SIO-SERIES
Item Specification
Model BST-SIO-125-TW BST-SIO-160-TH BST-SIO-195-FO

Inside dimension 550(W)X500(D)X500(H) 650(W)X500(D)X500(H) 650(W)X500(D)X600(H)

(mm) X 2-room X 3-room X 4-room
Performance
Temp. range RT+10 ~250℃, 350℃, 500℃

Temp. uniformity ±2.5 ℃

N2 Flow meter 10 ~100 ℓ/min * 2sets 10 ~100 ℓ/min * 3sets 10 ~100 ℓ/min * 4sets

Inner material STS304, Polishing

Material
Outer material SS400, 1.6t, Powder coating
Temperature
5.7” TFT LCD Touch screen programmable Controller
controller

Safety device Over heat protector,, EOCR for motor, ELB for heater

6-point recorder, RS-232 or 485 Communication port., Water cooling system

Option
O2 transmitter and O2 controller

Power source 220V/380V, 3Φ 60Hz/ 50Hz

N2 Supply Connection: Ø10mm Air Fitting, Pressure: 4~5 Kg/cm2, Flow rate: 100 l/m.

Technical Features
Temperature range: 40 ~ 350 ℃ (500 ℃)
Temperature stability: Less than ± 0.5 ℃
Temperature uniformity: Less than ± 0.85% of the set point (Less than ±3.0 ℃ at 350 ℃)
Heat up rate: More than 6℃/min
Input power requirements: 220V ±10%, 380V ±10%, 50Hz/60Hz, 3Ph

Customization available : Chamber design for special application

478, Beakbeom-Ro Bupyeong-Gu TEL:82-70-7094-4548
Incheon, 21453 Korea FAX:82-32-442-3116
www.bestronix.co.kr E-mail : bestronix@daum.com
 WAFER BAKE OVEN WITH HIGH TEMPERATURE
(NITROGEN ATMOSPHERIC OVEN WITH O2 ANALYZER)

BST-NST series are designed for protect

parts from oxidation using any non-
flammable gas such as Nitrogen.
Solved temperature variations,
unbalanced air distribution inside the
oven.

MODEL: BST-NST-SERIES
Item Specification
Inside dimension 680(W) X 550(D) X 510(H)mm

Temperature range RT+10 ~ 500℃

Performance Temperature uniformity ±2.5 ℃

N2 Flow rate 10 ~ 100 ℓ/min

Cooling methods Air cooling system

Inner material STS304, Polishing

Material
Outer material SUS430, 1.2t, Polishing.
Accessories O2 transmitter and O2 controller, Door lock system

Temp. Controller 5.7” Touch panel, Programmable controller

Safety device Over heat protector, Over current relay, N2 pressure switch, Signal tower lamp

Power source 220V/380V, 3Φ 60Hz/ 50Hz

Technical Features
Purge N2 flow rate : 20 ~ 200 SCFH, (10 ~ 100 liter/min)
O2 control system: O2 Analyzer, O2 controller, less then 100 ppm.
Maintain inner flow rates : 10 ~ 100 SCFH
Temperature range: 40 ~ 400 ℃ (500 ℃)
Temperature stability: Less than ± 0.5 ℃
Temperature uniformity: Less than ± 0.85% of the set point
Heat up rate: More than 6℃/min
Cooling system: Air cooling system.
Input power requirements: 230V ±10%, 380V ±10%, 50Hz/60Hz, 3Ph
Customization available : Chamber design for special application
478, Beakbeom-Ro Bupyeong-Gu TEL:82-70-7094-4548
Incheon, 21453 Korea FAX:82-32-442-3116
www.bestronix.co.kr E-mail : bestronix@daum.com
 SUPER HIGH TEMPERATURE OVEN

BST-SIO High temperature drying ovens are

relied upon for a variety of applications from
simple glassware drying to sophisticated, precise
heating for experiments. For this reason, drying
ovens should be versatile and efficient as they
are easy to use. Our high temperature dry ovens
range in maximum temperature from 300°C to
500°C and offer excellent temperature uniformity
and durability Learn

MODEL: BST-SIO-SERIES
Item Specification
Model BST-SIO 125 BST-SIO 190

Inside dimension 500 X 500 X 500 680 X 550 X 510

(W) X (D) X (H)mm X 2rooms X 2rooms
Performance
Temperature range RT+10 ~ 500℃

Temperature uniformity ±2.5 ℃

Cooling methods Air cooling system

Inner material STS304, Polishing

Material
Outer material SUS430, 1.2t, Polishing.
Accessories Door lock system

Temp. Controller Digital PID, Programmable controller

Safety device Over heat protector, Over current relay, Signal tower lamp

Power source 220V/380V, 3Φ 60Hz/ 50Hz

Technical Features
Maintain inner flow rates : 10 ~ 100 LPM
Temperature range: 40 ~ 400 ℃ (500 ℃)
Temperature stability: Less than ± 0.5 ℃
Temperature uniformity: Less than ± 0.85% of the set point
Heat up rate: More than 6℃/min
Cooling system: Air cooling system. (Option: Water Cooling system)
Input power requirements: 230V ±10%, 380V ±10%, 50Hz/60Hz, 3Ph

Customization available : Chamber design for special application

478, Beakbeom-Ro Bupyeong-Gu TEL:82-70-7094-4548
Incheon, 21453 Korea FAX:82-32-442-3116
www.bestronix.co.kr E-mail : bestronix@daum.com
 PRESSURE CHAMBER

MODEL: BST-PSC-SERIES
Item Specification
Model BST-PSC-27 BST-PSC-170

Inner dimension 300(W) X 300(D) X 300(H) mm 500(W) X 500(D) X 680(H) mm

Outside dimension 500(W) X 450(D) X 650(H) mm 1,450(W) X 1,730(D) X 1,750(H) mm

Interior material STS 304, 1.0t, Polishing

Exterior material CR, 1.6t, Power coating

Temperature range 60 ℃ ~ 200 ℃

Humidity range 30 ~ 98%RH

Pressure range 0~20 kg/㎠

Temperature & Pressure controller Touch panel, 10”, Programmable

Specimen shelves SUS, 2ea Sliding type, 3-setp

Power source 220V/380V, 60Hz(50Hz), 3PH, 13Kw 220V/380V, 60Hz(50Hz), 3PH, 17Kw

Customization available : Chamber design for special application

478, Beakbeom-Ro Bupyeong-Gu TEL:82-70-7094-4548
Incheon, 21453 Korea FAX:82-32-442-3116
www.bestronix.co.kr E-mail : bestronix@daum.com