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1 s2.0 S0257897222000159 Main
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A R T I C L E I N F O A B S T R A C T
Keywords: The design of multilayered structure is a promising way to tailor the microstructure and properties of the hard
AlCrN/AlTiSiN coating coatings. In this study, AlCrN, AlTiSiN and nano-multilayer AlCrN/AlTiSiN coatings were deposited and their
Nano-multilayer microstructure, mechanical, oxidation and cutting properties were comparatively investigated. The results
Mechanical properties
showed that the AlCrN/AlTiSiN coating, possessing two phase and denser microstructure, showed improved
Oxidation resistance
hardness (39.4 GPa) and adhesion strength, as compared with the AlCrN and AlTiSiN coatings. The AlCrN/
Cutting performance
AlTiSiN coating also exhibited excellent oxidation resistance up to 1000 ◦ C and its oxidation scale was composed
of a thin and dense Al-rich oxide, due to the multilayer structure acted as an effective barrier to block elemental
diffusion to retard the oxidation process. In the turning tests for SKD11, the AlCrN/AlTiSiN coating demonstrated
good tool life (~800 m), which should be attributed to its higher hardness, good adhesion strength and oxidation
resistance, as compared with the monolithic AlCrN and AlTiSiN coatings.
1. Introduction To meet the increasing demands of coatings with high hardness, high
thermal stability and good oxidation resistance for high-speed cutting
AlCrN and AlTiSiN nitride coatings are well acknowledged as wear- and dry machining technologies [18,19], some novel coating concepts,
resistant coatings for many industrial machining tools due to their such as multicomponent [20–23] and multilayer architecture [24–26],
excellent properties [1–6]. The significant advantage of AlCrN coatings have been put forward and widely applied to industry. Among them,
is their good oxidation resistance up to 1000 ◦ C [7], which can form multilayer-structured coatings with alternating two or more different
dense oxide layer composed of Cr- and Al-rich oxide mixture and show sublayer materials, have attracted increasing interests due to their great
significantly protective effect by retarding outward diffusion of metal potential for enhancing the comprehensive properties of the coatings,
ions and inward diffusion of oxygen at elevated temperatures [8,9]. which is also one simple and reliable method for industrial applications
However, the formation of wurtzite AlN (w-AlN) and N-loss of AlCrN [27,28].
coatings at high temperatures significantly degrade their thermal sta AlCrN-based multilayer coatings have been widely reported, such as
bility, which limits their applications at working temperature over than AlCrN/TiVN [29], AlCrN/TiAlN [30–32], and AlCrN/ZrO2 [33], Espe
900 ◦ C [10,11]. In addition, AlCrN coatings possess relatively low cially, the AlCrN/AlTiSiN multilayer coatings have drawn great atten
hardness, which is disadvantage for wear protection. On the other hand, tion, which combines both high hardness and high thermal stability of
the AlTiSiN coatings, with AlTiN nano-crystalls embed into amorphous AlTiSiN and good oxidation resistance of AlCrN. However, the oxidation
Si3N4 phase matrix, typically show high hardness (>40 GPa) and good properties and cutting performance of AlCrN/AlTiSiN multilayer coat
thermal stability up to 1000 ◦ C [12–15]. The amorphous Si3N4 grain ings have not been well explored. Therefore, in the present work, the
boundaries in the nc-AlTiSiN/a-Si3N4 nanocomposite structure of AlTi AlCrN and AlTiSiN monolayer coatings, and AlCrN/AlTiSiN multilayer
SiN coatings can improve their oxidation resistance to a certain extent coating with a modulation period of ~11.6 nm were deposited on both
[16]. However, the anti-oxidation capacity of AlTiSiN coatings reduces Al2O3 and carbide substrates. The microstructure, oxidation resistance
rapidly as the oxidation temperature increases to more than 900 ◦ C [17]. and cutting performance of these coatings were comparatively
* Corresponding authors.
E-mail addresses: beijunxiao@163.con (B. Xiao), tfzhang@gdut.edu.cn (T.F. Zhang).
https://doi.org/10.1016/j.surfcoat.2022.128094
Received 27 May 2021; Received in revised form 28 December 2021; Accepted 4 January 2022
Available online 10 January 2022
0257-8972/© 2022 Published by Elsevier B.V.
B. Xiao et al. Surface & Coatings Technology 433 (2022) 128094
Fig. 1. The schematic diagram of the deposited system and coating multilayer sructure.
Table 2
The chemical constituents and hardness of the SKD11 mold steel.
Workpiece material Chemical composition (wt%) Hardness (HRC)
C Cr Mo Si Mn Ni V
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B. Xiao et al. Surface & Coatings Technology 433 (2022) 128094
Fig. 2. The SEM surface and cross-sectional morphology of (a and d) AlCrN, (b and e) AlTiSiN, and (c and f) AlCrN/AlTiSiN coatings.
Based on the EPMA results, the contents of oxygen impurity in our as-
deposited coatings are quite low (about 0.5 at.% ~ 0.7 at.%), which
should be attributed to the residual oxygen impurity in the chamber
during deposition. All the coatings exhibited slightly overstoichiometric
nitrogen content, in range of 51 at.% ~ 53 at.%. To simplify notations,
the elemental compositions of AlCrN, AlTiSiN and AlCrN/AlTiSiN
coatings can be identified as Al0.63Cr0.37N, Al0.65Ti0.29Si0.06N and
Al0.54Cr0.17Ti0.21Si0.08N, respectively. The relatively lower Al concen
tration in multilayer AlCrN/AlTiSiN coating was considered to be
mainly caused by the re-sputtering effect. Al element has lower atomic
mass than Ti and Cr elements, which could be more easily re-sputtered
from as-deposited surface. Higher density of metallic ion flux was
generated owing to double targets operation during deposition of
AlCrN/AlTiSiN coating, which resulted in enhanced bombardment of
metallic ions and re-sputtering effect of the AlCrN/AlTiSiN coating than
those of the monolayer AlCrN and AlTiSiN coatings. Therefore, Al
element was preferably etched off from the surface of AlCrN/AlTiSiN
coating, leading to lower Al concentration [64]. Fig. 3. XRD patterns of AlCrN, AlTiSiN and AlCrN/AlTiSiN coatings.
The surface and cross-sectional morphologies of as-deposited coat
ings are shown in Fig. 2. The growth defect of metallic macroparticles sectional images of AlCrN and AlTiSiN (Fig. 2(d and e)) coatings
can be discovered on the surfaces of all coatings due to the characteristic exhibit typical columnar structure. On the other hand, the AlCrN/
of arc deposition. The AlCrN and AlTiSiN monolithic coatings show AlTiSiN coating shows a much denser microstructure (Fig. 2(f)), indi
higher density of macroparticles, as seen in Fig. 2(a and b), whereas the cating that the alternating deposition of AlCrN and AlTiSiN monolithic
AlCrN/AlTiSiN multilayer coating exhibits less amount of macro layers hinder the growth of columnar grains, and reduce internal defects
particles on its surface (Fig. 2(c)). It was inferred that the AlCrN/AlTiSiN of pin-holes and large columnar grain boundaries, resulting in better
coating suffered from stronger re-sputtering effect than the monolayer compactness of AlCrN/AlTiSiN coating. The measured thicknesses of
AlCrN and AlTiSiN coatings due to higher density of metallic ions and AlCrN, AlTiSiN and AlCrN/AlTiSiN multilayer coatings were ~ 3.5, 3.8
enhanced bombardment of metallic ions generated from double targets and 4.1 μm, respectively.
operation during deposition of AlCrN/AlTiSiN coating. Therefore, many XRD patterns of AlCrN, AlTiSiN and AlCrN/AlTiSiN coatings are
micro-droplets would have been etched off from the surface of AlCrN/ shown in Fig. 3. All coatings exhibit a typical face-centered cubic (fcc)
AlTiSiN coating, leading to fewer micro-droplets [65]. The cross- structure. The AlCrN monolithic coating is mainly composed of fcc-CrN
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B. Xiao et al. Surface & Coatings Technology 433 (2022) 128094
Fig. 4. Cross-sectional bright-field (a) TEM and (b) HRTEM images of the as-deposited AlCrN/AlTiSiN multilayer coating with corresponding SAED pattern.
Fig. 5. Mechanical properties of AlTiSiN, AlCrN and AlCrN/AlTiSiN coatings on cemented carbide substrates.
phase and the AlTiSiN monolithic coating is mainly composed of fcc-TiN boundaries, and high hardness, good thermal stability can be obtained
phase, with (111), (200), and (220) peaks being identified, respectively. [39,40].
The AlCrN/AlTiSiN multilayer coating shows diffraction peaks of both
fcc-TiN and fcc-CrN phases. Slight shifting to higher angles of the peaks 3.2. Mechanical properties of the coatings
might be attributed to the decrease (or release) of the residual stress in
multilayer structure [41,42], which had been widely reported in Ti/TiN Hardness and elastic modulus of our coatings are shown in Fig. 5(a).
[43] and Mo2N/CrN [44] multilayer coating systems. The hardness values of AlCrN and AlTiSiN monolithic coatings were
The cross-sectional TEM investigations of AlCrN/AlTiSiN multilayer ~27.8 and 36.1 GPa, respectively, while higher hardness of ~39.4 GPa
coating was performed to further analyze its microstructure, as shown in of AlCrN/AlTiSiN multilayer coating was obtained. The elastic modulus
Fig. 4. TEM bright-filed image of AlCrN/AlTiSiN multilayer coating in of the AlCrN and AlTiSiN monolithic coatings are ~363.5 and ~475
Fig. 4(a) shows a compact nanocrystalline structure. The SAED image GPa, respectively, while elastic modulus of our AlCrN/AlTiSiN multi
inserted reveals that the AlCrN/AlTiSiN multilayer coating consists of layer coating is ~491 GPa. According to Koehler theory [45], hardening
TiN and CrN phases with (111), (200), (220) diffraction rings being effect of multilayer coating can be attributed to the elastic modulus
identified, respectively. This is in good agreement with the XRD results difference of the matching monolayers. It was considered that the great
in Fig. 3. The high resolution TEM image in Fig. 4(b) displays that the elastic modulus difference between AlCrN and AlTiSiN monolayers was
AlCrN/AlTiSiN coating has a nano-multilayer structure with clear in one main factor of higher hardness of the multilayer AlCrN/AlTiSiN
terfaces, where alternating bright and dark contrast sublayers are cor coating. On the other hand, the grain boundaries inside the AlCrN/
responding to the AlTiSiN and AlCrN layers, respectively. The AlTiSiN multiyear coating impede dislocation motion and form more
modulation period of AlCrN/AlTiSiN coating is ~11.6 nm, and thickness dislocation accumulations at the grain boundaries, which can enhance
of AlCrN and AlTiSiN sublayers are ~4.1 and 7.5 nm, respectively. the yield strength of the coating material and result in a higher hardness
Compared with AlCrN and AlTiSiN monolithic coatings, the multilayer [46–48]. Besides, the denser microstructure (SEM result) and grain
structure in AlCrN/AlTiSiN coating can effectively reduce the internal refinement (TEM result) can also benefits for higher hardness of our
defects of pin-holes and macroparticles (seen in Fig. 2) and inhibit the multilayer coating [46].
growth of large columnar grains, leading to grain refinement, which can The H/E* and H3/E*2 (where E* = E/(1-ʋ2)) values are presented in
result in a pronounced increase in the volume fraction of grain Fig. 5(b). The H/E* plays an important role for evaluating plasticity and
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B. Xiao et al. Surface & Coatings Technology 433 (2022) 128094
Fig. 7. The thermogravimetric curves of AlTiSiN, AlCrN and AlCrN/AlTiSiN coatings at oxidation temperatures of 800, 900, and 1000 ◦ C in air.
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B. Xiao et al. Surface & Coatings Technology 433 (2022) 128094
Fig. 8. The plots of (Δm/A)2 versus time of AlTiSiN, AlCrN and AlCrN/AlTiSiN coatings during isothermal oxidation at temperatures between 800 ◦ C and 1000 ◦ C.
Best fitting straight lines gave with the coefficient of determination R2.
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B. Xiao et al. Surface & Coatings Technology 433 (2022) 128094
Fig. 10. The cross-sectional SEM morphologies of (a) AlCrN, (b) AlCrN/AlTiSiN, and (c) AlTiSiN coatings at 900 ◦ C for 2 h and the corresponding EDS line-scanning
of (d) AlCrN/AlTiSiN and (e) AlTiSiN coatings.
Fig. 11. The cross-sectional SEM morphologies of (a) AlCrN, (b) AlCrN/AlTiSiN, and (c) AlTiSiN coatings at 1000 ◦ C for 2 h and the corresponding EDS line-scanning
of (d) AlCrN/AlTiSiN and (e) AlTiSiN coatings.
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B. Xiao et al. Surface & Coatings Technology 433 (2022) 128094
Fig. 12. Cross-sectional SEM image of AlTiSiN coating oxidized at 1000 ◦ C for 2 h and the corresponding EDS mapping.
Fig. 13. Cross-sectional SEM image of AlCrN/AlTiSiN coating oxidized at 1000 ◦ C for 2 h and the corresponding EDS mapping.
no strong Cr and Ti signals are observed, and O signal shows a sharp AlCrN/AlTiSiN coating are observed, indicating that less outward
decrease at the interface of oxide scale and remained nitride coating, diffusion of Ti and Cr occurs for the multilayered coating (seen Fig. 13(c
indicating that nano-multilayered structure effectively retards inward/ and e)). Low content of oxygen can be detected in the inner layer of the
outward diffusion of oxygen /metallic ions, respectively. Up to 1000 ◦ C, coating, which reveals that the inward diffusion of oxygen is effectively
AlCrN/AlTiSiN multilayer coating still keeps a dense structure with an retarded (Fig. 13(d)).
oxide scale thickness of ~0.28 μm (Fig. 11(b)), and AlCrN coating also As mentioned above, For the AlTiSiN coating, Ti ions diffuse rapidly
shows a dense structure with an oxide scale thickness of ~0.26 μm into the surface of AlTiSiN coating and exhibit a faster formation rate of
(Fig. 11(a)). The oxidation resistance of AlCrN/AlTiSiN multilayer TiO2 at high oxidation temperatures, as compared with Al2O3 [38],
coating was comparable to AlCrN coating. However, AlTiSiN coating which destroys the formation of the protective Al2O3 layer on the surface
exhibits a loose oxide scale of ~0.5 μm (Fig. 11(c)). By EDS line- of the AlTiSiN coating and leads to generate a porous (Al, Ti)-rich oxide
scanning analysis, the oxide scale of AlCrN/AlTiSiN coating mainly scale on the surface of AlTiSiN coating [38,55–57]. For the AlCrN/
consists of Al-rich oxide (Fig. 11(d)), while the oxide scale of AlTiSiN AlTiSiN multilayer coating, the interfaces between the sublayers act as
coating is composed of (Al, Ti)-rich oxide (Fig. 11(e)). good barriers to block the inward diffusion of oxygen and outward
The elemental diffusion behavior of our coatings was further inves diffusion of metallic ions such as Ti, which significantly improves the
tigated by EDS mapping. Figs. 12 and 13 show the cross-sectional EDS oxidation resistance of the multilayer coatings [56]. In addition, less
mapping of AlTiSiN and AlCrN/AlTiSiN coatings oxidized at 1000 ◦ C in straight column boundaries inside AlCrN/AlTiSiN multilayer coating
air for 2 h. The high concentration Al, Ti and O elements on the surface also decreases diffusion pathways for oxygen and metallic ions and
of AlTiSiN coating are observed, indicating that inward diffusion of O promote the better oxidation resistance of AlCrN/AlTiSiN coatings
and outward diffusion of Al and Ti ions significantly occur during [57–62]. These results are in good agreement with the above thermog
oxidation (Fig. 12(b-d)). However, a thin and dense oxidation scale is ravimetric tests.
formed on the surface of AlCrN/AlTiSiN coating, as shown in Fig. 13(a).
Relatively low concentration Ti and Cr elements on the surface of the
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B. Xiao et al. Surface & Coatings Technology 433 (2022) 128094
the flank wear of the coated tools with AlCrN and AlTiSiN coatings
obviously accelerated, whereas the flank wear of the coated tools with
AlCrN/AlTiSiN coating are steady followed. It is clear that the
descending sort of the flank wear values for all coated tools are un
coated, AlCrN, AlTiSiN and AlCrN/AlTiSiN coatings with the same
cutting length. When the cutting length reached ~400 m and 500 m,
respectively, the flank wear of the coated tools with AlCrN and AlTiSiN
coatings are 0.337 mm and 0.325 mm, which shows these two kinds of
the coated tools reach their cutting lives. After increasing further to 800
m, the tool wear values for the coated tools with AlCrN/AlTiSiN coating
only reach 0.312 mm. Noticeably, the coated tools with AlCrN/AlTiSiN
exhibit much higher tool life compared to those of the AlCrN and
AlTiSiN coatings, indicating good cutting performance of the coated
tools with AlCrN/AlTiSiN coating.
To further research the wear mechanism of the coated tools during
the machining SKD11 cool steel, SEM morphologies and element maps
of the worn tools are investigated. Fig. 15(a) shows the SEM morphol
ogies and element map for the AlCrN turning tool. It is very clear that the
large wear area obviously occurs on the flank surface and appears the
Fig. 14. The flank wears of the coatings as a function of cutting length. block coating peeling and crack, which mainly contribute to the thermal
stress. The higher magnification SEM morphologies shows that there are
3.4. Cutting performance of the coated tools deep plough grooves and many microchips on the surface of the AlCrN
tool. The hardness of the AlCrN tool is lower, which is easy scratched by
To evaluate the machining performance of the AlCrN-, AlTiSiN- and hard particles of the workpiece material in the cutting process and
AlCrN/AlTiSiN- coated tools, the turning tests were performed on generate the plough grooves. In addition, high temperature during the
SKD11cold mold steel at cutting parameters given in Table 2. The ex cutting process makes part of the chips to form hard phase oxides, which
periments have been repeated three time. During the cutting tests, the will also scratch the surface of the coated tool, and forms plough
flank wear values of the different coated tools are periodically measured grooves, indicating the abrasive wear is occurred. According to EDS
with an optical microscope. Tool life would be recorded after the flank analysis, high concentrations of W and Co elements with low contents Al
wear reached over 0.3 mm. The uncoated tools are also tested for the and Cr elements are detected, indicating that the coating was nearly
reference. Fig. 14 presents the flank wear values of the coated tools with worn out, as shown in Fig. 15(c). There is high concentration of Fe
different coatings versus the cutting length. Clearly, the flank wear element on the surface of the coated tool, indicating the adhesion wear is
trends for all coated tools are obviously different. The flank wear of all occurred. The hardness of the AlCrN tool is low, which leads to poor
tools are significant in the initial stage. With increasing cutting length, wear resistance. So it causes to the severe flank wear of the AlCrN tool
Fig. 15. SEM morphologies of wear morphology and elemental map for the coated tool with AlCrN coating (the cutting length for 400 m).
9
B. Xiao et al. Surface & Coatings Technology 433 (2022) 128094
Fig. 16. SEM morphologies of wear morphology and elemental map for the coated tool with AlTiSiN coating (the cutting length for 400 m).
Fig. 17. SEM morphologies of wear morphology and elemental map for the coated tool with AlCrN/AlTiSiN multilayer coating (the cutting length for 400 m).
during machining SKD11 hardened steel. When the AlCrN tool is worn, Fig. 16(a) shows the SEM morphologies and element map for AlTiSiN
the chips are easily adhered to the surface of the AlCrN tool owing to the tool. There also occurs serious wear on the flank face of the tool. The
strong affinity between Co and Fe. magnification SEM micro-graph in Fig. 16(c) shows that there are
10
B. Xiao et al. Surface & Coatings Technology 433 (2022) 128094
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