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H2S Gas Sensing Based On SnO2 Thin Films PDF
H2S Gas Sensing Based On SnO2 Thin Films PDF
H2S Gas Sensing Based On SnO2 Thin Films PDF
· Reza Safari
· 991771228
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Contents :------------------------------------- : ﻓﻬﺮﺳﺖ
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Original selected text:-------------------------- : ﻣﺘﻦ اﻧﺘﺨﺎﺑﯽ اﺻﻠﯽ
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microheaters and sensing layers. The details of USP deposition
system presented in our previous work [10].
Substrate temperature and deposition time are the main control
parameters. The input power to the ultrasonic transducers
control’s the spray rate. All depositions are carried out at a
precursor spray rate of 4 mL/min and substrate temperature of
325 °C. The precursor solution for USP deposition is prepared
by dissolving 0.2 mol/L of stannous chloride dihydrate in pure
ethanol (99.90% v/v pure). After USP deposition for 75 min to
form microheater, the sample annealed at 900 °C for an hour in
air. Followed by 2 min’s of USP deposition on the back side of
the sample to form the porous sensing layer of SnO2. The SEM
micrographs of the microheater (Fig.la and b) and the sensing
layer (Fig.1c and d) are presented below.
Prior to gas sensing measurements, the samples were annealed at
600 °C for an hour in dry air to stabilize the sensor structure.
The prepared gas sensors were placed on the ceramic support
mounted to chip (25x35 mm) with electrical feedthroughs.
Electrical contacts to both heater and sensor structure were
provided by diffusion bonding using 75µm gold wire. The chip
with the sensors was placed in a stainless-steel chamber (with
volume of 5 ) with gas tube connectors for gas inlet and
outlet. Gas sensing experiments were conducted at clean room
conditions using in a closed chamber equipped with mass flow
controllers (MFCs).
In all experiments the continuous gas flow of 500±5 ml/min was
kept and monitored by MFCs and the independent flowmeter
(AALBORG, GFM17). In all cases the carrier gas was a
precleaned and dried compressed air. The target gasses for
experiments were taken from the cylinders with analytical
quality standard gas mixtures namely, 100 ppm of H2S, 100 ppm
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of NO2 and 1% of CH4, all in synthetic air. The relative humidity
(RH) of the gas mixture was continuously monitored by the
commercial RH sensor (Honeywell HIH-400-004) and
controlled using bubble humidifier supported with MFC.
Different gas concentrations and RH levels were obtained by
proper gases flows ratio. During all experiments the sensor
temperature was kept at stable level by the constant current
delivered to the heater by laboratory power supply. The
temperature of sensor was measured by the small s-type
thermocouple (made of Pt and 90%Pt10%Rh wires with 25 µm
diameter). The electrical parameters of sensors were measured
using Keithley 2410 electrometer using 500 mV power supply
during current measurements. The measurements control and
data acquisition were both realized by PC with homemade
software written in NI LabVIEW. In all cases sensor responses
were calculated according to formula:
, (eq.1)
where and are the sensor currents in clean carrier gas and
target gas atmospheres, respectively. The response times
( % ) Were calculated as a time from the start of dosing of
target gas to 90% of maximum response value (related to the
baseline). In a similar way, the regeneration times ( %)
were calculate as time form staring of clean carrier gas flow to
drop of sensing signal to 10% of initial value (from maximum
response to base line).
Bruker AXS, 2D Phaser was used for X-ray diffraction (XRD)
analysis and morphological studies.
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Fig. 1: SEM micrographs of (a) top and (b) cross section of heater. (c)
Structure of the sensing layer with high magnification presented in the
inset. (d) Cross section of the sensing layer. (e) EDX analysis obtained
from sensing layer.
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ﺗﺮﺟﻤﻪ ﻣﺘﻦ text translation :----------------------------------- :
ﭼﮑﯿﺪه— ﮔﺎز ﻫﯿﺪروژن ﺳﻮﻟﻔﯿﺪ ﺑﺮاي ﺳﻼﻣﺘﯽ اﻧﺴﺎن و ﻣﺤﯿﻂ زﯾﺴﺖ ﻣﻀﺮ اﺳﺖ،
ﺑﻨﺎﺑﺮاﯾﻦ ﺳﻨﺴﻮرﻫﺎي ﺟﺪﯾﺪ ﮔﺎز ﺑﺮاي ﺗﺸﺨﯿﺺ ﺳﺮﯾﻊ و ﺑﻪ ﻣﻮﻗﻊ ﺑﺎ دﻗﺖ ﺑﺎﻻ ﺑﻪ دﻧﺒﺎل آن
ﻫﺴﺘﻨﺪ .اﮐﺴﯿﺪﻫﺎي ﻓﻠﺰي در ﺣﺎل ﺣﺎﺿﺮ ﺑﻪ ﻋﻨﻮان ﮐﺎﻧﺪﯾﺪاي اﻣﯿﺪوار ﮐﻨﻨﺪه ﺑﺮاي اﯾﻦ
ﻣﻨﻈﻮر ﺷﻨﺎﺧﺘﻪ ﺷﺪه اﻧﺪ .اﯾﻦ ﻣﻘﺎﻟﻪ ﻋﻤﻠﮑﺮد ﯾﮏ ﺣﺴﮕﺮ ﮔﺎز را ﺷﺎﻣﻞ ﯾﮏ ﻣﯿﮑﺮوﻫﯿﺘﺮ و
ﻻﯾﻪ ﻓﻌﺎل ﺗﺸﮑﯿﻞ ﺷﺪه ﺑﺮ روي ﯾﮏ ﺑﺴﺘﺮ آﻟﻮﻣﯿﻨﺎ ﺑﺮاي ﻋﻤﻠﮑﺮد در ﮐﺎرﺑﺮدﻫﺎي دﻣﺎي ﺑﺎﻻ
اراﺋﻪ ﻣﯽﮐﻨﺪ.
ﺑﺮاي ﺳﺎﺧﺘﻦ ﻻﯾﻪ ﺿﺨﯿﻢ ﻗﻠﻊ دي اﮐﺴﯿﺪ ﺑﺮاي ﻣﯿﮑﺮوﻫﯿﺘﺮ و ﻻﯾﻪ ﻧﺎزك و ﻣﺘﺨﻠﺨﻞ
ﮐﺮﯾﺴﺘﺎﻟﯽ آن )ﻗﻠﻊ دي اﮐﺴﯿﺪ( ﺑﻪ ﻋﻨﻮان ﻻﯾﻪ ﺳﻨﺠﺶ ،از روش رﺳﻮب ﺗﺠﺰﯾﻪ در اﺛﺮ
اﺳﭙﺮي اوﻟﺘﺮاﺳﻮﻧﯿﮏ ﻣﻮرد اﺳﺘﻔﺎده ﻗﺮار ﮔﺮﻓﺖ .ﺣﺴﮕﺮ آﻣﺎده ﺷﺪه ﭘﺎﺳﺦ دﯾﻨﺎﻣﯿﮑﯽ
ﻣﻨﺎﺳﺒﯽ ﻧﺴﺒﺖ ﺑﻪ )ﻏﻠﻈﺖ( 10ﺗﺎ ppm 50ﮔﺎز ﻫﯿﺪروژن ﺳﻮﻟﻔﯿﺪ در ﺷﺮاﯾﻂ ﻣﺮﻃﻮب و
ﺧﺸﮏ در دﻣﺎي 450درﺟﻪ ﺳﺎﻧﺘﯽ ﮔﺮاد ﻧﺸﺎن داد .در اﯾﻦ آزﻣﺎﯾﺶﻫﺎ ،ﺣﺴﺎﺳﯿﺖ
ﻣﺘﻘﺎﻃﻊ ﺣﺴﮕﺮ ﺑﺮاي ﺳﺎﯾﺮ ﮔﺎزﻫﺎي ﻣﺰاﺣﻢ ﺑﻪ ﻋﻨﻮان ﻣﺜﺎل ﮔﺎز ﻣﺘﺎن و ﻧﯿﺘﺮوژن دي اﮐﺴﯿﺪ
ﺑﺮرﺳﯽ ﺷﺪ.
ﮐﻠﻤﺎت ﮐﻠﯿﺪي—ﻗﻠﻊ دي اﮐﺴﯿﺪ ،ﺣﺴﮕﺮ ﮔﺎز ،ﻫﯿﺪروژن ﺳﻮﻟﻔﯿﺪ ،اﺳﭙﺮي اوﻟﺘﺮاﺳﻮﻧﯿﮏ،
ﭘﯿﺮوﻟﯿﺰ ،ﻻﯾﻪ ﻧﺎزك ﻧﺎﻧﻮ ﻣﺘﺨﻠﺨﻞ.
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)ﺑﺨﺶ دوم( .ﺟﺰﺋﯿﺎت ﺗﺠﺮﺑﯽ
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ﺑﺎ اﺳﺘﻔﺎده از ﺳﯿﻢ ﻃﻼﯾﯽ 75ﻣﯿﮑﺮوﻣﺘﺮي ﻓﺮاﻫﻢ ﺷﺪ .ﺗﺮاﺷﻪ ﺑﺎ ﺳﻨﺴﻮرﻫﺎ در ﯾﮏ ﻣﺤﻔﻈﻪ
ﻓﻮﻻدي ﺿﺪ زﻧﮓ )ﺑﺎ ﺣﺠﻢ 5ﺳﺎﻧﺘﯽ ﻣﺘﺮ ﻣﺮﺑﻊ( ﺑﺎ اﺗﺼﺎﻻت ﻟﻮﻟﻪ ﮔﺎز ﺑﺮاي ورودي و
ﺧﺮوﺟﯽ ﮔﺎز ﻗﺮار داده ﺷﺪ .آزﻣﺎﯾﺶﻫﺎي ﺳﻨﺠﺶ ﮔﺎز در ﺷﺮاﯾﻂ اﺗﺎق ﺗﻤﯿﺰ ﺑﺎ اﺳﺘﻔﺎده از
ﯾﮏ ﻣﺤﻔﻈﻪ ﺑﺴﺘﻪ ﻣﺠﻬﺰ ﺑﻪ ﮐﻨﺘﺮلﮐﻨﻨﺪهﻫﺎي ﺟﺮﯾﺎن ﺟﺮﻣﯽ) (MFCاﻧﺠﺎم ﺷﺪ.
در ﺗﻤﺎم آزﻣﺎﯾﺶﻫﺎ ﺟﺮﯾﺎن ﮔﺎز ﭘﯿﻮﺳﺘﻪ 500±5ﻣﯿﻠﯽﻟﯿﺘﺮ ﺑﺮ دﻗﯿﻘﻪ ﻧﮕﻪ داﺷﺘﻪ ﺷﺪ و
ﺗﻮﺳﻂ ﮐﻨﺘﺮل ﮐﻨﻨﺪه ﻫﺎي ﺟﺮﯾﺎن ﺟﺮﻣﯽ و ﻓﻠﻮﻣﺘﺮ ﻣﺴﺘﻘﻞ )(AALBORG, GFM17
ﮐﻨﺘﺮل ﺷﺪ .در ﺗﻤﺎم ﻣﻮارد ﮔﺎز ﺣﺎﻣﻞ ﻫﻮاي ﻓﺸﺮده از ﭘﯿﺶ ﺗﻤﯿﺰ ﺷﺪه و ﺧﺸﮏ ﺷﺪه ﺑﻮد.
ﮔﺎزﻫﺎي ﻣﻮرد ﻧﻈﺮ ﺑﺮاي آزﻣﺎﯾﺶﻫﺎ از ﺳﯿﻠﻨﺪرﻫﺎﯾﯽ ﺑﺎ ﻣﺨﻠﻮطﻫﺎي ﮔﺎز اﺳﺘﺎﻧﺪارد ﺑﺎ ﮐﯿﻔﯿﺖ
ﺗﺤﻠﯿﻠﯽ ﯾﻌﻨﯽ) 100ppmاز ﻫﯿﺪروژن ﺳﻮﻟﻔﯿﺪ 100ppm ،از ﻧﯿﺘﺮوژن دي اﮐﺴﯿﺪ و
٪1از ﻣﺘﺎن ( ،ﻫﻤﻪ در ﻫﻮاي ﻣﺼﻨﻮﻋﯽ ﮔﺮﻓﺘﻪ ﺷﺪ .رﻃﻮﺑﺖ ﻧﺴﺒﯽ ) (RHﻣﺨﻠﻮط ﮔﺎز ﺑﻪ
ﻃﻮر ﻣﺪاوم ﺗﻮﺳﻂ ﺳﻨﺴﻮر رﻃﻮﺑﺖ ﻧﺴﺒﯽ ﺗﺠﺎري ) (Honeywell HIH-400-004ﮐﻨﺘﺮل
ﺷﺪ و ﺑﺎ اﺳﺘﻔﺎده از ﻣﺮﻃﻮب ﮐﻨﻨﺪه ﺣﺒﺎب ﭘﺸﺘﯿﺒﺎﻧﯽ ﺷﺪه ﺑﺎ ﮐﻨﺘﺮل ﮐﻨﻨﺪه ﺟﺮﯾﺎن ﺟﺮﻣﯽ
ﮐﻨﺘﺮل ﺷﺪ .ﻏﻠﻈﺖ ﻫﺎي ﻣﺨﺘﻠﻒ ﮔﺎز و ﺳﻄﻮح رﻃﻮﺑﺖ ﻧﺴﺒﯽ ﺑﺎ ﻧﺴﺒﺖ ﺟﺮﯾﺎن ﮔﺎزﻫﺎي
ﻣﻨﺎﺳﺐ ﺑﻪ دﺳﺖ آﻣﺪ .در ﻃﻮل ﺗﻤﺎم آزﻣﺎﯾﺶﻫﺎ ،دﻣﺎي ﺳﻨﺴﻮر ﺗﻮﺳﻂ ﺟﺮﯾﺎن ﺛﺎﺑﺘﯽ ﮐﻪ
ﺗﻮﺳﻂ ﻣﻨﺒﻊ ﺗﻐﺬﯾﻪ آزﻣﺎﯾﺸﮕﺎﻫﯽ ﺑﻪ ﺑﺨﺎري ﺗﺤﻮﯾﻞ داده ﻣﯽﺷﺪ ،در ﺳﻄﺢ ﺛﺎﺑﺘﯽ ﻧﮕﻪ
داﺷﺘﻪ ﺷﺪه اﺳﺖ .دﻣﺎي ﺳﻨﺴﻮر ﺗﻮﺳﻂ ﺗﺮﻣﻮﮐﻮﭘﻞ ﮐﻮﭼﮏ ﻧﻮع sاﻧﺪازه ﮔﯿﺮي ﺷﺪ.
)ﺳﺎﺧﺘﻪ ﺷﺪه از ﺳﯿﻢ ﭘﻼﺗﯿﻦ و %90ﭘﻼﺗﯿﻦ Rh %10ﺑﺎ ﻗﻄﺮ 25ﻣﯿﮑﺮوﻣﺘﺮ( .
ﭘﺎراﻣﺘﺮﻫﺎي اﻟﮑﺘﺮﯾﮑﯽ ﺳﻨﺴﻮرﻫﺎ ﺑﺎ اﺳﺘﻔﺎده از اﻟﮑﺘﺮوﻣﺘﺮ Keithley 2410ﺑﺎ ﻣﻨﺒﻊ
ﺗﻐﺬﯾﻪ 500ﻣﯿﻠﯽ وﻟﺖ در ﻃﻮل اﻧﺪازهﮔﯿﺮي ﺟﺮﯾﺎن اﻧﺪازهﮔﯿﺮي ﺷﺪ .ﮐﻨﺘﺮل اﻧﺪازهﮔﯿﺮي و
ﺟﻤﻊآوري دادهﻫﺎ ﻫﺮ دو ﺗﻮﺳﻂ راﯾﺎﻧﻪ ﺷﺨﺼﯽ ﺑﺎ ﻧﺮماﻓﺰار ﺧﺎﻧﮕﯽ ﮐﻪ در NI LabVIEW
ﻧﻮﺷﺘﻪ ﺷﺪه اﺳﺖ ،اﻧﺠﺎم ﺷﺪ .در ﺗﻤﺎم ﻣﻮارد ﭘﺎﺳﺦ ﺳﻨﺴﻮر ﻃﺒﻖ ﻓﺮﻣﻮل )زﯾﺮ( ﻣﺤﺎﺳﺒﻪ
ﺷﺪ:
واﮐﻨﺶ
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ﺑﻪ ﺗﺮﺗﯿﺐ ﺟﺮﯾﺎن ﺣﺴﮕﺮ در ﮔﺎز ﺣﺎﻣﻞ ﺗﻤﯿﺰ و اﺗﻤﺴﻔﺮ ﮔﺎز ﻫﺪف و ﮐﻪ در آن
ﻫﺴﺘﻨﺪ.
ﺑﻪ ﻋﻨﻮان ﯾﮏ زﻣﺎن از ﺷﺮوع دوز ﮔﺎز ﻫﺪف ﺗﺎ 90 زﻣﺎن ﭘﺎﺳﺨﮕﻮﯾﯽ %
درﺻﺪ ﺣﺪاﮐﺜﺮ ﻣﻘﺪار ﭘﺎﺳﺦ )ﻣﺮﺑﻮط ﺑﻪ ﺧﻂ ﭘﺎﯾﻪ( ﻣﺤﺎﺳﺒﻪ ﺷﺪ .ﺑﻪ روﺷﯽ ﻣﺸﺎﺑﻪ ،زﻣﺎنﻫﺎي
ﺑﻪ ﺻﻮرت زﻣﺎن ﺧﯿﺮه ﺷﺪن ﺟﺮﯾﺎن ﮔﺎز ﺣﺎﻣﻞ ﺗﻤﯿﺰ ﺗﺎ اﻓﺖ ﺑﺎزﺳﺎزي %
ﺳﯿﮕﻨﺎل ﺣﺴﮕﺮ ﺗﺎ %10ﻣﻘﺪار اوﻟﯿﻪ )از ﺣﺪاﮐﺜﺮ ﭘﺎﺳﺦ ﺗﺎ ﺧﻂ ﭘﺎﯾﻪ( ﻣﺤﺎﺳﺒﻪ ﺷﺪ.
Bruker AXS, 2D Phaserﺑﺮاي ﺗﺠﺰﯾﻪ و ﺗﺤﻠﯿﻞ ﭘﺮاش اﺷﻌﻪ اﯾﮑﺲ ) (XRDو
ﻣﻄﺎﻟﻌﺎت ﻣﻮرﻓﻮﻟﻮژﯾﮑﯽ اﺳﺘﻔﺎده ﺷﺪ.
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ﺷﮑﻞ :1ﻣﯿﮑﺮوﮔﺮاف ﻫﺎي SEMاز )اﻟﻒ( ﺑﺎﻻ و )ب( ﻣﻘﻄﻊ ﮔﺮم ﮐﻦ) .ج( ﺳﺎﺧﺘﺎر ﻻﯾﻪ
ﺣﺴﮕﺮ ﺑﺎ ﺑﺰرﮔﻨﻤﺎﯾﯽ ﺑﺎﻻ ﮐﻪ در ﻗﺴﻤﺖ داﺧﻠﯽ اراﺋﻪ ﺷﺪه اﺳﺖ) .د( ﻣﻘﻄﻊ ﻻﯾﻪ ﺣﺴﮕﺮ.
)ه( ﺗﺠﺰﯾﻪ و ﺗﺤﻠﯿﻞ EDXﺑﻪ دﺳﺖ آﻣﺪه از ﻻﯾﻪ ﺣﺴﮕﺮ.
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Translate selected words :--------------------- : ﺗﺮﺟﻤﻪ ﻟﻐﺎت ﺑﺮﮔﺰﯾﺪه
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laboratory power supply ﻣﻨﺒﻊ ﺗﻐﺬﯾﻪ آزﻣﺎﯾﺸﮕﺎﻫﯽ
maximum response value ﺣﺪاﮐﺜﺮ ﻣﻘﺪار ﭘﺎﺳﺦ
measured اﻧﺪازه ﮔﯿﺮي ﺷﺪه
measurements اﻧﺪازه ﮔﯿﺮي ﻫﺎ
mixture ﻣﺨﻠﻮط
namely ﯾﻌﻨﯽ
novel gas sensors ﺳﻨﺴﻮر ﻫﺎي ﺟﺪﯾﺪ ﮔﺎز
obtained ﺑﻪ دﺳﺖ آﻣﺪه
operating ﮐﺎرﮐﺮد
performance (ﻋﻤﻠﮑﺮد )ﮐﺎراﯾﯽ
porous ﻣﺘﺨﻠﺨﻞ
power supply ﻣﻨﺒﻊ ﺗﻐﺬﯾﻪ
precleaned از ﻗﺒﻞ ﺗﻤﯿﺰ ﺷﺪه
precursor ﭘﯿﺶ ﺳﺎز
precursor solution ﻣﺤﻠﻮل ﭘﯿﺶ ﺳﺎز
prepared ﺗﻬﯿﻪ ﺷﺪه
prepared chips ﺗﺮاﺷﻪ ﻫﺎي آﻣﺎده ﺷﺪه
presented اراﯾﻪ ﺷﺪه
previous ﻗﺒﻠﯽ
prior ﻗﺒﻞ
promising candidate (ﮐﺎﻧﺪﯾﺪاي اﻣﯿﺪوار ﮐﻨﻨﺪه )اﻣﯿﺪ ﺑﺨﺶ
proper gases flows ratio ﻧﺴﺒﺖ ﺟﺮﯾﺎن ﮔﺎزﻫﺎي ﻣﻨﺎﺳﺐ
provided اراﺋﻪ ﺷﺪه اﺳﺖ
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pure ﺧﺎﻟﺺ
purpose (ﻫﺪف )ﻣﻨﻈﻮر
real time ﺑﻪ ﻣﻮﻗﻊ
realized ﻣﺘﻮﺟﻪ ﺷﺪ
regeneration times زﻣﺎن ﺑﺎزﺳﺎزي
relative humidity رﻃﻮﺑﺖ ﻧﺴﺒﯽ
relative humidity levels ﺳﻄﻮح رﻃﻮﺑﺖ ﻧﺴﺒﯽ
respectively ﺑﻪ ﺗﺮﺗﯿﺐ
responses ﭘﺎﺳﺦ ﻫﺎ
sample annealed ﻧﻤﻮﻧﻪ آﻧﯿﻞ ﺷﺪه
similar way روش ﻣﺸﺎﺑﻪ
stabilize ﺗﺜﺒﯿﺖ ﮐﺮدن
stable level ﺳﻄﺢ ﭘﺎﯾﺪار
stannous ﻗﻠﻊ
Structure ﺳﺎﺧﺘﺎر
Substrate (ﺑﺴﺘﺮ )زﯾﺮﻻﯾﻪ
synthetic air ﻫﻮاي ﻣﺼﻨﻮﻋﯽ
target gasses ﮔﺎزﻫﺎي ﻫﺪف
temperature درﺟﻪ ﺣﺮارت
Thin Films Deposited ﻻﯾﻪ ﻫﺎي ﻧﺎزك رﺳﻮب ﺷﺪه
transducers ﻣﺒﺪل ﻫﺎ
wire ﺳﯿﻢ
X-ray diffraction ﭘﺮاش اﺷﻌﻪ اﯾﮑﺲ
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ﺗﻮﺿﯿﺤﺎت ﻋﺒﺎرات ﺧﺎص Description of specific phrases :---------------------- :
· اﺳﭙﺮي اﻟﺘﺮاﺳﻮﻧﯿﮏ ) : (Ultrasonic Sprayﻧﺎزل ﻫﺎي اﻟﺘﺮاﺳﻮﻧﯿﮏ ﻧﻮﻋﯽ از ﻧﺎزل ﺑﺮاي اﺳﭙﺮي
ﻣﻮاد ﻣﺎﯾﻊ و ﻣﺤﻠﻮل ﻫﺎ ﻫﺴﺘﻨﺪ ﮐﻪ ﺑﺎ اﺳﺘﻔﺎده از اﻣﻮاج اﻟﺘﺮاﺳﻮﻧﯿﮏ ﺑﺎﻋﺚ اﯾﺠﺎد ذرات رﯾﺰ و ﭘﺎﺷﺶ آﻧﻬﺎ
) (Atomizationﻣﯽ ﺷﻮﻧﺪ.
· ﭘﯿﺮوﻟﯿﺰ ) : (Pyrolysisﻓﺮاﯾﻨﺪي ﺗﺮﻣﻮﺷﯿﻤﯿﺎﯾﯽ اﺳﺖ ﮐﻪ ﻃﯽ آن ﻣﻮاد آﻟﯽ در اﺛﺮﮔﺮﻣﺎ ﺗﺠﺰﯾﻪ ﻣﯽﺷﻮﻧﺪ.
· ﻣﯿﮑﺮو ﻫﯿﺘﺮ ) : (micro heaterاﯾﻦ دﺳﺘﮕﺎه داراي ﯾﮏ ﺻﻔﺤﻪ ﮔﺮم ) (Hot plateﭘﺎﯾﺪار از ﻧﻈﺮ
ﺣﺮارﺗﯽ اﺳﺖ ﮐﻪ ﻣﯿﺘﻮاﻧﺪ ﺑﺮاي ﺟﺎﮔﺬاري ﻧﻤﻮﻧﻪ ﻫﺎ و ﯾﺎ ﺑﺮاي ﭼﺴﺒﺎﻧﺪن ﺗﺮﻣﻮﭘﻼﺳﺖ از آن اﺳﺘﻔﺎده ﮐﺮد.
· ﺣﻤﺎم اوﻟﺘﺮاﺳﻮﻧﯿﮏ ) : (warm ultrasonic bathﺣﻤﺎمﻫﺎي اوﻟﺘﺮاﺳﻮﻧﯿﮏ ﺟﺰء دﺳﺘﻪ ي
ﺗﺠﻬﯿﺰات آزﻣﺎﯾﺸﮕﺎﻫﯽ اﺳﺖ و ﻣﺠﻬﺰ ﺑﻪ ﺳﯿﺴﺘﻢ ﮔﺮﻣﺎﯾﺸﯽ و ﺳﺮﻣﺎﯾﺸﯽ ﺟﻬﺖ ﭘﺮاﮐﻨﺪﮔﯽ ﻣﻮاد ،ﺗﻤﯿﯿﺰ
ﮐﺮدن ﻟﻮازم آزﻣﺎﯾﺸﮕﺎﻫﯽ و ﺗﺨﺮﯾﺐ ﺳﻠﻮلﻫﺎ ﻫﺴﺘﻨﺪ.
· آﻧﯿﻞ ﮐﺮدن )ﺑﺎزﭘﺨﺖ( ) : (Annealingدرﻋﻠﻢ ﻣﻮاد ،ﺑﻪ ﻓﺮاﯾﻨﺪي ﻣﯽ ﮔﻮﯾﻨﺪ ﮐﻪ ﻣﻮﺟﺐ ﺗﻐﯿﯿﺮ ﺧﻮاص
ﻣﺎده ﻣﺎﻧﻨﺪ ﺳﺨﺘﯽ و ﺷﮑﻞ ﭘﺬﯾﺮي آن ﻣﯽ ﺷﻮد.
· رﯾﺰﻧﮕﺎري ﯾﺎ ﻣﯿﮑﺮوﮔﺮاﻓﯽ ) : (Micrographyروﺷﯽ اﺳﺖ در ﻋﮑﺎﺳﯽ ﺑﺮاي ﺗﻬﯿﻪ ﻧﮕﺎره ﺗﻮﺳﻂ
رﯾﺰﺑﯿﻦ.
· ) SEM : SEM (Serial-section Electron Microscopeﻣﯿﮑﺮوﺳﮑﻮپ اﻟﮑﺘﺮوﻧﯽ ﺗﺴﻠﺴﻠﯽ
اﺳﺖ) .ﻣﯿﮑﺮوﺳﮑﻮپ اﻟﮑﺘﺮوﻧﯽ ﺑﻪ دﺳﺘﻪاي از ﻣﯿﮑﺮوﺳﮑﻮﭘﻬﺎ ﮔﻔﺘﻪ ﻣﯽﺷﻮد ﮐﻪ از ﯾﮏ ﺑﺎرﯾﮑﻪ اﻟﮑﺘﺮوﻧﯽ ﺑﺮاي
ﺗﺼﻮﯾﺮﺳﺎزي اﺳﺘﻔﺎده ﻣﯽﮐﻨﻨﺪ(.
· ﻣﺤﻔﻈﻪ ﻓﻮﻻدي ﺿﺪ زﻧﮓ :ﺟﻌﺒﻪ ﻫﺎي اﺗﺼﺎﻟﯽ در اﺳﺘﯿﻞ ﺿﺪزﻧﮓ داراي وﯾﮋﮔﯽ ﻫﺎي ﻣﮑﺎﻧﯿﮑﯽ و ﺿﺪ
ﺧﻮردﮔﯽ ﻧﺴﺒﺖ ﺑﻪ ﺟﻌﺒﻪ ﻫﺎي ﻣﻮﺟﻮد در آﻟﯿﺎژ آﻟﻮﻣﯿﻨﯿﻮم ﻫﺴﺘﻨﺪ آﻧﻬﺎ ﯾﺎ ﺑﻪ ﻋﻨﻮان ﺟﻌﺒﻪ ﻫﺎي اﺗﺼﺎﻟﯽ ﺑﺎ /
ﺑﺪون ﺗﺮﻣﯿﻨﺎل و ﯾﺎ ﺑﺮاي ﻧﺼﺐ ﺗﺠﻬﯿﺰات ﺑﺮﻗﯽ اﺳﺘﻔﺎده ﻣﯽ ﺷﻮﻧﺪ.
· ) : MFC (mass flow controllerﻣﻨﻈﻮر ﮐﻨﺘﺮل ﺷﺪت ﺟﺮﯾﺎن ،ﮐﻨﺘﺮلﮐﻨﻨﺪه ﺟﺮﯾﺎن ﺟﺮﻣﯽ اﺳﺖ
ﮐﻪ ﺑﻪ اﺧﺘﺼﺎر MFCﻧﯿﺰ ﻧﺎﻣﯿﺪه ﻣﯽﺷﻮد .اﯾﻦ دﺳﺘﮕﺎه ﺑﺎ ﻧﺎمﻫﺎي ﻣﺨﺘﻠﻒ ﻓﻠﻮ ﮐﻨﺘﺮﻟﺮ ﺟﺮﻣﯽ ،ﻓﻠﻮﻣﺘﺮ
ﺟﺮﻣﯽ ،دﺑﯽ ﺳﻨﺞ ﺟﺮﻣﯽ ،ﻣﺲ ﻓﻠﻮ ﮐﻨﺘﺮﻟﺮ و… ﻧﯿﺰ در زﺑﺎن ﻓﺎرﺳﯽ ﺷﻨﺎﺧﺘﻪ ﻣﯽﺷﻮد.
· ﻓﻠﻮﻣﺘﺮ ﻫﺎي ﻣﺴﺘﻘﻞ )ﺟﺮﻣﯽ( :ﻓﻠﻮﻣﺘﺮ ﻫﺎي ﺟﺮﻣﯽ ﯾﮑﯽ دﯾﮕﺮ از روﺷﻬﺎي اﻧﺪازه ﮔﯿﺮي ﻓﻠﻮ ﺑﺮ ﺣﺴﺐ
وزن ﻣﯿﺒﺎﺷﺪ ﮐﻪ ﺑﻪ ﻓﻠﻮﻣﺘﺮﻫﺎي ﺟﺮﻣﯽ ﯾﺎ ﻣﺲ ﻓﻠﻮﻣﺘﺮ ﻣﺸﻬﻮرﻧﺪ .در روﺷﻬﺎي ﻣﺘﺪاول ﻗﺒﻞ ﺑﺮاي اﻧﺪازه
ﮔﯿﺮي ﺟﺮم ﺳﯿﺎل ﻋﺒﻮري ﻧﯿﺎز ﺑﻪ اﻧﺪازه ﮔﯿﺮي داﻧﺴﯿﺘﻪ ﻣﻮاد ﻧﯿﺰ ﻣﯿﺒﻮد ﮐﻪ ﻋﻤﻼ ﻣﺤﺎﺳﺒﻪ ﺟﺮم ﺑﺎ ﺧﻄﺎي
ﺑﺴﯿﺎر ﻫﻤﺮاه ﻣﯿﮕﺮدﯾﺪ .در ﺣﺎل ﺣﺎﺿﺮ اﻧﻮاع ﻓﻠﻮﻣﺘﺮﻫﺎي ﺟﺮﻣﯽ ﺑﺎ ﺗﮑﻨﻮﻟﻮژﯾﻬﺎي ﮐﻮرﯾﺎﻟﯿﺲ و ﺗﺮﻣﺎل ﻣﺲ
اﯾﻦ اﻧﺪازه ﮔﯿﺮي را ﺑﺎ دﻗﺖ ﺑﺎﻻ اﻧﺠﺎم ﻣﯿﺪﻫﻨﺪ .
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· رﻃﻮﺑﺖ ﻧﺴﺒﯽ ) : (Relative Humidityﮐﻪ ﺑﺎ RHﯾﺎ Φﻧﺸﺎن داده ﻣﯽﺷﻮد ،ﺑﻪ ﺻﻮرت ﻧﺴﺒﺖ
ﻓﺸﺎر ﺟﺰﺋﯽ ﺑﺨﺎر آب ،ﺑﻪ ﻓﺸﺎر ﺑﺨﺎر آب در ﯾﮏ دﻣﺎي ﺧﺎص ﺗﻌﺮﯾﻒ ﻣﯽﺷﻮد.
· ﺗﺮﻣﻮﮐﻮﭘﻞ ﻧﻮع : sاﯾﻦ ﺗﺮﻣﻮﮐﻮﭘﻞ ﯾﮑﯽ ازﻧﻮاع ﺗﺮﻣﻮﮐﻮﭘﻞ ﻫﺎ ﻣﺤﺴﻮب ﻣﯽﺷﻮد ،ﮐﻪ ﺧﺼﻮﺻﯿﺎت و وﯾﮋﮔﯽ
ﻫﺎي ﻣﺘﻔﺎوت و ﻣﻨﺤﺼﺮ ﺑﻪ ﻓﺮد ﺧﻮد را دارد .اﯾﻦ ﻧﻮع ﺗﺮﻣﻮﮐﻮﭘﻞ ﻫﻤﺎﻧﻨﺪ ﺗﺮﻣﻮﮐﻮﭘﻞ ﻫﺎي ﺗﯿﭗ Rاز
آﻟﯿﺎژﻫﺎي ﭘﻼﺗﯿﻨﯿﻮم و رادﯾﻮم ﻣﯽﺳﺎزﻧﺪ.
· اﻟﮑﺘﺮوﻣﺘﺮ ﯾﺎ ﺑﺮقﺳﻨﺞ ) : (Electrometerوﺳﯿﻠﻪاي اﻟﮑﺘﺮﯾﮑﯽ ﺑﺮاي اﻧﺪازهﮔﯿﺮي ﺑﺎر اﻟﮑﺘﺮﯾﮑﯽ ﯾﺎ
اﺧﺘﻼف ﭘﺘﺎﻧﺴﯿﻞ اﻟﮑﺘﺮﯾﮑﯽ اﺳﺖ.
· : NI LabVIEWﯾﮏ زﺑﺎن ﺑﺮﻧﺎﻣﻪﻧﻮﯾﺴﯽ ﮔﺮاﻓﯿﮑﯽ اﺳﺖ ﮐﻪ ﺑﻪ وﺳﯿﻠﻪ ﺷﺮﮐﺖ ﻧﺸﻨﺎل اﯾﻨﺴﺘﺮوﻣﻨﺘﺲ
ﻃﺮاﺣﯽ ﺷﺪهاﺳﺖ و ﮐﺎرﺑﺮد آن ﺑﯿﺸﺘﺮ در ﺳﺎﻣﺎﻧﻪﻫﺎي ﺗﺴﺖ ،اﺧﺬ داده ،ﮐﻨﺘﺮل و ﭘﺎﯾﺶ راﯾﺎﻧﻪاي اﺳﺖ.
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References :-----------------------------------------------------------------------------: ﻣﻨﺎﺑﻊ
· https://fa.wikipedia.org/
· https://iranlabexpo.ir/resource/ir_products_edit/files/others/5/1/main_a2ef40
6e2c2351e0b9e80029c909242d590.jpg
· http://www.aryaeo.com/fa/product/3202/%D8%AF%D8%B3%D8%AA%D
A%AF%D8%A7%D9%87%D9%85%DB%8C%DA%A9%D8%B1%D9%8
8%D9%87%DB%8C%D8%AA%D8%B1.aspx
· http://www.azmaplast.com/product-
detail/%D8%AD%D9%85%D8%A7%D9%85-
%D8%A7%D9%88%D9%84%D8%AA%D8%B1%D8%A7%D8%B3%D9
%88%D9%86%DB%8C%DA%A9-ultrasonic-bath/
· http://www.packmangroup.com/content/1327/%D8%A2%D9%86%DB%8C
%D9%84+%DA%A9%D8%B1%D8%AF%D9%86+%28%D8%A8%D8%
A7%D8%B2%D9%BE%D8%AE%D8%AA%29+-+Annealing
· https://fa.m.wikipedia.org/wiki/%D8%B9%DA%A9%D8%A7%D8%B3%D
B%8C_%D8%B1%DB%8C%D8%B2%D9%86%DA%AF%D8%A7%D8%
B1%DB%8C
· https://www.atexdelvalle.com/fa/enclosures-ex-atex/flameproof-enclosure-
stainless-steel-junction-box
· https://fa.m.wikipedia.org/wiki/%DA%A9%D9%86%D8%AA%D8%B1%D
9%84_%D8%B4%D8%AF%D8%AA_%D8%AC%D8%B1%DB%8C%D8
%A7%D9%86
· https://isatis-
fa.com/product/%D9%81%D9%84%D9%88%D9%85%D8%AA%D8%B1-
%D8%AC%D8%B1%D9%85%DB%8C/
· https://fa.m.wikipedia.org/wiki/%D8%B1%D8%B7%D9%88%D8%A8%D8
%AA_%D9%86%D8%B3%D8%A8%DB%8C
· https://www.technoelementgroup.com/products/thermocouple-type-s/
· https://fa.m.wikipedia.org/wiki/%D8%A7%D9%84%DA%A9%D8%AA%
D8%B1%D9%88%D9%85%D8%AA%D8%B1
· https://fa.m.wikipedia.org/wiki/%D9%84%D8%A8%E2%80%8C%D9%88
%DB%8C%D9%88
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