H2S Gas Sensing Based On SnO2 Thin Films PDF

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In the name of god

· Reza Safari
· 991771228

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Contents :------------------------------------- : ‫ﻓﻬﺮﺳﺖ‬

Original selected text : ---------3-------- : ‫ﻣﺘﻦ اﻧﺘﺨﺎﺑﯽ اﺻﻠﯽ‬

text translation :---------------7------------- : ‫ﺗﺮﺟﻤﻪ ﻣﺘﻦ‬

Translate selected words :------12------ : ‫ﺗﺮﺟﻤﻪ ﻟﻐﺎت ﺑﺮﮔﺰﯾﺪه‬

Description of specific phrases : --16-- : ‫ﺗﻮﺿﯿﺤﺎت ﻋﺒﺎرات ﺧﺎص‬

References :-------------------18----------------: ‫ﻣﻨﺎﺑﻊ‬

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Original selected text:-------------------------- : ‫ﻣﺘﻦ اﻧﺘﺨﺎﺑﯽ اﺻﻠﯽ‬

H2S Gas Sensing Based on SnO2 Thin Films


Deposited by Ultrasonic Spray Pyrolysis on Al2O3
Substrate

Abstract— H2S gas is harmful for human health and


environment, therefore novel gas sensors for real time and fast
detection with high precision have been sought. Metal oxides are
already known as promising candidate for this purpose. This
article presents the performance of a gas sensor consists of a
microheater and active layer formed on single alumina substrate
for operating at high temperature applications.
Ultrasonic spray pyrolysis deposition method was used to make
both thick layer of SnO2 for microheater and thin and porous
crystalline layer of SnO2 as sensing layer. The prepared sensor
showed suitable dynamic response towards 10 to 50 ppm of H2S
gas both in humid and dry conditions at 450 °C. In these
experiments, the cross sensitivity of the sensor was also checked
for other interfering gases e.g. CH4 and NO2.
Keywords— SnO2, Gas Sensor, H2S, Ultrasonic Spray
Pyrolysis, Nanoporous thin film.

II. EXPERIMENTAL DETAILS


The utilized substrates were 99% pure alumina plates, which are
laser cut into 3 mm × 3 mm × 0.5 mm pieces. The substrates are
washed and cleaned with acetone and distilled water in warm
ultrasonic bath, dried in air prior to deposition of SnO2. The
prepared chips are directly placed on the hot stage of the
ultrasonic spray pyrolysis (USP) system to form both

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microheaters and sensing layers. The details of USP deposition
system presented in our previous work [10].
Substrate temperature and deposition time are the main control
parameters. The input power to the ultrasonic transducers
control’s the spray rate. All depositions are carried out at a
precursor spray rate of 4 mL/min and substrate temperature of
325 °C. The precursor solution for USP deposition is prepared
by dissolving 0.2 mol/L of stannous chloride dihydrate in pure
ethanol (99.90% v/v pure). After USP deposition for 75 min to
form microheater, the sample annealed at 900 °C for an hour in
air. Followed by 2 min’s of USP deposition on the back side of
the sample to form the porous sensing layer of SnO2. The SEM
micrographs of the microheater (Fig.la and b) and the sensing
layer (Fig.1c and d) are presented below.
Prior to gas sensing measurements, the samples were annealed at
600 °C for an hour in dry air to stabilize the sensor structure.
The prepared gas sensors were placed on the ceramic support
mounted to chip (25x35 mm) with electrical feedthroughs.
Electrical contacts to both heater and sensor structure were
provided by diffusion bonding using 75µm gold wire. The chip
with the sensors was placed in a stainless-steel chamber (with
volume of 5 ) with gas tube connectors for gas inlet and
outlet. Gas sensing experiments were conducted at clean room
conditions using in a closed chamber equipped with mass flow
controllers (MFCs).
In all experiments the continuous gas flow of 500±5 ml/min was
kept and monitored by MFCs and the independent flowmeter
(AALBORG, GFM17). In all cases the carrier gas was a
precleaned and dried compressed air. The target gasses for
experiments were taken from the cylinders with analytical
quality standard gas mixtures namely, 100 ppm of H2S, 100 ppm
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of NO2 and 1% of CH4, all in synthetic air. The relative humidity
(RH) of the gas mixture was continuously monitored by the
commercial RH sensor (Honeywell HIH-400-004) and
controlled using bubble humidifier supported with MFC.
Different gas concentrations and RH levels were obtained by
proper gases flows ratio. During all experiments the sensor
temperature was kept at stable level by the constant current
delivered to the heater by laboratory power supply. The
temperature of sensor was measured by the small s-type
thermocouple (made of Pt and 90%Pt10%Rh wires with 25 µm
diameter). The electrical parameters of sensors were measured
using Keithley 2410 electrometer using 500 mV power supply
during current measurements. The measurements control and
data acquisition were both realized by PC with homemade
software written in NI LabVIEW. In all cases sensor responses
were calculated according to formula:
, (eq.1)
where and are the sensor currents in clean carrier gas and
target gas atmospheres, respectively. The response times
( % ) Were calculated as a time from the start of dosing of
target gas to 90% of maximum response value (related to the
baseline). In a similar way, the regeneration times ( %)
were calculate as time form staring of clean carrier gas flow to
drop of sensing signal to 10% of initial value (from maximum
response to base line).
Bruker AXS, 2D Phaser was used for X-ray diffraction (XRD)
analysis and morphological studies.

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Fig. 1: SEM micrographs of (a) top and (b) cross section of heater. (c)
Structure of the sensing layer with high magnification presented in the
inset. (d) Cross section of the sensing layer. (e) EDX analysis obtained
from sensing layer.
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‫ﺗﺮﺟﻤﻪ ﻣﺘﻦ ‪text translation :----------------------------------- :‬‬

‫ﺳﻨﺠﺶ ﮔﺎز ﻫﯿﺪروژن ﺳﻮﻟﻔﯿﺪ ﺑﺮ اﺳﺎس ﻻﯾﻪﻫﺎي ﻧﺎزك ﻗﻠﻊ دي اﮐﺴﯿﺪ‬


‫رﺳﻮبﺷﺪه ﺗﻮﺳﻂ اﺳﭙﺮي اﻟﺘﺮاﺳﻮﻧﯿﮏ ﭘﯿﺮوﻟﯿﺰ ﺑﺮ روي ﺑﺴﺘﺮ آﻟﻮﻣﯿﻨﯿﻮم‬
‫اﮐﺴﯿﺪ‬

‫ﭼﮑﯿﺪه— ﮔﺎز ﻫﯿﺪروژن ﺳﻮﻟﻔﯿﺪ ﺑﺮاي ﺳﻼﻣﺘﯽ اﻧﺴﺎن و ﻣﺤﯿﻂ زﯾﺴﺖ ﻣﻀﺮ اﺳﺖ‪،‬‬
‫ﺑﻨﺎﺑﺮاﯾﻦ ﺳﻨﺴﻮرﻫﺎي ﺟﺪﯾﺪ ﮔﺎز ﺑﺮاي ﺗﺸﺨﯿﺺ ﺳﺮﯾﻊ و ﺑﻪ ﻣﻮﻗﻊ ﺑﺎ دﻗﺖ ﺑﺎﻻ ﺑﻪ دﻧﺒﺎل آن‬
‫ﻫﺴﺘﻨﺪ‪ .‬اﮐﺴﯿﺪﻫﺎي ﻓﻠﺰي در ﺣﺎل ﺣﺎﺿﺮ ﺑﻪ ﻋﻨﻮان ﮐﺎﻧﺪﯾﺪاي اﻣﯿﺪوار ﮐﻨﻨﺪه ﺑﺮاي اﯾﻦ‬
‫ﻣﻨﻈﻮر ﺷﻨﺎﺧﺘﻪ ﺷﺪه اﻧﺪ‪ .‬اﯾﻦ ﻣﻘﺎﻟﻪ ﻋﻤﻠﮑﺮد ﯾﮏ ﺣﺴﮕﺮ ﮔﺎز را ﺷﺎﻣﻞ ﯾﮏ ﻣﯿﮑﺮوﻫﯿﺘﺮ و‬
‫ﻻﯾﻪ ﻓﻌﺎل ﺗﺸﮑﯿﻞ ﺷﺪه ﺑﺮ روي ﯾﮏ ﺑﺴﺘﺮ آﻟﻮﻣﯿﻨﺎ ﺑﺮاي ﻋﻤﻠﮑﺮد در ﮐﺎرﺑﺮدﻫﺎي دﻣﺎي ﺑﺎﻻ‬
‫اراﺋﻪ ﻣﯽﮐﻨﺪ‪.‬‬
‫ﺑﺮاي ﺳﺎﺧﺘﻦ ﻻﯾﻪ ﺿﺨﯿﻢ ﻗﻠﻊ دي اﮐﺴﯿﺪ ﺑﺮاي ﻣﯿﮑﺮوﻫﯿﺘﺮ و ﻻﯾﻪ ﻧﺎزك و ﻣﺘﺨﻠﺨﻞ‬
‫ﮐﺮﯾﺴﺘﺎﻟﯽ آن )ﻗﻠﻊ دي اﮐﺴﯿﺪ( ﺑﻪ ﻋﻨﻮان ﻻﯾﻪ ﺳﻨﺠﺶ‪ ،‬از روش رﺳﻮب ﺗﺠﺰﯾﻪ در اﺛﺮ‬
‫اﺳﭙﺮي اوﻟﺘﺮاﺳﻮﻧﯿﮏ ﻣﻮرد اﺳﺘﻔﺎده ﻗﺮار ﮔﺮﻓﺖ‪ .‬ﺣﺴﮕﺮ آﻣﺎده ﺷﺪه ﭘﺎﺳﺦ دﯾﻨﺎﻣﯿﮑﯽ‬
‫ﻣﻨﺎﺳﺒﯽ ﻧﺴﺒﺖ ﺑﻪ )ﻏﻠﻈﺖ( ‪ 10‬ﺗﺎ ‪ ppm 50‬ﮔﺎز ﻫﯿﺪروژن ﺳﻮﻟﻔﯿﺪ در ﺷﺮاﯾﻂ ﻣﺮﻃﻮب و‬
‫ﺧﺸﮏ در دﻣﺎي ‪ 450‬درﺟﻪ ﺳﺎﻧﺘﯽ ﮔﺮاد ﻧﺸﺎن داد‪ .‬در اﯾﻦ آزﻣﺎﯾﺶﻫﺎ‪ ،‬ﺣﺴﺎﺳﯿﺖ‬
‫ﻣﺘﻘﺎﻃﻊ ﺣﺴﮕﺮ ﺑﺮاي ﺳﺎﯾﺮ ﮔﺎزﻫﺎي ﻣﺰاﺣﻢ ﺑﻪ ﻋﻨﻮان ﻣﺜﺎل ﮔﺎز ﻣﺘﺎن و ﻧﯿﺘﺮوژن دي اﮐﺴﯿﺪ‬
‫ﺑﺮرﺳﯽ ﺷﺪ‪.‬‬
‫ﮐﻠﻤﺎت ﮐﻠﯿﺪي—ﻗﻠﻊ دي اﮐﺴﯿﺪ‪ ،‬ﺣﺴﮕﺮ ﮔﺎز‪ ،‬ﻫﯿﺪروژن ﺳﻮﻟﻔﯿﺪ‪ ،‬اﺳﭙﺮي اوﻟﺘﺮاﺳﻮﻧﯿﮏ‪،‬‬
‫ﭘﯿﺮوﻟﯿﺰ‪ ،‬ﻻﯾﻪ ﻧﺎزك ﻧﺎﻧﻮ ﻣﺘﺨﻠﺨﻞ‪.‬‬

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‫)ﺑﺨﺶ دوم(‪ .‬ﺟﺰﺋﯿﺎت ﺗﺠﺮﺑﯽ‬

‫ﺑﺴﺘﺮﻫﺎي ﻣﻮرد اﺳﺘﻔﺎده ﺻﻔﺤﺎت آﻟﻮﻣﯿﻨﺎ ‪ 99‬درﺻﺪ ﺧﺎﻟﺺ ﺑﻮدﻧﺪ ﮐﻪ ﺑﻪ ﻗﻄﻌﺎت‬


‫‪ 0.5 × 3 × 3‬ﻣﯿﻠﯽ ﻣﺘﺮ ﺑﺮش داده ﺷﺪه اﻧﺪ‪ .‬ﺑﺴﺘﺮﻫﺎ ﺑﺎ اﺳﺘﻮن و آب ﻣﻘﻄﺮ در ﺣﻤﺎم ﮔﺮم‬
‫اوﻟﺘﺮاﺳﻮﻧﯿﮏ ﺷﺴﺘﻪ و ﺗﻤﯿﺰ ﻣﯽ ﺷﻮﻧﺪ و ﻗﺒﻞ از رﺳﻮب ﻗﻠﻊ دي اﮐﺴﯿﺪ در ﻫﻮا ﺧﺸﮏ‬
‫ﻣﯽ ﺷﻮﻧﺪ‪ .‬ﺗﺮاﺷﻪ ﻫﺎي آﻣﺎده ﺷﺪه ﻣﺴﺘﻘﯿﻤﺎً روي ﻣﺮﺣﻠﻪ داغ ﺳﯿﺴﺘﻢ ﭘﯿﺮوﻟﯿﺰ اﺳﭙﺮي‬
‫اوﻟﺘﺮاﺳﻮﻧﯿﮏ)‪ (USP‬ﻗﺮار ﻣﯽ ﮔﯿﺮﻧﺪ ﺗﺎ ﻫﻢ ﻣﯿﮑﺮوﻫﯿﺘﺮﻫﺎ و ﻫﻢ ﻻﯾﻪ ﻫﺎي ﺣﺴﮕﺮ را‬
‫ﺗﺸﮑﯿﻞ دﻫﻨﺪ‪ .‬ﺟﺰﺋﯿﺎت ﺳﯿﺴﺘﻢ رﺳﻮب دﻫﯽ اﺳﭙﺮي اوﻟﺘﺮاﺳﻮﻧﯿﮏ در ﮐﺎر ﻗﺒﻠﯽ ﻣﺎ اراﺋﻪ‬
‫ﺷﺪه اﺳﺖ ]‪.[10‬‬
‫دﻣﺎي ﺑﺴﺘﺮ و زﻣﺎن رﺳﻮب ﭘﺎراﻣﺘﺮﻫﺎي اﺻﻠﯽ ﮐﻨﺘﺮل ﻫﺴﺘﻨﺪ‪ .‬ﻗﺪرت ورودي ﺑﻪ ﻣﺒﺪل ﻫﺎي‬
‫اوﻟﺘﺮاﺳﻮﻧﯿﮏ ﻣﯿﺰان اﺳﭙﺮي را ﮐﻨﺘﺮل ﻣﯽ ﮐﻨﺪ‪ .‬ﻫﻤﻪ رﺳﻮبﮔﺬاريﻫﺎ ﺑﺎ ﺳﺮﻋﺖ اﺳﭙﺮي‬
‫ﭘﯿﺶﺳﺎز ‪ 4‬ﻣﯿﻠﯽﻟﯿﺘﺮ در دﻗﯿﻘﻪ و دﻣﺎي ﺑﺴﺘﺮ ‪ 325‬درﺟﻪ ﺳﺎﻧﺘﯽﮔﺮاد اﻧﺠﺎم ﻣﯽﺷﻮﻧﺪ‪.‬‬
‫ﻣﺤﻠﻮل ﭘﯿﺶ ﺳﺎز ﺑﺮاي رﺳﻮب اﺳﭙﺮي اوﻟﺘﺮاﺳﻮﻧﯿﮏ ﺑﺎ ﺣﻞ ‪ 0.2‬ﻣﻮل در ﻟﯿﺘﺮ دي‬
‫ﻫﯿﺪرات ﮐﻠﺮﯾﺪ ﻗﻠﻊ در اﺗﺎﻧﻮل ﺧﺎﻟﺺ )‪ V/V ٪99.90‬ﺧﺎﻟﺺ( ﺗﻬﯿﻪ ﻣﯽ ﺷﻮد‪ .‬ﭘﺲ از‬
‫رﺳﻮب اﺳﭙﺮي اوﻟﺘﺮاﺳﻮﻧﯿﮏ ﺑﻪ ﻣﺪت ‪ 75‬دﻗﯿﻘﻪ ﺑﺮاي ﺗﺸﮑﯿﻞ ﻣﯿﮑﺮوﻫﯿﺘﺮ‪ ،‬ﻧﻤﻮﻧﻪ در دﻣﺎي‬
‫‪ 900‬درﺟﻪ ﺳﺎﻧﺘﯿﮕﺮاد ﺑﻪ ﻣﺪت ﯾﮏ ﺳﺎﻋﺖ در ﻫﻮا آﻧﯿﻞ ﺷﺪ‪ .‬ﭘﺲ از ‪ 2‬دﻗﯿﻘﻪ رﺳﻮب‬
‫اﺳﭙﺮي اوﻟﺘﺮاﺳﻮﻧﯿﮏ در ﭘﺸﺖ ﻧﻤﻮﻧﻪ ﺑﺮاي ﺗﺸﮑﯿﻞ ﻻﯾﻪ ﺣﺴﮕﺮ ﻣﺘﺨﻠﺨﻞ ﻗﻠﻊ دي اﮐﺴﯿﺪ‬
‫اﯾﺠﺎد ﺷﺪ‪ .‬ﻣﯿﮑﺮوﮔﺮاف ﻫﺎي ﻣﯿﮑﺮوﺳﮑﻮپ اﻟﮑﺘﺮوﻧﯽ ﺗﺴﻠﺴﻠﯽ ﻣﯿﮑﺮوﻫﯿﺘﺮ )ﺷﮑﻞ ‪ la‬و ‪(b‬‬
‫و ﻻﯾﻪ ﺣﺴﮕﺮ )ﺷﮑﻞ ‪ 1c‬و ‪ (d‬در زﯾﺮ اراﺋﻪ ﺷﺪه اﺳﺖ‪.‬‬
‫ﻗﺒﻞ از اﻧﺪازه ﮔﯿﺮي ﺳﻨﺠﺶ ﮔﺎز‪ ،‬ﻧﻤﻮﻧﻪ ﻫﺎ در دﻣﺎي ‪ 600‬درﺟﻪ ﺳﺎﻧﺘﯿﮕﺮاد ﺑﻪ ﻣﺪت ﯾﮏ‬
‫ﺳﺎﻋﺖ در ﻫﻮاي ﺧﺸﮏ آﻧﯿﻞ ﺷﺪﻧﺪ ﺗﺎ ﺳﺎﺧﺘﺎر ﺣﺴﮕﺮ ﺗﺜﺒﯿﺖ ﺷﻮد‪ .‬ﺣﺴﮕﺮﻫﺎي ﮔﺎز آﻣﺎده‬
‫ﺷﺪه روي ﺗﮑﯿﻪ ﮔﺎه ﺳﺮاﻣﯿﮑﯽ ﻧﺼﺐ ﺷﺪه روي ﺗﺮاﺷﻪ )‪ 35×25‬ﻣﯿﻠﯽ ﻣﺘﺮ( ﺑﺎ ورودي‬
‫ﻫﺎي اﻟﮑﺘﺮﯾﮑﯽ ﻗﺮار ﮔﺮﻓﺘﻨﺪ‪ .‬ﺗﻤﺎس ﻫﺎي اﻟﮑﺘﺮﯾﮑﯽ‪ ،‬ﺳﺎﺧﺘﺎر ﻫﯿﺘﺮ و ﺣﺴﮕﺮ ﺑﺎ ﭘﯿﻮﻧﺪ اﻧﺘﺸﺎر‬

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‫ﺑﺎ اﺳﺘﻔﺎده از ﺳﯿﻢ ﻃﻼﯾﯽ ‪ 75‬ﻣﯿﮑﺮوﻣﺘﺮي ﻓﺮاﻫﻢ ﺷﺪ‪ .‬ﺗﺮاﺷﻪ ﺑﺎ ﺳﻨﺴﻮرﻫﺎ در ﯾﮏ ﻣﺤﻔﻈﻪ‬
‫ﻓﻮﻻدي ﺿﺪ زﻧﮓ )ﺑﺎ ﺣﺠﻢ ‪ 5‬ﺳﺎﻧﺘﯽ ﻣﺘﺮ ﻣﺮﺑﻊ( ﺑﺎ اﺗﺼﺎﻻت ﻟﻮﻟﻪ ﮔﺎز ﺑﺮاي ورودي و‬
‫ﺧﺮوﺟﯽ ﮔﺎز ﻗﺮار داده ﺷﺪ‪ .‬آزﻣﺎﯾﺶﻫﺎي ﺳﻨﺠﺶ ﮔﺎز در ﺷﺮاﯾﻂ اﺗﺎق ﺗﻤﯿﺰ ﺑﺎ اﺳﺘﻔﺎده از‬
‫ﯾﮏ ﻣﺤﻔﻈﻪ ﺑﺴﺘﻪ ﻣﺠﻬﺰ ﺑﻪ ﮐﻨﺘﺮلﮐﻨﻨﺪهﻫﺎي ﺟﺮﯾﺎن ﺟﺮﻣﯽ)‪ (MFC‬اﻧﺠﺎم ﺷﺪ‪.‬‬
‫در ﺗﻤﺎم آزﻣﺎﯾﺶﻫﺎ ﺟﺮﯾﺎن ﮔﺎز ﭘﯿﻮﺳﺘﻪ ‪ 500±5‬ﻣﯿﻠﯽﻟﯿﺘﺮ ﺑﺮ دﻗﯿﻘﻪ ﻧﮕﻪ داﺷﺘﻪ ﺷﺪ و‬
‫ﺗﻮﺳﻂ ﮐﻨﺘﺮل ﮐﻨﻨﺪه ﻫﺎي ﺟﺮﯾﺎن ﺟﺮﻣﯽ و ﻓﻠﻮﻣﺘﺮ ﻣﺴﺘﻘﻞ )‪(AALBORG, GFM17‬‬
‫ﮐﻨﺘﺮل ﺷﺪ‪ .‬در ﺗﻤﺎم ﻣﻮارد ﮔﺎز ﺣﺎﻣﻞ ﻫﻮاي ﻓﺸﺮده از ﭘﯿﺶ ﺗﻤﯿﺰ ﺷﺪه و ﺧﺸﮏ ﺷﺪه ﺑﻮد‪.‬‬
‫ﮔﺎزﻫﺎي ﻣﻮرد ﻧﻈﺮ ﺑﺮاي آزﻣﺎﯾﺶﻫﺎ از ﺳﯿﻠﻨﺪرﻫﺎﯾﯽ ﺑﺎ ﻣﺨﻠﻮطﻫﺎي ﮔﺎز اﺳﺘﺎﻧﺪارد ﺑﺎ ﮐﯿﻔﯿﺖ‬
‫ﺗﺤﻠﯿﻠﯽ ﯾﻌﻨﯽ) ‪ 100ppm‬از ﻫﯿﺪروژن ﺳﻮﻟﻔﯿﺪ ‪ 100ppm ،‬از ﻧﯿﺘﺮوژن دي اﮐﺴﯿﺪ و‬
‫‪ ٪1‬از ﻣﺘﺎن‪ ( ،‬ﻫﻤﻪ در ﻫﻮاي ﻣﺼﻨﻮﻋﯽ ﮔﺮﻓﺘﻪ ﺷﺪ‪ .‬رﻃﻮﺑﺖ ﻧﺴﺒﯽ )‪ (RH‬ﻣﺨﻠﻮط ﮔﺎز ﺑﻪ‬
‫ﻃﻮر ﻣﺪاوم ﺗﻮﺳﻂ ﺳﻨﺴﻮر رﻃﻮﺑﺖ ﻧﺴﺒﯽ ﺗﺠﺎري )‪ (Honeywell HIH-400-004‬ﮐﻨﺘﺮل‬
‫ﺷﺪ و ﺑﺎ اﺳﺘﻔﺎده از ﻣﺮﻃﻮب ﮐﻨﻨﺪه ﺣﺒﺎب ﭘﺸﺘﯿﺒﺎﻧﯽ ﺷﺪه ﺑﺎ ﮐﻨﺘﺮل ﮐﻨﻨﺪه ﺟﺮﯾﺎن ﺟﺮﻣﯽ‬
‫ﮐﻨﺘﺮل ﺷﺪ‪ .‬ﻏﻠﻈﺖ ﻫﺎي ﻣﺨﺘﻠﻒ ﮔﺎز و ﺳﻄﻮح رﻃﻮﺑﺖ ﻧﺴﺒﯽ ﺑﺎ ﻧﺴﺒﺖ ﺟﺮﯾﺎن ﮔﺎزﻫﺎي‬
‫ﻣﻨﺎﺳﺐ ﺑﻪ دﺳﺖ آﻣﺪ‪ .‬در ﻃﻮل ﺗﻤﺎم آزﻣﺎﯾﺶﻫﺎ‪ ،‬دﻣﺎي ﺳﻨﺴﻮر ﺗﻮﺳﻂ ﺟﺮﯾﺎن ﺛﺎﺑﺘﯽ ﮐﻪ‬
‫ﺗﻮﺳﻂ ﻣﻨﺒﻊ ﺗﻐﺬﯾﻪ آزﻣﺎﯾﺸﮕﺎﻫﯽ ﺑﻪ ﺑﺨﺎري ﺗﺤﻮﯾﻞ داده ﻣﯽﺷﺪ‪ ،‬در ﺳﻄﺢ ﺛﺎﺑﺘﯽ ﻧﮕﻪ‬
‫داﺷﺘﻪ ﺷﺪه اﺳﺖ‪ .‬دﻣﺎي ﺳﻨﺴﻮر ﺗﻮﺳﻂ ﺗﺮﻣﻮﮐﻮﭘﻞ ﮐﻮﭼﮏ ﻧﻮع ‪ s‬اﻧﺪازه ﮔﯿﺮي ﺷﺪ‪.‬‬
‫)ﺳﺎﺧﺘﻪ ﺷﺪه از ﺳﯿﻢ ﭘﻼﺗﯿﻦ و ‪ %90‬ﭘﻼﺗﯿﻦ ‪ Rh %10‬ﺑﺎ ﻗﻄﺮ ‪ 25‬ﻣﯿﮑﺮوﻣﺘﺮ( ‪.‬‬
‫ﭘﺎراﻣﺘﺮﻫﺎي اﻟﮑﺘﺮﯾﮑﯽ ﺳﻨﺴﻮرﻫﺎ ﺑﺎ اﺳﺘﻔﺎده از اﻟﮑﺘﺮوﻣﺘﺮ ‪ Keithley 2410‬ﺑﺎ ﻣﻨﺒﻊ‬
‫ﺗﻐﺬﯾﻪ ‪ 500‬ﻣﯿﻠﯽ وﻟﺖ در ﻃﻮل اﻧﺪازهﮔﯿﺮي ﺟﺮﯾﺎن اﻧﺪازهﮔﯿﺮي ﺷﺪ‪ .‬ﮐﻨﺘﺮل اﻧﺪازهﮔﯿﺮي و‬
‫ﺟﻤﻊآوري دادهﻫﺎ ﻫﺮ دو ﺗﻮﺳﻂ راﯾﺎﻧﻪ ﺷﺨﺼﯽ ﺑﺎ ﻧﺮماﻓﺰار ﺧﺎﻧﮕﯽ ﮐﻪ در ‪NI LabVIEW‬‬
‫ﻧﻮﺷﺘﻪ ﺷﺪه اﺳﺖ‪ ،‬اﻧﺠﺎم ﺷﺪ‪ .‬در ﺗﻤﺎم ﻣﻮارد ﭘﺎﺳﺦ ﺳﻨﺴﻮر ﻃﺒﻖ ﻓﺮﻣﻮل )زﯾﺮ( ﻣﺤﺎﺳﺒﻪ‬
‫ﺷﺪ‪:‬‬

‫واﮐﻨﺶ‬

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‫ﺑﻪ ﺗﺮﺗﯿﺐ ﺟﺮﯾﺎن ﺣﺴﮕﺮ در ﮔﺎز ﺣﺎﻣﻞ ﺗﻤﯿﺰ و اﺗﻤﺴﻔﺮ ﮔﺎز ﻫﺪف‬ ‫و‬ ‫ﮐﻪ در آن‬
‫ﻫﺴﺘﻨﺪ‪.‬‬
‫ﺑﻪ ﻋﻨﻮان ﯾﮏ زﻣﺎن از ﺷﺮوع دوز ﮔﺎز ﻫﺪف ﺗﺎ ‪90‬‬ ‫زﻣﺎن ﭘﺎﺳﺨﮕﻮﯾﯽ ‪%‬‬
‫درﺻﺪ ﺣﺪاﮐﺜﺮ ﻣﻘﺪار ﭘﺎﺳﺦ )ﻣﺮﺑﻮط ﺑﻪ ﺧﻂ ﭘﺎﯾﻪ( ﻣﺤﺎﺳﺒﻪ ﺷﺪ‪ .‬ﺑﻪ روﺷﯽ ﻣﺸﺎﺑﻪ‪ ،‬زﻣﺎنﻫﺎي‬
‫ﺑﻪ ﺻﻮرت زﻣﺎن ﺧﯿﺮه ﺷﺪن ﺟﺮﯾﺎن ﮔﺎز ﺣﺎﻣﻞ ﺗﻤﯿﺰ ﺗﺎ اﻓﺖ‬ ‫ﺑﺎزﺳﺎزي ‪%‬‬
‫ﺳﯿﮕﻨﺎل ﺣﺴﮕﺮ ﺗﺎ ‪ %10‬ﻣﻘﺪار اوﻟﯿﻪ )از ﺣﺪاﮐﺜﺮ ﭘﺎﺳﺦ ﺗﺎ ﺧﻂ ﭘﺎﯾﻪ( ﻣﺤﺎﺳﺒﻪ ﺷﺪ‪.‬‬
‫‪ Bruker AXS, 2D Phaser‬ﺑﺮاي ﺗﺠﺰﯾﻪ و ﺗﺤﻠﯿﻞ ﭘﺮاش اﺷﻌﻪ اﯾﮑﺲ )‪ (XRD‬و‬
‫ﻣﻄﺎﻟﻌﺎت ﻣﻮرﻓﻮﻟﻮژﯾﮑﯽ اﺳﺘﻔﺎده ﺷﺪ‪.‬‬

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‫ﺷﮑﻞ ‪ :1‬ﻣﯿﮑﺮوﮔﺮاف ﻫﺎي ‪ SEM‬از )اﻟﻒ( ﺑﺎﻻ و )ب( ﻣﻘﻄﻊ ﮔﺮم ﮐﻦ‪) .‬ج( ﺳﺎﺧﺘﺎر ﻻﯾﻪ‬
‫ﺣﺴﮕﺮ ﺑﺎ ﺑﺰرﮔﻨﻤﺎﯾﯽ ﺑﺎﻻ ﮐﻪ در ﻗﺴﻤﺖ داﺧﻠﯽ اراﺋﻪ ﺷﺪه اﺳﺖ‪) .‬د( ﻣﻘﻄﻊ ﻻﯾﻪ ﺣﺴﮕﺮ‪.‬‬
‫)ه( ﺗﺠﺰﯾﻪ و ﺗﺤﻠﯿﻞ ‪ EDX‬ﺑﻪ دﺳﺖ آﻣﺪه از ﻻﯾﻪ ﺣﺴﮕﺮ‪.‬‬

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Translate selected words :--------------------- : ‫ﺗﺮﺟﻤﻪ ﻟﻐﺎت ﺑﺮﮔﺰﯾﺪه‬

words :----------------------- : ‫ ﻟﻐﺎت‬Translations :------------- : ‫ﺗﺮﺟﻤﻪ ﻫﺎ‬


active layer formed ‫ﻻﯾﻪ ﻓﻌﺎل ﺗﺸﮑﯿﻞ ﺷﺪه‬
analytical quality standard gas ‫ﮔﺎز اﺳﺘﺎﻧﺪارد ﮐﯿﻔﯿﺖ ﺗﺤﻠﯿﻠﯽ‬
applications ‫ﮐﺎرﺑﺮدﻫﺎ‬
Based on ‫ﺑﺮ اﺳﺎس‬
baseline ‫ﺧﻂ ﭘﺎﯾﻪ‬
bubble humidifier ‫ﻣﺮﻃﻮب ﮐﻨﻨﺪه ﺣﺒﺎب دار‬
carried out ‫اﻧﺠﺎم ﺷﺪ‬
carrier gas ‫ﮔﺎز ﺣﺎﻣﻞ‬
chamber ‫ اﺗﺎق‬- ‫ﻣﺤﻔﻈﻪ‬
commercial ‫ﺗﺠﺎري‬
concentrations ‫ﻏﻠﻈﺖ ﻫﺎ‬
conditions ‫ﺷﺮاﯾﻂ‬
conducted ‫اﻧﺠﺎم ﺷﺪه‬
connectors ‫اﺗﺼﺎل دﻫﻨﺪه ﻫﺎ‬
consists of ‫ﺷﺎﻣﻞ‬
constant current ‫ﺟﺮﯾﺎن ﭘﺎﯾﺪار‬
continuous ‫ﻣﺪاوم‬
continuously ‫ﺑﻪ ﻃﻮر ﻣﺪاوم‬
cross section ‫ﺳﻄﺢ ﻣﻘﻄﻊ‬
data acquisition ‫داده ﻫﺎي ﺟﻤﻊ آوري ﺷﺪه‬
delivered ‫ﺗﺤﻮﯾﻞ داده ﺷﺪه‬
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deposition ‫رﺳﻮب ﮔﺬاري‬
deposition system ‫ﺳﯿﺴﺘﻢ رﺳﻮب ﮔﺬاري‬
detection ‫ﺗﺸﺨﯿﺺ‬
diameter ‫ﻗﻄﺮ‬
diffusion bonding ‫ﭘﯿﻮﻧﺪ اﻧﺘﺸﺎر‬
directly placed ‫ﺑﻪ ﻃﻮر ﻣﺴﺘﻘﯿﻢ ﻗﺮار داده ﺷﺪه اﺳﺖ‬
dissolving ‫ﺣﻞ ﺷﺪن‬
distilled water ‫آب ﻣﻘﻄﺮ‬
During ‫در ﺣﯿﻦ‬
electrical feedthroughs ‫ورودي ﻫﺎي اﻟﮑﺘﺮﯾﮑﯽ‬
environment ‫ﻣﺤﯿﻂ زﯾﺴﺖ‬
equipped ‫ﻣﺠﻬﺰ ﺑﻮدن‬
experiments ‫آزﻣﺎﯾﺶ‬
flow of ‫ﺟﺮﯾﺎن‬
Gas Sensing ‫ﺳﻨﺠﺶ ﮔﺎز‬
gas tube ‫ﻟﻮﻟﻪ ﮔﺎز‬
high magnification ‫ﺑﺰرﮔﻨﻤﺎﯾﯽ ﺑﺎﻻ‬
high precision ‫دﻗﺖ ﺑﺎﻻ‬
independent ‫ﻣﺴﺘﻘﻞ‬
initial value ‫ﻣﻘﺪار اوﻟﯿﻪ‬
inlet and outlet ‫ورودي و ﺧﺮوﺟﯽ‬
inset ‫دروﻧﯽ‬
kept ‫ﻧﮕﻬﺪاري ﻣﯽ ﺷﻮد‬

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laboratory power supply ‫ﻣﻨﺒﻊ ﺗﻐﺬﯾﻪ آزﻣﺎﯾﺸﮕﺎﻫﯽ‬
maximum response value ‫ﺣﺪاﮐﺜﺮ ﻣﻘﺪار ﭘﺎﺳﺦ‬
measured ‫اﻧﺪازه ﮔﯿﺮي ﺷﺪه‬
measurements ‫اﻧﺪازه ﮔﯿﺮي ﻫﺎ‬
mixture ‫ﻣﺨﻠﻮط‬
namely ‫ﯾﻌﻨﯽ‬
novel gas sensors ‫ﺳﻨﺴﻮر ﻫﺎي ﺟﺪﯾﺪ ﮔﺎز‬
obtained ‫ﺑﻪ دﺳﺖ آﻣﺪه‬
operating ‫ﮐﺎرﮐﺮد‬
performance (‫ﻋﻤﻠﮑﺮد )ﮐﺎراﯾﯽ‬
porous ‫ﻣﺘﺨﻠﺨﻞ‬
power supply ‫ﻣﻨﺒﻊ ﺗﻐﺬﯾﻪ‬
precleaned ‫از ﻗﺒﻞ ﺗﻤﯿﺰ ﺷﺪه‬
precursor ‫ﭘﯿﺶ ﺳﺎز‬
precursor solution ‫ﻣﺤﻠﻮل ﭘﯿﺶ ﺳﺎز‬
prepared ‫ﺗﻬﯿﻪ ﺷﺪه‬
prepared chips ‫ﺗﺮاﺷﻪ ﻫﺎي آﻣﺎده ﺷﺪه‬
presented ‫اراﯾﻪ ﺷﺪه‬
previous ‫ﻗﺒﻠﯽ‬
prior ‫ﻗﺒﻞ‬
promising candidate (‫ﮐﺎﻧﺪﯾﺪاي اﻣﯿﺪوار ﮐﻨﻨﺪه )اﻣﯿﺪ ﺑﺨﺶ‬
proper gases flows ratio ‫ﻧﺴﺒﺖ ﺟﺮﯾﺎن ﮔﺎزﻫﺎي ﻣﻨﺎﺳﺐ‬
provided ‫اراﺋﻪ ﺷﺪه اﺳﺖ‬

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pure ‫ﺧﺎﻟﺺ‬
purpose (‫ﻫﺪف )ﻣﻨﻈﻮر‬
real time ‫ﺑﻪ ﻣﻮﻗﻊ‬
realized ‫ﻣﺘﻮﺟﻪ ﺷﺪ‬
regeneration times ‫زﻣﺎن ﺑﺎزﺳﺎزي‬
relative humidity ‫رﻃﻮﺑﺖ ﻧﺴﺒﯽ‬
relative humidity levels ‫ﺳﻄﻮح رﻃﻮﺑﺖ ﻧﺴﺒﯽ‬
respectively ‫ﺑﻪ ﺗﺮﺗﯿﺐ‬
responses ‫ﭘﺎﺳﺦ ﻫﺎ‬
sample annealed ‫ﻧﻤﻮﻧﻪ آﻧﯿﻞ ﺷﺪه‬
similar way ‫روش ﻣﺸﺎﺑﻪ‬
stabilize ‫ﺗﺜﺒﯿﺖ ﮐﺮدن‬
stable level ‫ﺳﻄﺢ ﭘﺎﯾﺪار‬
stannous ‫ﻗﻠﻊ‬
Structure ‫ﺳﺎﺧﺘﺎر‬
Substrate (‫ﺑﺴﺘﺮ )زﯾﺮﻻﯾﻪ‬
synthetic air ‫ﻫﻮاي ﻣﺼﻨﻮﻋﯽ‬
target gasses ‫ﮔﺎزﻫﺎي ﻫﺪف‬
temperature ‫درﺟﻪ ﺣﺮارت‬
Thin Films Deposited ‫ﻻﯾﻪ ﻫﺎي ﻧﺎزك رﺳﻮب ﺷﺪه‬
transducers ‫ﻣﺒﺪل ﻫﺎ‬
wire ‫ﺳﯿﻢ‬
X-ray diffraction ‫ﭘﺮاش اﺷﻌﻪ اﯾﮑﺲ‬

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‫ﺗﻮﺿﯿﺤﺎت ﻋﺒﺎرات ﺧﺎص ‪Description of specific phrases :---------------------- :‬‬

‫· اﺳﭙﺮي اﻟﺘﺮاﺳﻮﻧﯿﮏ )‪ : (Ultrasonic Spray‬ﻧﺎزل ﻫﺎي اﻟﺘﺮاﺳﻮﻧﯿﮏ ﻧﻮﻋﯽ از ﻧﺎزل ﺑﺮاي اﺳﭙﺮي‬
‫ﻣﻮاد ﻣﺎﯾﻊ و ﻣﺤﻠﻮل ﻫﺎ ﻫﺴﺘﻨﺪ ﮐﻪ ﺑﺎ اﺳﺘﻔﺎده از اﻣﻮاج اﻟﺘﺮاﺳﻮﻧﯿﮏ ﺑﺎﻋﺚ اﯾﺠﺎد ذرات رﯾﺰ و ﭘﺎﺷﺶ آﻧﻬﺎ‬
‫)‪ (Atomization‬ﻣﯽ ﺷﻮﻧﺪ‪.‬‬
‫· ﭘﯿﺮوﻟﯿﺰ )‪ : (Pyrolysis‬ﻓﺮاﯾﻨﺪي ﺗﺮﻣﻮﺷﯿﻤﯿﺎﯾﯽ اﺳﺖ ﮐﻪ ﻃﯽ آن ﻣﻮاد آﻟﯽ در اﺛﺮﮔﺮﻣﺎ ﺗﺠﺰﯾﻪ ﻣﯽﺷﻮﻧﺪ‪.‬‬
‫· ﻣﯿﮑﺮو ﻫﯿﺘﺮ )‪ : (micro heater‬اﯾﻦ دﺳﺘﮕﺎه داراي ﯾﮏ ﺻﻔﺤﻪ ﮔﺮم )‪ (Hot plate‬ﭘﺎﯾﺪار از ﻧﻈﺮ‬
‫ﺣﺮارﺗﯽ اﺳﺖ ﮐﻪ ﻣﯿﺘﻮاﻧﺪ ﺑﺮاي ﺟﺎﮔﺬاري ﻧﻤﻮﻧﻪ ﻫﺎ و ﯾﺎ ﺑﺮاي ﭼﺴﺒﺎﻧﺪن ﺗﺮﻣﻮﭘﻼﺳﺖ از آن اﺳﺘﻔﺎده ﮐﺮد‪.‬‬
‫· ﺣﻤﺎم اوﻟﺘﺮاﺳﻮﻧﯿﮏ )‪ : (warm ultrasonic bath‬ﺣﻤﺎمﻫﺎي اوﻟﺘﺮاﺳﻮﻧﯿﮏ ﺟﺰء دﺳﺘﻪ ي‬
‫ﺗﺠﻬﯿﺰات آزﻣﺎﯾﺸﮕﺎﻫﯽ اﺳﺖ و ﻣﺠﻬﺰ ﺑﻪ ﺳﯿﺴﺘﻢ ﮔﺮﻣﺎﯾﺸﯽ و ﺳﺮﻣﺎﯾﺸﯽ ﺟﻬﺖ ﭘﺮاﮐﻨﺪﮔﯽ ﻣﻮاد‪ ،‬ﺗﻤﯿﯿﺰ‬
‫ﮐﺮدن ﻟﻮازم آزﻣﺎﯾﺸﮕﺎﻫﯽ و ﺗﺨﺮﯾﺐ ﺳﻠﻮلﻫﺎ ﻫﺴﺘﻨﺪ‪.‬‬
‫· آﻧﯿﻞ ﮐﺮدن )ﺑﺎزﭘﺨﺖ( )‪ : (Annealing‬درﻋﻠﻢ ﻣﻮاد‪ ،‬ﺑﻪ ﻓﺮاﯾﻨﺪي ﻣﯽ ﮔﻮﯾﻨﺪ ﮐﻪ ﻣﻮﺟﺐ ﺗﻐﯿﯿﺮ ﺧﻮاص‬
‫ﻣﺎده ﻣﺎﻧﻨﺪ ﺳﺨﺘﯽ و ﺷﮑﻞ ﭘﺬﯾﺮي آن ﻣﯽ ﺷﻮد‪.‬‬
‫· رﯾﺰﻧﮕﺎري ﯾﺎ ﻣﯿﮑﺮوﮔﺮاﻓﯽ )‪ : (Micrography‬روﺷﯽ اﺳﺖ در ﻋﮑﺎﺳﯽ ﺑﺮاي ﺗﻬﯿﻪ ﻧﮕﺎره ﺗﻮﺳﻂ‬
‫رﯾﺰﺑﯿﻦ‪.‬‬
‫· )‪ SEM : SEM (Serial-section Electron Microscope‬ﻣﯿﮑﺮوﺳﮑﻮپ اﻟﮑﺘﺮوﻧﯽ ﺗﺴﻠﺴﻠﯽ‬
‫اﺳﺖ‪) .‬ﻣﯿﮑﺮوﺳﮑﻮپ اﻟﮑﺘﺮوﻧﯽ ﺑﻪ دﺳﺘﻪاي از ﻣﯿﮑﺮوﺳﮑﻮﭘﻬﺎ ﮔﻔﺘﻪ ﻣﯽﺷﻮد ﮐﻪ از ﯾﮏ ﺑﺎرﯾﮑﻪ اﻟﮑﺘﺮوﻧﯽ ﺑﺮاي‬
‫ﺗﺼﻮﯾﺮﺳﺎزي اﺳﺘﻔﺎده ﻣﯽﮐﻨﻨﺪ‪(.‬‬
‫· ﻣﺤﻔﻈﻪ ﻓﻮﻻدي ﺿﺪ زﻧﮓ ‪ :‬ﺟﻌﺒﻪ ﻫﺎي اﺗﺼﺎﻟﯽ در اﺳﺘﯿﻞ ﺿﺪزﻧﮓ داراي وﯾﮋﮔﯽ ﻫﺎي ﻣﮑﺎﻧﯿﮑﯽ و ﺿﺪ‬
‫ﺧﻮردﮔﯽ ﻧﺴﺒﺖ ﺑﻪ ﺟﻌﺒﻪ ﻫﺎي ﻣﻮﺟﻮد در آﻟﯿﺎژ آﻟﻮﻣﯿﻨﯿﻮم ﻫﺴﺘﻨﺪ آﻧﻬﺎ ﯾﺎ ﺑﻪ ﻋﻨﻮان ﺟﻌﺒﻪ ﻫﺎي اﺗﺼﺎﻟﯽ ﺑﺎ ‪/‬‬
‫ﺑﺪون ﺗﺮﻣﯿﻨﺎل و ﯾﺎ ﺑﺮاي ﻧﺼﺐ ﺗﺠﻬﯿﺰات ﺑﺮﻗﯽ اﺳﺘﻔﺎده ﻣﯽ ﺷﻮﻧﺪ‪.‬‬
‫· )‪ : MFC (mass flow controller‬ﻣﻨﻈﻮر ﮐﻨﺘﺮل ﺷﺪت ﺟﺮﯾﺎن‪ ،‬ﮐﻨﺘﺮلﮐﻨﻨﺪه ﺟﺮﯾﺎن ﺟﺮﻣﯽ اﺳﺖ‬
‫ﮐﻪ ﺑﻪ اﺧﺘﺼﺎر ‪ MFC‬ﻧﯿﺰ ﻧﺎﻣﯿﺪه ﻣﯽﺷﻮد‪ .‬اﯾﻦ دﺳﺘﮕﺎه ﺑﺎ ﻧﺎمﻫﺎي ﻣﺨﺘﻠﻒ ﻓﻠﻮ ﮐﻨﺘﺮﻟﺮ ﺟﺮﻣﯽ‪ ،‬ﻓﻠﻮﻣﺘﺮ‬
‫ﺟﺮﻣﯽ‪ ،‬دﺑﯽ ﺳﻨﺞ ﺟﺮﻣﯽ‪ ،‬ﻣﺲ ﻓﻠﻮ ﮐﻨﺘﺮﻟﺮ و… ﻧﯿﺰ در زﺑﺎن ﻓﺎرﺳﯽ ﺷﻨﺎﺧﺘﻪ ﻣﯽﺷﻮد‪.‬‬
‫· ﻓﻠﻮﻣﺘﺮ ﻫﺎي ﻣﺴﺘﻘﻞ )ﺟﺮﻣﯽ( ‪ :‬ﻓﻠﻮﻣﺘﺮ ﻫﺎي ﺟﺮﻣﯽ ﯾﮑﯽ دﯾﮕﺮ از روﺷﻬﺎي اﻧﺪازه ﮔﯿﺮي ﻓﻠﻮ ﺑﺮ ﺣﺴﺐ‬
‫وزن ﻣﯿﺒﺎﺷﺪ ﮐﻪ ﺑﻪ ﻓﻠﻮﻣﺘﺮﻫﺎي ﺟﺮﻣﯽ ﯾﺎ ﻣﺲ ﻓﻠﻮﻣﺘﺮ ﻣﺸﻬﻮرﻧﺪ ‪ .‬در روﺷﻬﺎي ﻣﺘﺪاول ﻗﺒﻞ ﺑﺮاي اﻧﺪازه‬
‫ﮔﯿﺮي ﺟﺮم ﺳﯿﺎل ﻋﺒﻮري ﻧﯿﺎز ﺑﻪ اﻧﺪازه ﮔﯿﺮي داﻧﺴﯿﺘﻪ ﻣﻮاد ﻧﯿﺰ ﻣﯿﺒﻮد ﮐﻪ ﻋﻤﻼ ﻣﺤﺎﺳﺒﻪ ﺟﺮم ﺑﺎ ﺧﻄﺎي‬
‫ﺑﺴﯿﺎر ﻫﻤﺮاه ﻣﯿﮕﺮدﯾﺪ ‪ .‬در ﺣﺎل ﺣﺎﺿﺮ اﻧﻮاع ﻓﻠﻮﻣﺘﺮﻫﺎي ﺟﺮﻣﯽ ﺑﺎ ﺗﮑﻨﻮﻟﻮژﯾﻬﺎي ﮐﻮرﯾﺎﻟﯿﺲ و ﺗﺮﻣﺎل ﻣﺲ‬
‫اﯾﻦ اﻧﺪازه ﮔﯿﺮي را ﺑﺎ دﻗﺖ ﺑﺎﻻ اﻧﺠﺎم ﻣﯿﺪﻫﻨﺪ ‪.‬‬

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‫· رﻃﻮﺑﺖ ﻧﺴﺒﯽ )‪ : (Relative Humidity‬ﮐﻪ ﺑﺎ ‪ RH‬ﯾﺎ ‪ Φ‬ﻧﺸﺎن داده ﻣﯽﺷﻮد‪ ،‬ﺑﻪ ﺻﻮرت ﻧﺴﺒﺖ‬
‫ﻓﺸﺎر ﺟﺰﺋﯽ ﺑﺨﺎر آب‪ ،‬ﺑﻪ ﻓﺸﺎر ﺑﺨﺎر آب در ﯾﮏ دﻣﺎي ﺧﺎص ﺗﻌﺮﯾﻒ ﻣﯽﺷﻮد‪.‬‬
‫· ﺗﺮﻣﻮﮐﻮﭘﻞ ﻧﻮع ‪ : s‬اﯾﻦ ﺗﺮﻣﻮﮐﻮﭘﻞ ﯾﮑﯽ ازﻧﻮاع ﺗﺮﻣﻮﮐﻮﭘﻞ ﻫﺎ ﻣﺤﺴﻮب ﻣﯽﺷﻮد‪ ،‬ﮐﻪ ﺧﺼﻮﺻﯿﺎت و وﯾﮋﮔﯽ‬
‫ﻫﺎي ﻣﺘﻔﺎوت و ﻣﻨﺤﺼﺮ ﺑﻪ ﻓﺮد ﺧﻮد را دارد‪ .‬اﯾﻦ ﻧﻮع ﺗﺮﻣﻮﮐﻮﭘﻞ ﻫﻤﺎﻧﻨﺪ ﺗﺮﻣﻮﮐﻮﭘﻞ ﻫﺎي ﺗﯿﭗ ‪ R‬از‬
‫آﻟﯿﺎژﻫﺎي ﭘﻼﺗﯿﻨﯿﻮم و رادﯾﻮم ﻣﯽﺳﺎزﻧﺪ‪.‬‬
‫· اﻟﮑﺘﺮوﻣﺘﺮ ﯾﺎ ﺑﺮقﺳﻨﺞ )‪ : (Electrometer‬وﺳﯿﻠﻪاي اﻟﮑﺘﺮﯾﮑﯽ ﺑﺮاي اﻧﺪازهﮔﯿﺮي ﺑﺎر اﻟﮑﺘﺮﯾﮑﯽ ﯾﺎ‬
‫اﺧﺘﻼف ﭘﺘﺎﻧﺴﯿﻞ اﻟﮑﺘﺮﯾﮑﯽ اﺳﺖ‪.‬‬
‫· ‪ : NI LabVIEW‬ﯾﮏ زﺑﺎن ﺑﺮﻧﺎﻣﻪﻧﻮﯾﺴﯽ ﮔﺮاﻓﯿﮑﯽ اﺳﺖ ﮐﻪ ﺑﻪ وﺳﯿﻠﻪ ﺷﺮﮐﺖ ﻧﺸﻨﺎل اﯾﻨﺴﺘﺮوﻣﻨﺘﺲ‬
‫ﻃﺮاﺣﯽ ﺷﺪهاﺳﺖ و ﮐﺎرﺑﺮد آن ﺑﯿﺸﺘﺮ در ﺳﺎﻣﺎﻧﻪﻫﺎي ﺗﺴﺖ‪ ،‬اﺧﺬ داده‪ ،‬ﮐﻨﺘﺮل و ﭘﺎﯾﺶ راﯾﺎﻧﻪاي اﺳﺖ‪.‬‬

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References :-----------------------------------------------------------------------------: ‫ﻣﻨﺎﺑﻊ‬

· https://fa.wikipedia.org/
· https://iranlabexpo.ir/resource/ir_products_edit/files/others/5/1/main_a2ef40
6e2c2351e0b9e80029c909242d590.jpg
· http://www.aryaeo.com/fa/product/3202/%D8%AF%D8%B3%D8%AA%D
A%AF%D8%A7%D9%87%D9%85%DB%8C%DA%A9%D8%B1%D9%8
8%D9%87%DB%8C%D8%AA%D8%B1.aspx
· http://www.azmaplast.com/product-
detail/%D8%AD%D9%85%D8%A7%D9%85-
%D8%A7%D9%88%D9%84%D8%AA%D8%B1%D8%A7%D8%B3%D9
%88%D9%86%DB%8C%DA%A9-ultrasonic-bath/
· http://www.packmangroup.com/content/1327/%D8%A2%D9%86%DB%8C
%D9%84+%DA%A9%D8%B1%D8%AF%D9%86+%28%D8%A8%D8%
A7%D8%B2%D9%BE%D8%AE%D8%AA%29+-+Annealing
· https://fa.m.wikipedia.org/wiki/%D8%B9%DA%A9%D8%A7%D8%B3%D
B%8C_%D8%B1%DB%8C%D8%B2%D9%86%DA%AF%D8%A7%D8%
B1%DB%8C
· https://www.atexdelvalle.com/fa/enclosures-ex-atex/flameproof-enclosure-
stainless-steel-junction-box
· https://fa.m.wikipedia.org/wiki/%DA%A9%D9%86%D8%AA%D8%B1%D
9%84_%D8%B4%D8%AF%D8%AA_%D8%AC%D8%B1%DB%8C%D8
%A7%D9%86
· https://isatis-
fa.com/product/%D9%81%D9%84%D9%88%D9%85%D8%AA%D8%B1-
%D8%AC%D8%B1%D9%85%DB%8C/
· https://fa.m.wikipedia.org/wiki/%D8%B1%D8%B7%D9%88%D8%A8%D8
%AA_%D9%86%D8%B3%D8%A8%DB%8C
· https://www.technoelementgroup.com/products/thermocouple-type-s/
· https://fa.m.wikipedia.org/wiki/%D8%A7%D9%84%DA%A9%D8%AA%
D8%B1%D9%88%D9%85%D8%AA%D8%B1
· https://fa.m.wikipedia.org/wiki/%D9%84%D8%A8%E2%80%8C%D9%88
%DB%8C%D9%88

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