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Vacuum Gauge
Vacuum Gauge
Karl Jousten, PTB, Berlin 1. Measurement of vacuum pressures and the calibration chain 2. Overview of measurement principles and gauge types 3. Direct gauges, indirectly measuring gauges 4. Accuracy of vacuum gauges
CAS_2006
F p= A
Mass
Time
Gas pressure p A
F p= A
F p0 Balance as force meter
Uncertainty: The possible range by Possible which a reading may not reflect the true value true value defined by the SI units.
Gas pressure p A
F p= A
F p0 Balance as force meter
primary standard
Reliability increases
secondary standard
Uncertainty increases
1E-01
2E-02 1E-02
4E-03 2E-03
p atm
3E-06
1E-02
1E+00
1E+02
1E+04
1E+06
p in Pa
M e a s u re m e n t u n c e rta in ty
1E-01
1E-02
in to lt cu i Ionisation iff
et pr ter
1E-03
n pe e sd Ga
Viscosity
1E-04 1E-12
1E-10
1E-08
1E-06
1E-04 pressure in Pa
1E-02
1E+00
1E+02
1E+04
10
11
Gas inlet
F p = = gh A
The mercury U-tube exists since Torricelli (1644). It is still the most accurate vacuum gauge > 100 Pa (1 mbar)!
12
Gap: 0.2m
F p= A
Gas
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M R A Raum 1 P1 Raum 2 P2 Z
3 Groups: 1. 2. Ref.side patm and contains meas.dev. Ref.side p=0, meas.dev. on test side (1) 3. Ref.side p=0 and contain meas.dev.
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15
Mirror Coils
Amplifier
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Sensitivity of deflection: 0.4 nm! Membrane (INVAR, Ceramic): as low as 25 m. Two improve zero stability: 2 capacitors plus thermostated housing
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n2 T = 1 n1 T2
p2 T = 2 p1 T1
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23
24
25
26
27
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1,20
Helium
1,00
Correction factor CF He/N2
0,80
VM1 (Pfeiffer) VM2 (Thyracont) VM3 (MKS) VM4 (Leybold) Mean
MEMS Pirani
0,60
0,40
0,20
0,00 1E-03
1E-02
1E-01
p in mbar
1E+00
1E+01
1E+02
30
# 1 2 3 4
Gauge
s in % 0,05 mbar 3 mbar 30 mbar Pfeiffer TPR 280 0,19 0,13 0,09 Thyracont VSP52 0,06 0,35 3,30 MKS 925C 0,10 0,12 0,19 Leybold TTR91 0,03 0,09 0,12
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Measurement principles
Viscosity
& 8kT d p= RD ( ) m 20
33
34
2,05E-07 DCR-Signal
2,00E-07
1,95E-07
1,90E-07
s-1
416
35
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Measurement principles
Ionisation
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Measurement principles
Fine vacuum IG
38
Measurement principles
Ionisation gauges for fine vacuum
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Measurement principles
I 1 = I0 1 eS n L
I 0 ( 1 ) p= ln 1 1 I ( 1 ) S (T ) ( 0 ) L kT
Previous investigations showed that TDLAS is applicable for vacuum measurement:
2.5 Intensity (a.u.)
( ) ( )
time (ms )
40
Inaccuracies caused by the physical Thermal conductivity or ion gauge is used, principle of measurement but gas mixture is not (accurately) known. Uncertainties caused by the device See Table 2. itself
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Thermal conductivity gauges and ionisation gauges : Scaling factors are available, but do have high uncertainties.
CFeff = ai CFi
i =1
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Normal uncertainty
Optimum range Lowest in Pa uncertainty 102...105 10-4... 10-5 103...105 3x10-4... 2x10-4 2x10-4... 5x10-5 100 ... 105
0.003... 0.0005 0.1 ...0.01 0.1 ...0.01 1 ...0.01 1... 0.3 1 ... 0.1 0.1... 0.003 0.1 ... 0.007 0.5 ... 0.2 1 ...0.1 1...0.05
1 ... 100 10-1 ... 105 10-3 ...10-1 10-5 ... 1 10-6 ... 1 10 ... 10
-8 -2
... 10
44
Ionisation gauge
0,1 0,05 0,05 0,02 0,004
1E-01
Mechanical
0,02 0,01
Pirani
0,01 0,003
SRG
0,006
CDG
0,002 0,001
Continuous expansion
Series expansion
1E-06 1E-10
1E-08
1E-06
1E-04
1E-02
1E+00
1E+02
1E+04
1E+06
p in Pa
Lowest relative uncertainties for vacuum gauges and primary standards Errors > 100 % (error factor > 1) are possible.
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Metrological system - primary standards- calibration chain Measurement principles and gauges Direct, indirect measuring gauges Sources of uncertainties with values from 0.001% up to 100% or factor
CAS_2006