Professional Documents
Culture Documents
A-3D-diamond-dosimeter-with-graphitic-surface-c - 2023 - Diamond-and-Related-Mat 4
A-3D-diamond-dosimeter-with-graphitic-surface-c - 2023 - Diamond-and-Related-Mat 4
A R T I C L E I N F O A B S T R A C T
Keywords: A new prototype 3D diamond dosimeter featuring laser-written graphitic surface connections and bonding pads
Diamond dosimetry graphitic 3D detector CVD has been tested. Diamond substrates are of interest to medical dosimetry as they are closer to bodily tissue
equivalence than other solid-state materials. The device in this work was made with a polycrystalline chemical
vapour deposition diamond substrate (pCVD) was laser processed to have internal 3D electrode columns and
surface connections including the wire-bonding pads to make an all‑carbon detector, with no metal-diamond
interfaces. Polycrystalline diamond can be produced with a larger area and cheaper cost than single crystal
diamond, but has a relatively slow timing response due to charge trapping defects inside the substrate. To
mitigate material defects, 3D sensor technology has been proposed. The 3D design has charge collection elec
trodes as columns spaced inside the material bulk perpendicular to the surface. When compared to the con
ventional ‘planar’ sensor design, the 3D arrangement decouples the charge collection distance from the thickness
of the substrate, theoretically allowing for more efficient charge collection and the active volumes have smaller
dimensions. The laser writing process used for the 3D columns was extended to make graphitic surface con
nections replacing conventionally used metal bonding contacts between the 3D graphitic columns and readout
electronics. The removal of metal-diamond contacts in the detector volume reduces the distortion of the electric
field close to the surface of the diamond. The prototype was tested using a laboratory X-ray tube and a clinical
Elekta Synergy BM LINAC and was found to have dose-rate independence consistent with previous 3D diamond
dosimeters but with lower operating voltages, the lowest being +6 V. Lower operating voltage is attributed to the
removal of the electric field distortion at diamond-metal interfaces. This paper proposes the first implementation
of an all‑carbon 3D diamond dosimeter using a polycrystalline substrate.
* Corresponding author.
E-mail address: alice.porter@manchester.ac.uk (A. Porter).
https://doi.org/10.1016/j.diamond.2023.109692
Received 9 November 2022; Received in revised form 28 December 2022; Accepted 8 January 2023
Available online 18 January 2023
0925-9635/© 2023 The Author(s). Published by Elsevier B.V. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).
A. Porter et al. Diamond & Related Materials 133 (2023) 109692
2. Methods
2
A. Porter et al. Diamond & Related Materials 133 (2023) 109692
Fig. 2. Optical microscope images of the (a) whole graphitised diamond and (b) a close up of the region with 3D pixels. The region of interest (red) is split into an
array of 9 3D pixels. The wire-bonding pads can be seen as the smaller filled squares around the surface. The horizontal lines are the surface connections between the
3D electrodes. The pixel that was successfully bonded to the external circuitry is highlighted in yellow.
the pixel of interest in the device through the wall of the chamber. The in Florence, Italy. The detector was assembled inside a PMMA phantom,
PCB was mounted with 1 cm of PMMA above in the phantom, as shown at 10 cm depth as is the standardised depth of solid water for medical X-
in Fig. 4a. This was to minimise the air gap around the detector's sen ray beam calibration [24] as shown in Fig. 4b. The phantom was placed
sitive area, but suitably close to receive direct irradiation from the upon a motorised movable stage (single step precision 210 nm) resting
nozzle. Standard co-axial cabling connected the DUT to the readout on the patient bed. The detector was aligned 100 cm from the source
apparatus outside the environmental chamber. The source-target dis using the LINAC system's light guide lines. Lengths of ethernet cabling,
tance was not altered throughout the testing period. The source was used around 10 m, were used to communicate to the Tetramm from outside
to induce a current to be measured in the DUT. The X-ray source was set the treatment room, kept behind a concrete door. Otherwise, the current
to a nominal 30 kV operation voltage, with the beam current varied in the detector was monitored using the same data-acquisition system as
between 60 and 180 μA. detailed for the laboratory. The dose-rate supplied by this LINAC is
calibrated to have a conversion of 1 MU/min to 1 cGy/min.
2.1.3. Clinical testing set-up
To test the detector in a clinical environment, the detector was set up 2.2. Experimental tests
on the patient bed of an Elekta Synergy BM LINAC treatment beam set to
6 MV, as shown in Fig. 3, at Radiotherapy Unit of the University Hospital 2.2.1. Voltage scan
To characterise the device's optimum working voltage point, the
DUT's applied bias voltage was varied whilst exposed to a fixed X-ray
energy and rate in the laboratory. The induced current within the DUT
from the incident X-rays was recorded for measured for equal exposure
times of 30 s at each bias voltage point. The voltage polarity was tested
in the available positive domain up to +70 V. Beyond this value the
detector displayed exponentially increasing currents associated with
electrical breakdown. In the interest of preserving the device's function,
voltages above +70 V were not used. This test was repeated for varying
tube currents for the same peak voltage available from the X-ray tube.
3
A. Porter et al. Diamond & Related Materials 133 (2023) 109692
Fig. 4. The PMMA phantom used to mount the detector. In the laboratory the PCB was placed in the top layer as shown in (a). For clinical testing there is 10 cm of
PMMA or solid water on top of the mounting slot and the phantom is on a movable stage as shown in (b).
where the current measured in the detector is I, the leakage (or dark)
current is Idark, the dose rate is D, the detector sensitivity is para
meterised by K and Δ is the correlation factor of the data shown, which
indicates the linearity of the response.
The results show that this device with only graphitic surface con
nections, the first of its kind, is functional and exhibits key character
istics suitable for use as a radiation dosimeter. As discussed below, there Fig. 5. The measured current in the detector for different applied bias voltages.
is value to the detector performance by the replacement of conventional The colours correspond to the beam current supplied to the X-ray tube. The
metallisation to surface graphitisation for a 3D diamond dosimeter. deviation from the fit is shown in the bottom plot.
Metal components cause interface phenomena, so reducing metallic
content in the detector package is of interest within the scope of medical negative. When the detector is exposed with ionising radiation, charges
physics as it will reduce perturbations to dose measurements [21]. The accumulate within the crystal. These immobile carriers generate their
implementation is a proof of concept for an all‑carbon 3D diamond own electric field which opposes an applied field produced by an
device, with scope for further design refinements. external polarisation voltage, in this case the bias voltage. This reduces
the resulting electric field strength within the detector's sensitive vol
3.1. Voltage scan ume, and subsequently the efficiency of charge collection. Graphitic
paths in place of metal have been proposed to solve the issue of polar
A standard 500 μm planar diamond device reaches full charge isation at the diamond surface, and the observed lower operational
collection efficiency at around 500 V (about 1 V/μm) with operation voltage supports this reasoning. Low voltage operation may be an
ranges 100–1000 V; by comparison, 3D diamond devices, built with the attractive consideration in the interest of patient and practitioner safety.
same substrate thickness, require 40–50 V of bias to fully collect the
generated charge [19,27]. This is important for a prospective dosimeter
as full charge collection is necessary for a proper assessment of radiation 3.2. Dose-rate linearity
dose. As shown in Fig. 5, the detector was operational at voltages as low
as ≈6 V. This indicates that the 3D region was active during testing with The current response to a range X-ray tube beam currents is shown in
bias voltages lower than previous devices with metal contacts. This is Fig. 6 and the measurements taken in the clinical setting are shown in
likely to be attributed to the removal of metal surface structures Fig. 7. Both sets of data were fitted with the function shown in Eq. (1).
reducing the interference with the electric field distribution inside the The fitting parameters for both datasets are shown in Table 1. The device
active region. The diamond-metal interface plays an important role in shows dose-rate linearity comparable to studies of similar 3D diamond
the operation voltage. The difference between diamond and metal work structures [12]. The linearity factor Δ is stable across the bias voltages
functions favours the flow of electrons from lower to higher work and in both the laboratory and clinical setting. The lowest bias voltage
function regions. As a consequence an effective junction is created, as tested was +6 V with this value showing consistent linearity factor and a
one material becomes slightly positive charged while the other slightly reasonable signal-to-noise ratio (as indicated by the comparable
4
A. Porter et al. Diamond & Related Materials 133 (2023) 109692
5
A. Porter et al. Diamond & Related Materials 133 (2023) 109692
4. Conclusion
Position(mm)
Position(mm)
Fig. 9. Beam profile for (a) 0.8 × 0.8 cm2 and (b) 1.6 × 1.6 cm2 beam sizes and with a 0.2 mm stage step size. The measurement made with a PTW dosimeter is
shown in green and the DUT is in red.
6
A. Porter et al. Diamond & Related Materials 133 (2023) 109692
Project administration, Supervision, Conceptualization. L. Servoli: Re [10] C. Talamonti, High- quality polycrystalline CVD diamond for conformal
radiotherapy applications, in: Proceedings of 10th International Conference on
sources, Conceptualization, Project administration, Writing – review &
Large Scale Applications and Radiation Hardness of Semiconductor Detectors —
editing. C. Talamonti: Resources, Supervision, Data curation, Writing – PoS(RD11), 2012, p. 015. ISSN 18248039.
review & editing. [11] A. Bartoli, I. Cupparo, A. Baldi, M. Scaringella, A. Pasquini, S. Pallotta,
C. Talamonti, M. Bruzzi, J. Instrum. 12 (2017). C03052-C03052.
[12] K. Kanxheri, L. Alunni Solestizi, M. Biasini, M. Caprai, A. Dipilato, M. Iacco,
Declaration of competing interest M. Ionica, S. Lagomarsino, M. Menichelli, A. Morozzi, D. Passeri, S. Sciortino,
C. Talamonti, C. Zucchetti, L. Servoli, J. Instrum. 13 (2018). P06006-P06006.
Alice Porter reports a relationship with Science and Technology [13] A. Whitehead, R. Airey, C. Buttar, J. Conway, G. Hill, S. Ramkumar, G. Scarsbrook,
R. Sussmann, S. Walker, Nucl. Instrum. Methods Phys. Res., Sect. A 460 (2001)
Facilities Council that includes: travel reimbursement. 20–26. ISSN 01689002.
[14] C. De Angelis, M. Casati, M. Bruzzi, S. Onori, M. Bucciolini, Nucl. Instrum. Methods
Data availability Phys. Res., Sect. A 583 (2007) 195–203.
[15] S. Lagomarsino, M. Bellini, C. Corsi, V. Cindro, K. Kanxheri, A. Morozzi, D. Passeri,
L. Servoli, C.J. Schmidt, S. Sciortino, Appl. Phys. Lett. 106 (19) (2015), 193509.
Data will be made available on request. ISSN 0003–6951.
[16] K. Kanxheri, D. Aisa, L. Alunni Solestizi, M. Bellini, M. Caprai, C. Corsi, A. Dipilato,
M. Iacco, M. Ionica, S. Lagomarsino, A. Morozzi, F. Moscatelli, D. Passeri,
Acknowledgements S. Sciortino, C. Talamonti, C. Zucchetti, L. Servoli, Nucl. Instrum. Methods Phys.
Res., Sect. A 958 (2019), 162730.
This work has been carried out within the 3Dose project INFN-CSN5. [17] F. Marsolat, D. Tromson, N. Tranchant, M. Pomorski, C. Bassinet, C. Huet,
S. Derreumaux, M. Chea, K. Cristina, G. Boisserie, I. Buchheit, V. Marchesi,
AP would like to thank STFC CDN+ for their support by travel bursary.
S. Josset, A. Lisbona, D. Lazaro, R. Hugon, P. Bergonzo, J. Appl. Phys. 118 (2015),
The authors would also like to acknowledge the positive environment 234507.
given by the RD42 Collaboration. [18] K. Kanxheri, C. Talamonti, S. Sciortino, S. Lagomarsino, M. Ionica, M. Caprai,
F. Moscatelli, L. Servoli, Phys. Med. 102 (2022) 73–78. ISSN 2234-943X.
[19] C. Talamonti, K. Kanxheri, S. Pallotta, L. Servoli, Front. Phys. (2021) 9. ISSN
References 2296424X.
[20] F. Marsolat, D. Tromson, N. Tranchant, M. Pomorski, M. Le Roy, M. Donois,
[1] M. Franklin, A. Fry, K. Gan, S. Han, H. Kagan, S. Kanda, D. Kania, R. Kass, S. Kim, F. Moignau, A. Ostrowsky, L. De Carlan, C. Bassinet, C. Huet, S. Derreumaux,
R. Malchow, F. Morrow, S. Olsen, W. Palmer, L. Pan, F. Sannes, S. Schnetzer, M. Chea, K. Cristina, G. Boisserie, P. Bergonzo, Phys. Med. Biol. 58 (2013)
R. Stone, Y. Sugimoto, G. Thomson, C. White, S. Zhao, Nucl. Instrum. Methods 7647–7660. ISSN 00319155.
Phys. Res., Sect. A 315 (1992) 39–42. [21] B. G´orka, B. Nilsson, R. Svensson, A. Brahme, Phys. Med. Biol. 51 (2006)
[2] C. White, W. Dulinski, D. Fujino, K.K. Gan, R. Gilman, S. Han, J. Hassard, 3607–3623.
A. Howard, H. Kagan, S. Kanda, D. Kania, R. Kass, S.K. Kim, G. Kumbartski, M. [22] S. Lagomarsino, M. Bellini, M. Brianzi, R. Carzino, V. Cindro, C. Corsi, A. Morozzi,
H. Lee, K. Lister, R. Malchow, S. Margetides, L.S. Pan, P. Rutt, F. Sannes, D. Passeri, S. Sciortino, L. Servoli, Nucl. Instrum. Methods Phys. Res., Sect. A 796
S. Schnetzer, S.V. Somalwar, J. Straver, R. Stone, R. Tesarek, G.B. Thomson, (2015) 42–46. ISSN 01689002.
W. Trischuk, Y. Sugimoto, G.B. Thomson, P. Weilhammer, C. White, S. Zhao, Nucl. [23] S. Lagomarsino, M. Bellini, C. Corsi, S. Fanetti, F. Gorelli, I. Liontos, G. Parrini,
Inst. Methods Phys. Res. A 351 (1994) 217–221. ISSN 01689002. M. Santoro, S. Sciortino, Diam. Relat. Mater. 43 (2014) 23–28. ISSN 09259635.
[3] M. Bucciolini, C. De Angelis, C. Talamonti, in: Diamond Detectors for Dosimetry [24] Absorbed Dose Determination in External Beam Radiotherapy (Technical Reports
vol 8, 2014, pp. 229–248. ISBN 9780444536334. Series no 398) (Vienna: INTERNATIONAL ATOMIC ENERGY AGENCY) ISBN 92-0-
[4] J.D. Wilson, E.M. Hammond, G.S. Higgins, K. Petersson, Front. Oncol. (2020) 9. 102200-X.
ISSN 2234-943X. [25] J. Fowler, Radiat. Dosim. 2 (1966) 290–324.
[5] S.I. Parker, C.J. Kenney, J. Segal, Nucl. Instrum. Methods Phys. Res., Sect. A 395 [26] W.U. Laub, T.W. Kaulich, F. Nu¨sslin, Med. Phys. 24 (1997) 535–536. ISSN
(1997) 328–343. ISSN 01689002. 00942405.
[6] F. Bachmair, L. Bäni, P. Bergonzo, B. Caylar, G. Forcolin, I. Haughton, D. Hits, [27] S. Lagomarsino, M. Bellini, C. Corsi, F. Gorelli, G. Parrini, M. Santoro, S. Sciortino,
H. Kagan, R. Kass, L. Li, A. Oh, S. Phan, M. Pomorski, D.S. Smith, V. Tyzhnevyi, Appl. Phys. Lett. 103 (2013), 233507-233507.
R. Wallny, D. Whitehead, A 3D diamond detector for particle tracking, Nucl. [28] M. Booth, G. Forcolin, V. Grilj, B. Hamilton, I. Haughton, S. Murphy, A. Oh,
Instrum. Methods Phys. Res., Sect. A 786 (2015) 97–104. P. Salter, M. McGowan, I. Sudi´c, N. Skukan, Diam. Relat. Mater. 77 (2017)
[7] K. Kanxheri, L. Servoli, A.M. Oh, F. Munoz Sanchez, G. Forcolin, S. Murphy, 137–145. ISSN 0925-9635.
A. Aitkenhead, C. Moore, A. Morozzi, D. Passeri, S. Lagomarsino, S. Sciortino, [29] W.U. Lauba, T. Wong, Med. Phys. 30 (2003) 341–347. ISSN 00942405.
J. Instrum. 12 (2017). [30] A. Ralston, M. Tyler, P. Liu, N. Suchowerska, D. McKenzie, Phys. Med. Biol. 59
[8] S. Almaviva, I. Ciancaglioni, R. Consorti, F. Notaristefani, C. Manfredotti, (2014) 5873–5881. ISSN 13616560.
M. Marinelli, E. Milani, A. Petrucci, G. Prestopino, C. Verona, G. Verona Rinati, [31] I.A. Zahradnik, P. Barberet, D. Tromson, L. De Marzi, M.T. Pomorski, Rev. Sci.
Diam. Relat. Mater. 19 (2010) 217–220. Instrum. 91 (2020), 054102. ISSN 0034–6748.
[9] C. Moignier, D. Tromson, F. Marsolat, M. Agelou, M. Pomorski, R. Woo, J.
M. Bourbotte, F. Moignau, D. Lazaro, A. Mazal, L. De Marzi, J. Hern´andez, Phys.
Med. Biol. 62 (2017) 5417–5439.