Graphen Fet

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Graphene nanoribbon FETs:

Technology exploration and CAD

Kartik Mohanram† Jing Guo‡



Department of Electrical and Computer Engineering, Rice University, Houston

Department of Electrical and Computer Engineering, University of Florida, Gainesville
kmram@rice.edu guoj@ufl.edu

Abstract about 4.5% of the ballistic current at low VD < 0.1V [12]. Clearly,
Graphene nanoribbon FETs (GNRFETs) have emerged as a promis- these are preliminary devices, and it would be natural to expect
ing candidate for nanoelectronics applications. This paper summa- further advances such as the integration of ultrathin high-κ dielec-
rizes (i) current understanding and prospects for GNRFETs as ulti- trics [13] and aggressive channel length scaling to move the perfor-
mately scaled, ideal ballistic transistors, (ii) physics-based model- mance of these devices closer to the ballistic limit, with switching
ing of GNRFETs to support circuit design and CAD, and (iii) vari- speeds, Ion /Ioff , and subthreshold slope that is competitive with
ability and defects in GNRs and their impact on GNRFET circuit scaled CMOS.
performance and reliability. Next, since GNRs and CNTs share similarities, modeling and
CAD for GNRFETs can expect to leverage the rich literature and
experience in physics-based efforts related to CNTFETs. How-
ever, several effects, e.g., edge bond relaxation and the third nearest
1. Introduction neighbor interaction that are not pronounced in CNTs have been
Graphene, which is a monolayer of carbon atoms packed into shown to play important role in the electronic structure of GNRs
a two-dimensional honeycomb lattice, has emerged as a promis- and device characteristics of GNRFETs. Recent progress in physics-
ing candidate material for nanoelectronics applications. Graphene- based analytical modeling based on the Landauer approach for GN-
based devices offer high mobility for ballistic transport, high carrier RFETs notwithstanding, several challenges on the modeling and
velocity for fast switching, monolayer thin body for optimum elec- CAD fronts remain to be addressed.
trostatic scaling, and excellent thermal conductivity [1–6]. The po- Last, due to the atomically thin and nanometer-wide geometries
tential to produce wafer-scale graphene films with full planar pro- of GNRs, variability and defects are projected to have a larger im-
cessing for devices promises high integration potential with con- pact on GNRFET circuit performance and reliability in comparison
ventional CMOS fabrication processes, which is a significant ad- to conventional silicon devices. Variability, for example, can arise
vantage over carbon nanotubes (CNTs) [6]. from the difficulty of control of the GNR width, edge roughness,
Although two-dimensional graphene is a zero band-gap semi- or oxide thickness during fabrication. Defects may occur during
metal, a band-gap is achieved by patterning graphene into a gra- fabrication due to a charge impurity in the gate insulator or a lat-
phene nanoribbon (GNR) that is a few nanometers wide [6–9]. The tice vacancy, and result in a large performance variation or a non-
band-gap of a GNR is in general inversely proportional to its width, functional device. Not only must each of the variability and defect
and width confinement down to the sub-10nm scale is essential to mechanisms be identified and studied, the models developed for
open a band-gap that is sufficient for room temperature transis- GNRs and GNRFETs must be capable of predicting their effects in
tor operation. Unlike CNTs, which are mixtures of metallic and isolation as well as together in a systematic manner.
semiconducting materials, recent samples of chemically derived This paper is organized as follows. Section 2 provides a short
sub-10nm GNRs have exhibited all-semiconducting behavior [9], introduction to short-channel, SB-type GNRFETs with intrinsic A-
generating considerable excitement for transistor applications. The GNR channels. Section 3 summarizes modeling and CAD chal-
two main types of GNRs, with the edges of the ribbons assumed lenges for GNRs and GNRFETs. Section 4 summarizes challenges
passivated by hydrogen atoms, are armchair-edge and zigzag-edge posed by variability and defects. Section 5 is a conclusion.
GNRs (AGNRs and ZGNRs). ZGNRs are predicted to be metal-
lic by a simple tight-binding model, but a band-gap exists in more
advanced, spin-unrestricted simulations [10]. For digital circuits 2. GNRFETs
applications, the focus has been on using AGNRs as the channel In order to study how close the GNRFET operates to the ballis-
material. AGNRs have an electronic structure that is closely related tic performance limit, it is necessary to use theoretical models and
to that of zigzag CNTs. The band-gap in AGNRs originates from quantum simulators capable of capturing several important features
quantum confinement and edge effects play a critical role [10]. of GNR device physics. Although most discussions in this paper
This paper first provides an overview of Schottky barrier (SB) focus on SB-type GNRFETs [14], simulation studies of MOSFET-
GNRFETs with intrinsic AGNR channels (GNRFETs henceforth, type GNRFETs with doped reservoirs have also been reported in
unless specified otherwise). Unlike traditional MOSFETs, SBFETs literature [15–17]. In [18, 19], SB-type GNRFETs were also com-
use metal or metal silicide contacts at the source and drain ends, pared to MOSFET-type GNRFETs. There is consensus that in ideal
leading to the formation of SBs at these contacts. In SBFETs, the devices, MOSFET-type GNRFETs show better device characteris-
gate modulates the quantum tunneling current through the SB [11]. tics over SB-type GNRFETs: larger maximum achievable Ion /Ioff ,
Recently fabricated GNRFETs with channel lengths of the order of larger Ion , larger transconductance, and better saturation behavior.
200 nm delivered about 21% of the ballistic current at VD = 1V and Motivated by experimental work [20, 21], ballistic MOSFET-type
GNRFETs with wide monolayer and bilayer graphene channels The GNRFET channel is assumed to be comprised of 4 equi-distant
were studied in [22, 23], and it was concluded that bilayer devices GNRs, with a contact width of 10nm per GNR for a total contact
exhibit different but more favorable I-V characteristics in compar- width of 40nm in this paper. The current in the GNRFET is 4 times
ison to the monolayer devices. the current in the individual GNR channel, and the parasitics are
The GNRFETs considered in this paper have 15 nm-long intrin- also 4 times that for an individual GNR. The parasitic junction ca-
sic AGNR channel material. AGNRs are classified based on their pacitances CGD,e and CGS,e are determined by 3D electrostatics
index, n, into three families with n = 3p/3p + 1/3p + 2 [24] — to be 0.01– 0.1 aF/nm times the total GNRFET contact width. The
AGNR widths over the n = 9–18 range from the 3p family are con- substrate is usually thick enough that the extrinsic parasitic capac-
sidered here. Double gate geometry is implemented through a 1.5 itances CDB,e and CSB,e are negligible. The contact resistances
nm-thick SiO2 gate insulator (r = 3.9). The source and drain con- range from 1 KΩ to 100 KΩ, with reported values of approximately
tacts are metals, and the Schottky barrier height is equal to half 60KΩ [12].
the band-gap of the channel GNR (ΦBn = ΦBp = Eg /2). Simula- −5
10
−6
7 x 10
tions of such GNRFETs are carried out by self-consistent solution 6 VD = 0.05V
of the Schrödinger and Poisson equations in the atomistic pz orbital −6
10
VD = 0.75V 5
basis within the non-equilibrium Green’s function (NEGF) formal- Offset = 0.2V

ID (A)
ID (A)
4
ism [25]. Because the electric field varies in all dimensions for −7
10
VD = 0.5V VT = 0.1V
3
the simulated device structure, the 3D Poisson’s equation is used
−8 2
and numerically solved using the finite element method. A pz or- 10
VD = 0.25V Offset = 0V
1
bital coupling parameter of 2.7 eV is used and energy relaxation at VT = 0.3V
−9
the edges is treated according to ab initio calculations [10]. The 10
0 0.2 0.4 0.6 0.8
0
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7

theoretical model computes the ballistic performance limits by as- VG (V) VG (V)
suming a single ballistic channel and ideal contacts (sufficiently (a) (b)
negative SBs) [26].
The I-V device characteristics for the ideal n = 12 GNRFET for Figure 1: (a) I-V characteristics and (b) VT extraction at low
different drain voltages is shown in Figure 1(a). Ambipolar char- VD for ideal n = 12 GNRFETs
acteristics due to both electron and hole conduction (SBFET-type Preliminary results for circuit-level technology exploration based
operation) are clearly shown, with electron conduction at high gate on such GNRFETs, considering both performance robustness and
voltages and hole conduction at low gate voltages. Minimum leak- reliability was presented in [29]. By explicitly considering the
age current occurs at VG ≈ VD /2. If Ion is divided by the chan- trade-offs between delay, energy, and noise robustness for differ-
nel width, it is 6300 μA /μm for the n = 12 GNRFET when VD is ent values of VDD and VT , it was shown that traditional objectives
0.5 V. As drain voltage increases, SBFETs show linear behavior based on metrics like the energy-delay product (EDP) may lead
in the overall range of gate bias. For example, the drain current to unreliable designs with poor performance even for nominal de-
and the channel charge for VD = 0.75V are linearly proportional to vices. At an operating point with VDD and VT tuned to comparable
VG , whereas those for VD = 0.25V show exponential behavior in the performance and reliability to the 22 nm CMOS predictive technol-
sub-threshold region. ogy node, ideal ballistic GNRFETs enjoy a 40X EDP advantage.
The threshold voltage VT of the GNRFET is obtained using tra- This advantage in EDPs leaves enough headroom for robust design
ditional VT extraction methods for MOS devices from the I-V with GNRFETs to overcome challenges due to variability and de-
data [27]. When a low drain voltage VDS is applied to an n-type fects described in Section 4.
GNRFET, the slope of the I-V curve at a high gate voltage is said to
intersect the VG axis at the threshold voltage VT . This is illustrated 3. GNRFET modeling and CAD
for the I-V curve in Figure 1(b), where the VT is approximately 0.3
Although there is broad consensus that GNRFET modeling can
V. The leakage current at VG = 0 is large, but the threshold voltage
leverage the rich literature developed in the context of MOSFETs,
of the FET can be tuned by engineering the gate metal material to
models for GNRFETs must be capable of treating new device phy-
shift the I-V curves along the x-axis, thereby moving the point with
sics specific to GNRs, such as edge scattering, edge bond relax-
minimum leakage current to VG = 0 [28]. Note that when the off-set
ation, and the third nearest neighbor (3nn) interaction. Models must
is applied to achieve minimum leakage, VT changes by an amount
also treat (i) the Dirac-Fermion-like E-k relation of graphene, (ii)
equal to the off-set, illustrated by the I-V curve for an off-set of
the quantum capacitance limit due to the low quasi-one-dimensional
0.2V and a VT of approximately 0.1V in the same figure. Finally,
density-of-states of GNRs, and (iii) transport from ballistic to the
both n-type and p-type FETs can be achieved on the same GNRFET
quasi-ballistic regime for different edge qualities, channel lengths,
due to the ambipolar I-V characteristics. This has already been ex-
and bias regimes.
perimentally demonstrated in the context of CNTFETs [28], which
One of the main candidate approaches is the physics-based, semi-
exhibit ambipolar I-V characteristics qualitatively similar to GN-
analytical nanotransistor model based on the Landauer approach
RFETs.
that has previously been applied to model silicon nanoscale MOS-
The drain current ID (VG , VD ) and channel charge Q(VG , VD )
FETs, nanowire FETs, and CNTFETs [26, 30–37]. Circuit mod-
computed for the intrinsic GNRFET can be used with data-driven
els based on the Landauer approach provide a compact physical
table lookup simulators to simulate extrinsic GNRFETs. Extrinsic
description of transistor physics at the mesoscopic and molecular
n-type and p-type GNRFETs can be modeled by adding the para-
scale. The model distills the essential physics of ballistic FETs
sitic capacitances and contact resistances around the intrinsic GNR.
to the carrier statistics at the beginning of the channel and self-
Two strategies — fabricating very narrow contacts to an individual
consistent electrostatics described by a capacitance network. The
GNR or fabricating multiple GNRs in an array for a wide contact
core of this approach requires the solution of the charge density in-
— are currently under investigation in the device community. The
tegral for the channel and subsequent solution of the self-consistent
pitch refers to the spacing between the neighboring GNRs in the
electrostatics equation for the local potential at the top of the energy
GNRFET channel, and usually ranges from the GNR width to 1μm.
barrier.
−4
10
As applied to CNTFETs in its simplest form, this approach as-
VD = 0.5V
sumes ballistic carrier transport, i.e, the scattering effects of charge −5
10

carriers are ignored and it does not model real-device effects like −6 N = 18
10
edge bond relaxation and third nearest neighbor interaction that

ID (A)
N = 15
play an important role in the calculation of the band structure nec- −7
10
N = 12
essary to simulate GNRFETs. For CNTs, a simple pz orbital tight −8
10
binding (TB) calculation with the first nearest neighbor interaction N=9
yields an accurate E-k relation in the energy range relevant for car- −9
10
0 0.2 0.4 0.6 0.8
rier transport. For an AGNR, this calculation, however, fails to VG (V)
yield even a correct band-gap, as indicated by comparing the TB
results to the ab initio simulation results [10, 38, 39]. In an AGNR, Figure 3: I-V characteristics for different GNR widths
the difference is due to both the edge bond relaxation and the third
nearest neighbor interaction (shown in figure 2), which a simple TB
calculation does not include. 4. GNRFETs: Variability and defects
Variability and defects are expected to play an important role
in graphene electronics in practice. Variability, for example, can
come from the difficulty of control of the GNR width, edge rough-
ness, or oxide thickness during fabrication. Defects may occur dur-
ing fabrication due to a charge impurity in the gate insulator or
a lattice vacancy, and result in a large performance variation or a
non-functional device.
Figure 3 illustrates how variability in GNR width affects device
ID -VG characteristics. The band-gap of the n = 18 GNR is too small
Figure 2: The schematic sketch of an AGNR. The edge of the to achieve a small leakage current, whereas that of the n = 9 GNR is
honeycomb lattice is hydrogen terminated. The edge bonds sufficiently large so that Ion /Ioff is as high as 1000 X. However, the
(colored lines) have a different bonding length and bonding pa- capacitance of a wider GNRFET is large due to the larger surface
rameter from those in the middle of the AGNR due to edge of the GNR channel. The n = 18 GNRFET has 50% larger intrinsic
bond relaxation. The interaction between the first nearest channel capacitance than the n = 9 GNRFET in the on state, which
neighbor (1nn), the second nearest neighbor (2nn), and the can impact performance.
third nearest neighbor (3nn) atoms are also shown. State-of-the-art etching techniques are far enough from atomistic
resolution that edge roughness is projected to play an important role
Through a re-parameterization of the TB model using additional in GNRFETs [8]. Edge scattering, optical phonon scattering, and
parameters that describe these effects, it is possible to obtain a defect scattering have all been identified to play an important role
band-structure in agreement with the ab initio calculations in the in GNRFETs [12]. The effect of edge roughness on MOSFET-type
energy range of interest [39]. When integrated with the basic Lan- GNRFETs was reported in [42]. Across these studies, there is con-
dauer approach, it is possible to derive an analytical model to de- sensus that edge roughness effects reduce Ion and increase Ioff ,
scribe ballistic GNRFETs that handles these effects [40]. Results with the effect of edge roughness increasing as GNR width is de-
based on this simple model indicate the important role of the edge creased. Edge roughness effects of the same degree but with atomi-
bond relaxation and third nearest neighbor interaction effects on the cally different edge configurations are also expected to contribute to
electrostatics of AGNRs. Edge bond relaxation results in a slight increased variability across devices [42], especially at short channel
decrease of the threshold voltage VT . The third nearest neighbor lengths [43]. It is, therefore, important to improve the edge quality
interaction results in a further and larger decrease of VT , because to optimize the performance of GNRFETs.
of the decrease in AGNR band-gap. At the same time, the gate ca- For SBFETs, a charge impurity in the gate oxide behaves as
pacitance slightly increases after edge effects are considered, due a fixed external charge that plays an important role on the self-
to an increase of the density-of-states and hence the GNR quantum consistent electrostatic potential. The location of the charge im-
capacitance. purity in the gate oxide is important, since device characteristics
Such physics-based compact models based on the Landauer ap- are affected most severely when it is located close to the source
proach serve as a good starting point for GNRFET models that in- because the SB between source and GNR is affected. Figure 4(a)
volve more complex interactions and/or many-body effects. The shows the severely affected Schottky barrier due to the charge im-
models can also be validated and extended by more rigorous quan- purity that is placed near the source and at a distance of 0.4 nm from
tum atomistic simulations and availability of more experimental the GNR surface (see inset for position of charge impurity in the
data. Extending these models to systematically understand and cross-section of the simulated device). Both polarities of charges
predict the effects of variability and defects will help with CAD- are considered, and the charge magnitude is also varied.
related efforts to optimize the performance and reliability of GN- A negative charge impurity increases the SB height and thick-
RFET circuits. However, the Landauer approach still involves nu- ness, whereas a positive charge impurity decreases the SB height
merical computation of the charge density integral and solution to and thickness at the source contact. This affects the source-drain
the self-consistent electrostatics, which makes the study of GNR- current and the charge in the channel. With the charge impurity of
FET circuits computationally demanding and not scalable to large -2q, the electron flow is significantly reduced by the large barrier,
circuits. Recent progress in CNTFET modeling that focus on com- and the on current is a factor of six smaller than that in the ideal
putational aspects of the Landauer approach provide good mathe- device. For the device with the +2q charge impurity, both off and
matical continuity for simulators to obtain robust simulation results on currents show a relatively smaller variation from the ideal de-
with fast convergence, e.g., [34, 35, 37, 41] and are good starting vice compared to that with the -2q charge impurity in the n-type
points for future research to address these issues. operation branch (VG > 0.25 V), as illustrated in Figure 4(b).
0.8

VD = 0.5V Top Gate 10


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