MF series In-line

MEMS Mass Flow Meters

SIARGO MEMS FLOW SENSING PRODUCTS

User Manual

© 2011 Siargo Ltd.

 MEMS Mass Flow Meter User Manual

Introduction

Based on Siargo's proprietary sensor technology and control circuit technology,

Siargo's MF series MEMS mass flow meters offer a new generation of intelligent
full-electronic mass flow meters. By virtue of the most advanced electronic
technology, the MF series MEMS mass flow meters achieve high sensitivity, large
measure range, and high accuracy. Moreover, the MF series MEMS mass flow meters
adopt a number of advanced techniques such as multiple-compensation scheme, anti-
noise solution, multiple signal outputs, and network management feature.
Comparing to the traditional mechanical or mechanical-electronic flow meters, the
MF series MEMS mass flow meters exhibit high accuracy, high reliability, strong
noise immunity, good security, good programmability, self error detections, and user
friendly operations.
The MF series MEMS mass flow meters can be used for a general purpose in industry
or commercial applications. In order to safely and correctly use the MF series MEMS
mass flow meters, the users must read this user manual carefully before any
manipulation. Please install and operate the meters by closely following this user
manual to prevent unit malfunctions and unit damages due to improper operations or
operational errors. In addition, the user can also familiarize with the MF series
MEMS mass flow meters through reading this user manual, understand their
operational rules, requirements, and crucial matters that need your special

Declarations

1. Do not change any software and hardware of the product. All software and
hardware of the product have been carefully checked at factory.
2. Do not use any misfunctional unit of the product.
3. Do not use this product in any explosive gas environment.
4. Only a qualified person from Siargo or a person who is accredited by Siargo
can perform troubleshooting services to the product, otherwise Siargo is not
liable for any consequences.

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 MEMS Mass Flow Meter User Manual

Contents

I ntroduction 1
1 Usage and Safety 3
2 Overview 3
2.1 Siargo's MEMS Thermal Mass Flow Sensor Technology 3
2.2 Siargo's MEMS Thermal Mass Flow Meter 3
3 Working Principle 4
3.1 Working Principle 4
3.2 Volume Flow vs. Mass Flow 4
4 Product Model Selections 4
4.1 Selection Codes 4
4.2 Flow Range 5
5 Product Configuration 5
6 Product Specifications 6
6.1 Physical Dimensions 6
6.2 Environmental Conditions 6
6.3 Medium Conditions 6
6.4 Electrical Specifications 6
6.5 Other Specifications 7
7 Installation 7
7.1 Description of Parts in Package 7
7.2 Installation Preparation 7
7.3 Installation Procedure 8
7.3.1 Installation Rules 8
7.3.2 4~20mA Loop Resistance 9
7.3.3 Power Up 9
7.4 Caution Notes on Installation 9
8 Display and Functions 9
8.1 Display 9
8.2 Access Points and User Interface 10
8.3 Functions 10
8.3.1 Real time display of both flow rate and accumulated volume 10
8.3.2 RS485 data communication protocol 10
8.3.3 4~20mA Connection 10
8.3.4 Pulse output 10
8.3.5 Automatic stored data 10
9 Safety and Maintenance 11
9.1 Wetted Materials and Compatibility 11
9.2 Safety Precautions 11
9.3 Maintenance 11
10 Warranty 11
11 Customer Service and Order information 12

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 MEMS Mass Flow Meter User Manual

1. Usage and Safety

a) The product can be utilized to measure in-line mass flow rate of any relatively clean, single-element gas
or multiple-element gas mixture with a relatively constant concentration profile during gas
measurement, monitoring, or flow control in industrial and commercial applications. If the product is used
for a special gas condition other than listed in above, the product may not function properly or even can be
damaged. Please contact with Siargo for special demands.
b) The operational ranges of the product are illustrated in the section of product specifications. If the product
is used for a special operational condition other than listed in the product specifications, the product may
not function properly or even can be damaged. Please contact with Siargo for special demands.
c) Operation, installation, storage, and maintenance of the product must closely follow the instructions of
this user manual. Otherwise, unpredicted damage and even injuries or other severe situations could be
caused. All the installation, storage, and maintenance of the product must be manipulated by skilled
workers. This user manual should be placed near the product for easy access.
d) Before using the product, the user should read this user manual completely and in details so that the user
can memorize all the important instructions.
e) It is recommended that the product should be re-calibrated and maintained in each two years or at any time
if needed.
2. Overview
2.1 Siargo's MEMS Thermal Mass Flow Sensor Technology
Siargo's proprietary MF series MEMS mass flow sensor technology provides accurate in-line flow
measurement with the availability of customer-specified packages. The sensor is manufactured using
Siargo's unique MEMS process that ensures high reliability. The sensors can measure air flow as low as
0.01m/sec and as high as 75m/sec. Depending on the applications, the sensors can be used to measure mass
flow, volume flow or media flow speed. The specially designed circuit provides amplification as well as
small signal processing capability that yields a high accuracy.
Siargo's flow sensors utilize the same thermal mass flow technology using energy balance design. But unlike
the other MEMS flow sensing technologies, Siargo's flow sensors have multiple sensors integrated on a
single silicon chip. The surface of the chip is passivated by ceramic materials with high thermal conductivity
to ensure the sensor's sensitivity. It also enhances the reliability by avoiding the direct contact among the
sensors and the flow media. Also, Siargo's sensor design makes it easy to package the sensor in a variety of

2.2 Siargo's MEMS Thermal Mass Flow Meter

Siargo's gas meter features the state-of-the-art electronics that provides a much larger rangeability than that
for most of the thermal mass flow meters using the traditional sensor technology:
Integrated silicon MEMS flow sensor
Measures mass, volume flow and flow speed
Large rangeability over 1:200
Measures flow speed up to 65 m/sec
High stability at full scale
High accuracy and repeatability at full scale
Low power consumption
Low pressure loss
Fast response time
Small form factor

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3. Working Principle
3.1 Working Principle
Siargo's proprietary flow meter utilizes the insertion approach that can measure gas flows in large pipes. The
MEMS flow sensor chip integrates a micro heater, local temperature sensors and environmental temperature
sensors onto a single package. If no flow media passes through the MEMS sensor chip, a stable temperature
field (distribution) around the micro heater is maintained. When the flow media passes through the sensor
chip, the temperature field will be forced to change as the flow media will carry away the heat causing the
redistribution and variation of local temperature. Such a change of the local temperature will depend on the
media's mass as well as the media's flow speed. The sensors integrated on the silicon chip will then measure
such temperature redistribution, and the carefully designed signal process circuits and the algorithm provided
by the smart control software can then precisely measure the actual media mass flow speed. This mass flow
speed can then be translated into volume speed as well as accumulated volume media consumption.
For the MEMS thermal mass flow sensor technology, the heater on the chip has a dimension at the micrometer
scale. In the insertion configuration, the air convection due to the onset of the micro heater is negligible, and
hence the "chimney effect" concerned for most of the "hot-wire" thermal mass flow meters will not be
applicable to the MEMS thermal mass flow sensor technology.

3.2 Volume Flow vs. Mass Flow

For the gas metrology using mechanical meters, the volume flow rate is adopted. The volume rate
nevertheless may not be a good indicator at industrial processing technology as the processing gas quality
depending vastly on the mass, not on the volume. In addition, the volume of gas will change with different
environment temperature and pressure. With the MEMS thermal mass flow meter, it is possible to measure the
"quality" (mass) of the gas directly, and at real time. The mass flow rate will not depend on temperature and
pressure, and hence an accurate measurement of the actual mass consumption becomes a reality. In addition,
the conversion of the volume rate to the mass rate is readily available by referencing a standard condition such
as 20 oC and 101.325 kPa.

4. Product Model Selections

4.1 Selection Codes

MF
Gas（A-Air; N-N2 ; O-O2 ; R-Ar ; C-CO2 ; E-He ; H-H2.
Other gas please contact customer service）

Output（A-4~20mA ; B-RS485 ; C-RS232 ; D-Pulse）

Maximum Operational Pressure（XXMPa ; e.g.,0.6MPa-06）

Max. Flow（NCMH ; e.g.,450NCMH-450）

Min. Flow（NCMH ; e.g., 0.5NCMH-05）

Explosion Proof(E-Explosion proof, e-General purpose)

Installation(N-NPT ; B-BSPT ; F-Flange)

Pipe Size(mm)

Product Series Number

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 MEMS Mass Flow Meter User Manual

4.2 Flow Range

Model Pipe Size Flow Range

(mm) (NCMH) *

MF25 25 0~100

MF32 32 0~160

MF40 40 0~250

MF50 50 0~400

MF65 65 0~600

MF80 80 0~1000

MF100 100 0~1500

*: Customer specified flow range and flow unit can be accommodated.

5. Product Configuration
The product consists of MEMS flow sensor, smart control circuit, display unit and output ports, probe pole,
flow conditioner, flange, and connectors. Its configuration is illustrated in Fig. 5-1:

User Interface

LCD Display Smart Control Circuit

ACC
3
Accumulation 88888888 Nm
888

Flow Rate FR 888888 888 Nm3/h

Sensor (Inside)

Connector(Flange or NPT/BSPT)

Flow direction label

Fig. 5-1

*
Note: (Ports: power supply, RS485, 4-20mA, PULSE output)

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6. Product Specifications
6.1 Physical Dimensions

Model Connecting L H D d K n-L Reference

MF25 F 300 309 115 25 85 4 -φ14
MF32 F 300 323 140 32 100 4 -φ18
MF40 F 300 331 150 40 110 4-φ18
MF50 F 360 336 165 50 125 4-φ18 GB/T-9116.1-2000
MF65 F 360 362 185 65 145 8 -φ18
MF80 F 400 393 200 80 160 8 -φ18
MF100 F 400 408 220 100 180 8-φ18
MF25 N/B 300 264 -- 25 -- --
300 269 -- -- CANSIB1.20.1
MF32 N/B 32 --
MF40 N/B 300 276 -- 40 -- -- BSPT:ISO7/1
MF50 N/B 360 277 -- 50 -- --

Fig.6-1

6.2 Environmental Conditions

(1) Temperature: -20 oC~+55 oC
(2) Humidity: ≤95%RH
(3) Atmospheres Pressure: 86kPa~106kPa
(4)Working Pressure: 0.1~ 1.5MPa

6.3 Medium Conditions

o o
(1) Temperature: -20 C~+55 C
(2) Gas Type: natural gas, coal gas, etc..; industrial gases except ethane.
6.4 Electrical Specifications
(1)Power In: 8 ~ 24 VDC; 200mA
(2) Display LCD: Real time display of both flow rate and accumulated volume
(3) Response Time: 0.1 second to 95% of final value
(4) Gas Type Selection at Calibration
(5) Communication
RS485, which can send out real-time data for flow rate and flow accumulation and can be directly
connected to the user network for central management. A software tool can be obtained from the
manufacturer.
(6) 4 to20mA Output
The current is proportional to the standard mass flow rate; 4mA represents 0 flow rate, while 20mA
denotes the maximum flow rate Q max.
(7) Pulse Output
The output signal consists of a sequence of voltage pulses, each pulse denotes 0.001Nm 3.
(8) Data Records
a)Log of power supply and flow accumulation.
b)As many as 1000 records of status of the external power supply, including the time records of power-
on and power-off as well as the flow accumulation at these time instants.
c)Record the flow accumulation each 3~720 minutes (which can be specified through a software tool)
to facilitate data analysis and data management. A software tool can be obtained from the
manufacturer for specifying the record period length and retrieving record data.

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6.5 Other Specifications

(1) Accuracy: ±(1.5+0.5FS)%
(2) Repeatability: ±0.75%
(3) Turn-Down Ratio: > 1:100
(4) Pressure Loss: < 500 Pa (at max. flow)
(5) Calibration Flow: Air(20 oC, 101.325kPa)( other gases upon request)）
(6) Defending Grade: IP65
(7) Explosion Proof
General purpose model: None
Explosion proof model: Ex ia IIC T4

7. Installation
7.1 Description of Parts in Package

When unpack your meter from the shipping container, five parts should be found in the package:
a) The meter
b) This user manual
c) Product Certificate
Upon opening the package, the product physical integrity should be inspected to ensure no visual damage can
be observed. If any items are missing or any physical damages are observed, please contact the meter
manufacturer and/or the shipping agents to place a return/exchange or to identify the cause during the transit.
If you are uncertain of the installation or have any questions about the shipment, please also contact the
manufacturer or the shipping agents before further process.

7.2 Installation Preparation

The product at the time of shipment has been fully inspected for product quality and meets all safety
requirements. Additional safety measures during the installation should be applied. This includes, but is not
limited to leakage verification procedure, standard ESD (electrostatic discharge) precautions, DC voltage
precautions and heavy duty precautions. Other tasks such as calibration, part replacement, repair and
maintenance must only be performed by trained personnel. Upon requests, the manufacturer will provide
necessary technical support and/or training of the personnel.
Do not open the product cover or alter any part of the product. Any of such actions will forfeit the warranty
and cause the liability to any damages thereafter.
Before the installation, both upstream and downstream valves on the pipeline should be tightly shut down to
ensure no gas leakage from the pipeline. Once the pipeline is ready for installation of the meter, follow the
steps listed below to check the meter electronics:
（1）Check the mechanical integrity including the LCD display and make sure no mechanical faults pre-
exist before installation.
（2）Connect the cable of the meter (see Fig. 7-1);
（3）Supply the meter with a proper DC voltage described previously, then the LCD should read ：
AUTO CHECKING ...
1) CRYSTAL OK
2) ADC OK
3) EEPROM OK
4) RTC OK

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 MEMS Mass Flow Meter User Manual

DC+ 8V～24VDC Power Supply

DC- Power GND
RS485A
RS485B
LOOP+ 4～20mA output
LOOP- 4～20mA GND
PULSE PULSE output
VP N.C.
PGND Power GND for pulse output
Fig.7-1

(4) When the above processes are completed, the Fig. 8-1 should appeared on the LCD screen;
Attention: Because of the high sensitivity of the meter, the displayed real time flow rate and
accumulated volume value might be non-zero as any air flow passing through the pipe attached to
the meter will be sensed and displayed, regardless if the meter is connected to the pipeline except
that there is absolutely no air flow in the pipe attached. Use your hands or a tight cover to close
both ends of the pipe attached to the meter, the top line display of the real time flow rate should
decrease and become zero, and the accumulated volume should remain a constant value.
(5) Once the above steps have been performed and no errors are found, it indicates that the meter is working
properly. Then power off the meter by disconnecting the DC cable from the DC outlet, and it is ready to
be installed onto the pipeline.
7.3 Installation Procedure
7.3.1 Installation Rules
The stainless steel pipe attached to the meter has its both ends threaded with NPT standard for easy
installation. The meter should be mounted horizontally with the flow direction indicated on the meter body.
To ensure the best performance of the meter, a straight pipe with the same diameter as the pipe attached to the
meter and a length of at least 5D (5 times of the pipe diameter) should be located at the upstream, while
another straight pipe with the same diameter as the pipe attached to the meter and a length of at least 3D
should be located at the downstream, as shown in the following figure:
Meter

Flow

≥5DN ≥3DN
Fig.7-2
After the meter is installed onto the pipeline, follow the steps listed below to finish the installation:
a) Make sure no leakage at both connections.
b) Make sure a nearby DC power supply with surge protection is available and the power supply functions
properly without safety issue.
c) Connect the DC power cable with the DC power connection of the meter.
d) Open the valves at both ends of the pipeline until the gas fill the pipeline，then close the valves.
e) Supply the meter with a proper DC voltage described previously.
f) Make sure that the LCD turns into the display as Fig 8-1.
g) Record the accumulated flow volume value (optional).
h)Open the valves at both ends of the pipeline, and the meter should then measure the current flow.
i) Finish the installation.

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7.3.2 4~20mA Loop Resistance 4~20mA(LOOP+, Violet )

For customers who use 4~20mA output. The

connection of the loop load resistor is illustrated
as Fig. 7-3:

R L（max）=450Ω
4~20mA GND(LOOP-, Transparent )

7.3.3 Power Up Fig.7-3

After the meter is installed onto the pipeline, follow the steps listed below to finish the installation:
(1) Make sure no leakage at both connections.
(2) Make sure a nearby DC power supply with surge protection is available and the power supply functions
properly without safety issue.
(3) Connect the cables as the Chapter 7.2.
(4) Open the valves at both ends of the pipeline until the gas fill the pipeline，then close the valves.
(5) Supply the meter with a proper DC voltage ,and the LCD should read as the Chapter 7.2;
(6) Record the accumulated flow volume value (optional).
(7) Open the valves at both ends of the pipeline, and the meter should then measure the current flow.
(8) Finish the installation.
7.4 Caution Notes on Installation
(1) It is forbidden to weld pipeline flange online.
(2) Before installing the flow meter, all the dirty in the pipeline must be cleaned for preventing possible
damages of the flow meter by the dirty. Moreover, it is recommended that the pipeline wall should be
clean.
(3) Please ensure that the seal rings do not block the passageway of the pipeline.
(4) The ground line of the flow meter must be connected to the earth reliably.
(5) Please ensure that no stress to the flow meter is introduced by the installation.
(6) Near the flow meter site, there should be neither any strong external magnetic field nor any strong
mechanical vibration.
(7) The gas medium should flow stably. The operation of the valves should move slowly. It is prohibited to
close/open valves suddenly.
8. Display and Functions
8.1 Display
At the normal operation mode, the meter has the display as Fig 8-1. The FR shows the real time mass flow rate
in normal cubic meter per hour (Nm 3/h); the ACC displays the accumulated volume in normal cubic meter
(Nm 3). The conversion of the real time mass flow to the volume is based on the condition that 1 Nm 3/h equals
to the mass that is in 1 cubic meter of the air at a temperature of 20 oC and a pressure of 101.325 kPa. The
display can only be reset by trained personnel at the firmware level.

ACC
Nm3
88888888 888

FR 000000 000 Nm3/h

Fig.8-1 display at the normal operation mode

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8.2 Access Points and User Interface

Siargo's proprietary flow meter utilizes the insertion approach that can measure gas flows in large pipes.
TheAll access points and user interface are through the cable provided.
8.3 Functions
8.3.1 Real time display of both flow rate and accumulated volume
The real time values of both flow rate in normal cubic meters per hour (Nm 3/h) and accumulated volume in
normal cubic meters (Nm 3) can be read from the LCD display on the front side of the meter. The meter can read
up to 16 digits to a maximum volume record of 99999999.999 normal cubic meters (Nm 3) and the minimal real
time flow rate is 0.001 Nm 3/h.
8.3.2 RS485 data communication protocole
For purposes of computer control and networking, the RS485 is used for communication
with the following preferred settings:
Baud rate (Bits per second): 9600
Date bits: 8
Stop bits: 1
Parity: None
Flow control: None
User Mode:
1. Send 0x9d to the meter and return with 0x9d;
2. Send 0x00 to the meter and return with 0x00;
The interval time between two bytes sent to the meter must be longer than 5ms.
Then the meter will be at User Mode at which the data will not be sent via RS485 by the
meter.
Operation Mode:
1. Send 0x9d to the meter and return with 0x9d
2. Send 0x54 to the meter and return with 0x54
The interval time between two bytes sent to the meter must be longer than 5ms.
The meter will be at Operation Mode at which the data from the meter will be sent via
RS485 in an interval of one second.
The data are in the following format:
"V=vvvv\nF=ffffff\nA=aaaaaaaa\nT=t\n;"
vvvv: Voltage code
ffffff: Flow rate (Equal to fff.fff Nm 3/h)
aaaaaaaa: Accumulated flow (Equal to aaaaa.aaa Nm 3)
t: Either shown in 0 or 1
8.3.3 4~20mA Connection
Input: 24VDC
Output: 4~20 mA
（ 4mA @ 0 Nm 3/h; 20 mA@ Max. Flow )

8.3.4 Pulse output

The meter supply pulse output in form of even square wave. The even square wave is composed of 3.3V signal
high and 0V signal low, and every pulse equal to 0.001Nm 3.

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8.3.5 Automatic stored data

The meter can automatically record mass flow rate, accumulated flow rate and time. To retrieve these data,
please contact manufacturer for the necessary user interface software. The data store interval can be
customized and please contact manufacturer for further information.
9. Safety and Maintenance
9.1 Wetted Materials and Compatibility
The meter body and pipe are made of 316L stainless steel. Sensors comprise of silicon, silicon nitride and
silicon dioxide and the sensor surfaces are passivated with silicon nitride and silicon dioxide. The electronic
sealing is provided by RTV (room temperature vulcanizing) #643 Highly Chemical Resistant Coating.
9.2 Safety Precautions
The product is designed for use with general purpose gases such as compressed air. Until the products have
been fully certified with explosion proof, it is advised that the products are best used for non-explosive clean
gases. This meter cannot be used for gas metrology of fluoride or fluoride containing gases. For updates of the
product certification information, please contact the manufacturer or visit www.Siargo.com. Using for other
gases that are extreme corrosive and toxic may cause the product malfunctioning or even severe damages.
The product sealing is ensured to work under working pressure of 200 psig and is leakage proof before the
shipment. But cautions and further leakage test are important at installation since any leakage could cause
severe safety issue.
The power supply for this product is 8~24 VDC, all precautions and measures for electrical voltage handling
must apply.
Attentions: any alternation and/or improper use of the product without the permission of the
manufacturer can cause unpredicted damage and even injuries or other severe situations. Siargo Ltd. or
any of its employees and subsidiaries shall not be held liable and indemnified against consequences due
to such circumstances via improper use of the product.

9.3 Maintenance
Attentions: without prior permission of the manufacturer, please do not attempt to alter any parts of the
product as it may cause unrecoverable damages. If any questions or doubts come up, please contact the
manufacturer immediately before further actions. Please ensure the DC power is off before
disassembling the meter.
All maintenance of the meter should be done by trained and certified personnel by Siargo Ltd.

10. Warranty
(Effective September 2004)
Siargo warrants the products sold hereunder, properly used and properly installed under normal
circumstances and service as described in the user's manual, shall be free from faulty materials or
workmanship for 180 days for OEM products, and 365 days for non-OEM products from the date of shipment.
This warranty period is inclusive of any statutory warranty. Any repair or replacement serviced product shall
bear the same terms in this warranty.
Siargo makes no other warranty, expressed or implied and assumes no liability for any special or incidental
damage or charges, including but not limited to any damages or charges due to installation, dismantling,
reinstallation or any other consequential or indirect damages of any kind. To the extent permitted by Law, the
exclusive remedy of the user or purchaser, and the limit of Siargo's liability for any and all losses, injuries or
damages concerning the products including claims based on contract, negligence, tort, strictly liability or
otherwise shall be the return of products to Siargo, and upon verification by Siargo to prove to be defective, at
its sole option, to refund, repair or replacement of the products. No Action, regardless of form, may be
brought against Siargo more than 365 days after a cause of action has accrued. The products returned under
warranty to Siargo shall be at user or purchaser's risk of loss, and will be returned, if at all, at Siargo's risk of
loss. Purchasers or users are deemed to have accepted this limitation of warranty and liability, which contains
the complete and exclusive limited warranty of Siargo, and it shall not be amended, modified or its terms
waived except by Siargo's sole action.

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This warranty is subject to the following exclusions:

1. Products that have been altered, modified or have been subject to unusual physical or electrical
circumstances indicated but not limited to those stated in the user's manual or any other actions which cannot
be deemed as proper use of the products
2. Siargo does not provide any warranty on finished goods manufactured by others. Only the original
manufacturer's warranty applies.

11. Customer Service and Order information

Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions, and or product
supports, please contact customer service at the address listed below. We will respond your request in a timely
fashion and will work with you toward your complete satisfaction.
Customer service and all orders should be addressed to
Siargo Ltd.
2041 Mission College Blvd., Suite 250
Santa Clara, CA 95054.
Tel: 01-(408)969-0368
Fax: 01-(408)777-8091
Email: Info@Siargo.com.
For orders, please provide accurate and full post address. Siargo will not ship to P.O. Boxes or via a third
party.
For further information and updates, please visit www.Siargo.com.

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Siargo Ltd.
2041 Mi ssion Co llege Blvd, Ste 250
Santa Cl ara, CA 95054 US A
Tel:+1(408)969-0368
Ema il: Info@Si argo.com
Ht tp: //ww w. Siargo.com