BY3000 User's Manual PDF

BY3000 SPM User’s Manual
BY3000
Scanning Probe Microscope System
User’s Manual
V1.00.3 English Version
1
If you are about to install the softwares on a new Windows system,

please following the instructions below:
1. Install the Microsoft DotNetFrameWork: Click on dotnetfx.exe and follow the instructions;
2. Install Winpcap: Click on WinPcap_4_1_2.exe and follow the instructions;
3. Install SPMConsole software: Click on Setup.exe in the SPMConsole dictionary, and follow
the instructions;
4. Install Imager 4.7 software: Click on Setup.exe in the Imager 4.7 dictionary, and follow the
instructions;
5. If you run the SPMConsole software for the first time, please setup your system as following:
A. Open the “Network Connections” window in the Windows Control Panel;
B. Right click on the network icon (usually appears as “Local Area Connection”), choose
“Properties”;
C. Double click on “Internet Protocol (TCP/IP)” in the “This connection uses the following
items:” box;
D. Insert 192.168.1.x (x is any integer between 2 and 255) in the “IP Address”;
E. Insert 255.255.255.0 in the “Subnet Mask”;
F. Click “OK” to save the changes and quit;
G. Run SPMConsole, and open the “NICs settings” in the “System” menu;
H. Insert the controller’s Instrument Code, either “Serial Number” or “MAC address” can
be used, you can find both of these two parameters on the back of the controller.
I. Click on “Start Detect” and wait a few seconds;
J. The instrument will be automatically connected with the SPMConsole software;
K. Please follow the detailed instructions for connection setup in chapter 1.10;
6. If you run the SPMConsole for the first time, please load the scanner parameters as following:
A. Open “Scanner settings” window in the System menu;
B. Choose “Current Scanner” (Usually to be 1);
C. Use “Load Param” to load the scanner parameters which is in the “Scanner Parameters”
dictionary as a “.spf” file;
D. Click “Refresh” after loading the parameters;
E. If you have more than one scanner, choose a different scanner number and load its
parameters;
F. Close the window when all scanner parameters have been loaded;
G. Open “X/Y non-linear correction” window in the System menu;
H. Choose a scanner which should be the same one in the “Scanner Settings” window;
I. Use “Load item” to load the scanner XY nonlinear correction parameters which is in the
“Scanner Parameters” dictionary as a “.cos” file, input the scanner name;
J. Click on the scanner name you just loaded to highlight it, Click “Update”;
K. If you have more than one scanner, choose a different scanner number and load its
parameters and the above procedures;
L. Close the window when all scanner parameters have been loaded;
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Table of Contents
Warnings ...................................................................................................................................4
Chapter 1 Introduction ..............................................................................................................5
1.1 System Components ......................................................................................................5
1.2 The SPM Controller ......................................................................................................5
1.3 The SPM Head ..............................................................................................................6
1.4 The SPM Base ...............................................................................................................6
1.5 Scanners.........................................................................................................................7
1.6 Tip Holders ....................................................................................................................8
1.7 Probes ............................................................................................................................9
1.8 The SPM Feedback Control System..............................................................................9
1.9 General discussion of main scanning parameters........................................................11
1.10 Software installation and setup..................................................................................12
Chapter 2 Probe Installation and Laser Alignment （AFM only）.......................................14
2.1 Probe Installation.........................................................................................................14
2.2 Laser Alignment ..........................................................................................................14
Chapter 3 Contact Mode of AFM............................................................................................18
3.1 The Contact Mode basics ............................................................................................18
3.2 The LFM basics...........................................................................................................19
3.3 Real-time Operations...................................................................................................19
Chapter 4 Tapping Mode of AFM ...........................................................................................22
4.1 The Tapping Mode basics............................................................................................22
4.2 The Phase Mode ..........................................................................................................23
4.3 Real-time operations....................................................................................................23
Chapter 5 Scanning Tunneling Microscopy ............................................................................30
5.1 The STM basics...........................................................................................................30
5.2 The STM Controls.......................................................................................................31
5.3 Real-time STM Operation ...........................................................................................32
Chapter 6 Curve Measurements ..............................................................................................35
6.1 Force-Distance Curve (Only in AFM Contact Mode) .................................................35
6.2 Amplitude-Distance Curve (only in AFM Tapping Mode)..........................................37
6.3 I-V Curve (STM).........................................................................................................38
Chapter 7 Optimization of scanning .......................................................................................39
Chapter 8 Basic Operating Procedures....................................................................................43
8.1 Contact Mode of AFM.................................................................................................43
8.2 Tapping Mode of AFM ................................................................................................45
8.3 Scanning Tunneling Microscope (STM) .....................................................................47
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Warnings
WARNING! ± 200V-high voltage is applied to SPM. Power off the
controller before any hardware connection or disconnection.
WARNING! When engaged, SPM Head or SPM Base should NOT be moved.
All knobs on the SPM Head should Not be adjusted either.
WARNING! During and prior to set up of the laser, it is especially important to

avoid looking directly at the laser beam or at the laser spot. Care should be taken
when highly reflective samples are inserted onto the chuck. Avoid looking at all
reflected laser light. Operators should use care to avoid staring into beams that may be
reflected from sample surfaces.
WARNING! Staring at a bright beam or reflection can result in eye damage.
WARNING! To avoid eye damage due to high-level laser light, do NOT place
highly reflective or metallized objects into the head area while the laser is on.
Note!
Both the MAC address and the Serial Number of the instrument can be found on the
back of the controller.
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Chapter 1 Introduction
1.1 System Components
Component list:
z SPM Controller
z Computer System
z SPM (including SPM Base, SPM Head, Tip Holders, Scanner and Probes)
z Controller to SPM cable, 37-to-37 pin, D-type
z Ethernet cable, Computer to SPM Controller
z Power cable
1.2 The SPM Controller
The SPM Controller handles all SPM electronics such as signal processing and feedback
programming.
The interfaces on the back of the SPM Controller are defined by：
AC In Power
FUSE Fuse
SPM Connect to SPM base
Ethernet Ethernet interface, connect to computer
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1.3 The SPM Head
SPM Head
① Laser ② Steady Spring Holders
③ Steady Spring Holders ④ Laser X-adjust knob
⑤ Laser Y-adjust knob ⑥ PSD X-adjust knob
⑦ PSD Y-adjust knob ⑧ TipHolder installation notch
1.4 The SPM Base
SPM Base
1. Head-Base connector 2. Scanner 3. Steady springs 4. Motor #1
5. Motor #2 6. Motor #3 7. LED (always be on when power is switched on)
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1.5 Scanners
SPM scanners are made of piezo tubes and are steady held in the SPM base.
Piezo scanner can extend and retract 3-dimentionally based on the applied X, Y and Z voltage. By
characteristic distinctions, each scanner has its own specified parameters.
If SPMConsole software is run for the first time, please load the Scanner
parameters by following:
1. Click on “System” menu and open the “Scanner settings” window;
2. Tick to choose scanner number to specify the present;
3. Click on “Load Param” and locate the corresponding scanner parameter file which is in *.spf
format;
4. Click on “Refresh”;
5. Click on “Close” to close the window;
6. Open the “System”—“Non-linear correction” window;
7. Click on “Load Item” and locate the corresponding scanner parameter file which is in *.cos
format;
8. Click on the file name which is loaded and click “Update”;
9. Close the “Non-linear correction” window, and the correction has been completed.
Non-linear Correction of the Scanners:
Non-linear effect of scanners occurs due to piezo characteristics. An example of grating is shown
below.
Before Correction After Correction
Two calibration equations can be applied to correct the non-linear effect on both fast and slow
scan directions (X and Y direction) as the followings:
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x ′ = Ax + B x ⋅ x + C x ⋅ x 2 + D x ⋅ x 3
y ′ = Ay + B y ⋅ y + C y ⋅ y 2 + D y ⋅ y 3
To obtain and use the non-linear correction parameters by:
1. Scan a sample with a surface of symmetrical periods (i.e. a DVD-R or CD-R disk or grating);
2. Run the non-linear correction program in Imager 4.7 software to obtain the X/Y non-linear
correction parameters;
3. Open the “System”—“Non-linear correction” window and input the parameters, and click
“Refresh”;
4. Close the “Non-linear correction” window, and the correction has been completed.
1.6 Tip Holders
Two types of Tip holders are used in the SPM system, based on different modes as shown below:
Tip
Holder
for
AFM
Front Back
① Tip holder Handle ② Spring Clip to secure the cantilever ③ Cantilever notch
Tip
Holder
for
STM
Front Back
① Tip holder Handle ② Installation tube for Pt-Ir or tungsten tips
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1.7 Probes
Different kinds of probes can be used on the system. Proper probe selection has to be made by
samples’ characteristics and system conditions.
z Metal Probes
Probe used in STM must be conductive and a atomic-sharp tip is required. STM tips can be obtain
by simply cut (for Pt-Ir) and electronically eroded (for tungsten).
z Cantilever Probes
A flexible cantilever with an atomic-sharp tip is widely used in AFM as below.
Triangle cantilever probe Rectangle cantilever probe Tip
Most cantilever probes are made by Si or SiN with different types of coatings and different shape
and size. Different samples and system conditions required different cantilevers.
Contact Mode: Theoretically all kinds of cantilever probes can be used in contact mode. But
because of the different Force constant parameters, harder cantilever will cause the sample
damages with the same amount of deflection.
Tapping Mode: A oscillating cantilever is required in Tapping mode. So theoretically using

cantilevers with higher resonance frequency will give better resolution. Cantilevers with larger
force constant and higher resonance frequency (normally over 200kHz) should be chosen.
1.8 The SPM Feedback Control System
In summary, the basic feedback processes may be broken down as follows:
z Look Ahead gain
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Having a record of previous lines over topography enabled feedback controls to better anticipate
the rises and falls of the below them. Similarly, the feedback controller relies upon data from the
previous (immediately adjacent) scan line to anticipate local features. It is easier to image samples
which contain regular, periodic features (e.g., gratings) since scan lines change relatively little
from scan-to-scan. Consider, for example, scan lines tracing the surface of a penny.
Although this scan is much larger than normally found in SPM, it illustrates how an adjacent,
lagging scan line can be used to determine local scan lines on regular surfaces. In most places (e.g.,
the forehead), each scan line changes little from the line next to it. In some local areas (such as
under the nose) there are small, sudden changes; however, these are relatively isolated. In contrast,
a similar trace of an irregular, random surface would reveal that each scan line bears little
resemblance to its adjacent line.
The entire purpose of LookAhead gain is to take full advantage of regular features by using every
line to anticipate the next one. In SPM Console software, the LookAhead gain value may be
adjusted between a range of 0 (off) to 1000 (maximum). As values are adjusted upward from 0,
the LookAhead gain is weighted to apply more data from the adjacent (lagging) line. Although
LookAhead gain is relatively useless for random surfaces, it is a tremendous help on regular
surfaces.
When LookAhead gain is switched on ( > 0), it is the first gain calculated in the feedback process.
That is, the LookAhead-weighted integral gain, is calculated by subtracting the adjacent pixel’s
Z-axis value from the one immediately next to it, then multiplying this difference by the
LookAhead gain value1 and summing the product with the current data value.
At start-up, there is no information yet recorded from an adjacent scan line; therefore, the
LookAhead gain is effectively 0 until several lines have been scanned. This allows the system to
settle down and record data.
z Integral gain and average error
The second step in the feedback process uses integral gain to correct for error by averaging
(integrating) the total error. The SPM’s feedback process maintains a running average of the error
and responds to it.
The integral gain is used to calculate a running average of error which is the new average error
calculated by adding the old average error to the product of the integral gain times the error. The
running average represented by maintains itself continually until one or more of the major
scanning parameters is changed by the operator. Whenever major scan parameters are changed
(e.g., Setpoint), the error accumulator is dumped and begins a new running average.
With the average error calculated, the feedback system is prepared to make its final error
correction based upon proportional gain.
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z Proportional gain
The third and final step in the feedback process uses proportional gain to complete error correction.
Recall that proportional gain responds to error in proportion to how much it differs from the
setpoint. Proportional gain is used to calculate the final correction voltage sent to the Z-axis piezo,
by the time proportional gain is figured in, the bulk of error correction has already been completed.
This tends to make Proportional gain a less “touchy” control when compared to Integral and
LookAhead gain. Nevertheless, the system can be driven into oscillation whenever gains are
excessive, including Proportional gain.
1.9 General discussion of main scanning parameters
z Basic control parameters
Scan Scope — Size of the scan along one side of a square. If the scan is non-square (as
determined by the Aspect ratio parameter), the value entered is the longer of the two sides.
Aspect ratio — Determines whether the scan is to be square (Aspect ration 1:1), or non-square
(Aspect ratio 2:1, 4:1, 8:1 or 16:1).
X offset, Y offset — These controls allow adjustment of the lateral scanned area and the center
of the scanned area.
Scan Angle — Combines X-axis and Y-axis drive voltages, causing the piezo to scan the sample
at varying X-Y angles.
Scan rate — The number of lines scanned per second in the fast scan direction.
Resolution — Sets the number of pixels displayed per line and the number of lines scanned per
frame.
Integral gain and Proportional gain — Controls the response time of the feedback loop.
The feedback loop tries to keep the output of the SPM equal to the setpoint reference chosen. It
does this by moving the piezo in Z to keep the SPM's output on track with the setpoint reference.
Setpoint — Setpoint refers to how much tip-sample force is to be maintained. There are two
ways of defining setpoint, depending upon whether one is referring to contact AFM or Tapping
Mode. In contact AFM, setpoint is determined by the amount of cantilever flexion — as the
setpoint increases, the cantilever flexes more and tip-sample forces increase. In Tapping Mode,
setpoint is determined by the RMS amplitude of the oscillating tip—as setpoint decreases, RMS
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amplitude decreases, but tip-sample forces increases.
Z limit — sets the maximum voltage can be applied to the scanner Z-axis.
z Data types of the images
AFM Contact Mode:

Topography — the rise and fall of the sample surface.
Deflection — cantilever flexes because of the rise and fall of sample topography and the amount
of this deflection can be reflected by the Photodectetor’s Up-Down signal.
Friction — lateral forces between tip and sample, which causes the torsion of the cantilever and
can be reflected by the Photodectetor’s Left-Right signal.
AFM Tapping Mode:

Topography — he rise and fall of the sample surface.
Amplitude — cantilever oscillating amplitude changes because of the rise and fall of sample
topography.
Phase — cantilever oscillating phase changes because of the sample material characteristics.
STM:
Topography —the rise and fall of the sample surface.
Current — Tunneling current changes between tip and sample surface.
1.10 Software installation and setup
z Installation of DotNetFx and Winpcap

¾ Double click on the dotnetfx.exe;
¾ Follow the instructions and click “finish” when DotNetFx is successfully installed;
¾ Open the winpcap folder in the Setup directory;
¾ Double click on the WinPcap_4_1_2.exe;
¾ Follow the instructions and click “finish” when Winpcap is successfully installed;
¾ Note: DotNetFx and Winpcap must be installed before other on-line software’s installation,
or the SPMConsole can not be installed or run properly;
z On-line software installation

¾ Open the “SPMConsole” folder in the Setup directory;
¾ Double click on “Setup.exe”;
¾ Follow the instructions and click “next” during the setup process;
¾ Click “finish” when the installation is done;
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z Network setup
Important: After the controller is power on, the network connection icon
will be like , or ; if the icon appears like ,
or , please check the cable or your computer settings.
1. Open the “Network Connections” window in the Windows XP;

2. Right click on the network icon (usually appears as “Local Area Connection”), choose
“Properties”;
3. Double click on “Internet Protocol (TCP/IP)” in the “This connection uses the following
items:” box;
4. Insert 192.168.1.x (x is any integer between 2 and 255) in the “IP Address”;
5. Insert 255.255.255.0 in the “Subnet Mask”;
6. Click “OK” to save the changes and quit;
7. Power on the controller, the windows network icon appears like this;
8. Run SPMConsole, choose “Winpcap” in the “System- Net Driver” menu;
9. Open the “NICs settings” in the “System” menu, either “Serial Number” or “MAC address”
can be used, you can find both of these two parameters on the back of the controller;
Insert Serial Number Insert MAC address

10. Click on “Start Detect” and wait a few seconds;
11. The instrument will be automatically connected with the SPMConsole software;
z Off-line software installation

¾ Open the “Imager 4.7” folder in the Setup directory;
¾ Double click on “Setup.exe”;
¾ Follow the instructions and click “next” during the setup process;
¾ Click “finish” when the installation is done;
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Chapter 2 Probe Installation and Laser

Alignment （AFM only）
2.1 Probe Installation
1) Choose the proper probe according to the present mode;

2) Place the AFM tipholder upfront, press the spring chip with your forefinger and thumb,
gently lift the chip up to separate the chip and tipholder; catch the cantilever chip with a
tweezers using your another hand load the probe onto the tipholder, gently release the spring
chip;
Important: Use your two fingers evenly to lift the chip when you are
about to install or take out the AFM probe. This can prevent the
chip from tilt or damage.
2.2 Laser Alignment
Click the “LASER” button to turn the laser on, then adjust the laser X/Y adjustment knob to
position the laser focus on the very tip of the cantilever.
Adjust as following:
1): Position the laser beam on the cantilever substrate.
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Clockwise move the laser Y-adjust knob, till the laser beam is located on the tipholder or the
cantilever substrate. Now the laser beam is reflected brightly from the substrate and a very bright
laser spot can be observed form the front of the SPM Head.
2): Position the laser beam off the cantilever substrate.
Move the laser X and Y adjustment knob, position the laser beam off the cantilever substrate
and around the cantilever.
Because of the trapezoidal edge of the substrate, laser will be reflected to the front of the
SPM Head in that edge. When a reflected laser spot is observed in front of the SPM Head, slight
Y-adjustment can turns the laser beam to the cantilever region.
A: Laser beam is reflected by the cantilever

substrate to position A where is the same
position of the user’s eyes.
B: Laser beam is reflected on the trapezoidal

edge of the substrate to position B where is in
front of the SPM Head.
Different laser reflected positions on cantilever substrate
3): Position the laser beam to the very tip position of the cantilever by a Paper
Method.
In this Paper Method, the user inserts a narrow (about 1 cm wide) slip of paper into the head
(under the PSD), and observes patterns reflected from the top side of the cantilever. Once learned,
this is a very quick method for obtaining laser alignment. Because the slip of paper prevents light
from reaching the PSD, the sum signal cannot be monitored while using this method.
Move the Laser X-adjust knob (Do not move the Y-adjust knob), by observing the reflected
patterns, the position of the laser beam can be known.
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Laser Laser
Pattern on the paper Pattern on the paper Explanations
Position Position
Laser beam directly passes

A No reflected patterns E No reflected patterns
through the cantilever.
Laser beam is on the edge
of the cantilever. A
diffraction pattern (half
B D
bar-shape) which is
vertical to the cantilever
legs can be observed.
diffraction pattern (half
F G
bar-shape) which is
vertical to the cantilever
legs can be observed.
H diffraction pattern which is
bar-shaped can be
observed.
Laser beam is fully on the
tip and completely
C and I
reflected. A bright circle
laser spot can be observed.
Using the X-adjust knob, move the laser beam vertical to the edge of the substrate while looking
for a reflection on the paper slip. Typically, the beam will reflect off both edges of the cantilever,
so there will be only one spot reflected which may or may not show on the paper. In either case,
the object is to position the beam along the cantilever by counterclockwise moving the Y-adjust
16
knob, till the bright and circle reflected spot just disappears. Then clockwise move the Y-adjust
knob, till the spot has just emerged.
Clockwise Counterclockwise
X-adjust Knob
Laser beam is on the edge of the cantilever. A diffraction pattern which is vertical
to the cantilever legs can be observed.
Y-adjust Knob
Laser beam is on the edge of the
Laser beam is still on the cantilever. cantilever. A diffraction pattern which is
bar-shaped can be observed.
4): Move the PSD X and Y adjustment knob, till the laser spot is positioned the
center of the “Laser” windows of the SPM Console software. Now the Up-Down
and Left-Right signal are both close to 0.
Now, the Laser Alignment process is completed.
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Chapter 3 Contact Mode of AFM

3.1 The Contact Mode basics
A B C D E F
A: Laser is positioned on the center of the PSD, Up-Down signal equals to 0.
B: Up-Down signal equals to Setpoint after engagement.
C: Topography raises, cantilever flexes more, Up-Down signal is larger than Setpoint.
D: Z Voltage of the scanner decreases, and the piezo retracts, till Up-Down signal equals to Setpoint.
E: Topography descends, cantilever flexes less, Up-Down signal is smaller than Setpoint.
F: Z Voltage of the scanner increases, and the piezo extends, till Up-Down signal equals to Setpoint.
Contact Mode basics: The feedback system controls the scanner’s Z voltage to
maintain the tip-sample force constant, which leads the Up-Down signal equals to
the Setpoint. The Z voltage is recorded for calculating the sample topography.
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3.2 The LFM basics
There is lateral force between tip and sample in Contact Mode which causes torsion of the
cantilever. The amount of this torsion can be reflected by PSD’s (Photodetector) Left-Right
signal. As the followings:
3.3 Real-time Operations
3.3.1 Initial control settings
Basic settings:
1. Determine the proper Scan Scope, Scan Angle, X offset and Y offset;
2. Choose image ratio aspect: 1:1 for Square and others for Rectangle region;
3. Determine the Scan Rate: 1Hz suggested;
4. Bias: 0V suggested;
5. Input the non-linear correction parameters of current scanner, all can be set 0 if not sure;
Feedback settings:
1. Setpoint: 0.1~0.5, 0.2 suggested;
2. Integral Gain: 200 suggested;
3. Proportional Gain: 200 suggested;
4. Look Ahead Gain: 0 suggested;
3.3.2 Engage
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Feedback Control Test:

1. Turn on the laser;
2. Align laser. Laser spot should be on the center of the laser window. Up-Down and Left-Right
signals both equal to 0, Sum signal is maximized, and the Z voltage is +180V;
3. Move the PSD Y-adjust knob counterclockwise to make the Up-Down signal is larger than
Setpoint, and the Z voltage should be -180V;
4. The feedback control is normal；
5. Reset the laser spot to center, Up-Down signal equals to 0;
Engage:
1. Click on the “Engage” button, and the “Engage” window is activated. Then open the
“Engage” box;
2. Click “Engage Automatically”, auto engagement begins, Z voltage is +180V;
3. If sample-tip distance is too far, auto engagement will stop after several minutes. Click
“Engage Automatically”, and the auto engagement continues;
4. Auto engagement stops when Z voltage is less than +180V;
5. Open the “Run single” box, click on “Engage single” or “Withdraw single” till Z voltage is
around 0V;
6. Click “Done”, engagement finished;
3.3.3 Determine the Sensitivity:
1. Open “Measure Curve” window, preset proper “Start Voltage”, “End Voltage” and “Points”;
2. Curve Type: Force;
3. Measurement: Sensitivity;
4. Click “Capture” to obtain a good Force Curve;
5. Use the mouse’s right button to draw a line parallel to the part of the plot where the tip is on
the surface. To clear the screen, click the mouse’s right button again while in the graph.
Sensitivity will be automatically showed on the top of the graph;
6. Fill in the “Sensitivity” box;
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3.3.4 Adjustment of Scanning Parameters:

1. Enable “Continuous” and “Dual”;
2. Click “Scan”, scanning begins. Open “Topography” window, 3 signals will be shown on the
Scope Grid which are Trace, Retrace and Difference;
3. Adjust “Gain” parameter in “Topography” window, till the scan signal is well contrasted and
beyond the maximum and minimum;
4. Choose “Lowpass Filter” level if necessary;
5. Adjust “Integral Gain”, “Proportional Gain”, “Look Ahead Gain”, “Setpoint” and “Scan
Rate”. If the feedback parameters are adjusted optimally, the trace and retrace scan lines
should look very similar, but may not look completely identical;
6. Click “Stop”, scanning parameter adjustment is finished;
3.3.5 Start Scanning, Save Images and Stop Scanning:
Start scanning:
1. Disable “Dual” and “Calibration”;
2. Click “Scan”, sample scanning begins;
3. Adjust “Gain”, “Z Limit”, “Brightness”, “Lowpass Filter” in Topography/Deflection/Friction
window;
Save Images:
1. When a single scan is over, scan images will be save in the Image Buffer automatically;
2. Click mouse’s right button on the target image to activate a dialogue box;
3. Click “Save as…” and specify a file name, to save the target image to specified folder;
Stop scanning:
1. Click “Stop”, sample scanning stops;
2. Click “Engage”, and open the “Withdraw” box;
3. Click “Start”;
4. After a few seconds, Click “Done”;
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Chapter 4 Tapping Mode of AFM

4.1 The Tapping Mode basics
In Tapping Mode, a cantilever is oscillating in free air at its resonant frequency. A piezo stack
excites the cantilever’s substrate vertically, causing the tip to bounce up and down. As the
cantilever bounces vertically, the reflected laser beam is deflected in a regular pattern over a
photodiode array, generating a sinusoidal electronic signal. And this signal is converted to a root
mean square (RMS) amplitude value.
When the same cantilever is oscillating at the sample surface, Although the piezo stack continues
to excite the cantilever’s substrate with the same energy, the tip is deflected in its encounter with
the surface. The reflected laser beam reveals information about the vertical height of the sample
surface.
Fig. A Stronger drive signal causes lager Fig. B The lower Setpoint is, the larger Fig. C Wrong
free amplitude. sample-tip force is. Setting.
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4.2 The Phase Mode
The difference between the actual phase of the oscillating cantilever and the phase of the drive
signal can also be detected in Tapping Mode, which is named Phase Mode as shown below:
Phase Mode reveals some characteristics of the sample material itself. These material
characteristics may include elasticity ("hardness"), magnetic and/or electric forces present.
4.3 Real-time operations
4.3.1.1 Basic settings

4. Bias: 0V suggested;
4.3.1.2 Feedback settings

1. Integral Gain: 200 suggested;
2. Proportional Gain: 200 suggested;
4.3.1.3 Tuning the cantilever Frequency Sweep
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This section describes steps required to find the resonance peak of the cantilever and adjust the
oscillation voltage so the cantilever will vibrate at an appropriate amplitude. A range of vibration
frequencies will be applied to the cantilever to determine the frequency which produces the largest
response (the resonance frequency). In most instances, the resonance peak will have a sharp
Gaussian distribution but sometimes the peak can be somewhat ragged. The system will tolerate
some deviation in the shape of the peak.
Tuning:
1. Turn the laser on and align. Laser spot should be on the center of the laser window. Up-Down
and Left-Right signals both equal to 0, Sum signal is maximized;
2. Switch to “Tapping Mode”;
3. Display the “Frequency Sweep” window;
4. Choose a channel ( or , displayed in blue or green lines respectively,

Amplitude must be chosen for the amplitude signal will be used in the feedback loop);
5. Initial the Frequency Scanning Scope, the cantilever resonance signal will be captured
between the preset Start and End Frequency. The input frequency is equivalence to the two
black markers;
6. Initial the Drive Signal:
Tapping Drive Amplitude: the intensity of the drive signal in Tapping Mode. This value
should be low initially (for example: 0.05V) for preventing the cantilever breaks. Increase
this value gradually if the resonance signal is too small.
7. Click “Full Scope Capture”, from 50kHz to 500kHz cantilever resonance signal will be
captured. As shown below, with a 0.30V drive signal, cantilever resonance frequency is about
260kHz.
24
8. Gradually narrow down the Frequency Scanning Scope by inputting the Start/End Frequency
box or moving the two black markers, the cantilever resonance frequency and amplitude can
be precisely determined.
For example as shown below, Start Frequency is 260.8075kHz and End Frequency is
263.0745kHz, click “New Scope Capture” button, the cantilever resonance peak can be found, and
cantilever oscillation signals are also displayed which is equivalence to the red marker.
25
9. The intensity of drive signal should be increased if the cantilever resonance amplitude is too
low. Increase the “Tapping Drive Amplitude” gradually and re-capture the frequency sweep.
The cantilever resonance peak amplitude should be around 1V (0.8-1.5V).
Set Cantilever Oscillating Frequency and Setpoint

1. Cantilever Oscillating Frequency (the abscissa of the red marker, also displayed in the
“Frequency” box in the “Cantilever Oscillating Signal”) should be set a little bit lower than
the resonance peak which makes the oscillating amplitude is 75%~95% of the peak
amplitude (the linear part). As the red region shown below.
2. Setpoint should be set as the 50%~70% amplitude of the resonance peak. As the blue region
shown below.
26
3. The Frequency Sweep will be similar as below when tuning is finished:
4.3.2 Engage
Feedback Control Test:

1. Open the “Frequency Sweep” window;
2. Drag and move the red marker to just below the resonance peak, and the Z voltage should be
+180V;
27
3. Drag and move the red marker to position where the cantilever oscillating amplitude is lower
than the Setpoint, and the Z voltage should be -180V;
4. The feedback control is normal;
5. Remove the red marker to the preset position;
Engage:
“Engage” box;
around 0V;
4.3.3 Determine the Sensitivity:
1. Open “Measure Curve” window, preset proper “Start Voltage”, “End Voltage” and “Points”;
2. Curve Type: Amplitude;
3. Measurement: Sensitivity;
4. Click “Capture” to obtain a good Amplitude Curve;
5. Use the mouse’s right button to draw a line parallel to the part of the plot where the
amplitude is linearly decreased. To clear the screen, click the mouse’s right button again
while in the graph. Sensitivity will be automatically showed on the top of the graph;
6. Fill in the “Sensitivity” box;
28

Start scanning:
3. Adjust “Gain”, “Brightness”, “Lowpass Filter” in Topography/Amplitude/Phase window;
Save Images:
Stop scanning:
29
Chapter 5 Scanning Tunneling Microscopy

5.1 The STM basics
STM relies on “tunneling current” between the probe and the sample to sense the topography of
the sample. The STM probe, a sharp metal tip (in the best case, atomically sharp), is positioned a
few atomic diameters above a conducting sample which is electrically biased with respect to the
tip. At a distance under 1 nanometer, a tunneling current will flow from sample to tip. In operation,
the bias voltages typically range from 10 to 1000 mV while the tunneling currents vary from 0.1 to
10 nA. The tunneling current changes exponentially with the tip-sample separation, typically
decreasing by a factor of two as the separation is increased 0.2 nm. The exponential relationship
between the tip separation and the tunneling current makes the tunneling current an excellent
parameter for sensing the tip-to-sample separation. In essence, a reproduction of the sample
surface is produced by scanning the tip over the sample surface and sensing the tunneling current.
STM relies on a precise scanning technique to produce very high-resolution, three-dimensional

images of sample surfaces. The STM scans the sample surface beneath the tip in a raster pattern
while sensing and outputting the tunneling current to the SPM Controller. The digital signal
processor (DSP) in the Controller controls the Z position of the Piezo Scanner based on the
tunneling current error signal. The STM operates in both “constant height” and “constant current”
data modes, depending on the Feedback Gain settings. The DSP always adjusts the height of the
tip based on the tunneling current error signal, but if the feedback gains are set extremely low (e.g.,
Integral Gain < 15 and Proportional Gain < 15), the piezo remains at a nearly constant height
while tunneling current data is collected. With the Feedback Gains high (e.g., Integral Gain >15
and Proportional Gain >15), the Scanners Piezo height changes to keep the tunneling current
nearly constant, and changes in piezo height are used to construct the image. The exponential
relationship between tip-sample separation and tunneling current allows the tip height to be
controlled very precisely.
30
5.2 The STM Controls
z The Feedback Controls
The STM control panels contain three items that are specific to the operation of the Scanning
Tunneling Microscope. The Feedback type, Bias, and Setpoint parameters pertain exclusively to
the control of the STM.
The Feedback type parameter determines the transformation performed on the tunneling current
prior to the feedback calculations. The two settings are Linear and Log. Remember that tip-sample
separation is proportional to the log of the tunneling current. The Linear selection causes the error
signal for the feedback loop to be the difference between the instantaneous tunneling current and
the Setpoint current. The Log selection calculates the error signal as the difference between the log
of the instantaneous tunneling current and the log of the Setpoint current. The Bias parameter
controls the magnitude and sign of the bias voltage applied between the tip and the sample. A bias
voltage encourages the tunneling current to flow. Although settings of 10~100 mV are typical for
conductive samples, the allowable setting ranges from -1~+1 Volts. Positive settings of the bias
voltage induce positive tunneling currents (i.e., electrons flowing from the sample-to-tip). A
higher bias keeps the tip further from the surface, giving the feedback loop greater tolerance in
tracking the surface.
Settings for Feedback Gains depend on many factors. The Look Ahead gain adds information
from the previous scan line into the feedback calculation, so it is most useful for samples with
long features oriented along the slow scan axis.
The gains should be lowered for data captured using the linear Feedback type (Linear), especially
with high Setpoint current levels. When using the Log Feedback type (Log), the feedback gains
should be typically 5 to 10 times larger than using the Linear Feedback type. Large-scale images
should be taken at increased gains, except for the Look Ahead gain, which is best kept to zero (0).
First, increase the Integral gain until oscillations start to appear, and then, back off a little. Next,
adjust the Proportional gain. High frequency fuzz will appear on the signal when the Proportional
gain is set too high.
Increasing the Setpoint current can also be helpful for larger scans. This has the effect of raising
the gain, but also brings the tip closer to the surface by a small amount.
The Feedback type can be set to either Log or Linear input transformations. Because the
tip-to-sample separation is proportional to the log of the tunneling current, the transformation
performed on the tunneling current prior to the feedback calculation can have dramatic effects on
the performance of the feedback loop. Linear input is more protective of the tip, because the
31
feedback error signal responds exponentially to tip-sample separation. When the tip-to-sample
separation decreases, the error signal rises exponentially, quickly driving the tip away. However,
the error signal is unsymmetrical. The same sample-to-tip separation change that caused the tip to
move away so quickly will generate a small error signal when the tip is higher than it is supposed
to be. This unsymmetrical response in linear (Lin) mode will distort data. For this reason, the Log
mode —with ln (I) used in the feedback calculation—are preferable for most samples, because
they respond in a more symmetrical fashion to positive and negative sample slopes. Large scans
cannot be taken at the same scan rate as small scans. When using the large scanners with scans
above a few microns, the Scan rate should be lowered below 2 Hz. Best results can be obtained at
scan rates of 1 Hz or less, although image-taking is slow. To ensure there is no image degradation
due to a high Scan rate, lower the rate and check for changes in the image. The Lowpass filter
parameter provides the option of filtering the tunneling current signal.
z Tunneling tips
Although the microscope will accept any 0.25mm diameter tip, tips made of platinum iridium (PtIr)
and tungsten are used most often. Tungsten tips can be obtained by electrochemically etched from
tungsten wire. PtIr tips can be obtained by simply cut.
Pt-Ir tips seem to give better atomic resolution than tungsten, probably due to the lower reactivity
of platinum. The PtIr tips are not as uniformly shaped as the tungsten tips, so freshly etched
tungsten tips may provide cleaner data when scanning steeply sloped surfaces such as compact or
optical disks. The quality of the mechanically formed PtIr tips will vary.
z Sample surface
Samples to be imaged with a scanning tunneling microscope must conduct electricity to some
degree. In many cases nonconductive samples can be coated with a thin layer of a conductive
material to facilitate imaging. The sample surface must be conductive enough to allow a few
nano-amps of current to flow from the bias voltage source to the area to be scanned.
Oxide layers more than a few atoms thick on the sample tend to affect the scanning and wear
down the tip as it is dragged through the oxide. The feedback loop will extend the tip until
tunneling current flows, even if it must push the tip through an oxide layer (if it can).
5.3 Real-time STM Operation
5.3.1 Sample Preparation

1. Attach a sample to a metal puck using an electrically conductive (e.g., silver-based) epoxy.
Ensure that the sample itself is conductive and in electrical contact with the top of the
scanner.
32
2. Insert a new tip in the STM tip holder. Grip the tip with tweezers near the sharp end, then
insert the blunt end of the tip into the tip holder. On some tip holders, it may be necessary to
put a slight bend in the tip to help it stay in. The tip must be inserted so that it protrudes
beyond the bottom profile of the tipholder; otherwise, the tipholder will bottom out on the
sample surface before the tip engages. Ensure that the tip is tightly held.
3. Insert the tipholder with STM tip into the SPM Head, and the System will automatically
switch to STM mode.
Basic settings:
Feedback settings:
1. Feedback type: Linear or Log;
2. Bias: 0.05V suggested for good conductors; larger for semiconductors (based on material
conductivity);
3. Setpoint: 1~2 nA suggested;
4. Integral Gain: 100 suggested when using Linear feedback control and 3000 when using Log
feedback control;
5. Proportional Gain: 100 suggested when using Linear feedback control and 3000 when using
Log feedback control;
5.3.3 Engage
“Engage” box;
around 0V;
33

Start scanning:
3. Adjust “Gain”, “Z Limit”, “Brightness”, “Lowpass Filter” in Topography/Current window;
Save Images:
Stop scanning:
34
Chapter 6 Curve Measurements

6.1 Force-Distance Curve (Only in AFM Contact Mode)
The Force Curve and Piezo Extension-Retraction Cycle
The force curve represents the deflection signal for each complete extension-retraction cycle of
the piezo. Typically, the signal continues to drop after the flat, zero deflection point of the force
curve (Fig. 2, Position C). Pull-down continues, due to attractive forces between the tip and the
sample, the tip sticks to the sample (Fig. 3), and the cantilever is pulled down as the piezo
continues to retract. Eventually, the spring force of the bent cantilever overcomes the attractive
forces, and the cantilever quickly returns to its non-deflected, non-contact position (Fig. 4). The
effects of tip pull-up due to attractive forces merges as the tip nears the surface (Fig. 7, process B
to E), and the sudden, sharp rebound appears that results as the tip is pulled free (Fig.8, process E
to F).
Fig.2 Tip being pulled down,

Fig.1 Tip away from the
deflection drops due to Fig. 3 Tip sticks to the sample.
sample surface, non-deflected.
attractive forces.
Fig. 4 Pull-down continues,

spring force equals the Fig. 5 Spring force overcomes Fig. 6 Cantilever pulled away,
attractive forces, cantilever the attractive forces. non-deflected.
non-deflected.
Fig. 7 Cantilever sticks to the Fig. 8 Cantilever performs a

Fig. 9 Cantilever is pulled free,
samples surface due to the sudden rebound as the
non-deflected.
attractive forces. pull-away continues.
The Piezo extension-retraction cycle
35
Typical Force-Distance Curve
The graph reveals at least two very important things:
• Sample-tip attraction — As the tip approaches the sample, various attractive forces reach
out and “grab” the tip. This is evidenced at point C (slight dip) in the graph above. Notice how the
tip suddenly plunges toward the sample here during its descent. This is sometimes called the
“jump-to-contact” point and is usually due to electrostatic attraction and/or surface tension
(capillary) forces.
Attraction is also evident between points D and E (sloped line) as the cantilever is pulled away
from the sample. If attractive forces are strong enough, the tip will cling to the sample surface as it
is pulled clear. Eventually, the sample “lets go” and the tip rebounds sharply upward (between
points E and F).
By knowing the spring constant of the cantilever, it is possible to measure the attractive forces of
tip-sample interactions with good precision.
Notes:
Although attractive forces appear small, remember that the tip is extremely sharp. Since only a
few nanometers of the tip actually touch the sample, even minute forces are distributed over an
exceedingly small area, which add up quickly. Many materials are easily dented by the tip under
such conditions.
36
• Material elasticity — It is possible to extract some information regarding the elasticity of the
material by studying force curves. In the graph above, the tip is in constant contact with the
sample between points C and D. As the tip is pressed further and further into the material, the
probe’s cantilever flexes. The amount of cantilever flexion for a given amount of downward tip
movement gives an indication of the material’s elasticity.
For example, if the material is extremely hard, pressing the probe downward will result in a
relatively large amount of cantilever flexion. On the other hand, if the material is soft, the
cantilever will flex less during its descent. The shape and slope of the contacted portion of the
force curve gives detailed information about surface elasticity. It is sometimes possible to obtain
quantitative measurements of sample elasticity.
6.2 Amplitude-Distance Curve (only in AFM Tapping Mode)
When performing Curve Measurement in Tapping Mode, the piezo moves to the center of the
current XY scan, then turns off the XY scan motion. Next, a triangular waveform is applied to the
Z electrodes of the piezo tube. As a result, the oscillating tip is moved up and down relative to the
sample. This is exactly the same Z-axis piezo motion as for contact AFM. In Tapping Mode,
however, the force plot is a graph of the piezo’s extension versus the oscillating tip’s amplitude.
Figure below represents a tip-sample-piezo relationship on a CSPM5000 system. The piezo

positions the sample just below the tip, then extends a user-specified distance closer to the tip. If
the oscillating tip encounters any surface forces, it will respond (its amplitude may decrease).
Typical Amplitude-Distant Curve
37
Uses of Curve Measurement in Tapping Mode include characterizing forces on the cantilever tip,
diagnosing SPM performance, and calibrating the RMS amplitude, deflection or phase of the
cantilever as a function of tip-sample distance. For example, as the oscillating tip is brought closer
to the surface, the tip’s motion is dampened, which shows as an immediate drop in amplitude.
When plotted, the graph resembles.
The graph demonstrates how the cantilever’s RMS amplitude decreases as the tip is positioned
closer to the sample. The plot represents the RMS amplitude for one complete extension-retraction
cycle of the piezo. At point B, the tip begins its interaction with the sample. The tip’s oscillation
amplitude begins to recede, dropping off as the tip moves closer to the sample surface. Between
points B and C, voltage to the piezo is increased, bringing the tip closer to the surface. Over the
same interval, the cantilever’s amplitude is diminished due to dampening effects.
Dividing the change in amplitude by the change in Z piezo position gives the responsiveness of
the tip-sample interaction, displayed as a Sensitivity value at the top of the graph. This value may
be found directly by using the mouse to draw a line parallel to the plot’s slope in the region
between point B and C where the tip’s amplitude is dampened. Tip dampening occurs as a result
of mechanical acoustic coupling between the tip and sample. As the tip descends closer and closer
to the sample, oscillation eventually ceases and the amplitude drops to zero.
6.3 I-V Curve (STM)
The relationship of Bias voltage of tip and sample and tunneling current can be measured in STM,
which is represented by I-V curve shown below.
Typical I-V Curve
38
Chapter 7 Optimization of scanning

There are several primary feedback parameters that need adjusting every time you engage the
microscope to capture an image. To demonstrate how these parameters affect the image, operation
on an example of the 3μm pitch calibration grating will be shown. These examples display a
two-dimensional view (X vs. Z) of the Trace (left-to-right) and Retrace (right-to-left) scan lines
being acquired in Real-time.
Dual scan may be used to diagnose how well the tip is tracking the surface. If the feedback
parameters are adjusted optimally, the trace and retrace scan lines should look very similar, but
may not look completely identical.
An optimized scope trace of a 3μm scan across the pits of the grating is shown below.
z Setpoint
The Setpoint parameter tells the feedback loop what amplitude (Tapping Mode) or deflection
(Contact Mode) to maintain during scanning.
Set this parameter so that the smallest amount of force is applied during scanning while still
maintaining a stable engagement on the surface.
If the Setpoint is too close to the free air amplitude (Tapping Mode) or free air deflection (Contact
Mode) of the cantilever, the tip will not trace the topography properly. This problem will be more
pronounced on downward slopes with respect to the scan direction.
39
Setpoint is too low (in Contact Mode) or Setpoint is too high (in Tapping Mode).
z Integral / Proportional Gain
The Integral and Proportional Gain control the amount of the error signal used in the feedback
calculation.
Setting the Integral and Proportional gain too low may result in the tip not tracking the surface
properly, as shown below.
The Integral and Proportional Gain are too low.
The higher these two parameters are set, the better the tip will track the sample topography.
However, if the integral and proportional gain are set too high, noise due to feedback oscillation
will be introduced into the scan, as shown below.
40
The Integral and Proportional Gain are too high.
So set the Integral and Proportional Gain as high as possible by increasing the gains until noise is
seen, then reduce the gains just lower than the value where the noise disappears.
z Scan Rate
The Scan Rate is the number of trace and retrace scan lines performed per second (Hz).
For example, with a scan rate set to 1Hz, the tip will scan forward and back (trace and retrace) in 1
second.
Set this value so that the feedback loop has time to respond to the changes in the sample
topography.
Setting the scan rate too high will result in poor tracking of the surface, as shown below.
Scan Rate is too high
41
The actual tip speed or of the tip depends on two parameters: Scan Rate and Scan Size. Since the
Scan Rate units are lines per second (Hz), increasing the Scan Size without changing the Scan
Rate actually increases the scan velocity of the tip.
The Scan Rate setting will greatly depend on the scan size and the height of the features being
imaged. In general, the taller the features and/or the larger the scan size, the slower the scan rate.
Typical Scan Rate settings are 0.8 to 2.0Hz.
z Lowpass Filter
The Lowpass filter invokes a digital, one-pole, low pass filter to remove high-frequency noise
from the Real Time data. The filter operates on the collected digital data regardless of the scan
direction. Settings for this item range from Off through Level 4. Off implies no lowpass filtering
of the data, while settings of Level 1 through Level 4, successively, lower the cut-off frequency of
the filter applied to the data stream.
Lowpass Filter is turned off.
42
Chapter 8 Basic Operating Procedures

8.1 Contact Mode of AFM
1． Run SPM Console software;

2． Install scanner with proper scanning scope;
3． Load the cantilever probe which is suitable for Contact Mode on the AFM Tip Holder, and
insert the Tip Holder into the SPM Head;
4． Input the sample;

5． Turn on the SPM Controller, and choose Contact Mode, and turn the Laser on;
6． Align the Laser to make the laser beam reflected by the back of the tip;
7． Adjust the Photodetector, the reflected laser spot should be in the center of the Laser
window;
8． Set initial Setpoint between 0.2~0.5;
9． Engage automatically to Z voltage is less than 180V, and Engage Single or Withdraw
Single till the Z voltage is around 0V (-20~20V);
43
10． Start scanning;

11． Adjust Gain parameter in Topography window which displays the sample topography to gain
good contrast;
12． Adjust Integral Gain, Proportional Gain, Setpoint and Look Ahead Gain so that the tip
tracks the sample surface most precisely and feedback loop noise just disappears;
13． Set proper Scan Rate;
14． Set proper Lowpass Filter level;
44
15． Adjust Gain and Brightness parameters in Deflection/Friction window which displays the
cantilever Deflection/ Friction signal to gain good contrast;
16． When scanning is over, save images in the Image Buffer;
17． Withdraw the tip;
8.2 Tapping Mode of AFM

3． Load the cantilever probe which is suitable for Tapping Mode on the AFM Tip Holder, and
insert the Tip Holder into the SPM Head;
4． Input the sample;

5． Turn on the SPM Controller, and choose Tapping Mode, and turn the Laser on;
6． Align the Laser to make the laser beam reflected by the back of the tip;
7． Adjust the Photodetector, the reflected laser spot should be in the center of the Laser
window;
45
8． Open Frequency Sweep window, and tune the cantilever oscillating frequency;
9． Set cantilever oscillating frequency and proper Setpoint with the red marker;
46

good contrast;
16． Adjust Gain and Brightness parameters in Amplitude/Phase window which displays the
cantilever Amplitude/Phase signal to gain good contrast;
8.3 Scanning Tunneling Microscope (STM)

3． Cut a segment of Pt-Ir with proper length and insert it into the STM Tip Holder tube with the
tip side upward, then insert the STM Tip Holder into the SPM Head;；
47
4． Input the sample with a conductive surface and the sample must be conductively attached to
the topside of the scanner;;
5． Turn on the SPM Controller, and system will automatically switch to STM mode;
6． Set an initial Setpoint (1~2nA to a good conductor and smaller to a semiconductor);
7． Set a Bias voltage (0.05-0.1V will be enough to a good conductor);
good contrast;
48
14． Adjust Gain and Brightness parameters in Current window which displays the tunneling
current signal to gain good contrast;
49

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BY3000 SPM User’s Manual

V1.00.3 English Version

If you are about to install the softwares on a new Windows system,

All knobs on the SPM Head should Not be adjusted either.

WARNING! During and prior to set up of the laser, it is especially important to

WARNING! Staring at a bright beam or reflection can result in eye damage.

1.1 System Components

1.2 The SPM Controller

1.3 The SPM Head

1.4 The SPM Base

5. Motor #2 6. Motor #3 7. LED (always be on when power is switched on)

Non-linear Correction of the Scanners:

Before Correction After Correction

To obtain and use the non-linear correction parameters by:

1.6 Tip Holders

A flexible cantilever with an atomic-sharp tip is widely used in AFM as below.

Triangle cantilever probe Rectangle cantilever probe Tip

Tapping Mode: A oscillating cantilever is required in Tapping mode. So theoretically using

1.8 The SPM Feedback Control System

In summary, the basic feedback processes may be broken down as follows:

z Look Ahead gain

z Integral gain and average error

1.9 General discussion of main scanning parameters

z Basic control parameters

amplitude decreases, but tip-sample forces increases.

z Data types of the images

AFM Contact Mode:

AFM Tapping Mode:

1.10 Software installation and setup

z Installation of DotNetFx and Winpcap

z On-line software installation

will be like , or ; if the icon appears like ,

or , please check the cable or your computer settings.

1. Open the “Network Connections” window in the Windows XP;

Insert Serial Number Insert MAC address

z Off-line software installation

Chapter 2 Probe Installation and Laser

1) Choose the proper probe according to the present mode;

2.2 Laser Alignment

1): Position the laser beam on the cantilever substrate.

2): Position the laser beam off the cantilever substrate.

A: Laser beam is reflected by the cantilever

B: Laser beam is reflected on the trapezoidal

Different laser reflected positions on cantilever substrate

Laser beam directly passes

Now, the Laser Alignment process is completed.

Chapter 3 Contact Mode of AFM

A: Laser is positioned on the center of the PSD, Up-Down signal equals to 0.

B: Up-Down signal equals to Setpoint after engagement.

3.2 The LFM basics

3.3 Real-time Operations

3.3.1 Initial control settings

Feedback Control Test:

3.3.3 Determine the Sensitivity:

6. Fill in the “Sensitivity” box;

3.3.4 Adjustment of Scanning Parameters:

3.3.5 Start Scanning, Save Images and Stop Scanning:

Chapter 4 Tapping Mode of AFM

4.2 The Phase Mode

4.3 Real-time operations

4.3.1 Initial control settings

4.3.1.1 Basic settings